TW200642033A - Methods of forming pluralities of capacitors - Google Patents
Methods of forming pluralities of capacitorsInfo
- Publication number
- TW200642033A TW200642033A TW095109106A TW95109106A TW200642033A TW 200642033 A TW200642033 A TW 200642033A TW 095109106 A TW095109106 A TW 095109106A TW 95109106 A TW95109106 A TW 95109106A TW 200642033 A TW200642033 A TW 200642033A
- Authority
- TW
- Taiwan
- Prior art keywords
- capacitors
- capacitor electrodes
- retaining structure
- forming
- methods
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0805—Capacitors only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/083,489 US7557015B2 (en) | 2005-03-18 | 2005-03-18 | Methods of forming pluralities of capacitors |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200642033A true TW200642033A (en) | 2006-12-01 |
TWI317982B TWI317982B (en) | 2009-12-01 |
Family
ID=36607596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095109106A TWI317982B (en) | 2005-03-18 | 2006-03-17 | Methods of forming pluralities of capacitors |
Country Status (8)
Country | Link |
---|---|
US (2) | US7557015B2 (zh) |
EP (1) | EP1859476B1 (zh) |
JP (1) | JP5119426B2 (zh) |
KR (1) | KR100920016B1 (zh) |
CN (2) | CN101142657B (zh) |
SG (1) | SG146611A1 (zh) |
TW (1) | TWI317982B (zh) |
WO (1) | WO2006101669A1 (zh) |
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-
2005
- 2005-03-18 US US11/083,489 patent/US7557015B2/en active Active
-
2006
- 2006-02-27 EP EP06736182.4A patent/EP1859476B1/en active Active
- 2006-02-27 SG SG200806499-0A patent/SG146611A1/en unknown
- 2006-02-27 WO PCT/US2006/006806 patent/WO2006101669A1/en active Application Filing
- 2006-02-27 CN CN2006800086063A patent/CN101142657B/zh active Active
- 2006-02-27 JP JP2008501897A patent/JP5119426B2/ja active Active
- 2006-02-27 CN CN2010105419634A patent/CN102064093B/zh active Active
- 2006-03-17 TW TW095109106A patent/TWI317982B/zh active
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2007
- 2007-09-21 KR KR1020077021914A patent/KR100920016B1/ko not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
SG146611A1 (en) | 2008-10-30 |
KR20070104675A (ko) | 2007-10-26 |
CN102064093B (zh) | 2013-01-02 |
CN101142657B (zh) | 2011-08-03 |
CN101142657A (zh) | 2008-03-12 |
KR100920016B1 (ko) | 2009-10-05 |
CN102064093A (zh) | 2011-05-18 |
EP1859476B1 (en) | 2015-11-04 |
JP2008533739A (ja) | 2008-08-21 |
WO2006101669A1 (en) | 2006-09-28 |
US7557015B2 (en) | 2009-07-07 |
US7919386B2 (en) | 2011-04-05 |
US20090209080A1 (en) | 2009-08-20 |
TWI317982B (en) | 2009-12-01 |
JP5119426B2 (ja) | 2013-01-16 |
EP1859476A1 (en) | 2007-11-28 |
US20060211211A1 (en) | 2006-09-21 |
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