JP5731754B2 - 赤外線センサ - Google Patents
赤外線センサ Download PDFInfo
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- JP5731754B2 JP5731754B2 JP2010033480A JP2010033480A JP5731754B2 JP 5731754 B2 JP5731754 B2 JP 5731754B2 JP 2010033480 A JP2010033480 A JP 2010033480A JP 2010033480 A JP2010033480 A JP 2010033480A JP 5731754 B2 JP5731754 B2 JP 5731754B2
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- infrared sensor
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Description
2 n型半導体層
3 p型半導体層
4 i型半導体層
5 バリア層
6 バッファ層
7 保護層
8 ガリウム砒素基板
9 n型のインジウムアンチモン層
10 p型のインジウムガリウムアンチモン層
11 i型のインジウムガリウムアンチモン層
12 p型のアルミインジウムアンチモン層
13 酸化チタン層
14 p型のインジウムアンチモン層
15 i型のインジウムアンチモン層
Claims (6)
- ガリウム砒素基板と、
前記ガリウム砒素基板上に直接形成されるn型のInSb層と、
前記n型のInSb層上のi型のGaxIn1-xSb(0.03≦x≦0.13)層と、
前記i型のGaxIn1-xSb層上のp型のGaInSb層とを含むPINフォトダイオード構造を備える赤外線センサ。 - 前記i型のGaxIn1-xSbにおいて、x=0.13であることを特徴とする請求項1に記載の赤外線センサ。
- 前記ガリウム砒素基板の裏面から、検出光を入射し、入射光量に応じた信号を電圧又は電流として出力することを特徴とする請求項1または2に記載の赤外線センサ。
- 前記各層が積層されない前記ガリウム砒素基板の裏面は、粗面であることを特徴とする請求項1乃至3の何れかに記載の赤外線センサ。
- 前記ガリウム砒素基板の裏面に、保護層を更に備えることを特徴とする請求項1乃至4の何れかに記載の赤外線センサ。
- 前記保護層は、酸化チタン、酸化シリコン、又は窒化シリコンから成ることを特徴とする請求項5に記載の赤外線センサ。
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JP2010033480A JP5731754B2 (ja) | 2010-02-18 | 2010-02-18 | 赤外線センサ |
Applications Claiming Priority (1)
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JP2010033480A JP5731754B2 (ja) | 2010-02-18 | 2010-02-18 | 赤外線センサ |
Publications (2)
Publication Number | Publication Date |
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JP2011171486A JP2011171486A (ja) | 2011-09-01 |
JP5731754B2 true JP5731754B2 (ja) | 2015-06-10 |
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JP2010033480A Active JP5731754B2 (ja) | 2010-02-18 | 2010-02-18 | 赤外線センサ |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7096684B2 (ja) * | 2018-03-23 | 2022-07-06 | 旭化成エレクトロニクス株式会社 | 赤外線発光素子 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55128883A (en) * | 1979-03-28 | 1980-10-06 | Moririka:Kk | Semiconductor material |
JPS61289678A (ja) * | 1985-06-18 | 1986-12-19 | Fujitsu Ltd | アバランシユ・ホトダイオ−ド |
JPS6411556U (ja) * | 1987-07-08 | 1989-01-20 | ||
JPH0567802A (ja) * | 1991-09-09 | 1993-03-19 | Sony Corp | 半導体受光素子 |
JP3526308B2 (ja) * | 1993-02-18 | 2004-05-10 | 株式会社日立製作所 | 受光素子 |
CN101459203B (zh) * | 2003-09-09 | 2011-06-15 | 旭化成电子材料元件株式会社 | 红外线传感器ic、红外线传感器及其制造方法 |
JP2008066584A (ja) * | 2006-09-08 | 2008-03-21 | Asahi Kasei Electronics Co Ltd | 光センサ |
JP5277485B2 (ja) * | 2007-12-13 | 2013-08-28 | シャープ株式会社 | 太陽電池の製造方法 |
JP2009206357A (ja) * | 2008-02-28 | 2009-09-10 | Asahi Kasei Electronics Co Ltd | 化合物半導体装置及び化合物半導体装置の製造方法 |
JP5266521B2 (ja) * | 2008-03-31 | 2013-08-21 | 旭化成エレクトロニクス株式会社 | 赤外線センサ、及び赤外線センサic |
CN102057495B (zh) * | 2008-06-04 | 2013-10-09 | 旭化成微电子株式会社 | 量子型红外线传感器以及使用该量子型红外线传感器的量子型红外线气体浓度仪 |
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- 2010-02-18 JP JP2010033480A patent/JP5731754B2/ja active Active
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JP2011171486A (ja) | 2011-09-01 |
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