TW365643B - Method for cooling a furnace, and furnace provided with a cooling device - Google Patents

Method for cooling a furnace, and furnace provided with a cooling device

Info

Publication number
TW365643B
TW365643B TW087114413A TW87114413A TW365643B TW 365643 B TW365643 B TW 365643B TW 087114413 A TW087114413 A TW 087114413A TW 87114413 A TW87114413 A TW 87114413A TW 365643 B TW365643 B TW 365643B
Authority
TW
Taiwan
Prior art keywords
furnace
cooling
gas
proposed
cooling device
Prior art date
Application number
TW087114413A
Other languages
English (en)
Inventor
Albert Hasper
Frank Huussen
Laken Theodorus Gerardus Ooster
Putten Jack Herman Van
Original Assignee
Asm Int
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Int filed Critical Asm Int
Application granted granted Critical
Publication of TW365643B publication Critical patent/TW365643B/zh

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • C30B25/10Heating of the reaction chamber or the substrate
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/12Heating of the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Furnace Details (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
TW087114413A 1997-03-14 1998-08-31 Method for cooling a furnace, and furnace provided with a cooling device TW365643B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1005541A NL1005541C2 (nl) 1997-03-14 1997-03-14 Werkwijze voor het koelen van een oven alsmede oven voorzien van een koelinrichting.

Publications (1)

Publication Number Publication Date
TW365643B true TW365643B (en) 1999-08-01

Family

ID=19764606

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087114413A TW365643B (en) 1997-03-14 1998-08-31 Method for cooling a furnace, and furnace provided with a cooling device

Country Status (9)

Country Link
US (1) US6328561B1 (zh)
EP (1) EP0970337B1 (zh)
JP (1) JP2000512374A (zh)
KR (1) KR100517418B1 (zh)
AU (1) AU6525198A (zh)
DE (1) DE69801315T2 (zh)
NL (1) NL1005541C2 (zh)
TW (1) TW365643B (zh)
WO (1) WO1998041806A1 (zh)

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SG46236A1 (en) * 1992-06-03 1998-02-20 Esec Sa Apparatus for the heat treatment of a magazine for lead frames with electronic chips
JP2959947B2 (ja) * 1994-02-28 1999-10-06 信越石英株式会社 原料ガス供給方法及び装置

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US6328561B1 (en) 2001-12-11
DE69801315D1 (de) 2001-09-13
DE69801315T2 (de) 2001-11-29
KR20000076155A (ko) 2000-12-26
EP0970337B1 (en) 2001-08-08
WO1998041806A1 (en) 1998-09-24
JP2000512374A (ja) 2000-09-19
EP0970337A1 (en) 2000-01-12
NL1005541C2 (nl) 1998-09-18
AU6525198A (en) 1998-10-12
KR100517418B1 (ko) 2005-09-29

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