KR20060083206A - 적외선 센서 ic, 적외선 센서 및 그 제조 방법 - Google Patents
적외선 센서 ic, 적외선 센서 및 그 제조 방법 Download PDFInfo
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- KR20060083206A KR20060083206A KR1020067004857A KR20067004857A KR20060083206A KR 20060083206 A KR20060083206 A KR 20060083206A KR 1020067004857 A KR1020067004857 A KR 1020067004857A KR 20067004857 A KR20067004857 A KR 20067004857A KR 20060083206 A KR20060083206 A KR 20060083206A
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Abstract
Description
Claims (28)
- 인듐 및 안티몬을 함유하는 화합물 반도체를 갖고, 상기 화합물 반도체에 의해 적외선을 검지하여 그 검지를 나타내는 전기 신호를 출력하는 화합물 반도체 센서부, 및상기 화합물 반도체 센서부로부터 출력되는 상기 전기 신호를 처리하여 소정의 연산을 행하는 집적 회로부를 구비하고,상기 화합물 반도체 센서부 및 상기 집적 회로부가 동일 패키지 내에 하이브리드의 형태로 배치되어 있는 것을 특징으로 하는 적외선 센서 IC.
- 제 1 항에 있어서,상기 화합물 반도체 센서부는,기판, 및상기 기판 상에, 격자 부정합을 완화시키는 층인 버퍼층을 사이에 개재하여 형성된 화합물 반도체층을 구비하는 것을 특징으로 하는 적외선 센서 IC.
- 제 2 항에 있어서,상기 버퍼층은, AlSb, AlGaSb, AlGaAsSb, AlInSb, GaInAsSb, AlInAsSb 중 어느 하나인 것을 특징으로 하는 적외선 센서 IC.
- 제 1 항 내지 제 3 항 중 어느 한 항에 있어서,상기 화합물 반도체층은, 제 1 화합물 반도체층의 단층으로 이루어지고,상기 제 1 화합물 반도체층은, InSb, InAsSb, InSbBi, InAsSbBi, InTlSb, InTlAsSb, InSbN, InAsSbN 중 어느 하나인 것을 특징으로 하는 적외선 센서 IC.
- 제 4 항에 있어서,상기 제 1 화합물 반도체층은, p 형 도핑되어 있는 것을 특징으로 하는 적외선 센서 IC.
- 제 1 항 내지 제 3 항 중 어느 한 항에 있어서,상기 화합물 반도체층은,인듐 및 안티몬을 함유하는 재료인 제 2 화합물 반도체층, 및상기 제 2 화합물 반도체층 상에 상기 제 2 화합물 반도체층과 헤테로 접합하도록 형성된, 안티몬을 함유하고, 또한 상기 제 2 화합물 반도체층과는 상이한 재료인 제 3 화합물 반도체층을 구비하는 것을 특징으로 하는 적외선 센서 IC.
- 제 6 항에 있어서,상기 제 3 화합물 반도체층/상기 제 2 화합물 반도체층의 조합은, GaSb/InSb, GaInSb/InSb, InSb/InAsSb, GaSb/InAsSb, GaInSb/InAsSb 중 어느 하나인 것을 특징으로 하는 적외선 센서 IC.
- 제 6 항 또는 제 7 항에 있어서,상기 제 2 화합물 반도체층과 상기 제 3 화합물 반도체층의 양방, 또는, 상기 제 3 화합물 반도체층만을 p 형 도핑하는 것을 특징으로 하는 적외선 센서 IC.
- 제 1 항 내지 제 3 항 중 어느 한 항에 있어서,상기 화합물 반도체층은,인듐 및 안티몬의 적어도 일방을 함유하는 재료인 제 4 화합물 반도체층, 및상기 제 4 화합물 반도체층 상에 그 제 4 화합물 반도체층과 헤테로 접합하도록 형성되고, 인듐 및 안티몬의 적어도 일방을 함유하고, 또한 상기 제 4 화합물 반도체층과는 상이한 재료인 제 5 화합물 반도체층을 구비하고,상기 제 4 화합물 반도체층과 상기 제 5 화합물 반도체층은, 주기적으로 적층된 초격자 구조인 것을 특징으로 하는 적외선 센서 IC.
- 제 9 항에 있어서,상기 제 5 화합물 반도체층/상기 제 4 화합물 반도체층의 조합은, InAs/GaSb, InAs/GaInSb, InAs/GaAsSb, InAsSb/GaSb, InAsSb/GaAsSb, InAsSb/GaInSb 중 어느 하나인 것을 특징으로 하는 적외선 센서 IC.
- 제 1 항 내지 제 3 항 중 어느 한 항에 있어서,상기 화합물 반도체층은,인듐 및 안티몬을 함유하고, n 형 도핑된 재료인 화합물 반도체층, 및인듐 및 안티몬을 함유하고, p 형 도핑된 재료인 화합물 반도체층을 구비한 p-n 접합의 적층체인 것을 특징으로 하는 적외선 센서 IC.
- 제 11 항에 있어서,상기 적층체는, p 형 도핑된 InSb/n 형 도핑된 InSb, p 형 도핑된 InSb/p 형 도핑된 InAsSb/n 형 도핑된 InSb, p 형 도핑된 GaInSb/p 형 도핑된 InAsSb/n 형 도핑된 GaInSb, p 형 도핑된 GaInSb/p 형 도핑된 InSb/n 형 도핑된 GaInSb 중 어느 하나인 p-n 접합 적층체인 것을 특징으로 하는 적외선 센서 IC.
- 기판, 및상기 기판 상에 형성된 복수의 화합물 반도체층이 적층된 화합물 반도체의 적층체를 구비하고,상기 화합물 반도체의 적층체는,상기 기판 상에 형성되고, 인듐 및 안티몬을 함유하고, n 형 도핑된 재료인 제 6 화합물 반도체층,상기 제 6 화합물 반도체층 상에 형성되고, 인듐 및 안티몬을 함유하고, 논도프 또는 p 형 도핑된 재료인 제 7 화합물 반도체층, 및상기 제 7 화합물 반도체층 상에 형성되고, 상기 제 7 화합물 반도체층보다 도 고농도로 p 형 도핑되고, 또한 상기 제 7 화합물 반도체층보다도 큰 밴드갭을 갖는 재료인 제 8 화합물 반도체층을 구비하는 것을 특징으로 하는 적외선 센서.
- 제 13 항에 있어서,상기 제 6 화합물 반도체층은, InSb 이고,상기 제 7 화합물 반도체층은, InSb, InAsSb, InSbN 중 어느 하나이고,상기 제 8 화합물 반도체층은, AlInSb, GaInSb, 또는 AlAs, InAs, GaAs, AlSb, GaSb 및 그들 혼정 중 어느 하나인 것을 특징으로 하는 적외선 센서.
- 제 13 항 또는 제 14 항에 있어서,상기 제 6 화합물 반도체층의 n 형 도펀트는, Sn 이고,상기 제 7 화합물 반도체층 및 상기 제 8 화합물 반도체층의 p 형 도펀트는, Zn 인 것을 특징으로 하는 적외선 센서.
- 제 13 항 내지 제 15 항 중 어느 한 항에 있어서,상기 화합물 반도체의 적층체는,상기 제 8 화합물 반도체층 상에 형성되고, 인듐 및 안티몬을 함유하고, 그 제 8 화합물 반도체층과 동등하거나, 또는 그 이상의 농도로 p 형 도핑된 재료인 제 9 화합물 반도체층을 추가로 구비하는 것을 특징으로 하는 적외선 센서.
- 제 16 항에 있어서,상기 제 9 화합물 반도체층은, InSb 인 것을 특징으로 하는 적외선 센서.
- 제 16 항 또는 제 17 항에 있어서,상기 제 9 화합물 반도체층의 p 형 도펀트는, Zn 인 것을 특징으로 하는 적외선 센서.
- 제 13 항 내지 제 18 항 중 어느 한 항에 있어서,상기 기판은, 반절연성, 또는 상기 기판과 그 기판에 형성된 제 6 화합물 반도체층이 절연 분리 가능한 기판이고,상기 제 6 화합물 반도체층 중, 상기 제 7 화합물 반도체층이 형성되어 있지 않은 영역에 형성된 제 1 전극과, 상기 제 8 화합물 반도체층 상에 형성된 제 2 전극을 추가로 구비하는 것을 특징으로 하는 적외선 센서.
- 제 19 항에 있어서,상기 기판 상에는, 상기 화합물 반도체의 적층체에 형성된 제 1 전극과, 상기 제 1 전극이 형성된 화합물 반도체의 적층체 옆의 화합물 반도체의 적층체에 형성된 제 2 전극이 직렬 접속하도록, 복수의 상기 화합물 반도체의 적층체가 연속적으로 형성되어 있는 것을 특징으로 하는 적외선 센서.
- 제 19 항 또는 제 20 항에 있어서,출력 신호를 측정할 때에, 상기 제 1 및 제 2 전극 사이의 바이어스를 제로 바이어스로 하고, 적외선 입사시의 신호를 개방 회로 전압으로서 판독하는 것을 특징으로 하는 적외선 센서.
- 제 13 항 내지 제 21 항 중 어느 한 항에 기재된 적외선 센서, 및상기 적외선 센서로부터 출력되는 전기 신호를 처리하여 소정의 연산을 행하는 집적 회로부를 구비하고,상기 적외선 센서 및 상기 집적 회로부가 동일 패키지 내에 하이브리드의 형태로 배치되어 있는 것을 특징으로 하는 적외선 센서 IC.
- 기판 상에, 인듐 및 안티몬을 함유하고, n 형 도핑된 재료인 제 6 화합물 반도체층을 형성하는 공정,상기 제 6 화합물 반도체층 상에, 인듐 및 안티몬을 함유하고, 논도프 또는 p 형 도핑된 재료인 제 7 화합물 반도체층을 형성하는 공정, 및상기 제 7 화합물 반도체층 상에, 상기 제 7 화합물 반도체층보다도 고농도로 p 형 도핑되고, 또한 상기 제 7 화합물 반도체층보다도 큰 밴드갭을 갖는 재료인 제 8 화합물 반도체층을 형성하는 공정을 갖는 것을 특징으로 하는 적외선 센서의 제조 방법.
- 제 23 항에 있어서,상기 제 6 화합물 반도체층은, InSb 이고,상기 제 7 화합물 반도체층은, InSb, InAsSb, InSbN 중 어느 하나이고,상기 제 8 화합물 반도체층은, AlInSb, GaInSb, 또는 AlAs, InAs, GaAs, AlSb, GaSb 및 그들의 혼정 중 어느 하나인 것을 특징으로 하는 적외선 센서의 제조 방법.
- 제 23 항 또는 제 24 항에 있어서,상기 제 6 화합물 반도체층의 n 형 도펀트는, Sn 이고,상기 제 7 화합물 반도체층 및 상기 제 8 화합물 반도체층의 p 형 도펀트는, Zn 인 것을 특징으로 하는 적외선 센서의 제조 방법.
- 제 23 항 내지 제 25 항 중 어느 한 항에 있어서,상기 제 8 화합물 반도체층 상에 인듐 및 안티몬을 함유하고, 상기 제 8 화합물 반도체층과 동등하거나, 또는 그 이상의 농도로 p 형 도핑된 재료인 제 9 화합물 반도체층을 형성하는 공정을 추가로 갖는 것을 특징으로 하는 적외선 센서의 제조 방법.
- 제 26 항에 있어서,상기 제 9 화합물 반도체층은, InSb 인 것을 특징으로 하는 적외선 센서의 제조 방법.
- 제 26 항 또는 제 27 항에 있어서,상기 제 9 화합물 반도체층의 p 형 도펀트는, Zn 인 것을 특징으로 하는 적외선 센서의 제조 방법.
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Publication number | Priority date | Publication date | Assignee | Title |
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KR20140111449A (ko) * | 2013-03-11 | 2014-09-19 | 삼성전자주식회사 | 반도체 패키지 및 이를 구비하는 전자 시스템 |
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CN100511719C (zh) | 2009-07-08 |
JPWO2005027228A1 (ja) | 2008-06-12 |
KR100762772B1 (ko) | 2007-10-02 |
CN1853281A (zh) | 2006-10-25 |
US7768048B2 (en) | 2010-08-03 |
EP1667239A1 (en) | 2006-06-07 |
JP4086875B2 (ja) | 2008-05-14 |
EP2023398A2 (en) | 2009-02-11 |
EP2023398B1 (en) | 2014-10-22 |
CN101459203B (zh) | 2011-06-15 |
EP1667239A4 (en) | 2008-08-06 |
TW200515610A (en) | 2005-05-01 |
US20070090337A1 (en) | 2007-04-26 |
TWI261934B (en) | 2006-09-11 |
WO2005027228A1 (ja) | 2005-03-24 |
EP2023398A3 (en) | 2011-04-13 |
EP2023398B9 (en) | 2015-02-18 |
US20100264459A1 (en) | 2010-10-21 |
CN101459203A (zh) | 2009-06-17 |
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