KR101149952B1 - 트랜스퍼 로봇 - Google Patents

트랜스퍼 로봇 Download PDF

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Publication number
KR101149952B1
KR101149952B1 KR1020050033948A KR20050033948A KR101149952B1 KR 101149952 B1 KR101149952 B1 KR 101149952B1 KR 1020050033948 A KR1020050033948 A KR 1020050033948A KR 20050033948 A KR20050033948 A KR 20050033948A KR 101149952 B1 KR101149952 B1 KR 101149952B1
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KR
South Korea
Prior art keywords
work
hand
workpiece
linear movement
movement path
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Expired - Fee Related
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KR1020050033948A
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English (en)
Korean (ko)
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KR20060045829A (ko
Inventor
토시노리 이와야마
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가부시키가이샤 다이헨
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Publication of KR20060045829A publication Critical patent/KR20060045829A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H10P72/30—

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020050033948A 2004-04-30 2005-04-25 트랜스퍼 로봇 Expired - Fee Related KR101149952B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004135995A JP4495509B2 (ja) 2004-04-30 2004-04-30 トランスファロボット
JPJP-P-2004-00135995 2004-04-30

Publications (2)

Publication Number Publication Date
KR20060045829A KR20060045829A (ko) 2006-05-17
KR101149952B1 true KR101149952B1 (ko) 2012-06-11

Family

ID=35444936

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050033948A Expired - Fee Related KR101149952B1 (ko) 2004-04-30 2005-04-25 트랜스퍼 로봇

Country Status (3)

Country Link
JP (1) JP4495509B2 (enExample)
KR (1) KR101149952B1 (enExample)
TW (1) TW200540085A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230063904A (ko) * 2021-10-29 2023-05-10 주식회사 라온테크 인-챔버 웨이퍼 이송 로봇

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101192751B1 (ko) 2005-12-29 2012-10-18 엘지디스플레이 주식회사 평판표시장치 제조 장비 및 이를 이용한 평판표시장치 제조방법
JP5190303B2 (ja) * 2008-06-04 2013-04-24 東京エレクトロン株式会社 搬送装置及び処理装置
JP2010023195A (ja) * 2008-07-22 2010-02-04 Nidec Sankyo Corp 産業用ロボット
JP5338365B2 (ja) * 2009-02-18 2013-11-13 凸版印刷株式会社 ガラス基板搬送用ロボットハンド
JP5821251B2 (ja) * 2011-04-08 2015-11-24 セイコーエプソン株式会社 ロボットハンド
KR101703767B1 (ko) * 2011-09-23 2017-02-23 주식회사 원익아이피에스 기판처리시스템, 버퍼모듈 및 로드락모듈
KR101870293B1 (ko) * 2011-11-09 2018-06-22 엘지디스플레이 주식회사 러빙 시스템 및 이를 위한 기판이송로봇
CN103128185B (zh) 2011-11-25 2015-03-11 鸿富锦精密工业（深圳）有限公司 搬运装置及采用该搬运装置的冲压设备
JP5480340B2 (ja) 2012-07-26 2014-04-23 ファナック株式会社 ローラ装置を用いた取出しロボットシステム
KR101410246B1 (ko) * 2013-03-18 2014-06-20 주식회사 로보스타 패널 반송용 트리플 암 로봇
CN105014655A (zh) * 2014-04-16 2015-11-04 扬州兴乐电镀设备有限公司 一种plc模块控制机械手抓放装置
CN104108605B (zh) * 2014-07-08 2016-08-17 深圳市华星光电技术有限公司 一种玻璃基板的取放装置
TWI614114B (zh) * 2015-08-21 2018-02-11 寧波弘訊科技股份有限公司 移取裝置及移取方法
CA3107180C (en) * 2016-09-06 2022-10-04 Advanced Intelligent Systems Inc. Mobile work station for transporting a plurality of articles
TWI674231B (zh) * 2017-06-01 2019-10-11 孫建忠 基板貯送系統
JP6777665B2 (ja) 2018-02-26 2020-10-28 ファナック株式会社 ロボットハンド、ロボットおよびロボットハンドのハンド幅調整方法
CN110202565A (zh) * 2019-05-30 2019-09-06 上海海事大学 微波炉高温食物抓取机械装置
TWI733141B (zh) * 2019-07-16 2021-07-11 亞智科技股份有限公司 牙叉式基板運輸裝置及其方法
CN110587635A (zh) * 2019-08-02 2019-12-20 湖南海纳赋能科技有限公司 一种用于寄存柜中的智能存储机械手
JP7518485B2 (ja) 2020-04-06 2024-07-18 日本電気硝子株式会社 ガラス板の製造方法及び製造装置
CN115072356B (zh) * 2021-03-11 2026-01-16 上海君屹工业自动化股份有限公司 机器人快速运输卸货设备
CN113213055B (zh) * 2021-05-27 2022-12-20 深圳市库宝软件有限公司 跨区域任务处理方法、装置、设备、仓储系统及存储介质
CN113414779B (zh) * 2021-06-29 2022-08-12 河南职业技术学院 一种基于计算机控制的机械手
CN119036453A (zh) * 2024-09-20 2024-11-29 北京人形机器人创新中心有限公司 机器人运动控制方法、装置及存储介质

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11168128A (ja) * 1997-12-03 1999-06-22 Mecs Corp 薄型基板の搬送ロボット

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611391U (ja) * 1984-06-06 1986-01-07 富士通株式会社 ロボツトフインガ−
JPH074788B2 (ja) * 1989-04-14 1995-01-25 株式会社安川電機 ワーク把持装置
JPH0724330Y2 (ja) * 1989-12-15 1995-06-05 セントラル硝子株式会社 板状体の移載装置
JPH0679573A (ja) * 1992-09-03 1994-03-22 Makino Milling Mach Co Ltd 搬送車のパレット移載装置
JP3249309B2 (ja) * 1994-09-13 2002-01-21 東京エレクトロン株式会社 基板の搬送装置及び基板の搬送方法並びに塗布現像処理装置
JPH0933589A (ja) * 1995-07-14 1997-02-07 Tokyo Electron Ltd 検査装置
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
JP4346765B2 (ja) * 2000-01-04 2009-10-21 株式会社アルバック 基板搬送ロボット
JP3443398B2 (ja) * 2000-11-08 2003-09-02 川崎重工業株式会社 反転積み重ね装置
JP2002172570A (ja) * 2000-12-05 2002-06-18 Kawasaki Heavy Ind Ltd ダブルアームおよびそれを備えたロボット

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11168128A (ja) * 1997-12-03 1999-06-22 Mecs Corp 薄型基板の搬送ロボット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230063904A (ko) * 2021-10-29 2023-05-10 주식회사 라온테크 인-챔버 웨이퍼 이송 로봇
KR102681573B1 (ko) 2021-10-29 2024-07-08 주식회사 라온테크 인-챔버 웨이퍼 이송 로봇

Also Published As

Publication number Publication date
JP2005317854A (ja) 2005-11-10
TW200540085A (en) 2005-12-16
JP4495509B2 (ja) 2010-07-07
KR20060045829A (ko) 2006-05-17
TWI301118B (enExample) 2008-09-21

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