M415404 五、新型說明： 【新型所屬之技術領域】 本創作涉及輸送薄板狀工件的輸送機器人，尤其涉及 輪送薄板狀玻璃基板等基板的基板輸送機器人。 【先前技術】 作為現有技術的基板輸送機器人，有例如具備四邊开^ 框體 能夠上下運動地設置在該框體的框内的2個臂支承 用結構體（4A、4B)、設置在各臂支承用結構體（4a、4B)上 的多關節臂的雙臂型機器人（參照專利文獻1)，所述四邊形 框體由能夠旋轉地設置的下側連接板（丨丨設置在下側連接 板（11)上的2根支柱（ΙΑ、1B)、以及連接兩支柱（ία、1B) 上端的上側連接板（1 2)構成》 並且’有具備能夠旋轉地設置的一根柱（支柱）（1 2)、沿 該柱（12)上下運動的上下移動機構（1丨）' 透過支承構件（1〇) 設置在上下移動機構（1 1)上的上下臂（21、22)的多關節機器 人（參照專利文獻2)。 [專利文獻1]曰本特開2005-150575號公報 [專利文獻2]日本特許第4168410號公報 【新型内容】 前者雙臂型機器人中，2個多關節臂分別設置在不同的 臂支承用結構體（4A、4B)上，能夠與另一方的多關節臂相 獨立地上下運動。因此，該雙臂型機器人能夠改變兩多關 M415404 節臂的分隔距離，但保持在一定的分隔距離或者精度良好 地將各多關節臂定位在既定位置不一定容易。而且，有必 要防止兩臂支承用結構體（4 A、4B)的衝突等，多關節臂的 上下運動控制不得不變得複雜。M415404 V. New description: [New technical field] This creation relates to a transport robot that transports thin-plate-shaped workpieces, and more particularly to a substrate transport robot that transports thin-plate-shaped glass substrates and the like. [Prior Art] As the substrate transfer robot of the related art, for example, two arm support structures (4A, 4B) provided in a frame in which the four-sided opening frame can be moved up and down, and provided in each frame are provided. A dual-arm type robot having a multi-joint arm on a supporting structure (4a, 4B) (refer to Patent Document 1), which is provided by a rotatably disposed lower side connecting plate (丨丨 is provided on the lower side connecting plate ( 11) Two pillars (ΙΑ, 1B) and an upper connecting plate (1 2) that connects the upper ends of the two pillars (ία, 1B) and "have a column (pillar) that is rotatably provided (1 2) a vertical movement mechanism (1丨) that moves up and down along the column (12) through the support member (1〇) a multi-joint robot provided on the upper and lower arms (21, 22) on the vertical movement mechanism (1 1) [Patent Document 1] JP-A-2005-150575 [Patent Document 2] Japanese Patent No. 4168410 [New Content] In the former dual-arm type robot, two multi-joint arms are respectively disposed at Different arm support structures (4A, 4B) It can move up and down independently of the other articulated arm. Therefore, the dual-arm type robot can change the separation distance of the M415404-section arm of the two-way, but maintain the separation distance or the multi-joint arm with high precision. It is not always easy to position at a predetermined position. Further, it is necessary to prevent collision of the two-arm supporting structures (4A, 4B), and the up-and-down motion control of the multi-joint arms has to be complicated.
另一方面，後者的多關節機器人中，上下臂（21、22) 透過支承構件（1 0、1 〇)被安裝在一個上下移動機構（n)上， 兩臂（21、22)的上下的分隔距離被固定。因此，該多關節機 益人中沒有兩支承構件（1〇)的衝突，兩臂（21、2 2)的上下運 動控制複雜化的可能性也小。但是，_關節機器人由於 只用一根柱（12)支承著兩臂（2卜22)，因此處理大型工件（大 型基板）時在機器人（柱（1 2))的剛性方面不一定足夠。 本創作就是鑒於這樣的問題，以提供結構簡單並且剛 性良好的基板輸送機器人為課題。 本創作為這樣的基板輸送機器人：具有能夠旋轉地設 置的旋轉結構ϋ、能夠相對於該旋轉結才冓體升降地設置的 升降:、以及被設置在該升降單元的f ;上述旋轉結構體 具有旋轉結構基礎部和被竪設在該旋轉結構基礎部上的一 對支柱；±述臂為多個臂片能夠屈伸地被連接著的結構， 並^為臂的前端能夠通過上述一對支柱之間而進退移動到 臂前進時位置和臂後退時位置的結構；上述升降單元且備 比上述支柱偏移到臂前進側而設置的升降框；上述臂的基 端部被連接在該升降框上。 並且，上述升降框為以上下配置的上底座構件和下底 座構件以及將該兩底㈣件互相連接的左右縱框構件構成 5 M415404 的框體；作為上述臂，目士 第2臂.文辟身’'有設置在各底座構件的第1臂和 ， 的基端部分别被設1在各底 向中間位置。 傅仟的長度方 升降：且：：=支柱設置有能夠沿支柱高度方向升降的 偏移㈣前進側的上述升降框透過升 ,7構件被安裝到以該一對升降體構成的升降部。 上述升降框的上述下底座構件比上 承構件偏#到下方向而配[ 开幸忙支 並且，上述升降框支承構件以從上述升降部的各升 體延伸到臂前進側的托架構成。 而且’上述旋轉結構體㈣轉軸、上述第丨臂的基端 部的旋轉軸以及上述第2臂的基端部的旋轉軸都是沿鉛垂 方向L伸的#，上述旋轉結構體的旋轉軸I置在上述旋轉 結構基礎部的中間位置；上述旋轉軸和上述旋轉轴配置在 沿臂前進後退方向擴展的同一垂直平面上。 本創作的基板輸送機器人由於{具備具有旋轉結構基 礎部和竪設在該旋轉結構基礎部上的一對支柱的旋轉結構 體，將臂設置在能夠升降地設置在該旋轉結構體上的升降 單元的結構，因此結構簡單並且剛性好。並且，由於臂的 前端能夠通過一對支柱之間進退移動到臂前進時的位置和 臂後退時的位置，因此能夠以剛性好的結構，在穩定的狀 態下進退移動。 並且’基板輸送機器人的升降單元具備比支柱偏離到 臂前進側設置的升降框，臂的基端部連接在該升降框上， M415404 臂前進的狀態τ臂前端的旋轉半經増大與偏離量 里即，如果採用本創作的基板輸送機器人，能夠 比臂的取大仃程長度長的大旋轉半徑範圍内輸送基板。 並且，能夠輸送更大型的工件。 、由於升降框為以上下配置的上底座構件和下底座構件 y U兩；^構件互相連接的左右縱框構件構成的框 ，因此相性好的㈣的結構。並且，在料降框的各 :座構件上設置…臂或第2臂，將各臂的基端部配置 在各底座構件的長度方向中間位置。即，各臂被設置成平 衡好、、穩定的H由此，更確實地確保剛性好的結構。 並且’由於透過升降框支承構件將升降框安裝到以能 夠升降地設置在各支柱的升降體構成的升降部，因此不僅 維持簡單的結構而且確保剛性好的結構。並且，如果使升 降框的下底座構件比升降框支承構件偏離到下方向配置的 活’當使升降框下降到最下時’能夠使下底座構件下降到 比旋轉結構體的旋轉結構基礎部靠下的位置。由此，能夠 降低相對於工件搬入搬出目的地的基板輸送機器人的搬入 搬出最低作用高度。並且’如果以從升降部的各升降體延 =臂前進側的托架構成升降框支承構件的話，不僅維持 簡單的結構而且確保剛性好的結構。而且，由於將旋轉結 構體的旋轉軸配置在旋轉結構基礎部的中間位置，並且將 該旋轉軸和第i臂的基端部的旋轉軸和第2臂的基端部的 旋轉軸配置在沿臂前進後退方向展開的一垂直平面上，因 此各臂進退移動時的平衡良好，不僅維持簡單的結構而且 7 料15404 確保剛性好的結構。 【實施方式】 下面參照附圖詳細說明本創作的基板輸送機器人。 如圖1所示，基板輸送機器人R具有能夠旋轉（參照圖 1的箭頭A)地設置於台座1〇的旋轉支承部11(參照圖”上 的旋轉結構體20、能夠升降地設置在旋轉結構體2〇上的升 降單元30、以及設置在升降單元3〇的臂5〇、6〇。 旋轉結構體20具有被圖中沒有表示的電動機等驅動源 驅動旋轉之設置在旋轉支承部η上的旋轉結構基礎部& 竪設在旋轉結構基礎部21上的一對支柱22、22、將—對支 柱22、22的上端互相固定的旋轉結構上框23。利用這樣的 雙柱結構能夠實現剛性優良的旋轉結構體2卜旋轉結構基 礎部21的旋轉軸2U(參照圖3)的軸線方向和支柱二：2 的延伸方向都是錯垂方向。因此，藉由使旋轉結構體2〇繞 鉛垂的旋轉軸21a旋轉，能夠將載置在臂5〇、上 W對配置在基板輸送機器人R周圍的工件搬入搬出目二也 搬入搬出。另外’旋轉軸21a的位置為—對支柱22 間的位置。換言之，配置旋轉結構基礎部Μ和支柱2 使支柱22、22位於俯視時關於旋轉軸…點對稱的位置。 因此，能夠在平衡良好的狀態下支承兩臂5〇、6〇。 在一對支柱22的各外側，安裝有覆蓋支柱22外側面 的蓋體24、24 〇並且，太々士上 外側面 22與蓋體24之間的升降體25二的軸^ 的升降體25。各升降體25能夠在圖中沒 M415404 有表一示的線性致動器等㈣源的驅動下沿支柱以伸的方 向（南度方向，參照圖i的箭頭B)升降，能夠沿支柱Μ的 外側面升降。並且，兩升降體25 25在位於相同高度的狀 態下同步升降，一斜弁膝·科 對开降體25、25做為使升降單元3〇升 降的升降部250發捏竹用。η 禪作用另外，雖然作為使兩升降體25、 25 一同步以使位於相同高度的結構可以考慮各種結構但像 本貫施形態這樣透過後述的把架31、31和升降框使兩 升降體25、2卜體化㈣步的結構為同時實現簡單並且剛 性優良的結構，為理想的結構。 升降單元3〇具有設置臂50、6〇的基端部5〇a、6〇a的 升降框40和用來將升降框4〇固定在升降部Μ 框支承構件310。 降 升降框支承構件310由連接在一個升降體25上的一個 ^架31和連接在另"個升降體25上的另—個托架Μ構 各托架31、31從升降體25、25向臂前進側（參照圖】 的前頭Ca)延伸，在托架31、31的前端側安裝有升降框♦ 升降框40配置在比支柱22、22靠臂前進側a，成為 相對於支柱22、22偏移到臂前進側Ca的設置狀態。並且， 升降框40能夠在下降位置（參照圖1和圖3的以實線表干的 位置）與上升位置（參照圖3的以兩點鏈線表示的位置）之間 如上所述，如果使升降框40比支柱22、22偏㈣ 構it側&使後述的下底座構件42的升降路徑與旋轉結 構基礎部21不干涉的話，能夠使下底座構件42 旋轉結構基礎部21的上表面（支柱22、22的設置面）靠下側 9 的位置(參照圖3)。同樣地，如果使後述的上底座構件4i 的升降路徑與旋轉結構上框23不干涉的話，能夠使上底座 構件41上升到比旋轉結構上框23的下表面靠上側的位置 (參圖3)。由此，作為升降框4〇的升降範圍能夠確保更 寬的範圍。即，能夠使相對於工件搬入搬出目的地(圖中沒 有表示）的基板輸送機器人R㈣入搬出最低作用高度更 低，或者能夠使搬入搬出最高作用高度更高。 並且’升降框4〇為以配置成上下位置關係的上底座構 件41和下底座構件42以及左右縱框構件43、圍成的框 體結構。34種結構的升降框4〇剛性優良。縱框部Μ、Μ 在上下端部具有沿水平方向彎曲的上部載置台43a和下部 載置台43b。 上底座構件41和下底座構件42與臂進退移動方向 C(參照圖υ正交並且配置成水平的狀態。並且，上底座構 牛孝下底座構件42為剖面為長方形的構件，4個側面中 寬度的面水平地上下配置。 並且，上底座構件41比托架31、31偏移到上方地配 置’。下底座構件42比托架31、31偏移到下方地配置。即， 托架3 1 3 1位於上底座構件4丨與下底座構件之間地配 置。並且，透過偏移，能夠確保將臂50、60設置在上底座 構件41與下底座構件42之間的空間。 在&座 而且，上底座構件41裝卸自由地安裝在左右縱框構件 上。卩的上邛載置台43a上，下底座構件42裝卸自由 地安裝在左右縱框構件43、43下部的下部載置台4扑上。 10 M4O404 升降單元30中却， 肀认置有上臂（第1臂）5〇和下臂（笛 臂）60。 ^ ^ 2 上臂50具有能夠屈伸地連接的2塊臂片5卜52 具體地說明，上臂5〇且古Α山 具有基端部能夠旋轉地連接在上瘊庙 構件41上的基端側臂^ j 任上底座 #片51和能夠旋轉地連接在該基端側 .刖部上的前端側臂片52。該基端側臂片5丨 基端部（以下簡稱為“ μ辟 的 濛基端部50a”）為支承整個上臂的 部位，相當於臂的启^ .^ 肩°P，別端側臂片52由其基端部連接在 基端側臂片51上，基姓伽辟口 按隹 知側#片51與前端側臂片52的連接 部相當於上臂50的肘部。 接 ψ u ^ 卜基鈿側詹片5 1和前端側 再u W長度（從臂片一端的連接部到另一端的連接部的 長度）相同。 :士，在上臂50的前端側臂片52的前端部( 上臂前端部50b”）卜处釣π姑，丨 )上此夠力疋轉地安裝有手部53。該手部 為此夠以載置狀態保持薄板狀基板W者。 :種結構的上臂5〇透過以圖中沒有表示的電動機等驅 動源使兩臂片5 i、52鏟叙、隹― ▲ 轉動進订屈伸，透過使上臂50屈伸 而使上臂前端部5〇b扃尨# a里/ 此在後退位置（臂後退時位置，參照圖υ 與別進位置（臂前進時位 i隹站能、·> 9日， 多，、、'圖3的兩點鏈線表示的前 果以:并曰^臂進退方肖C(參照圖^進退移動。其中，如 VL κ降早兀30之間的關係說明的話，臂進退方向C為 二：延伸的方向，並且為接近或遠離旋轉結構體2〇移動 上臂1如果使上臂前端部進退移動，能夠使安裝在 身則知部50b上的手部53進退移動。 11 另外，上臂基端部5〇a的與上底座構件4丨的連接邛 :端：臂片Μ與前端側臂片52的連接部、上臂前端部。5〇b ”手。P 53的連接部的各連接軸都是鉛垂方向的軸。 亚且’下臂6G為與上臂5G相同結構的構件，為使上 5〇沿進退方向延伸的水平軸旋轉了 180。的狀態配 對於水平面面對稱地配置)的構件。因此在下臂60的各部位 添加給上臂5G的對應部位的附圖標記相同的附圖 ^己（僅將十位數的“5’，變換成“6”），這裡省略下臂6〇 的詳細說明。 如上述，本實施形態的基板輸送機器人r中旋 體的旋轉軸21a、上臂基端部5〇a的旋轉轴和下臂^山 部咖的旋轉軸都是沿錯垂方向延伸的軸。並且旋轉二 和兩臂基端部50a'60a的旋轉軸配置在沿臂前進後退方向 C(參照圖1)擴展的同一垂直平面上。 而且’上臂基端部50a被安裝在上底座構件41的下面 側，下臂基端部60a被安裝在下底座構件42的上面側。兩 =前端部50b、6〇b通過升降框4〇的框内而在後退位置與 前進位置之間進退移動。換言之，兩臂前端部5〇卜_通 過-對支纟22、22之間而進退移動到前進位置和後退位 置。而且，上臂基端部5〇a被設置在上底座構件41的長产 方向的中間位置，上臂基端部60a設置在下底座構件則 長度方向中間位置。 接著說明這種結構的基板輸送機器人的動作。基板輸 送機器人的動作透過使用圖中沒有表示的控制單元=行j 12 M415404 述各驅動源的動作控制來實現。 圖1為上臂50的手部53位於臂後退位置的狀態，為 下臂6G的手部63位於手臂前進位置的狀‘態，為升降單元 3 0位於下降位置的狀態。 前進位置的手部53、63為被前進到目的 地的狀態。因此在以手部53、63保持工件搬入搬出目的地 的基板W的情況下，首先使手部53、63前進到圖示狀態， 然後使其上升。由此，卫件搬人搬出目的地的基板W被移 載至手部53、63上並被料。並且，在將被保持（載置）在 手部53、63上的基板w载置到工件搬入搬出目的地的情況 下，首先使手部53、63前進到圖示狀態，然後使其下降。 由此被保持（載置）在手部53、63上的基板w被移載到工件 搬入搬出目的地。 後退位置的手部53、63為待機狀態。例如，如果在使 兩臂50、60位於後退位置的狀態下旋轉，則基板輸送機器 人R的旋轉半徑最小。因此，在為了達到改變基板W的搬 入搬出目的地等目的而使旋轉結構體2〇旋轉的情況下，在 旋轉動作前使兩臂50、60的手部53、63移動到後退位置， 在這種狀態下使旋轉結構體2〇旋轉。 升降單元30能夠移動到下降位置（圖3中實線的位置） 與上升位置（圖3中兩點鏈線的位置）之間所希望的高度位 置。因此，如果是在工件搬入搬出目的地基板评被收納到 多層的貨架的情况，透過使升降單元3〇升降能夠使手部 53、63的高度位置與各貨架的高度相一致。 13 M415404 例如，在於基板輸送機器人卩的周圍設置了多個工件 :入搬出目的地的情況下，首先使旋轉結構體2〇旋轉使 的臂進退方向c朝向所希望的卫件搬人搬出·目的 ，使基板W的搬人搬出所使用的臂50、6G的高度 位置與作為基板搬入搬出目的地的貨架的高度一致。奴 =態：透過使臂50'60的手部53、63進退移動，對工 件搬入搬出目的地搬入搬出基板w。 在這樣的基板輸送動作時，如果傻 貫施形態的基板 别送機裔人R這樣，臂5〇、60設置在比支柱22、22偏移 到臂前進側Ca(參照圖υ配置的升降框4。上的話，則能夠 使臂前進時手部53、63能夠到達的範圍增加與偏移量相等 :-。如果能夠增加手部53、63能夠到達的範圍，則能夠 :送基板的把圍更寬。反過來想，由於能夠使臂前進時手 部53、63到達的距離赢得與偏移的量相等的量，因此在使 此夠到達的範圍與以往相同的情況下，能夠縮短臂 的長度（臂片5卜52)。結果，能夠使臂5〇'6〇的重量、體 積變小。因此，不僅能夠使用功率小的電動機作為臂用的 電動機’而且臂50、60旋轉時的力矩也小，因此兩支柱22、 22所要求的剛性值也小。 並且，由於基板輸送機器人尺為雙柱型，因此左右的 重里平衡均等。並且，由於以這兩支柱22、22支承兩臂、 6〇和基板W的重量，因此在使基板輸送機器人尺的兩支柱 22、22的柱總剖面積與單柱型基板輸送機器人的杈剖面積 相同的情況下，基板輸送機器人R的剛性比單柱型°言。处 ^ -firy 14 M415404 果是’基板輸送機器人R與單枉型基板輸送機器人相比能 夠更穩定地輸送大型基板w(工件）。 L固八間早說明】On the other hand, in the latter multi-joint robot, the upper and lower arms (21, 22) are mounted on a vertical movement mechanism (n) through the support members (10, 1), and the upper and lower arms (21, 22) are up and down. The separation distance is fixed. Therefore, there is no conflict between the two supporting members (1〇) in the multi-jointed person, and the possibility that the upper and lower motion control of the two arms (21, 22) is complicated is also small. However, since the _ joint robot supports the two arms (2b 22) by only one column (12), it is not necessarily sufficient in terms of rigidity of the robot (column (12)) when handling a large workpiece (large substrate). In view of such a problem, the present invention has been made in order to provide a substrate transfer robot having a simple structure and good rigidity. The present invention is a substrate transfer robot having a rotatably disposed rotating structure ϋ, a lifting and lowering that can be set up and down with respect to the rotating node, and a f that is disposed in the lifting unit; the rotating structure has a rotating structure base portion and a pair of pillars erected on the base portion of the rotating structure; the arm is a structure in which a plurality of arm pieces are bendably connected, and the front end of the arm can pass through the pair of pillars a structure for moving forward and backward to a position at which the arm is advanced and a position at which the arm is retracted; the lifting unit is provided with a lifting frame provided to be offset from the support to the arm advancing side; the base end portion of the arm is connected to the lifting frame . Further, the lifting frame is an upper base member and a lower base member disposed above, and a right and left vertical frame members that connect the two bottom members to each other, and constitute a frame of 5 M415404; as the arm, the second arm of the eye. Each of the first arm and the base end portion of each of the base members is provided at a position intermediate to the bottom. The length of the 仟 升降 升降 : : : : : : : : : : : : : : : 支柱 支柱 支柱 支柱 支柱 支柱 支柱 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The lower base member of the lifting frame is disposed in a lower direction than the upper bearing member. The lifting frame supporting member is configured by a bracket extending from each of the lifting portions of the lifting portion to the arm advancing side. Further, the 'rotating shaft of the rotating structure (four), the rotating shaft of the base end portion of the second arm, and the rotating shaft of the base end portion of the second arm are both extending in the vertical direction L, and the rotating shaft of the rotating structure I is disposed at an intermediate position of the base portion of the rotating structure; the rotating shaft and the rotating shaft are disposed on the same vertical plane that extends in the forward and backward directions of the arm. The substrate transfer robot of the present invention is provided with a rotating structure having a rotating structure base portion and a pair of pillars erected on the base portion of the rotating structure, and the arm is disposed on the lifting unit that can be lifted and disposed on the rotating structure The structure is therefore simple in structure and good in rigidity. Further, since the tip end of the arm can be moved forward and backward by the pair of struts to the position at which the arm is advanced and the position at which the arm is retracted, it is possible to advance and retreat in a stable state with a rigid structure. Further, the lifting unit of the substrate transfer robot has a lifting frame which is disposed on the arm advancing side from the support post, and the base end portion of the arm is connected to the lifting frame, and the M415404 arm advances state τ the rotation of the arm distal end is large and the deviation amount That is, if the substrate transfer robot of the present invention is employed, the substrate can be transported within a large radius of rotation that is longer than the length of the arm. Moreover, it is possible to transport a larger workpiece. Since the lifting frame is a frame formed by the upper base member and the lower base member y U disposed above and the left and right vertical frame members which are connected to each other, the structure of the phase (4) is good. Further, an arm or a second arm is provided on each of the seat members of the drop frame, and the base end portions of the arms are disposed at intermediate positions in the longitudinal direction of each of the base members. That is, each arm is set to a well-balanced, stable H, thereby more reliably ensuring a rigid structure. Further, since the elevating frame is attached to the elevating portion formed by the elevating body that can be lifted and lowered on each of the pillars by the elevating frame supporting member, the structure is not only maintained in a simple structure but also in a rigid structure. Further, if the lower base member of the elevating frame is displaced from the elevating frame supporting member to the lower side, when the lowering of the elevating frame is lowered to the lowermost position, the lower base member can be lowered to be lower than the base portion of the rotating structure of the rotating structure. The location below. Thereby, it is possible to reduce the minimum working height of the loading/unloading of the substrate transfer robot with respect to the workpiece loading/unloading destination. Further, if the elevating frame supporting member is constituted by the bracket extending from the elevating body of the elevating portion to the arm advancing side, not only a simple structure but also a rigid structure can be secured. Further, since the rotating shaft of the rotating structure is disposed at an intermediate position of the base portion of the rotating structure, the rotating shaft and the rotating shaft of the base end portion of the i-th arm and the rotating shaft of the base end portion of the second arm are disposed along the edge The arm advances in a vertical plane in which the backward direction is unfolded, so that the balance of each arm when moving forward and backward is good, not only maintaining a simple structure but also ensuring a rigid structure. [Embodiment] A substrate transfer robot of the present invention will be described in detail below with reference to the drawings. As shown in Fig. 1, the substrate transfer robot R has a rotary structure 20 (see Fig.) that can be rotated (see arrow A in Fig. 1) and is provided on the turret 1 (see Fig. 1). The lifting unit 30 on the body 2 and the arms 5〇 and 6〇 provided on the lifting unit 3〇. The rotating structure 20 has a rotation support portion η which is driven to rotate by a driving source such as a motor (not shown). Rotating structure base portion & A pair of struts 22, 22 erected on the rotating structure base portion 21, and a rotating structural upper frame 23 that fixes the upper ends of the struts 22, 22 to each other. The rigidity can be achieved by such a double-column structure The direction of the axis of rotation of the rotating shaft 2U (see FIG. 3) of the excellent rotating structure 2 and the extending direction of the strut 2: 2 are both staggered directions. Therefore, by rotating the rotating structure 2 around the lead The vertical rotating shaft 21a is rotated, and the workpieces placed on the periphery of the substrate transfer robot R can be carried in and out of the arm 5A and the upper W. The position of the rotating shaft 21a is between the pillars 22 position. In other words, the rotating structure base portion 支柱 and the strut 2 are disposed such that the pillars 22 and 22 are located in point symmetry with respect to the rotation axis in a plan view. Therefore, the arms 5〇, 6〇 can be supported in a well-balanced state. Each of the outer sides of the 22 is attached with a lid body 24, 24 覆盖 covering the outer side surface of the strut 22, and a lifting body 25 of the shaft of the elevating body 25 between the upper outer side surface 22 and the lid body 24. 25 can be lifted in the direction in which the strut (the south direction, referring to the arrow B in Fig. i) in the direction in which the strut is not driven by the linear actuator or the like (4) shown in Table No. M415404, and can be lifted along the outer side of the strut Moreover, the two lifting bodies 25 25 are simultaneously raised and lowered in a state of being at the same height, and the inclined body 25, 25 is used as a lifting portion 250 for lifting and lowering the lifting unit 3 发. Further, although the structure in which the two elevating bodies 25 and 25 are synchronized so as to be at the same height can be considered in various configurations, the elevating bodies 25 and 2 are passed through the racks 31 and 31 and the elevating frame which will be described later. The structure of the (4) step is realized at the same time The structure is simple and rigid, and is an ideal structure. The lifting unit 3 has a lifting frame 40 provided with base ends 5〇a, 6〇a of the arms 50, 6〇 and a lifting frame 4〇 for fixing the lifting frame 4〇 The frame supporting member 310. The descending frame supporting member 310 is connected by a frame 31 connected to one of the lifting bodies 25 and another brackets connected to the other lifting body 25 to each of the brackets 31, 31. The elevating bodies 25 and 25 extend toward the arm advancing side (see the front head Ca) of the arm, and the elevating frame is attached to the distal end sides of the brackets 31 and 31. The elevating frame 40 is disposed on the arm advancing side a of the strut 22 and 22, It is placed in a state of being displaced to the arm advancing side Ca with respect to the pillars 22 and 22. Further, the lifting frame 40 can be between the lowered position (refer to the position of the solid line in FIGS. 1 and 3) and the rising position (refer to the position indicated by the two-dot chain line in FIG. 3) as described above. When the lifting frame 40 is offset from the pillars 22 and 22, the lower side of the structural base portion 21 can be rotated by the lower base member 42 without causing the lifting path of the lower base member 42 to be described later to interfere with the rotating structure base portion 21 ( The installation surface of the pillars 22 and 22 is located at the lower side 9 (see Fig. 3). Similarly, if the lifting path of the upper base member 4i to be described later does not interfere with the rotating structure upper frame 23, the upper base member 41 can be raised to a position higher than the lower surface of the rotating structure upper frame 23 (refer to FIG. 3). . Thereby, a wide range can be secured as the lifting range of the lifting frame 4〇. In other words, the substrate transfer robot R (4) that is carried in and out of the workpiece (not shown) can be moved to a lower minimum working height, or the maximum height of the loading/unloading can be made higher. Further, the "lifting frame 4" is a frame structure in which the upper base member 41, the lower base member 42, and the right and left vertical frame members 43 are disposed in an up-and-down positional relationship. The lifting frame 4 of 34 structures is excellent in rigidity. The vertical frame portions Μ and Μ have an upper stage 43a and a lower stage 43b which are bent in the horizontal direction at the upper and lower ends. The upper base member 41 and the lower base member 42 are in a state in which the arm advances and retreats in the moving direction C (refer to the figure υ orthogonally and is arranged horizontally. Further, the upper base structure is a member having a rectangular cross section, and the four sides are The surface of the width is disposed horizontally above and below. Further, the upper base member 41 is disposed to be displaced upward from the brackets 31 and 31. The lower base member 42 is disposed to be displaced downward from the brackets 31 and 31. That is, the bracket 3 The 133 is disposed between the upper base member 4A and the lower base member, and by the offset, it is possible to ensure that the arms 50, 60 are provided in the space between the upper base member 41 and the lower base member 42. Further, the upper base member 41 is detachably attached to the left and right vertical frame members. The lower base member 42 is detachably attached to the lower mounting table 4 at the lower portion of the left and right vertical frame members 43 and 43. 10 M4O404 In the lifting unit 30, the upper arm (first arm) 5〇 and the lower arm (flute arm) 60 are recognized. ^ ^ 2 The upper arm 50 has two arm pieces 5 which can be flexibly connected. The description shows that the upper arm is 5 and the ancient mountain has a base. The base end side arm 156 rotatably coupled to the upper temple member 41 is provided with a base #31 and a front end side arm piece 52 rotatably coupled to the base end side. The base end side The end portion of the arm piece 5 (hereinafter referred to as "the base portion 50a" of the μ) is a portion that supports the entire upper arm, which corresponds to the shoulder of the arm, and the other side of the arm 52 is composed of The end portion is connected to the proximal end side arm piece 51, and the connection portion between the base name and the distal end side arm piece 52 corresponds to the elbow portion of the upper arm 50. The connection is ^ u ^ 卜基钿 詹The length of the sheet 5 1 and the front end side are the same as the length of the connecting portion from the connecting portion at one end of the arm piece to the other end. The front end portion of the front end side arm piece 52 of the upper arm 50 (the upper arm front end portion 50b) ) 卜 钓 π 丨 丨 丨 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 π π π π π π π π π π π π π π π π π π π A driving source such as a motor, which is not shown, causes the two arm pieces 5 i and 52 to be scribbled, 隹 ▲ ▲ to be rotated and bent, and the upper arm 50 is bent and extended to make the upper arm front end portion 5 〇 b 扃尨# a里/ This is in the retreat position (the position of the arm retreat, refer to the figure υ and the other position (the arm advances the position i 隹 station can, ·> 9th, more,,, 'the two-point chain line of Figure 3 The first fruit of the representation is: 曰^ arm advance and retreat square C (refer to Figure ^ forward and backward movement. Among them, if the relationship between VL κ and early 兀30 is explained, the arm advance and retreat direction C is two: the direction of extension, and When the upper arm 1 is moved closer to or away from the rotating structure 2, the front end portion of the upper arm can be moved forward and backward. The hand 53 attached to the body portion 50b can be moved forward and backward. 11 Further, the upper arm base end portion 5〇a and the upper base are moved forward and backward. The connection of the member 4丨: the end: the connection portion between the arm piece Μ and the front end side arm piece 52, and the front end portion of the upper arm. 5〇b"hand. Each connecting shaft of the connecting portion of P53 is a vertical axis. The lower arm 6G is a member having the same structure as the upper arm 5G, and is a horizontal axis extending the upper 5 〇 in the advancing and retracting direction. The member rotated 180 degrees is provided with a member that is symmetrically arranged on the horizontal plane. Therefore, the same reference numeral is added to the corresponding portion of the upper arm 5G at each portion of the lower arm 60 (only the ten-digit "5" ', converted to "6"), the detailed description of the lower arm 6〇 is omitted here. As described above, in the substrate transfer robot r of the present embodiment, the rotation axis 21a of the rotor, the rotation axis of the upper arm base end portion 5a, and the rotation axis of the lower arm portion are both axes extending in the wrong direction. Further, the rotation axes of the rotary two- and two-arm base end portions 50a'60a are disposed on the same vertical plane which is extended in the arm forward-retracting direction C (refer to Fig. 1). Further, the upper arm base end portion 50a is attached to the lower surface side of the upper base member 41, and the lower arm base end portion 60a is attached to the upper surface side of the lower base member 42. Two = the front end portions 50b, 6b are moved forward and backward between the retracted position and the advanced position by the inside of the frame of the elevating frame 4''. In other words, the front end portions 5 of the arms move forward and backward between the pair of legs 22 and 22 to the forward position and the backward position. Further, the upper arm base end portion 5a is provided at an intermediate position in the long-life direction of the upper base member 41, and the upper arm base end portion 60a is provided at the intermediate position in the longitudinal direction of the lower base member. Next, the operation of the substrate transfer robot having such a configuration will be described. The operation of the substrate transfer robot is realized by using the control unit = row j 12 M415404 not shown in the figure to describe the operation control of each drive source. Fig. 1 shows a state in which the hand 53 of the upper arm 50 is in the arm retracted position, and the hand 63 of the lower arm 6G is in the state of the arm advancing position, and the elevating unit 30 is in the lowered position. The hands 53 and 63 at the forward position are in a state of being advanced to the destination. Therefore, when the substrate W to which the workpiece is carried in and out is held by the hands 53 and 63, the hands 53 and 63 are first advanced to the illustrated state and then raised. As a result, the substrate W to which the satellite is moved and carried out is transferred to the hands 53 and 63 and is fed. When the substrate w held (placed) on the hands 53 and 63 is placed on the workpiece loading/unloading destination, the hands 53 and 63 are first advanced to the illustrated state and then lowered. Thereby, the substrate w held (placed) on the hands 53 and 63 is transferred to the workpiece loading/unloading destination. The hands 53 and 63 in the retracted position are in a standby state. For example, if the arms 50, 60 are rotated in the retracted position, the radius of rotation of the substrate transport robot R is the smallest. Therefore, when the rotating structure 2 is rotated for the purpose of changing the loading/unloading destination of the substrate W, etc., the hands 53 and 63 of the arms 50 and 60 are moved to the retracted position before the rotation operation. In this state, the rotating structure 2 is rotated. The lifting unit 30 is movable to a desired height position between the lowered position (the position of the solid line in Fig. 3) and the raised position (the position of the two-point chain line in Fig. 3). Therefore, in the case where the workpiece loading/unloading destination substrate is accommodated in the multi-storey shelf, the height position of the hands 53 and 63 can be made to match the height of each shelf by raising and lowering the lifting unit 3〇. 13 M415404 For example, a plurality of workpieces are provided around the substrate transfer robot :: when the destination is moved in, the arm advance/retract direction c is rotated by the rotation structure 2 to move toward the desired guard. The height positions of the arms 50 and 6G used for carrying and unloading the substrate W match the height of the shelf as the substrate loading/unloading destination. Slave = state: By moving the hands 53 and 63 of the arm 50'60 forward and backward, the substrate w is carried in and out of the workpiece loading/unloading destination. At the time of such a substrate conveyance operation, if the substrate of the stupid embodiment is sent to the person R, the arms 5A and 60 are disposed offset from the pillars 22 and 22 to the arm advancing side Ca (refer to the elevating frame arranged in FIG. 4. If it is above, the range in which the hands 53 and 63 can reach when the arm is advanced can be increased by the same amount of offset: - If the range in which the hands 53 and 63 can reach can be increased, the circumference of the substrate can be sent. Further, it is conceivable that since the distance at which the hands 53 and 63 reach when the arm is advanced can be equal to the amount of the offset, the arm can be shortened when the range that can be reached is the same as in the related art. As a result, the weight and volume of the arm 5〇'6〇 can be reduced. As a result, not only a motor having a small power can be used as the motor for the arm but also a torque when the arms 50 and 60 are rotated. It is also small, so the rigidity values required for the two pillars 22, 22 are also small. Moreover, since the substrate transport robot scale is of a double-column type, the balance of the left and right sides is equal, and since the two pillars 22, 22 support the two arms, 6〇 and the weight of the substrate W, When the total sectional area of the columns of the two pillars 22 and 22 of the substrate transporting robot scale is the same as the sectional area of the single-column substrate transport robot, the rigidity of the substrate transport robot R is smaller than that of the single-column type. Firi 14 M415404 The 'substrate transport robot R can transport large substrates w (workpieces) more stably than the single-turn type substrate transport robot. L solid eight early instructions】
圖為表示本創作的基板輸送機器人的立體圖 ®為表示圖1的基板輸送機器人的俯視圖； 圖3為表_1的基板輸送機器人的側視圖； 圖4為表示圖1的基板輸送機器人的前視圖。 【主要元件符號說明】 10 台座 11 旋轉支承部 20 旋轉結構體 21旋轉結構基礎部 2 1 a旋轉轴 22 支柱 23旋轉結構上框 24 蓋體 25 升降體 250升降部 3〇 升降單元 3 1 0升降框支承構件 3 1 托架 40 升降框 M415404 41 上底座構件 42 下底座構件 43 縱框構件 43a上部載置台 43b下部載置台 50 上臂（第1臂） 50a上臂基端部（基端側臂片的基端部） 50b上臂前端部（前端側臂片的前端部） 5 1 基端側臂片 52 前端側臂片 53 手部 60 .下臂（第2臂） 60a上臂基端部（基端側臂片的基端部） 60b上臂前端部（前端側臂片的前端部） 61 基端側臂片 62 前端側臂片 A 旋轉方向 B 支柱長度方向（高度方向，鉛垂方向） C 臂進退移動方向 Ca 臂前進側 Cb 臂後退側 R 基板輸送機器人 W 基板 16Figure 3 is a plan view showing the substrate transfer robot of Figure 1; Figure 3 is a side view of the substrate transfer robot of Table 1; Figure 4 is a front view showing the substrate transfer robot of Figure 1. . [Description of main components] 10 pedestal 11 Rotary support 20 Rotary structure 21 Rotary structure base 2 1 a Rotary shaft 22 Pillar 23 Rotary structure Upper frame 24 Cover 25 Lifting body 250 Lifting section 3 Lifting unit 3 1 0 Lifting Frame support member 3 1 bracket 40 lifting frame M415404 41 upper base member 42 lower base member 43 vertical frame member 43a upper stage 43b lower stage 50 upper arm (first arm) 50a upper arm base end (base end side arm piece Base end portion 50b Upper arm distal end portion (front end side arm end portion) 5 1 Base end side arm piece 52 Front end side arm piece 53 Hand 60. Lower arm (second arm) 60a Upper arm base end portion (base end side) 60b upper end portion (front end side arm end portion) 61 base end side arm piece 62 front end side arm piece A rotation direction B strut length direction (height direction, vertical direction) C arm advance and retreat movement Direction Ca Arm Forward side Cb Arm Back side R Substrate transport robot W Substrate 16