WO2009148134A1 - 量子型赤外線センサおよびそれを用いた量子型赤外線ガス濃度計 - Google Patents
量子型赤外線センサおよびそれを用いた量子型赤外線ガス濃度計 Download PDFInfo
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- WO2009148134A1 WO2009148134A1 PCT/JP2009/060285 JP2009060285W WO2009148134A1 WO 2009148134 A1 WO2009148134 A1 WO 2009148134A1 JP 2009060285 W JP2009060285 W JP 2009060285W WO 2009148134 A1 WO2009148134 A1 WO 2009148134A1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/61—Non-dispersive gas analysers
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- H—ELECTRICITY
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Definitions
- the present invention relates to a quantum infrared sensor and a quantum infrared gas concentration meter using the same, and more specifically, a quantum infrared sensor and a non-dispersive infrared absorption gas concentration meter using the same. (Hereinafter referred to as NDIR gas concentration meter).
- an infrared gas concentration meter that measures the gas concentration in the atmosphere, utilizing the fact that the wavelength of infrared rays (IR) that are absorbed differs depending on the type of gas, the gas is detected by detecting this absorption amount.
- An NDIR gas densitometer that measures the concentration is used. This NDIR gas concentration meter combines a filter that transmits infrared light limited to the wavelength of the gas to be detected and an infrared sensor, and measures the amount of absorption to measure the gas concentration.
- This NDIR gas concentration meter is required to be compact and highly accurate and capable of measuring stably in various environments.
- an infrared gas analyzer that measures a gas concentration in the atmosphere or the like using a wavelength selective infrared detection element has been proposed (see, for example, Patent Document 1).
- Patent Document 1 discloses an infrared gas sensor in which a wavelength selection filter that selectively transmits infrared light from a light source and an infrared detector that detects infrared light transmitted through the wavelength selection filter are integrally formed.
- a wavelength selection filter that selectively transmits infrared light from a light source
- an infrared detector that detects infrared light transmitted through the wavelength selection filter are integrally formed.
- thermal infrared sensors are divided into thermal infrared sensors and quantum infrared sensors.
- a thermal infrared sensor is a sensor that uses infrared energy as heat, and the temperature of the sensor itself rises due to the infrared thermal energy, and the effects (resistance change, capacitance change, electromotive force, spontaneous polarization) due to the temperature rise.
- This thermal infrared sensor includes pyroelectric type (PZT, LiTaO 3 ), thermoelectromotive force type (thermopile, thermocouple), and conductive type (bolometer, thermistor), sensitivity does not depend on wavelength, and cooling is unnecessary. It is. However, the response speed is slow and the detection capability is not so high.
- a quantum infrared sensor is a sensor that uses electrons and holes generated by photons when an infrared ray is irradiated on a semiconductor.
- Photoconductive types such as HgCdTe
- photovoltaic types such as InAs
- This quantum infrared sensor has the characteristics that the sensitivity depends on the wavelength, has high sensitivity, and has a high response speed. However, it needs to be cooled, and it is generally used with cooling mechanisms such as Peltier elements and Stirling coolers. It was the target. Therefore, it has been difficult to apply to the NDIR type gas sensor.
- an infrared filter that joins an optical filter that transmits infrared rays to the opening of the can package for the purpose of blocking heat and detects infrared rays that have passed through the optical filter.
- the shape which accommodates in the inside of a can package is used.
- thermopile sensor a sensor configured in a mold resin without using a can package has been proposed in order to simplify and improve durability (for example, see Patent Document 2).
- the device described in Patent Document 2 includes a flat plate optical filter that selectively transmits infrared light in a specific wavelength band, and a detection element for detecting infrared light transmitted through the optical filter on one surface. Is provided between the optical filter and the detection element forming surface of the infrared detection element, and adheres the optical filter and the infrared detection element and between the optical filter and the detection element formation surface. And a support for securing a predetermined gap.
- the one described in Patent Document 2 has a structure in which the infrared sensor has a simplified configuration that does not employ a can package, and a structure in which an optical filter is provided with a predetermined gap on the detection element forming surface of the infrared sensor.
- a thermopile is used for the infrared sensor, and it is disclosed that the infrared sensor has a hollow structure. Furthermore, it is described that this gap is secured to prevent damage to the detection element of the infrared element and scratches on the contact surface.
- the support described in Patent Document 2 is only for securing a gap, and a function for preventing unnecessary light that does not pass through the optical filter from entering the infrared detection element from the gap, an optical filter, It has a function of preventing scratches on the contact surface of the infrared detection element and breakage of the infrared detection element, and does not have a function for holding an optical filter or packaging.
- the detection element surface is provided inside the mold resin, and the surface in contact with the optical filter is the back surface of the substrate of the detection element. Therefore, as shown in FIG. 6, a structure in which the optical filter and the infrared sensor are in contact with no gap is also preferably used. As a result, a further reduction in size and thickness can be realized.
- the quantum infrared sensor is an element that converts the infrared ray into an electric signal using the photoconductive effect or the photovoltaic effect, and is generally used after being cooled, but it can operate at room temperature.
- An infrared sensor has also been proposed (see, for example, Patent Document 3).
- the quantum infrared sensor described in Patent Document 3 is a compound semiconductor sensor unit that detects an infrared ray by a compound semiconductor layer provided on a substrate and outputs an electric signal, and calculates an electric signal from the compound semiconductor sensor unit.
- the compound semiconductor sensor unit and the integrated circuit unit are housed in the same package. This makes it less susceptible to electromagnetic noise and thermal fluctuations, enables detection at room temperature, and enables downsizing of the module.
- Patent Document 3 and Patent Document 4 described above disclose the quantum infrared sensor, there is no disclosure about the application of the quantum infrared sensor to a gas sensor.
- Patent Document 3 and Patent Document 4 described above disclose a resin-packaged quantum infrared sensor that can operate at room temperature, and is used in combination with an optical filter and a holding member. There is no description or suggestion that it can be used for a gas concentration meter by the NDIR method.
- Patent Document 5 a gas sensor using a quantum infrared sensor is disclosed in Patent Document 5, for example.
- the measurement cell and the reference cell are arranged in parallel, and in order to detect the component concentration of the sample gas based on the comparison of the amount of transmitted infrared light irradiated to each cell, An optical filter corresponding to the measurement target component gas and a filter rotating chopper are provided between the quantum infrared sensors.
- this Patent Document 5 discloses an NDIR gas analyzer using a photoconductive infrared detection sensor.
- a single infrared sensor and a rotary chopper are used.
- a quantum infrared sensor configured using a holding member provided with a plurality of quantum infrared sensors, a plurality of optical filters, and a through hole.
- the NDIR gas concentration meter using the thermopile element described above has a problem that the sensor output greatly fluctuates because the sensor temperature changes drastically when the temperature or flow rate of the gas to be measured changes significantly. When used under circumstances, there is a problem that practical measurement cannot be performed.
- a can package is used to provide a gap around the sensor element in order to cope with the significant change in the sensor temperature described above, and further vacuuming or filling with a gas having low thermal conductivity. Or by attaching a heat sink part having a large heat capacity to thermally shut off and stabilize the detection part, a method for alleviating this phenomenon is used.
- the shape of the element is complicated, increased in size, and increased in weight, and the package is required to have high work accuracy, which increases costs.
- a method of thermally stabilizing the element with a large heat sink, a Peltier element, or liquid nitrogen A method of cooling is performed.
- a gas having low thermal conductivity such as Xe or Ne in order to suppress heat conduction to the outside, a can package is formed like a thermal infrared sensor. used. For this reason, there has been a problem that the cost is increased in order to increase the size and complexity of the element and to require high working accuracy for the package.
- the present invention has been made in view of such problems, and the object of the present invention is to have a small and simple element shape and to be stable against disturbance changes such as changes in the flow rate and temperature of the measurement gas. And providing a quantum infrared sensor for an NDIR gas concentration meter and a quantum infrared gas concentration meter using the same.
- the present invention has been made to achieve such an object, and is provided with a plurality of quantum infrared sensor elements and an infrared light source side with respect to the quantum infrared sensor elements, each having a different specific wavelength band.
- a plurality of optical filters that selectively transmit infrared light; and a holding member that holds at least the optical filter and has a plurality of through holes toward the infrared light source side with respect to the quantum infrared sensor element;
- the quantum infrared sensor and the optical filter are fitted into the through hole of the holding member.
- the holding member includes a lower stage and an upper stage, and has a hierarchical structure in which first and second through holes for receiving infrared rays are provided in the lower stage and the upper stage so as to face the quantum infrared sensor element.
- the lower stage is provided with first and second quantum infrared sensor elements
- the upper stage is provided with first and second optical filters facing the first and second quantum infrared sensor elements. It is characterized by being provided. (Fig. 2B)
- the optical filter includes a pair of an optical filter for transmitting the reference light from the infrared light source and an optical filter for transmitting a wavelength band different from the reference light.
- the optical filter includes an optical filter for transmitting reference light from the infrared light source and a plurality of optical filters for transmitting a plurality of wavelength bands different from the reference light.
- the holding member is a package material molded in advance.
- the package material is characterized in that it can be surface-mounted using the terminals of the quantum infrared sensor element having terminals for surface mounting.
- optical filter and the quantum infrared sensor element are in close contact with each other. (Fig. 6)
- the quantum infrared sensor element has a sensor element part, and the sensor element part includes a first contact layer provided on a substrate, an absorption layer provided on the contact layer, and the absorption layer.
- a barrier layer provided thereon, a second contact layer provided on the barrier layer, a second electrode provided on the second contact layer, the first contact layer, and the absorption
- a passivation layer provided adjacent to the layer, the barrier layer, and the second contact layer; and a first electrode provided on the substrate via the passivation layer.
- the first contact layer is made of n-type InSb
- the absorption layer is made of ⁇ -type InSb
- the barrier layer is made of p-type AlInSb
- the second contact layer is made of p-type InSb. It is characterized by becoming. (Fig. 7)
- an infrared light source is disposed at one end in a sample cell that constitutes a flow path of a gas to be measured, and any one of the infrared sensors described above is disposed at the other end in the sample cell. It is a gas concentration meter. (Fig. 9)
- Subtracting means for subtracting the signal from the circuit offset memory by subtracting the signal from the circuit signal from the sensor signal, the subtracting means being input through an amplifier for amplifying the sensor signal from the quantum infrared sensor and a filter for removing noise; Based on each signal from the subtracting means, an arithmetic means for calculating a ratio of a transmitted light amount in the absorption band of the measurement target gas and a transmitted light amount in a wavelength band without absorption of the measurement target gas; and Adding means for adding the proportional coefficient offset from the gas offset memory by using the two wavelength bands to the signal of the gas, and based on the signal from the adding means, the absorbance coefficient of the gas from the gas constant memory and the gas path length Dividing means for dividing the constant of the above, and using the transmitted light amount in the absorption band of the measurement target gas and the transmitted light amount in the wavelength band without absorption of the measurement target quantitative gas Characterized in that to perform the quantification of the concentration of the gas Te. (Fig. 10)
- a plurality of quantum infrared sensor elements and a plurality of optical elements provided on the infrared light source side with respect to the quantum infrared sensor elements and selectively transmitting infrared light in different specific wavelength bands. Because it has a filter and a holding member that holds at least a plurality of optical filters and has a plurality of through-holes facing the infrared light source side with respect to the quantum infrared sensor element, it is small, thin, and has a simple element shape Quantum infrared sensor for NDIR gas concentration meter and quantum infrared gas concentration using the same can be stably measured against disturbance changes such as flow rate change and temperature change of measurement gas The total can be realized.
- FIG. 1A is a perspective view of the quantum infrared sensor according to the first embodiment of the present invention, as viewed from the top side.
- FIG. 1B is a perspective view from the bottom in the configuration diagram of the first embodiment of the quantum infrared sensor according to the present invention.
- FIG. 2A shows a top view of the configuration of the first embodiment of the quantum infrared sensor according to the present invention.
- FIG. 2B is a cross-sectional view of the configuration of the first embodiment of the quantum infrared sensor according to the present invention.
- FIG. 2C shows a bottom view of the configuration of the first embodiment of the quantum infrared sensor according to the present invention.
- FIG. 3A is a configuration diagram of a holding member of the quantum infrared sensor according to the present invention and a perspective view from above.
- FIG. 3B is a configuration diagram of a holding member of the quantum infrared sensor according to the present invention and a perspective view from the bottom.
- FIG. 4A is a perspective view from the top in the configuration diagram of the second embodiment of the quantum infrared sensor according to the present invention.
- FIG. 4B is a perspective view from the bottom in the configuration diagram of Embodiment 2 of the quantum infrared sensor according to the present invention.
- FIG. 5A shows a top view of the configuration of the quantum infrared sensor according to the second embodiment of the present invention.
- FIG. 5B is a cross-sectional view of the configuration of the second embodiment of the quantum infrared sensor according to the present invention.
- FIG. 5C shows a bottom view of the configuration of the second embodiment of the quantum infrared sensor according to the present invention.
- FIG. 6 is a configuration diagram in which the gap between the optical filter and the quantum infrared sensor element shown in FIGS. 2B and 5B is eliminated.
- FIG. 7 is a specific configuration diagram of the quantum infrared sensor element shown in FIG. 2B.
- FIG. 8 is a configuration diagram in which sensor element portions of the quantum infrared sensor element shown in FIG. 7 are connected in series.
- FIG. 9 is a block diagram for explaining the NDIR gas concentration meter of the present invention.
- FIG. 10 is a circuit diagram showing a signal processing configuration of the NDIR gas concentration meter shown in FIG.
- FIGS. 2A to 2C are configuration diagrams of a quantum infrared sensor according to a first embodiment of the present invention.
- FIGS. 1A and 1B are perspective views from the top and bottom surfaces, and FIGS. 2C shows a top view, a cross-sectional view, and a bottom view, respectively.
- 2B is a cross-sectional view taken along the line AA ′ in FIG. 2A.
- the quantum infrared sensor 12 of the present invention is provided on the infrared light source side with respect to a plurality of quantum infrared sensor elements 13a and 13b and the quantum infrared sensor elements 13a and 13b.
- a plurality of optical filters 16a and 16b that selectively transmit, and at least the optical filters 16a and 16b are held, and a plurality of through holes 15a and 15b are directed toward the infrared light source with respect to the quantum infrared sensor elements 13a and 13b.
- a holding member 15 provided.
- the light receiving portions of the quantum infrared sensor elements 13a and 13b are indicated by sensor element portions 103a and 103b.
- the infrared sensor of the present invention is a quantum infrared sensor, the through-holes 15a and 15b only need to have holes through which light passes, and need not be evacuated. Further, sealing with inert gas or nitrogen gas is not necessary. Therefore, the structure constituted by a plurality of infrared sensors, a plurality of optical filters, and a holding member as in the present invention is very simple and can be reduced in size and thickness.
- the pair of optical filters 16a and 16b includes a pair of a reference light transmission optical filter from an infrared light source and a wavelength band transmission optical filter different from the reference light.
- the optical filter that selectively transmits infrared light of a specific wavelength band used in the present invention selects infrared light of a specific wavelength band using an optical member that transmits electromagnetic waves such as infrared light. It is designed to be transparent. As long as the optical member has a function of selectively transmitting infrared light in a specific wavelength band, an optical member alone can be used.
- a dielectric multilayer filter in which dielectrics having different refractive indexes are deposited in layers on an optical member is also used.
- optical filter in this embodiment is not limited to this example, and any optical filter having a function of selectively transmitting infrared light can be used. It can be used without limitation.
- an optical member and a thin film formed in a multilayer on the optical member have a function of not transmitting infrared light having a long wavelength, a short wavelength, or both, and these As a result, the optical filter has a function of transmitting only infrared rays having a specific wavelength by combining the transmission functions.
- This optical filter may perform a function of transmitting only infrared rays having a specific wavelength, or may use a plurality of sheets depending on circumstances.
- a material that transmits predetermined infrared rays such as silicon (Si), glass (SiO 2 ), sapphire (Al 2 O 3 ), Ge, ZnS, ZnSe, CaF 2 , BaF 2, and the like is used.
- the thin film materials used and deposited on this include silicon (Si), glass (SiO 2 ), sapphire (Al 2 O 3 ), Ge, ZnS, TiO 2 , MgF 2 , SiO 2 , ZrO 2 , Ta 2 O 5 or the like is used.
- the dielectric multilayer filter in which dielectrics having different refractive indexes are laminated in layers on the optical member may be formed on both sides with a predetermined thickness configuration different on the front and back sides, or formed only on one side. May be.
- an antireflection film may be formed on the front surface, both surfaces on the back surface, or the outermost layer on one surface.
- the size of the optical filter used in the present invention may be equal to or smaller than the size of the quantum infrared sensor in the vertical and horizontal sizes. In order to reduce the cost, it is more preferable that the size is just the same size as the light receiving portion of the quantum infrared sensor or a size that can cover the light receiving portion. Specifically, when the light receiving portion is 0.7 mm ⁇ 0.7 mm, the size is just 0.7 mm ⁇ 0.7 mm, or a little larger, such as about 1 mm ⁇ 1 mm, as a margin for fixing the optical filter. Size is also done.
- the thickness of the optical filter is preferably thinner in order to reduce the absorption of infrared rays by the optical filter itself. Specifically, it is 0.8 mm or less, preferably 0.5 mm or less, and more preferably 0.4 mm or less.
- a quantum infrared sensor capable of detecting infrared light transmitted through the optical filters 16a and 16b at room temperature includes a photovoltaic type, a photoconductive effect type, a photoelectron emission effect type, and the like. Any of these types can be used in the present invention.
- the photoelectron emission effect type requires a special environment such as high vacuum, and there is a problem that the device itself and the sensor section become large.
- the conductive effect type has a drawback that noise is increased because current is passed through the sensor with confidence, and it is difficult to measure with high sensitivity at room temperature. Therefore, the photovoltaic type is preferred most preferably.
- a quantum infrared sensor that operates at room temperature
- a quantum infrared sensor that can detect infrared light transmitted through the optical filter of the present invention at room temperature is not limited to this example.
- the quantum infrared sensor operating at room temperature is such that a light receiving portion having a photodiode structure that generates a photovoltaic effect by infrared rays is formed on a substrate.
- a substrate a single crystal Si substrate, a glass substrate, a GaAs substrate, or the like can be used.
- a semi-insulating GaAs substrate is used as an example.
- the light receiving unit is a quantum type light receiving unit in which the light receiving surface is excited by infrared photons (photons) and the electrical properties of the light receiving surface are changed by this excitation.
- infrared energy is converted into electric energy by photoelectric conversion on the light receiving surface. Since it is a quantum type, the infrared detection sensitivity of the light receiving unit is hardly affected by the heat capacity of the light receiving unit and its surroundings.
- the light receiving surface of the light receiving unit is made of, for example, InAsxSb1-x (0 ⁇ x ⁇ 1) and can efficiently photoelectrically convert infrared rays having a wavelength of about 1 to 11 ⁇ m.
- the light receiving unit is composed of, for example, an InSb quantum PIN photodiode formed on a semi-insulating GaAs substrate.
- the InSb quantum PIN photodiode is doped with a substrate, an n-type InSb layer (contact layer) formed on the substrate, and a p-type doped layer formed on the n-type InSb layer.
- the shape described in Patent Document 4 may be used as an example of the configuration of the quantum infrared sensor operating at room temperature according to the present invention.
- the PIN photodiodes are connected in series by connection wiring (this connection will be described later with reference to FIG. 8).
- connection wiring this connection will be described later with reference to FIG. 8.
- Quantum infrared sensors that operate at room temperature have higher sensitivity than thermoelectric elements such as thermopiles that are generally used in the past, and the amount of noise per signal, that is, the SN ratio is also better.
- this quantum infrared sensor can be formed into a shape that can be surface-mounted during assembly.
- Quantum infrared sensors 13a and 13b of the present invention are preferably used that are packaged with a resin in order to achieve miniaturization.
- the size of one quantum infrared sensor is preferably 3 mm in length, 4 mm in width, and 1 mm or less in size, more preferably 2 mm in length, 3 mm in width, 0.5 mm or less in thickness, and more preferably 1 in length. .5mm x width 2.5mm x thickness 0.4mm or less is used.
- the optical filter and the quantum infrared sensor operating at room temperature are fixed in a state where a gap is formed, and a quantum infrared sensor element with a filter is obtained.
- a method for fixing the optical filter and the quantum infrared sensor operating at room temperature can be arbitrarily selected.
- FIG. 3A and 3B are configuration diagrams of the holding member of the infrared sensor of the present invention, FIG. 3A is a perspective view from the top surface, and FIG. 3B is a perspective view from the bottom surface.
- the holding member 15 includes a lower stage and an upper stage, and first and second penetrations for receiving infrared rays facing the first and second quantum infrared sensor elements 13a and 13b at the lower stage, the upper stage, and an intermediate portion thereof. It has a hierarchical structure provided with holes 15a and 15b.
- the first and second quantum infrared sensor elements 13a and 13b are provided in the lower stage, and the first and second optical filters 16a and 16b are provided in the upper stage with the first and second through holes 15a and 15b. Via the first and second quantum infrared sensor elements 13a and 13b.
- the holding member 15 is preferably a package material with a terminal molded in advance, or a package material with a terminal molded with a terminal that can be electrically connected to the quantum infrared sensor element. Further, it is desirable that the packaging material be surface-mountable using the terminals of the quantum infrared sensor element having the terminals for surface mounting.
- the packaging material constituting the holding member 15 can be a packaging material for electronic parts such as insulating ceramic or resin.
- ceramics include alumina, mullite, cordierite, steatite, aluminum nitride, silicon carbide, silicon, and mixtures thereof
- resins include epoxy resin, silicon resin, phenol resin, polyimide resin, and urethane.
- Resins such as resins and polyphenylene sulfide resins are used, and additives such as curing agents, curing accelerators, fillers, mold release agents, and modifiers may be added thereto.
- connection terminal arranged on the quantum infrared sensor element itself is used for direct surface mounting
- a metal such as aluminum that can be easily molded can be used for the holding member.
- metal is used for the holding member, the holding member and the connection terminal of the quantum infrared sensor must be electrically insulated.
- the optical filter and the infrared sensor are fixed to those having a predetermined shape so that the infrared light transmitted through the optical filter can reach the light receiving surface of the infrared sensor.
- the fixing method is not particularly limited, it may be bonded with an adhesive or the like, or another attachment member may be created and fixed using an equivalent to the package material. Further, as a fitting structure, a method that does not particularly bond may be used.
- the optical filter When attaching the optical filter to the holding member, attach the optical filter so that the upper surface of the optical filter coincides with the outer surface of the holding member or is located below the outer surface of the holding member. If the optical filter protrudes from the outer surface of the holding member, disturbance light may enter from the side surface of the optical filter and may not function as an accurate bandpass filter.
- the partition formed between two through holes by opening a through hole in the holding member has an important role.
- this partition it is possible to prevent the infrared rays transmitted through the respective optical filters from interfering with each other, and it is possible to more accurately measure the amount of infrared rays that have passed through the band-pass filter.
- the gap between the optical filter of the present invention and the quantum infrared sensor does not require a hermetic structure, a vacuum, or a gas-filled structure, and can be configured to allow ventilation with the outside air. is there. This is possible because the quantum infrared sensor element is not easily affected by the temperature of the outside air and the moving speed of the outside air due to the characteristics of the element.
- the quantum infrared sensor is designed so that it can be surface-mounted at the time of its assembly, so that the surface-mounted terminals come out on the lower surface of the molded package, so that the quantum infrared sensor element can be packaged.
- Surface mounting such as reflow soldering becomes possible.
- the total size of the plurality of optical filters and the plurality of quantum infrared sensors fitted in the holding member of the present invention can be realized as small as ever.
- the vertical and horizontal sizes vary depending on the number of types of gas to be measured. However, in the case of a pair of reference light and measurement light, for example, the vertical and horizontal sizes are 5 mm x 8 mm and the thickness is 3 mm. realizable. Further, in the case of a structure in which the gap between the optical filter and the quantum infrared sensor is eliminated and brought into contact with each other, the thickness can be further reduced to 2 mm or less.
- a quantum infrared gas concentration meter can be realized using the quantum infrared sensor having the above-described configuration.
- This quantum type infrared gas concentration meter has an infrared light source disposed at one end in a sample cell that constitutes a flow path of a gas to be measured, and an infrared sensor of the present invention disposed at the other end in the sample cell.
- a band-pass filter (center wavelength 4.3 ⁇ m, half-value width 270 nm, transmittance 75% or more) matched to the absorption characteristics of carbon dioxide and the other band-pass filter (center wavelength 3) that transmits infrared light having a wavelength as reference light (2 ⁇ m, half width 245 nm, transmittance 75% or more), and the selected infrared rays are detected by an infrared sensor.
- FIGS. 5A to 5C are configuration diagrams of the quantum infrared sensor according to the second embodiment of the present invention.
- FIGS. 4A and 4B are perspective views from the top and bottom surfaces.
- 5C shows a top view, a cross-sectional view, and a bottom view, respectively.
- 5B is a cross-sectional view taken along the line AA ′ in FIG. 5A.
- reference numerals 13a to 13d denote quantum infrared sensor elements
- 16a to 16d denote optical filters.
- Example 2 shows an example in which the quantum infrared sensor element and the optical filter in Example 1 shown in FIGS. 1A and 1B and FIGS. 2A to 2C are four.
- the four optical filters 16a to 16d are composed of one optical filter for transmitting reference light from an infrared light source and three optical filters for transmitting wavelength bands different from the reference light.
- the second embodiment it is possible to adopt the same configuration as that of the first embodiment described above, and it is obvious that the second embodiment can be applied to an infrared densitometer.
- an example is shown in which the concentrations of three different gas types can be measured.
- the device has a small and simple element shape, and can be stably measured against disturbance changes such as a change in the flow rate of the measurement gas and a change in temperature.
- the quantum infrared sensor for the NDIR gas sensor and the quantum infrared gas concentration meter using the same can be realized.
- FIG. 6 is a configuration diagram in which the gap between the optical filter and the quantum infrared sensor element shown in FIGS. 2B and 5B is eliminated. That is, the optical filters 16a and 16b and the quantum infrared sensor elements 13a and 13b can be brought into close contact with each other so that a gap is eliminated.
- the optical filters 16a and 16b can be attached after the quantum infrared sensor elements 13a and 13b are attached to the holding member 15.
- FIG. 7 is a specific configuration diagram of the quantum infrared sensor element shown in FIG. 2B, and reference numeral 103a (103b) denotes a sensor element portion.
- the quantum infrared sensor elements 13a and 13b have a sensor element portion 103a (103b).
- the sensor element portion 103a (103b) includes a first contact layer 106 provided on the substrate 105 and the first contact.
- Second element portion electrode 111b provided above, first contact layer 106, absorption layer 107, barrier layer 108, and passivation layer 110 provided adjacent to second contact layer 109, and this passivation layer
- a first element portion electrode 111 a provided on the substrate 105 via 110.
- the entire sensor element portion 103a (103b) except the light receiving surface is covered with the resin mold 101, and sensor electrode terminals 102a and 102b for taking out sensor signals are provided on both sides of the sensor element portion 103a (103b). Is provided. Further, the sensor element portion 103a (103b) is installed with a window opened from a part of the resin mold 101 so as to capture infrared rays. Further, the pad electrodes 104a and 104b connected to the first element portion electrode 111a and the second element portion electrode 111b constituting the sensor element portion 103a (103b) and formed on the substrate 105 are detected by the wire bonding 113. It is electrically connected to the electrode terminals 102a and 102b.
- an n-type InSb contact layer 106, an n-type InSb absorption layer 107, a p-type AlInSb barrier layer 108, and a p-type InSb contact layer 109 are formed on a semi-insulating GaAs substrate 105 to form an n-type.
- the InSb contact layer 106 is electrically connected to one pad electrode 104a by the element part electrode 111a, and the p-type InSb contact layer 109 is electrically connected to the other pad electrode 104b by the second element part electrode 111b. Connected.
- the material of the semiconductor thin film constituting the sensor element unit 103a (103b) is not limited to the above-described example.
- a passivation film 110 such as SiN is formed at a predetermined position so that the element part electrodes 111a and 111b do not contact the semiconductor layer.
- a protective film 112 is formed.
- the protective film 112 is provided for preventing reflection of incident infrared rays and protecting the sensor unit, and a material that transmits as much infrared rays as possible of a wavelength to be measured is preferably selected.
- silicon oxide, silicon nitride, titanium oxide, or the like is preferably used.
- the thickness of the protective film is preferably from 50 nm to 800 nm, more preferably from 100 nm to 500 nm.
- the infrared light transmitted through the optical filters 16a and 16b is incident on the semi-insulating GaAs substrate 105 from the protective film 112 of the sensor element portions 103a and 103b.
- the infrared rays that have passed through the optical filters 16a and 16b have a wavelength such as 3.8 ⁇ m and 4.3 ⁇ m
- the semi-insulating GaAs substrate 105 has a wide energy band gap
- the infrared rays that have passed through the optical filters 16a and 16b are The light is transmitted without being absorbed by the GaAs substrate 105.
- the infrared light transmitted through the GaAs substrate 105 is absorbed by the n-type InSb absorption layer 107 of the sensor element portions 103a and 103b, and a photocurrent is generated in the n-type InSb absorption layer 107 by the photoexcited electrons.
- the output voltage can be extracted from the element part electrodes 111a and 111b based on the amount of generated photocurrent.
- FIG. 8 is a configuration diagram in which the sensor element portions of the quantum infrared sensor element shown in FIG. 7 are connected in series.
- a plurality of sensor element portions 103a (103b) are provided, and the plurality of sensor element portions 103a (103b) are provided. They are connected in series. As a result, a large output signal can be obtained.
- the number of sensor element portions 103a (103b) is increased as the number of sensor element portions 103a (103b) connected in series on a substrate having the same area improves the sensitivity of the quantum infrared sensor.
- (103b) is formed.
- FIG. 9 is a block diagram for explaining the NDIR gas concentration meter of the present invention.
- This NDIR gas concentration meter is a one-light source / two-wavelength comparison NDIR gas concentration meter, for example, an optical filter 16b (center wavelength 4.3 ⁇ m, half-value width 270 nm, transmittance 75% or more) matched to the absorption characteristics of carbon dioxide, and reference Two wavelengths are selected by the optical filter 16a that transmits infrared light having a wavelength that does not absorb various gases as light, for example, a wavelength of about 3.8 ⁇ m, and the selected infrared rays are detected by the quantum infrared sensors 13a and 13b, respectively. Is done. In this case, a change with time of the output signal due to deterioration of the light source 10 or contamination of the sample cell 11 can be corrected by comparison with the measured absorption characteristic of the reference light.
- a 4.3 ⁇ m band-pass filter that absorbs carbon dioxide may be used for the optical filter 16b in the carbon dioxide gas concentration meter.
- a 4.6 ⁇ m band-pass filter having carbon monoxide absorption is used as the optical filter 16b.
- the concentration meter for each gas is used.
- a quantum infrared sensor using optical filters of three gas types different from the optical filter for reference light is shown in Example 2 (FIG. 4). According to the second embodiment, a very small and thin quantum infrared sensor can be realized, and the NDIR gas concentration meter as a whole can achieve an unprecedented size reduction.
- FIG. 10 is a circuit diagram showing a signal processing configuration of the NDIR gas concentration meter shown in FIG.
- the NDIR gas concentration meter of the present invention can determine the gas concentration of the gas to be measured by the following calculation.
- the gas concentration c is expressed by the following equation, where the incident light intensity Ig0 of the gas absorption band, the transmitted light intensity Ig of the gas absorption band, the absorbance coefficient ⁇ , and the gas path length L Can be represented.
- the incident light intensity Ig0 in the gas absorption band is proportional to the transmitted light intensity Ib in the non-absorption wavelength band, if the proportionality coefficient is ⁇ ,
- the quantification of the gas concentration is obtained by the following equation using the transmitted light amount in the gas absorption band and the transmitted light amount in the wavelength band without gas absorption.
- the signal processing circuit is as shown in FIG. That is, the quantum infrared sensor elements 120a and 120b are provided on the other end in the sample cell 11 on the reference side and the gas absorption side via the filters 119a and 119b.
- the sensor signals (reference side V1, gas absorption side V2) from the quantum infrared sensor elements 120a, 120b are amplified via amplifiers (amplifiers) 121a, 121b.
- amplifiers amplifiers
- Sensor signals from the amplifiers 121a and 121b are removed from sensors, circuits, and external noise via the noise filters 122a and 122b.
- the noise filters 122a and 122b a low-pass filter for band limitation, a band-pass filter, an integrator for averaging signals, or the like is used.
- Each signal from the noise filters 122a and 122b and the signal from the circuit offset memory 124 are input to the subtracters 123a and 123b, and the offset is removed by subtracting the value from the circuit offset memory 124 from the sensor signal.
- the subtracters 123a and 123b are for removing the offset of the sensor or the circuit, but the value from the circuit offset memory 124 set in advance or periodically during the quantitative operation is set from the sensor signal. The offset of the signal can be removed by subtraction.
- the Log calculator 125 calculates the signal (V1) of the transmitted light amount in the gas absorption band and the signal (V2) of the transmitted light amount in the wavelength band without gas absorption. The log ratio is calculated.
- the adder 126 adds an offset Log ⁇ corresponding to the proportional coefficient from the gas offset memory 127 using the two wavelength bands to the signal from the Log calculator 125.
- the divider 128 divides the gas absorbance coefficient ⁇ and the gas path length L constant from the gas constant memory 129 from the signal from the adder 126.
- the quantitative analysis of the gas concentration can be carried out from the following equation using the transmitted light amount in the gas absorption band and the transmitted light amount in the wavelength band without gas absorption.
- ⁇ V2 ′ / V1
- ⁇ is a proportional coefficient
- V1 is a reference side output voltage
- V2 is a gas absorption side output voltage
- V2 ′ is a voltage value when there is no absorption on the gas absorption side
- ⁇ is an absorbance.
- the coefficient, L is the gas path length.
- the signal processing units from the subtractors 123a and 123b to the divider 128 described above may perform analog processing, and may also digitize signals using an A / D converter and process them with an arithmetic unit such as a CPU. good.
- the present invention relates to a quantum-type infrared sensor and a quantum-type infrared gas concentration meter using the same, and has a small, thin and simple element shape, and is suitable for changes in disturbance such as a change in flow rate of a measurement gas and a change in temperature. It is possible to realize a quantum infrared sensor for an NDIR gas concentration meter and a quantum infrared gas concentration meter using the same that can be measured stably.
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Abstract
Description
Claims (12)
- 複数の量子型赤外線センサ素子と、
該量子型赤外線センサ素子に対して赤外線光源側に設けられ、各々異なる特定の波長帯域の赤外線を選択的に透過する複数の光学フィルタと、
少なくとも前記光学フィルタを保持し、前記量子型赤外線センサ素子に対して前記赤外線光源側に向けて複数の貫通孔を設けた保持部材と
を備え、前記量子型赤外線センサと前記フィルタとが、前記保持部材の前記貫通孔に嵌め込まれていることを特徴とする量子型赤外線センサ。 - 前記保持部材は、下段と上段を備え、前記下段と前記上段に前記量子型赤外線センサ素子に対向して赤外線を受光するための第1及び第2の貫通孔を設けた階層構造を有し、
前記下段には、第1及び第2の量子型赤外線センサ素子が設けられ、前記上段には、第1及び第2の光学フィルタが前記第1及び第2の量子型赤外線センサ素子に対向して設けられていることを特徴とする請求項1に記載の量子型赤外線センサ。 - 前記光学フィルタは、前記赤外線光源からの参照光透過用の光学フィルタと、前記参照光と異なる波長帯域透過用の光学フィルタとの一対からなることを特徴とする請求項1又は2に記載の量子型赤外線センサ。
- 前記光学フィルタは、前記赤外線光源からの参照光透過用の光学フィルタと、前記参照光と各々異なる複数の波長帯域透過用の光学フィルタとからなることを特徴とする請求項1,2又は3に記載の量子型赤外線センサ。
- 前記保持部材は、予め成型したパッケージ材であることを特徴とする請求項1乃至4のいずれかに記載の量子型赤外線センサ。
- 前記パッケージ材は、表面実装用の端子を有する量子型赤外線センサ素子の該端子を用いて表面実装可能にしたことを特徴とする請求項5に記載の量子型赤外線センサ。
- 前記光学フィルタと前記量子型赤外線センサ素子とが密接していることを特徴とする請求項1乃至6のいずれかに記載の量子型赤外線センサ。
- 前記量子型赤外線センサ素子はセンサ素子部を有し、該センサ素子部は、
基板上に設けられた第1のコンタクト層と、該第1のコンタクト層上に設けられた吸収層と、該吸収層上に設けられたバリア層と、該バリア層上に設けられた第2のコンタクト層と、該第2のコンタクト層上に設けられた第2の電極と、前記第1のコンタクト層と前記吸収層と前記バリア層と前記第2のコンタクト層に隣接して設けられたパッシベーション層と、該パッシベーション層を介して前記基板上に設けられた第1の電極とを備えたことを特徴とする請求項1乃至7のいずれかに記載の量子型赤外線センサ。 - 前記第1のコンタクト層はn型のInSbからなり、前記吸収層はπ型のInSbからなり、前記バリア層はp型のAlInSbからなり、前記第2のコンタクト層はp型のInSbからなることを特徴とする請求項8に記載の量子型赤外線センサ。
- 前記センサ素子部を複数個設け、該複数のセンサ素子部を直列接続させたことを特徴とする請求項8又は9に記載の量子型赤外線センサ。
- 測定対象ガスの流路を構成するサンプルセル内の一端に赤外線光源を配置するとともに、前記サンプルセル内の他端に請求項1乃至10のいずれかに記載の量子型赤外線センサを配置したことを特徴とする量子型赤外線ガス濃度計。
- 前記量子型赤外線センサからのセンサ信号を増幅する増幅器及びノイズを除去するフィルタを介して入力され、回路オフセットメモリからの信号を前記センサ信号から減算してオフセットを除去する減算手段と、
該減算手段からの各々の信号に基づいて、前記測定対象ガスの吸収帯の透過光量と前記測定対象ガスの吸収のない波長帯の透過光量の信号の比を演算する演算手段と、
該演算手段からの信号に、2波長帯を用いることによるガスオフセットメモリからの比例係数分オフセットを加算する加算手段と、
該加算手段からの信号に基づいて、ガス定数メモリからのガスの吸光度係数とガス路長の定数を除算する除算手段と
を備え、前記測定対象ガスの吸収帯の透過光量と前記測定対象ガスの吸収のない波長帯の透過光量を用いてガスの濃度の定量を行うようにしたことを特徴とする請求項11に記載の量子型赤外線ガス濃度計。
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US12/996,293 US8803092B2 (en) | 2008-06-04 | 2009-06-04 | Quantum infrared sensor and quantum infrared gas concentration meter using the same |
JP2010515923A JP5266321B2 (ja) | 2008-06-04 | 2009-06-04 | 量子型赤外線センサおよびそれを用いた量子型赤外線ガス濃度計 |
EP09758401.5A EP2284904A4 (en) | 2008-06-04 | 2009-06-04 | QUANTUM IR SENSOR AND QUANTUM IR GAS CONCENTRATION METER THEREWITH |
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PCT/JP2009/060285 WO2009148134A1 (ja) | 2008-06-04 | 2009-06-04 | 量子型赤外線センサおよびそれを用いた量子型赤外線ガス濃度計 |
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US (1) | US8803092B2 (ja) |
EP (1) | EP2284904A4 (ja) |
JP (1) | JP5266321B2 (ja) |
CN (1) | CN102057495B (ja) |
WO (1) | WO2009148134A1 (ja) |
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- 2009-06-04 WO PCT/JP2009/060285 patent/WO2009148134A1/ja active Application Filing
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JP2012199311A (ja) * | 2011-03-18 | 2012-10-18 | Asahi Kasei Electronics Co Ltd | フォトカプラ |
JP2012209357A (ja) * | 2011-03-29 | 2012-10-25 | Asahi Kasei Electronics Co Ltd | 量子型赤外線センサ |
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Also Published As
Publication number | Publication date |
---|---|
EP2284904A1 (en) | 2011-02-16 |
JPWO2009148134A1 (ja) | 2011-11-04 |
CN102057495A (zh) | 2011-05-11 |
US8803092B2 (en) | 2014-08-12 |
US20110090505A1 (en) | 2011-04-21 |
JP5266321B2 (ja) | 2013-08-21 |
EP2284904A4 (en) | 2014-03-26 |
CN102057495B (zh) | 2013-10-09 |
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