FR2436192A1 - Perfectionnement apporte au depot non-galvanique du cuivre - Google Patents

Perfectionnement apporte au depot non-galvanique du cuivre

Info

Publication number
FR2436192A1
FR2436192A1 FR7922867A FR7922867A FR2436192A1 FR 2436192 A1 FR2436192 A1 FR 2436192A1 FR 7922867 A FR7922867 A FR 7922867A FR 7922867 A FR7922867 A FR 7922867A FR 2436192 A1 FR2436192 A1 FR 2436192A1
Authority
FR
France
Prior art keywords
bath
agent
rate
improvement
deposit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7922867A
Other languages
English (en)
Other versions
FR2436192B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kollmorgen Technologies Corp
Original Assignee
Kollmorgen Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kollmorgen Technologies Corp filed Critical Kollmorgen Technologies Corp
Publication of FR2436192A1 publication Critical patent/FR2436192A1/fr
Application granted granted Critical
Publication of FR2436192B1 publication Critical patent/FR2436192B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper
    • C23C18/40—Coating with copper using reducing agents

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electroplating And Plating Baths Therefor (AREA)

Abstract

Procédé pour élever la vitesse à laquelle un dépôt de cuivre adhérent peut être formé avec un bain de cuivrage non-galvanique dont le pH cet supérieur à 10. On ajoute au bain un agent qui dépolarise la réaction anodique partielle ou la réaction cathodique partielle du bain ou ces deux réactions, et on fait fonctionner le bain à un pH supérieur à celui correspondant à sa vitesse de dépôt maximale sans l'agent dépolarisant, pour déposer le cuivre par voie non-galvanique à une vitesse supérieure à la vitesse de dépôt du bain sans cet agent, au même pH et à la même température. Application à la fabrication de circuits imprimés.
FR7922867A 1978-09-13 1979-09-13 Perfectionnement apporte au depot non-galvanique du cuivre Granted FR2436192A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US94191278A 1978-09-13 1978-09-13

Publications (2)

Publication Number Publication Date
FR2436192A1 true FR2436192A1 (fr) 1980-04-11
FR2436192B1 FR2436192B1 (fr) 1983-08-26

Family

ID=25477278

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7922867A Granted FR2436192A1 (fr) 1978-09-13 1979-09-13 Perfectionnement apporte au depot non-galvanique du cuivre

Country Status (17)

Country Link
JP (2) JPS5927379B2 (fr)
AT (1) AT366105B (fr)
AU (1) AU532144B2 (fr)
BR (1) BR7905066A (fr)
CA (1) CA1135903A (fr)
CH (1) CH646200A5 (fr)
DE (1) DE2937297C2 (fr)
DK (1) DK148920C (fr)
ES (1) ES484158A1 (fr)
FR (1) FR2436192A1 (fr)
GB (1) GB2032462B (fr)
IL (1) IL58202A (fr)
IT (1) IT1162420B (fr)
MX (1) MX152657A (fr)
NL (1) NL189523C (fr)
SE (1) SE7907531L (fr)
ZA (1) ZA793786B (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2489848A1 (fr) * 1980-09-05 1982-03-12 Philips Nv Procede pour la realisation de couches et de configurations en alliages de cuivre, produits ainsi obtenus et solution pour la mise en oeuvre de ce procede
EP0179212A2 (fr) * 1984-09-27 1986-04-30 Kabushiki Kaisha Toshiba Bain de dépôt chimique de cuivre
EP0265895A2 (fr) * 1986-10-31 1988-05-04 AMP-AKZO CORPORATION (a Delaware corp.) Procédé de dépôt chimique de cuivre de haute qualité
EP0340649A1 (fr) * 1988-04-29 1989-11-08 AMP-AKZO CORPORATION (a Delaware corp.) Procédé et bain pour effectuer un dépôt chimique de cuivre exempt de fissures

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0723539B2 (ja) * 1986-11-06 1995-03-15 日本電装株式会社 化学銅めっき液及びそれを用いた銅めっき皮膜の形成方法
US4814009A (en) * 1986-11-14 1989-03-21 Nippondenso Co., Ltd. Electroless copper plating solution
JP2615682B2 (ja) * 1986-11-14 1997-06-04 株式会社デンソー 化学銅めっき液
JP2595319B2 (ja) * 1988-07-20 1997-04-02 日本電装株式会社 化学銅めっき液及びそれを用いた銅めっき皮膜の形成方法
JPH036383A (ja) * 1989-06-02 1991-01-11 Nippondenso Co Ltd 化学銅めっき液
JPH0448100A (ja) * 1990-06-15 1992-02-18 Nkk Corp 洗浄設備
US7905994B2 (en) 2007-10-03 2011-03-15 Moses Lake Industries, Inc. Substrate holder and electroplating system
US8262894B2 (en) 2009-04-30 2012-09-11 Moses Lake Industries, Inc. High speed copper plating bath
JP5255015B2 (ja) * 2010-04-28 2013-08-07 名古屋メッキ工業株式会社 高分子繊維の無電解銅めっき方法
JP5780920B2 (ja) * 2011-10-31 2015-09-16 新光電気工業株式会社 無電解銅めっき浴
US20190382901A1 (en) * 2018-06-15 2019-12-19 Rohm And Haas Electronic Materials Llc Electroless copper plating compositions and methods for electroless plating copper on substrates
US10590541B2 (en) * 2018-06-15 2020-03-17 Rohm And Haas Electronic Materials Llc Electroless copper plating compositions and methods for electroless plating copper on substrates
CN113881984B (zh) * 2021-10-21 2022-09-16 深圳市励高表面处理材料有限公司 一种脉冲电镀整平剂及制备方法和应用该整平液的电镀液

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3222195A (en) * 1962-02-23 1965-12-07 Pearlstein Fred Stabilized electroless copper solution
US3361580A (en) * 1963-06-18 1968-01-02 Day Company Electroless copper plating
US3377174A (en) * 1963-10-24 1968-04-09 Torigai Eiichi Method and bath for chemically plating copper
DE1621307B2 (de) * 1966-02-01 1972-01-05 Photocircuits Corp , Glen Cove, N Y (V St A ) Reduktives metallisierungsbad insbesondere verkupferungsbad
US3720525A (en) * 1971-08-16 1973-03-13 Rca Corp Electroless copper plating solutions with accelerated plating rates
US3708329A (en) * 1971-09-10 1973-01-02 Bell Telephone Labor Inc Electroless copper plating
US3915718A (en) * 1972-10-04 1975-10-28 Schering Ag Chemical silver bath
US3793038A (en) * 1973-01-02 1974-02-19 Crown City Plating Co Process for electroless plating
JPS5173933A (ja) * 1974-12-25 1976-06-26 Mitsubishi Rayon Co Mudenkaidometsukyoku
JPS5746448B2 (fr) * 1975-03-14 1982-10-04
JPS5217335A (en) * 1975-08-01 1977-02-09 Hitachi Ltd Chemical copper plating solution
JPS5288227A (en) * 1976-01-19 1977-07-23 Hitachi Ltd Chemical copper plating solution
IT1059950B (it) * 1976-04-30 1982-06-21 Alfachimici Spa Composizione per la ramatura anelettrica autocatalitica
JPS56156749A (en) * 1980-05-08 1981-12-03 Toshiba Corp Chemical copper plating solution

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2489848A1 (fr) * 1980-09-05 1982-03-12 Philips Nv Procede pour la realisation de couches et de configurations en alliages de cuivre, produits ainsi obtenus et solution pour la mise en oeuvre de ce procede
EP0179212A2 (fr) * 1984-09-27 1986-04-30 Kabushiki Kaisha Toshiba Bain de dépôt chimique de cuivre
EP0179212B1 (fr) * 1984-09-27 1991-12-27 Kabushiki Kaisha Toshiba Bain de dépôt chimique de cuivre
EP0265895A2 (fr) * 1986-10-31 1988-05-04 AMP-AKZO CORPORATION (a Delaware corp.) Procédé de dépôt chimique de cuivre de haute qualité
FR2607152A1 (fr) * 1986-10-31 1988-05-27 Kollmorgen Corp Procede pour former par revetement autocatalytique un depot de cuivre exempt de fissures sur un substrat
EP0265895A3 (en) * 1986-10-31 1989-04-05 Kollmorgen Corporation Method for electrolessly depositing high quality copper
EP0340649A1 (fr) * 1988-04-29 1989-11-08 AMP-AKZO CORPORATION (a Delaware corp.) Procédé et bain pour effectuer un dépôt chimique de cuivre exempt de fissures

Also Published As

Publication number Publication date
DK381979A (da) 1980-03-14
GB2032462B (en) 1983-05-18
CA1135903A (fr) 1982-11-23
FR2436192B1 (fr) 1983-08-26
IL58202A (en) 1982-08-31
JPS5915981B2 (ja) 1984-04-12
JPS5927379B2 (ja) 1984-07-05
DK148920C (da) 1986-05-05
SE7907531L (sv) 1980-03-14
MX152657A (es) 1985-10-07
JPS5565355A (en) 1980-05-16
AU532144B2 (en) 1983-09-22
IT7950227A0 (it) 1979-09-11
ES484158A1 (es) 1980-09-01
AU4956779A (en) 1980-03-20
NL7906856A (nl) 1980-03-17
ZA793786B (en) 1980-07-30
IT1162420B (it) 1987-04-01
BR7905066A (pt) 1980-04-29
NL189523C (nl) 1993-05-03
DE2937297A1 (de) 1980-03-20
GB2032462A (en) 1980-05-08
DK148920B (da) 1985-11-18
DE2937297C2 (de) 1982-04-08
ATA600879A (de) 1981-07-15
JPS5925965A (ja) 1984-02-10
IL58202A0 (en) 1979-12-30
AT366105B (de) 1982-03-10
CH646200A5 (de) 1984-11-15

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Legal Events

Date Code Title Description
TP Transmission of property
TP Transmission of property
ST Notification of lapse