SG114529A1 - Method of manufacturing a semiconductor device - Google Patents
Method of manufacturing a semiconductor deviceInfo
- Publication number
- SG114529A1 SG114529A1 SG200200835A SG200200835A SG114529A1 SG 114529 A1 SG114529 A1 SG 114529A1 SG 200200835 A SG200200835 A SG 200200835A SG 200200835 A SG200200835 A SG 200200835A SG 114529 A1 SG114529 A1 SG 114529A1
- Authority
- SG
- Singapore
- Prior art keywords
- manufacturing
- semiconductor device
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0732—Shaping the laser spot into a rectangular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02672—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using crystallisation enhancing elements
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Recrystallisation Techniques (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001049468 | 2001-02-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG114529A1 true SG114529A1 (en) | 2005-09-28 |
Family
ID=18910569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200200835A SG114529A1 (en) | 2001-02-23 | 2002-02-18 | Method of manufacturing a semiconductor device |
Country Status (7)
Country | Link |
---|---|
US (3) | US6872638B2 (de) |
EP (1) | EP1235259A3 (de) |
KR (1) | KR100871449B1 (de) |
CN (2) | CN1307695C (de) |
MY (1) | MY135105A (de) |
SG (1) | SG114529A1 (de) |
TW (1) | TW529092B (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6770518B2 (en) * | 2001-01-29 | 2004-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
SG114529A1 (en) * | 2001-02-23 | 2005-09-28 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
SG143975A1 (en) * | 2001-02-28 | 2008-07-29 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
JP2003045874A (ja) | 2001-07-27 | 2003-02-14 | Semiconductor Energy Lab Co Ltd | 金属配線およびその作製方法、並びに金属配線基板およびその作製方法 |
JP2004146559A (ja) * | 2002-10-24 | 2004-05-20 | Elpida Memory Inc | 容量素子の製造方法 |
JP3904512B2 (ja) * | 2002-12-24 | 2007-04-11 | シャープ株式会社 | 半導体装置およびその製造方法、並びに半導体装置を備えた電子機器 |
JP2004335839A (ja) * | 2003-05-09 | 2004-11-25 | Nec Corp | 半導体薄膜、薄膜トランジスタ、それらの製造方法および半導体薄膜の製造装置 |
KR100539962B1 (ko) * | 2003-07-03 | 2005-12-28 | 매그나칩 반도체 유한회사 | 포토레지스트 트리밍 공정을 이용한 반도체 소자의 제조방법 |
US7459379B2 (en) * | 2004-03-26 | 2008-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US7071042B1 (en) * | 2005-03-03 | 2006-07-04 | Sharp Laboratories Of America, Inc. | Method of fabricating silicon integrated circuit on glass |
KR20130010624A (ko) * | 2011-07-19 | 2013-01-29 | 삼성디스플레이 주식회사 | 도너 기판, 도너 기판의 제조 방법 및 도너 기판을 이용한 유기 발광 표시 장치의 제조 방법 |
JP5955658B2 (ja) | 2012-06-15 | 2016-07-20 | 株式会社Screenホールディングス | 熱処理方法および熱処理装置 |
KR101936619B1 (ko) * | 2012-10-31 | 2019-01-09 | 엘지디스플레이 주식회사 | 플렉서블 유기전계발광소자 및 그 제조방법 |
JP5753324B2 (ja) * | 2012-11-20 | 2015-07-22 | Hoya株式会社 | マスクブランク、転写用マスク、マスクブランクの製造方法、転写用マスクの製造方法および半導体デバイスの製造方法 |
JP2015049972A (ja) * | 2013-08-30 | 2015-03-16 | 株式会社ジャパンディスプレイ | 有機el表示装置 |
CN103879954B (zh) * | 2014-03-20 | 2017-04-12 | 浙江工业大学 | 一种硅基上非晶硅与玻璃的阳极键合方法及其应用 |
CN107799407B (zh) * | 2016-08-29 | 2020-07-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种晶体管的凹槽栅制备方法及大功率射频器件 |
CN113206006A (zh) * | 2021-04-21 | 2021-08-03 | 武汉大学 | 二维材料拉应变工程的激光冲击制备方法 |
Citations (6)
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JPH06163409A (ja) * | 1992-11-19 | 1994-06-10 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
US6066516A (en) * | 1995-06-26 | 2000-05-23 | Seiko Epson Corporation | Method for forming crystalline semiconductor layers, a method for fabricating thin film transistors, and method for fabricating solar cells and active matrix liquid crystal devices |
JP2000150890A (ja) * | 1998-11-11 | 2000-05-30 | Seiko Epson Corp | 半導体装置の製造方法 |
JP2002076349A (ja) * | 2000-08-28 | 2002-03-15 | Seiko Epson Corp | 半導体装置の製造方法 |
JP2002305148A (ja) * | 2001-01-29 | 2002-10-18 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
US20030089909A1 (en) * | 2001-10-09 | 2003-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, semiconductor device, and method of manufacturing the same |
Family Cites Families (63)
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US4256681A (en) * | 1976-12-16 | 1981-03-17 | Semix Incorporated | Method of producing semicrystalline silicon |
JPS6310573A (ja) * | 1986-07-02 | 1988-01-18 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
JPH0213630A (ja) * | 1988-06-29 | 1990-01-18 | Norihide Imagawa | ねじ付き棒状体と長ナットの継手構造 |
JPH0389517A (ja) * | 1989-08-31 | 1991-04-15 | Sharp Corp | ランプアニール装置 |
KR960008503B1 (en) * | 1991-10-04 | 1996-06-26 | Semiconductor Energy Lab Kk | Manufacturing method of semiconductor device |
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EP0612102B1 (de) * | 1993-02-15 | 2001-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Herstellungsverfahren für eine kristallisierte Halbleiterschicht |
JP3662263B2 (ja) * | 1993-02-15 | 2005-06-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
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US5481121A (en) * | 1993-05-26 | 1996-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having improved crystal orientation |
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US5488000A (en) * | 1993-06-22 | 1996-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating a thin film transistor using a nickel silicide layer to promote crystallization of the amorphous silicon layer |
US5529937A (en) * | 1993-07-27 | 1996-06-25 | Semiconductor Energy Laboratory Co., Ltd. | Process for fabricating thin film transistor |
US5663077A (en) * | 1993-07-27 | 1997-09-02 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a thin film transistor in which the gate insulator comprises two oxide films |
US5923962A (en) | 1993-10-29 | 1999-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
TW264575B (de) | 1993-10-29 | 1995-12-01 | Handotai Energy Kenkyusho Kk | |
JP3431041B2 (ja) | 1993-11-12 | 2003-07-28 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP3221473B2 (ja) * | 1994-02-03 | 2001-10-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
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ES2296298T3 (es) * | 1996-09-06 | 2008-04-16 | Ricoh Company, Ltd | Medio de grabacion optica. |
JP3389022B2 (ja) * | 1996-09-27 | 2003-03-24 | シャープ株式会社 | 半導体装置 |
JPH10172919A (ja) * | 1996-12-11 | 1998-06-26 | Sony Corp | レーザーアニール方法及び装置 |
JPH1174536A (ja) | 1997-01-09 | 1999-03-16 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JPH10249279A (ja) * | 1997-03-11 | 1998-09-22 | Tiger Kawashima Co Ltd | 穀類選別装置 |
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US6066547A (en) * | 1997-06-20 | 2000-05-23 | Sharp Laboratories Of America, Inc. | Thin-film transistor polycrystalline film formation by nickel induced, rapid thermal annealing method |
JP3633229B2 (ja) * | 1997-09-01 | 2005-03-30 | セイコーエプソン株式会社 | 発光素子の製造方法および多色表示装置の製造方法 |
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JP4493752B2 (ja) * | 1998-07-17 | 2010-06-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
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US6559036B1 (en) * | 1998-08-07 | 2003-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
JP4436469B2 (ja) * | 1998-09-30 | 2010-03-24 | 三洋電機株式会社 | 半導体装置 |
US7126161B2 (en) * | 1998-10-13 | 2006-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having El layer and sealing material |
US6197623B1 (en) * | 1998-10-16 | 2001-03-06 | Seungki Joo | Method for crystallizing amorphous silicon thin-film for use in thin-film transistors and thermal annealing apparatus therefor |
JP3483484B2 (ja) * | 1998-12-28 | 2004-01-06 | 富士通ディスプレイテクノロジーズ株式会社 | 半導体装置、画像表示装置、半導体装置の製造方法、及び画像表示装置の製造方法 |
JP2000251761A (ja) * | 1998-12-28 | 2000-09-14 | Toshiba Corp | カラー陰極線管装置 |
JP2000260710A (ja) * | 1999-03-11 | 2000-09-22 | Seiko Epson Corp | 半導体装置の製造方法及びアニール装置 |
TW515109B (en) * | 1999-06-28 | 2002-12-21 | Semiconductor Energy Lab | EL display device and electronic device |
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JP2001196699A (ja) * | 2000-01-13 | 2001-07-19 | Sony Corp | 半導体素子 |
US7023021B2 (en) * | 2000-02-22 | 2006-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
GB0006958D0 (en) * | 2000-03-23 | 2000-05-10 | Koninkl Philips Electronics Nv | Method of manufacturing a transistor |
US6747289B2 (en) * | 2000-04-27 | 2004-06-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating thereof |
TWI286338B (en) * | 2000-05-12 | 2007-09-01 | Semiconductor Energy Lab | Semiconductor device and manufacturing method thereof |
JP2002150890A (ja) | 2000-08-18 | 2002-05-24 | Hainicks Co Ltd | 多方向を有するボールスイッチ及びその操作方法 |
US6770518B2 (en) * | 2001-01-29 | 2004-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
SG114529A1 (en) * | 2001-02-23 | 2005-09-28 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
SG143975A1 (en) * | 2001-02-28 | 2008-07-29 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
US6893506B2 (en) * | 2002-03-11 | 2005-05-17 | Micron Technology, Inc. | Atomic layer deposition apparatus and method |
-
2002
- 2002-02-18 SG SG200200835A patent/SG114529A1/en unknown
- 2002-02-20 US US10/078,240 patent/US6872638B2/en not_active Expired - Lifetime
- 2002-02-20 MY MYPI20020561A patent/MY135105A/en unknown
- 2002-02-22 CN CNB021051321A patent/CN1307695C/zh not_active Expired - Fee Related
- 2002-02-22 TW TW091103200A patent/TW529092B/zh not_active IP Right Cessation
- 2002-02-22 CN CN200710006745A patent/CN100592481C/zh not_active Expired - Fee Related
- 2002-02-22 EP EP20020004035 patent/EP1235259A3/de not_active Ceased
- 2002-02-23 KR KR1020020009717A patent/KR100871449B1/ko active IP Right Grant
-
2005
- 2005-03-14 US US11/078,395 patent/US20050158930A1/en not_active Abandoned
-
2012
- 2012-03-15 US US13/421,171 patent/US20120171795A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06163409A (ja) * | 1992-11-19 | 1994-06-10 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
US6066516A (en) * | 1995-06-26 | 2000-05-23 | Seiko Epson Corporation | Method for forming crystalline semiconductor layers, a method for fabricating thin film transistors, and method for fabricating solar cells and active matrix liquid crystal devices |
JP2000150890A (ja) * | 1998-11-11 | 2000-05-30 | Seiko Epson Corp | 半導体装置の製造方法 |
JP2002076349A (ja) * | 2000-08-28 | 2002-03-15 | Seiko Epson Corp | 半導体装置の製造方法 |
JP2002305148A (ja) * | 2001-01-29 | 2002-10-18 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
US20030089909A1 (en) * | 2001-10-09 | 2003-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, semiconductor device, and method of manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
CN1372308A (zh) | 2002-10-02 |
TW529092B (en) | 2003-04-21 |
US6872638B2 (en) | 2005-03-29 |
CN100592481C (zh) | 2010-02-24 |
CN1307695C (zh) | 2007-03-28 |
KR100871449B1 (ko) | 2008-12-03 |
US20020127827A1 (en) | 2002-09-12 |
KR20020069175A (ko) | 2002-08-29 |
EP1235259A3 (de) | 2009-07-29 |
US20120171795A1 (en) | 2012-07-05 |
EP1235259A2 (de) | 2002-08-28 |
US20050158930A1 (en) | 2005-07-21 |
MY135105A (en) | 2008-02-29 |
CN101005039A (zh) | 2007-07-25 |
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