MX152657A - Metodo mejorado para aumentar la velocidad en la deposicion de cobre por via quimica,en substratos aislantes - Google Patents

Metodo mejorado para aumentar la velocidad en la deposicion de cobre por via quimica,en substratos aislantes

Info

Publication number
MX152657A
MX152657A MX178747A MX17874779A MX152657A MX 152657 A MX152657 A MX 152657A MX 178747 A MX178747 A MX 178747A MX 17874779 A MX17874779 A MX 17874779A MX 152657 A MX152657 A MX 152657A
Authority
MX
Mexico
Prior art keywords
speed
increase
improved method
insulating substrates
copper deposition
Prior art date
Application number
MX178747A
Other languages
English (en)
Inventor
John F Mccormack
Francis J Nuzzi
Original Assignee
Kollmorgen Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kollmorgen Tech Corp filed Critical Kollmorgen Tech Corp
Publication of MX152657A publication Critical patent/MX152657A/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper
    • C23C18/40—Coating with copper using reducing agents

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
MX178747A 1978-09-13 1979-08-01 Metodo mejorado para aumentar la velocidad en la deposicion de cobre por via quimica,en substratos aislantes MX152657A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US94191278A 1978-09-13 1978-09-13

Publications (1)

Publication Number Publication Date
MX152657A true MX152657A (es) 1985-10-07

Family

ID=25477278

Family Applications (1)

Application Number Title Priority Date Filing Date
MX178747A MX152657A (es) 1978-09-13 1979-08-01 Metodo mejorado para aumentar la velocidad en la deposicion de cobre por via quimica,en substratos aislantes

Country Status (17)

Country Link
JP (2) JPS5927379B2 (es)
AT (1) AT366105B (es)
AU (1) AU532144B2 (es)
BR (1) BR7905066A (es)
CA (1) CA1135903A (es)
CH (1) CH646200A5 (es)
DE (1) DE2937297C2 (es)
DK (1) DK148920C (es)
ES (1) ES484158A1 (es)
FR (1) FR2436192A1 (es)
GB (1) GB2032462B (es)
IL (1) IL58202A (es)
IT (1) IT1162420B (es)
MX (1) MX152657A (es)
NL (1) NL189523C (es)
SE (1) SE7907531L (es)
ZA (1) ZA793786B (es)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8005024A (nl) * 1980-09-05 1982-04-01 Philips Nv Werkwijze voor de vervaardiging van koperlegeringslagen en -patronen op substraten en de aldus vervaardigde produkten.
DE3585017D1 (de) * 1984-09-27 1992-02-06 Toshiba Kawasaki Kk Stromlose kupferplattierloesung.
EP0265895B1 (en) * 1986-10-31 1993-02-10 AMP-AKZO CORPORATION (a Delaware corp.) Method for electrolessly depositing high quality copper
JPH0723539B2 (ja) * 1986-11-06 1995-03-15 日本電装株式会社 化学銅めっき液及びそれを用いた銅めっき皮膜の形成方法
US4814009A (en) * 1986-11-14 1989-03-21 Nippondenso Co., Ltd. Electroless copper plating solution
JP2615682B2 (ja) * 1986-11-14 1997-06-04 株式会社デンソー 化学銅めっき液
AU3304389A (en) * 1988-04-29 1989-11-02 Kollmorgen Corporation Method of consistently producing a copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures
JP2595319B2 (ja) * 1988-07-20 1997-04-02 日本電装株式会社 化学銅めっき液及びそれを用いた銅めっき皮膜の形成方法
JPH036383A (ja) * 1989-06-02 1991-01-11 Nippondenso Co Ltd 化学銅めっき液
JPH0448100A (ja) * 1990-06-15 1992-02-18 Nkk Corp 洗浄設備
US7905994B2 (en) 2007-10-03 2011-03-15 Moses Lake Industries, Inc. Substrate holder and electroplating system
US8262894B2 (en) 2009-04-30 2012-09-11 Moses Lake Industries, Inc. High speed copper plating bath
JP5255015B2 (ja) * 2010-04-28 2013-08-07 名古屋メッキ工業株式会社 高分子繊維の無電解銅めっき方法
JP5780920B2 (ja) * 2011-10-31 2015-09-16 新光電気工業株式会社 無電解銅めっき浴
US20190382901A1 (en) * 2018-06-15 2019-12-19 Rohm And Haas Electronic Materials Llc Electroless copper plating compositions and methods for electroless plating copper on substrates
US10590541B2 (en) * 2018-06-15 2020-03-17 Rohm And Haas Electronic Materials Llc Electroless copper plating compositions and methods for electroless plating copper on substrates
CN113881984B (zh) * 2021-10-21 2022-09-16 深圳市励高表面处理材料有限公司 一种脉冲电镀整平剂及制备方法和应用该整平液的电镀液

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3222195A (en) * 1962-02-23 1965-12-07 Pearlstein Fred Stabilized electroless copper solution
US3361580A (en) * 1963-06-18 1968-01-02 Day Company Electroless copper plating
US3377174A (en) * 1963-10-24 1968-04-09 Torigai Eiichi Method and bath for chemically plating copper
DE1621307B2 (de) * 1966-02-01 1972-01-05 Photocircuits Corp , Glen Cove, N Y (V St A ) Reduktives metallisierungsbad insbesondere verkupferungsbad
US3720525A (en) * 1971-08-16 1973-03-13 Rca Corp Electroless copper plating solutions with accelerated plating rates
US3708329A (en) * 1971-09-10 1973-01-02 Bell Telephone Labor Inc Electroless copper plating
US3915718A (en) * 1972-10-04 1975-10-28 Schering Ag Chemical silver bath
US3793038A (en) * 1973-01-02 1974-02-19 Crown City Plating Co Process for electroless plating
JPS5173933A (ja) * 1974-12-25 1976-06-26 Mitsubishi Rayon Co Mudenkaidometsukyoku
JPS5746448B2 (es) * 1975-03-14 1982-10-04
JPS5217335A (en) * 1975-08-01 1977-02-09 Hitachi Ltd Chemical copper plating solution
JPS5288227A (en) * 1976-01-19 1977-07-23 Hitachi Ltd Chemical copper plating solution
IT1059950B (it) * 1976-04-30 1982-06-21 Alfachimici Spa Composizione per la ramatura anelettrica autocatalitica
JPS56156749A (en) * 1980-05-08 1981-12-03 Toshiba Corp Chemical copper plating solution

Also Published As

Publication number Publication date
DK381979A (da) 1980-03-14
GB2032462B (en) 1983-05-18
CA1135903A (en) 1982-11-23
FR2436192B1 (es) 1983-08-26
IL58202A (en) 1982-08-31
JPS5915981B2 (ja) 1984-04-12
JPS5927379B2 (ja) 1984-07-05
DK148920C (da) 1986-05-05
SE7907531L (sv) 1980-03-14
FR2436192A1 (fr) 1980-04-11
JPS5565355A (en) 1980-05-16
AU532144B2 (en) 1983-09-22
IT7950227A0 (it) 1979-09-11
ES484158A1 (es) 1980-09-01
AU4956779A (en) 1980-03-20
NL7906856A (nl) 1980-03-17
ZA793786B (en) 1980-07-30
IT1162420B (it) 1987-04-01
BR7905066A (pt) 1980-04-29
NL189523C (nl) 1993-05-03
DE2937297A1 (de) 1980-03-20
GB2032462A (en) 1980-05-08
DK148920B (da) 1985-11-18
DE2937297C2 (de) 1982-04-08
ATA600879A (de) 1981-07-15
JPS5925965A (ja) 1984-02-10
IL58202A0 (en) 1979-12-30
AT366105B (de) 1982-03-10
CH646200A5 (de) 1984-11-15

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