JP4495509B2 - トランスファロボット - Google Patents

トランスファロボット Download PDF

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Publication number
JP4495509B2
JP4495509B2 JP2004135995A JP2004135995A JP4495509B2 JP 4495509 B2 JP4495509 B2 JP 4495509B2 JP 2004135995 A JP2004135995 A JP 2004135995A JP 2004135995 A JP2004135995 A JP 2004135995A JP 4495509 B2 JP4495509 B2 JP 4495509B2
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JP
Japan
Prior art keywords
hand
transfer robot
linear movement
horizontal
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004135995A
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English (en)
Japanese (ja)
Other versions
JP2005317854A (ja
JP2005317854A5 (enExample
Inventor
敏徳 岩山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2004135995A priority Critical patent/JP4495509B2/ja
Priority to TW094112246A priority patent/TW200540085A/zh
Priority to KR1020050033948A priority patent/KR101149952B1/ko
Publication of JP2005317854A publication Critical patent/JP2005317854A/ja
Publication of JP2005317854A5 publication Critical patent/JP2005317854A5/ja
Application granted granted Critical
Publication of JP4495509B2 publication Critical patent/JP4495509B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H10P72/30—

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2004135995A 2004-04-30 2004-04-30 トランスファロボット Expired - Fee Related JP4495509B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004135995A JP4495509B2 (ja) 2004-04-30 2004-04-30 トランスファロボット
TW094112246A TW200540085A (en) 2004-04-30 2005-04-18 Transfer robot
KR1020050033948A KR101149952B1 (ko) 2004-04-30 2005-04-25 트랜스퍼 로봇

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004135995A JP4495509B2 (ja) 2004-04-30 2004-04-30 トランスファロボット

Publications (3)

Publication Number Publication Date
JP2005317854A JP2005317854A (ja) 2005-11-10
JP2005317854A5 JP2005317854A5 (enExample) 2007-04-12
JP4495509B2 true JP4495509B2 (ja) 2010-07-07

Family

ID=35444936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004135995A Expired - Fee Related JP4495509B2 (ja) 2004-04-30 2004-04-30 トランスファロボット

Country Status (3)

Country Link
JP (1) JP4495509B2 (enExample)
KR (1) KR101149952B1 (enExample)
TW (1) TW200540085A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130051148A (ko) * 2011-11-09 2013-05-20 엘지디스플레이 주식회사 러빙 시스템 및 이를 위한 기판이송로봇
CN104057438A (zh) * 2013-03-18 2014-09-24 罗普伺达机器人有限公司 面板搬运用三臂机器人
CN105014655A (zh) * 2014-04-16 2015-11-04 扬州兴乐电镀设备有限公司 一种plc模块控制机械手抓放装置
US11110615B2 (en) 2018-02-26 2021-09-07 Fanuc Corporation Robot hand, robot, and method for adjusting hand width of robot hand

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101192751B1 (ko) 2005-12-29 2012-10-18 엘지디스플레이 주식회사 평판표시장치 제조 장비 및 이를 이용한 평판표시장치 제조방법
JP5190303B2 (ja) * 2008-06-04 2013-04-24 東京エレクトロン株式会社 搬送装置及び処理装置
JP2010023195A (ja) * 2008-07-22 2010-02-04 Nidec Sankyo Corp 産業用ロボット
JP5338365B2 (ja) * 2009-02-18 2013-11-13 凸版印刷株式会社 ガラス基板搬送用ロボットハンド
JP5821251B2 (ja) * 2011-04-08 2015-11-24 セイコーエプソン株式会社 ロボットハンド
KR101703767B1 (ko) * 2011-09-23 2017-02-23 주식회사 원익아이피에스 기판처리시스템, 버퍼모듈 및 로드락모듈
CN103128185B (zh) 2011-11-25 2015-03-11 鸿富锦精密工业（深圳）有限公司 搬运装置及采用该搬运装置的冲压设备
JP5480340B2 (ja) 2012-07-26 2014-04-23 ファナック株式会社 ローラ装置を用いた取出しロボットシステム
CN104108605B (zh) * 2014-07-08 2016-08-17 深圳市华星光电技术有限公司 一种玻璃基板的取放装置
TWI614114B (zh) * 2015-08-21 2018-02-11 寧波弘訊科技股份有限公司 移取裝置及移取方法
CA3107180C (en) * 2016-09-06 2022-10-04 Advanced Intelligent Systems Inc. Mobile work station for transporting a plurality of articles
TWI674231B (zh) * 2017-06-01 2019-10-11 孫建忠 基板貯送系統
CN110202565A (zh) * 2019-05-30 2019-09-06 上海海事大学 微波炉高温食物抓取机械装置
TWI733141B (zh) * 2019-07-16 2021-07-11 亞智科技股份有限公司 牙叉式基板運輸裝置及其方法
CN110587635A (zh) * 2019-08-02 2019-12-20 湖南海纳赋能科技有限公司 一种用于寄存柜中的智能存储机械手
JP7518485B2 (ja) 2020-04-06 2024-07-18 日本電気硝子株式会社 ガラス板の製造方法及び製造装置
CN115072356B (zh) * 2021-03-11 2026-01-16 上海君屹工业自动化股份有限公司 机器人快速运输卸货设备
CN113213055B (zh) * 2021-05-27 2022-12-20 深圳市库宝软件有限公司 跨区域任务处理方法、装置、设备、仓储系统及存储介质
CN113414779B (zh) * 2021-06-29 2022-08-12 河南职业技术学院 一种基于计算机控制的机械手
WO2023074962A1 (ko) * 2021-10-29 2023-05-04 주식회사 라온테크 인-챔버 웨이퍼 이송 로봇
CN119036453A (zh) * 2024-09-20 2024-11-29 北京人形机器人创新中心有限公司 机器人运动控制方法、装置及存储介质

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611391U (ja) * 1984-06-06 1986-01-07 富士通株式会社 ロボツトフインガ−
JPH074788B2 (ja) * 1989-04-14 1995-01-25 株式会社安川電機 ワーク把持装置
JPH0724330Y2 (ja) * 1989-12-15 1995-06-05 セントラル硝子株式会社 板状体の移載装置
JPH0679573A (ja) * 1992-09-03 1994-03-22 Makino Milling Mach Co Ltd 搬送車のパレット移載装置
JP3249309B2 (ja) * 1994-09-13 2002-01-21 東京エレクトロン株式会社 基板の搬送装置及び基板の搬送方法並びに塗布現像処理装置
JPH0933589A (ja) * 1995-07-14 1997-02-07 Tokyo Electron Ltd 検査装置
JPH11168128A (ja) * 1997-12-03 1999-06-22 Mecs Corp 薄型基板の搬送ロボット
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
JP4346765B2 (ja) * 2000-01-04 2009-10-21 株式会社アルバック 基板搬送ロボット
JP3443398B2 (ja) * 2000-11-08 2003-09-02 川崎重工業株式会社 反転積み重ね装置
JP2002172570A (ja) * 2000-12-05 2002-06-18 Kawasaki Heavy Ind Ltd ダブルアームおよびそれを備えたロボット

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130051148A (ko) * 2011-11-09 2013-05-20 엘지디스플레이 주식회사 러빙 시스템 및 이를 위한 기판이송로봇
KR101870293B1 (ko) 2011-11-09 2018-06-22 엘지디스플레이 주식회사 러빙 시스템 및 이를 위한 기판이송로봇
CN104057438A (zh) * 2013-03-18 2014-09-24 罗普伺达机器人有限公司 面板搬运用三臂机器人
CN105014655A (zh) * 2014-04-16 2015-11-04 扬州兴乐电镀设备有限公司 一种plc模块控制机械手抓放装置
US11110615B2 (en) 2018-02-26 2021-09-07 Fanuc Corporation Robot hand, robot, and method for adjusting hand width of robot hand

Also Published As

Publication number Publication date
KR101149952B1 (ko) 2012-06-11
JP2005317854A (ja) 2005-11-10
TW200540085A (en) 2005-12-16
KR20060045829A (ko) 2006-05-17
TWI301118B (enExample) 2008-09-21

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