NL1005541C2 - Werkwijze voor het koelen van een oven alsmede oven voorzien van een koelinrichting. - Google Patents

Werkwijze voor het koelen van een oven alsmede oven voorzien van een koelinrichting. Download PDF

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Publication number
NL1005541C2
NL1005541C2 NL1005541A NL1005541A NL1005541C2 NL 1005541 C2 NL1005541 C2 NL 1005541C2 NL 1005541 A NL1005541 A NL 1005541A NL 1005541 A NL1005541 A NL 1005541A NL 1005541 C2 NL1005541 C2 NL 1005541C2
Authority
NL
Netherlands
Prior art keywords
gas
cooling
oven
boundary wall
valves
Prior art date
Application number
NL1005541A
Other languages
English (en)
Dutch (nl)
Inventor
Albert Hasper
Theodorus Gerardus Oosterlaken
Frank Huussen
Jack Herman Van Putten
Original Assignee
Advanced Semiconductor Mat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Semiconductor Mat filed Critical Advanced Semiconductor Mat
Priority to NL1005541A priority Critical patent/NL1005541C2/nl
Priority to US09/381,428 priority patent/US6328561B1/en
Priority to EP98911263A priority patent/EP0970337B1/en
Priority to KR10-1999-7008246A priority patent/KR100517418B1/ko
Priority to AU65251/98A priority patent/AU6525198A/en
Priority to JP10540385A priority patent/JP2000512374A/ja
Priority to PCT/NL1998/000151 priority patent/WO1998041806A1/en
Priority to DE69801315T priority patent/DE69801315T2/de
Priority to TW087114413A priority patent/TW365643B/zh
Application granted granted Critical
Publication of NL1005541C2 publication Critical patent/NL1005541C2/nl

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/12—Heating of the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
NL1005541A 1997-03-14 1997-03-14 Werkwijze voor het koelen van een oven alsmede oven voorzien van een koelinrichting. NL1005541C2 (nl)

Priority Applications (9)

Application Number Priority Date Filing Date Title
NL1005541A NL1005541C2 (nl) 1997-03-14 1997-03-14 Werkwijze voor het koelen van een oven alsmede oven voorzien van een koelinrichting.
US09/381,428 US6328561B1 (en) 1997-03-14 1998-03-16 Method for cooling a furnace, and furnace provided with a cooling device
EP98911263A EP0970337B1 (en) 1997-03-14 1998-03-16 Method for cooling a furnace, and furnace provided with a cooling device
KR10-1999-7008246A KR100517418B1 (ko) 1997-03-14 1998-03-16 냉각 장치를 구비한 노 및 그 노의 냉각 방법
AU65251/98A AU6525198A (en) 1997-03-14 1998-03-16 Method for cooling a furnace, and furnace provided with a cooling device
JP10540385A JP2000512374A (ja) 1997-03-14 1998-03-16 炉の冷却方法と冷却装置を備えた炉
PCT/NL1998/000151 WO1998041806A1 (en) 1997-03-14 1998-03-16 Method for cooling a furnace, and furnace provided with a cooling device
DE69801315T DE69801315T2 (de) 1997-03-14 1998-03-16 Verfahren zur kühlung eines ofens und ofen mit einer kühleinrichtung
TW087114413A TW365643B (en) 1997-03-14 1998-08-31 Method for cooling a furnace, and furnace provided with a cooling device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1005541 1997-03-14
NL1005541A NL1005541C2 (nl) 1997-03-14 1997-03-14 Werkwijze voor het koelen van een oven alsmede oven voorzien van een koelinrichting.

Publications (1)

Publication Number Publication Date
NL1005541C2 true NL1005541C2 (nl) 1998-09-18

Family

ID=19764606

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1005541A NL1005541C2 (nl) 1997-03-14 1997-03-14 Werkwijze voor het koelen van een oven alsmede oven voorzien van een koelinrichting.

Country Status (9)

Country Link
US (1) US6328561B1 (zh)
EP (1) EP0970337B1 (zh)
JP (1) JP2000512374A (zh)
KR (1) KR100517418B1 (zh)
AU (1) AU6525198A (zh)
DE (1) DE69801315T2 (zh)
NL (1) NL1005541C2 (zh)
TW (1) TW365643B (zh)
WO (1) WO1998041806A1 (zh)

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JP2000512374A (ja) 2000-09-19
TW365643B (en) 1999-08-01
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EP0970337A1 (en) 2000-01-12
DE69801315D1 (de) 2001-09-13
DE69801315T2 (de) 2001-11-29
AU6525198A (en) 1998-10-12
KR20000076155A (ko) 2000-12-26
US6328561B1 (en) 2001-12-11

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