TW200540085A - Transfer robot - Google Patents

Transfer robot Download PDF

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Publication number
TW200540085A
TW200540085A TW094112246A TW94112246A TW200540085A TW 200540085 A TW200540085 A TW 200540085A TW 094112246 A TW094112246 A TW 094112246A TW 94112246 A TW94112246 A TW 94112246A TW 200540085 A TW200540085 A TW 200540085A
Authority
TW
Taiwan
Prior art keywords
workpiece
hand
holding device
robot
handling robot
Prior art date
Application number
TW094112246A
Other languages
English (en)
Chinese (zh)
Other versions
TWI301118B (enExample
Inventor
Toshinori Iwayama
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Publication of TW200540085A publication Critical patent/TW200540085A/zh
Application granted granted Critical
Publication of TWI301118B publication Critical patent/TWI301118B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/0052Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/0014Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/06Programme-controlled manipulators characterised by multi-articulated arms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H10P72/30

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW094112246A 2004-04-30 2005-04-18 Transfer robot TW200540085A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004135995A JP4495509B2 (ja) 2004-04-30 2004-04-30 トランスファロボット

Publications (2)

Publication Number Publication Date
TW200540085A true TW200540085A (en) 2005-12-16
TWI301118B TWI301118B (enExample) 2008-09-21

Family

ID=35444936

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094112246A TW200540085A (en) 2004-04-30 2005-04-18 Transfer robot

Country Status (3)

Country Link
JP (1) JP4495509B2 (enExample)
KR (1) KR101149952B1 (enExample)
TW (1) TW200540085A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI560035B (en) * 2008-07-22 2016-12-01 Nidec Sankyo Corp Industrial robot
CN109803795A (zh) * 2016-09-06 2019-05-24 高级智能系统股份有限公司 用于运输多件物品的移动工作站
TWI674231B (zh) * 2017-06-01 2019-10-11 孫建忠 基板貯送系統
CN110587635A (zh) * 2019-08-02 2019-12-20 湖南海纳赋能科技有限公司 一种用于寄存柜中的智能存储机械手
TWI733141B (zh) * 2019-07-16 2021-07-11 亞智科技股份有限公司 牙叉式基板運輸裝置及其方法
TWI823399B (zh) * 2021-05-27 2023-11-21 大陸商深圳市庫寶軟件有限公司 跨區域任務處理方法、裝置、倉儲系統及儲存介質
CN119036453A (zh) * 2024-09-20 2024-11-29 北京人形机器人创新中心有限公司 机器人运动控制方法、装置及存储介质

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101192751B1 (ko) 2005-12-29 2012-10-18 엘지디스플레이 주식회사 평판표시장치 제조 장비 및 이를 이용한 평판표시장치 제조방법
JP5190303B2 (ja) * 2008-06-04 2013-04-24 東京エレクトロン株式会社 搬送装置及び処理装置
JP5338365B2 (ja) * 2009-02-18 2013-11-13 凸版印刷株式会社 ガラス基板搬送用ロボットハンド
JP5821251B2 (ja) * 2011-04-08 2015-11-24 セイコーエプソン株式会社 ロボットハンド
KR101703767B1 (ko) * 2011-09-23 2017-02-23 주식회사 원익아이피에스 기판처리시스템, 버퍼모듈 및 로드락모듈
KR101870293B1 (ko) * 2011-11-09 2018-06-22 엘지디스플레이 주식회사 러빙 시스템 및 이를 위한 기판이송로봇
CN103128185B (zh) 2011-11-25 2015-03-11 鸿富锦精密工业(深圳)有限公司 搬运装置及采用该搬运装置的冲压设备
JP5480340B2 (ja) 2012-07-26 2014-04-23 ファナック株式会社 ローラ装置を用いた取出しロボットシステム
KR101410246B1 (ko) * 2013-03-18 2014-06-20 주식회사 로보스타 패널 반송용 트리플 암 로봇
CN105014655A (zh) * 2014-04-16 2015-11-04 扬州兴乐电镀设备有限公司 一种plc模块控制机械手抓放装置
CN104108605B (zh) * 2014-07-08 2016-08-17 深圳市华星光电技术有限公司 一种玻璃基板的取放装置
TWI614114B (zh) * 2015-08-21 2018-02-11 寧波弘訊科技股份有限公司 移取裝置及移取方法
JP6777665B2 (ja) 2018-02-26 2020-10-28 ファナック株式会社 ロボットハンド、ロボットおよびロボットハンドのハンド幅調整方法
CN110202565A (zh) * 2019-05-30 2019-09-06 上海海事大学 微波炉高温食物抓取机械装置
JP7518485B2 (ja) 2020-04-06 2024-07-18 日本電気硝子株式会社 ガラス板の製造方法及び製造装置
CN115072356B (zh) * 2021-03-11 2026-01-16 上海君屹工业自动化股份有限公司 机器人快速运输卸货设备
CN113414779B (zh) * 2021-06-29 2022-08-12 河南职业技术学院 一种基于计算机控制的机械手
WO2023074962A1 (ko) * 2021-10-29 2023-05-04 주식회사 라온테크 인-챔버 웨이퍼 이송 로봇

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611391U (ja) * 1984-06-06 1986-01-07 富士通株式会社 ロボツトフインガ−
JPH074788B2 (ja) * 1989-04-14 1995-01-25 株式会社安川電機 ワーク把持装置
JPH0724330Y2 (ja) * 1989-12-15 1995-06-05 セントラル硝子株式会社 板状体の移載装置
JPH0679573A (ja) * 1992-09-03 1994-03-22 Makino Milling Mach Co Ltd 搬送車のパレット移載装置
JP3249309B2 (ja) * 1994-09-13 2002-01-21 東京エレクトロン株式会社 基板の搬送装置及び基板の搬送方法並びに塗布現像処理装置
JPH0933589A (ja) * 1995-07-14 1997-02-07 Tokyo Electron Ltd 検査装置
JPH11168128A (ja) * 1997-12-03 1999-06-22 Mecs Corp 薄型基板の搬送ロボット
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp 2アーム方式の搬送用ロボット装置
JP4346765B2 (ja) * 2000-01-04 2009-10-21 株式会社アルバック 基板搬送ロボット
JP3443398B2 (ja) * 2000-11-08 2003-09-02 川崎重工業株式会社 反転積み重ね装置
JP2002172570A (ja) * 2000-12-05 2002-06-18 Kawasaki Heavy Ind Ltd ダブルアームおよびそれを備えたロボット

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI560035B (en) * 2008-07-22 2016-12-01 Nidec Sankyo Corp Industrial robot
CN109803795A (zh) * 2016-09-06 2019-05-24 高级智能系统股份有限公司 用于运输多件物品的移动工作站
TWI674231B (zh) * 2017-06-01 2019-10-11 孫建忠 基板貯送系統
TWI733141B (zh) * 2019-07-16 2021-07-11 亞智科技股份有限公司 牙叉式基板運輸裝置及其方法
CN110587635A (zh) * 2019-08-02 2019-12-20 湖南海纳赋能科技有限公司 一种用于寄存柜中的智能存储机械手
TWI823399B (zh) * 2021-05-27 2023-11-21 大陸商深圳市庫寶軟件有限公司 跨區域任務處理方法、裝置、倉儲系統及儲存介質
CN119036453A (zh) * 2024-09-20 2024-11-29 北京人形机器人创新中心有限公司 机器人运动控制方法、装置及存储介质

Also Published As

Publication number Publication date
KR101149952B1 (ko) 2012-06-11
JP2005317854A (ja) 2005-11-10
JP4495509B2 (ja) 2010-07-07
KR20060045829A (ko) 2006-05-17
TWI301118B (enExample) 2008-09-21

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MM4A Annulment or lapse of patent due to non-payment of fees