WO2013046676A1 - 赤外線センサ及び保持体 - Google Patents
赤外線センサ及び保持体 Download PDFInfo
- Publication number
- WO2013046676A1 WO2013046676A1 PCT/JP2012/006164 JP2012006164W WO2013046676A1 WO 2013046676 A1 WO2013046676 A1 WO 2013046676A1 JP 2012006164 W JP2012006164 W JP 2012006164W WO 2013046676 A1 WO2013046676 A1 WO 2013046676A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- infrared sensor
- holding body
- recess
- optical filter
- adhesive
- Prior art date
Links
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- 239000000853 adhesive Substances 0.000 claims description 98
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- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0205—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0875—Windows; Arrangements for fastening thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/041—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00
- H01L25/042—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Definitions
- the present invention relates to an infrared sensor and a holding body that holds an infrared sensor element and an optical filter.
- FIG. 2B and FIG. 6 in Patent Document 1 describe a configuration in which optical filters 16 a and 16 b are attached to infrared sensor elements 13 a and 13 b via a holding member 15.
- FIG. 11 is a cross-sectional view showing a configuration example of an infrared sensor 200 according to a conventional example.
- FIG. 12 is a perspective view illustrating a configuration example of the holding body 120 included in the infrared sensor 200.
- the infrared sensor 200 includes an infrared sensor element 110, optical filters 130 a and 130 b, a holding body 120, and an adhesive 140.
- the infrared sensor element 110 includes infrared sensor chips 101 a and 101 b, a lead frame 103, a gold wire 105, and a mold resin 107.
- the infrared sensor chips 101 a and 101 b are connected to the lead frame 103 by gold wires 105.
- the infrared sensor chips 101a and 101b, the lead frame 103, and the gold wire 105 are made of the mold resin 107 except for the light receiving surfaces 102a and 102b of the infrared sensor chips 101a and 101b and the portions that are external terminals of the lead frame 103. It is sealed.
- the holding body 120 is provided with housing portions 121a and 121b for housing optical filters 130a and 130b that transmit only a specific wavelength.
- the accommodating parts 121a and 121b are concave parts.
- the optical filters 130a and 130b are mounted on the housing portions 121a and 121b, and the adhesive 140 is applied to the adhesive application portions 123a and 123b of the holding body 120, respectively.
- the side having the adhesive application portions 123a and 123b of the holding body 120 is opposed to the side having the light receiving surfaces 102a and 102b of the infrared sensor element 110.
- the infrared sensor element is opposed to the holding body 120. 110 is pressed relatively. Thereby, the holding body 120 and the infrared sensor element 110 adhere.
- the adhesive 140 may spread out and contaminate the optical filters 130a and 130b.
- the possibility of this contamination is particularly high when the adhesive application portions 123a and 123b and one surface of the optical filters 130a and 130b are on the same surface (that is, at the same height).
- the optical filters 130a and 130b may deteriorate the infrared transmittance, and may not sufficiently function as a filter.
- an object of the present invention is to provide an infrared sensor and a holding body that can prevent the optical filter from being contaminated with an adhesive.
- an infrared sensor holds an infrared sensor element, an optical filter facing a light receiving surface of the infrared sensor element, and the infrared sensor element and the optical filter.
- a holding body, and the holding body is provided on the facing surface of the holding body facing the infrared sensor element, and is provided on the facing surface of the holding body, and the optical filter
- An adhesive region disposed at a position away from the housing portion; and a first recess provided on the facing surface of the holding body and disposed between the adhesive region and the optical filter housing portion. It is characterized by.
- the protruding adhesive is bonded. It can be stored in the 1st recessed part arrange
- the function as a filter can be sufficiently exhibited without deteriorating the infrared transmittance. Further, the optical filter can be held on the holding member without applying an adhesive to the optical filter itself.
- the “infrared sensor element” of the present invention corresponds to an infrared sensor element 10 described later, for example.
- the “first recess” corresponds to, for example, at least one of a groove 25a or a groove 25b described later.
- the holding body may have a second recess provided in the adhesion region.
- the adhesive can be applied to the second concave portion of the adhesive region, and the adhesive can be prevented from protruding from the adhesive region as compared with the case where there is no concave portion in the adhesive region.
- the “second recess” in the present invention corresponds to, for example, recesses 23 a and 23 b provided in an adhesive region 23 described later.
- the distance from the facing surface to the bottom surface of the first recess may be larger than the distance from the facing surface to the bottom surface of the second recess. With such a configuration, a large amount of adhesive protruding from the second recess can be accumulated in the first recess.
- the first recess and the second recess may be integrally formed. With such a configuration, it becomes easy to keep the wetting and spreading of the adhesive in the second recess due to the surface tension of the adhesive.
- the first recess may be arranged so as to surround an outer periphery of the second recess. With such a configuration, it is possible to suppress the adhesive protruding from the second recess from being wetted and spread all around the second recess (that is, in all directions).
- a hole having a smaller diameter than the optical filter housing portion may be provided on the bottom surface of the optical filter housing portion. If it is such a structure, an infrared sensor element can receive infrared rays through a hole, without impairing the function to hold
- the holding body may be provided with an opening or a groove penetrating from the first recess to the outside of the holding body.
- a holding body is a holding body that holds an infrared sensor element and an optical filter facing a light receiving surface of the infrared sensor element, and is provided on one surface of the holding body. And an optical filter housing part, and a first recess provided on the one surface and spaced apart from the optical filter housing part.
- the infrared sensor element when the infrared sensor element is bonded to one surface of the holding body and to the region on the opposite side of the optical filter housing portion (for example, the bonding region) across the first recess, Even if the adhesive spreads out from the adhesive region of the holding body due to the spreading of the adhesive, the protruding adhesive can be collected in the first recess, and the adhesive protruding from the adhesive region is stored in the optical filter housing portion. Reaching can be suppressed. Thereby, it can prevent that an adhesive agent contacts the optical filter accommodated in an optical filter accommodating part, and can prevent that an optical filter is contaminated with an adhesive agent.
- the “one surface” of the present invention corresponds to, for example, a facing surface 20a described later.
- the holding body includes a second recess provided on the one surface, and the first recess is disposed between the second recess and the optical filter housing portion.
- This may be a feature.
- the adhesive can be stored in the second concave portion of the adhesion region, so that the adhesive can be prevented from protruding from the adhesion region.
- the first recess and the second recess may be integrally formed. With such a configuration, it becomes easy to keep the wetting and spreading of the adhesive in the second recess due to the surface tension of the adhesive.
- a distance from the one surface to the bottom surface of the first recess may be larger than a distance from the one surface to the bottom surface of the second recess.
- the first recess may be arranged so as to surround an outer periphery of the second recess. With such a configuration, it is possible to suppress the adhesive protruding from the second recess from being wetted and spread all around the second recess (that is, in all directions).
- a hole having a diameter smaller than that of the optical filter housing portion may be provided on the bottom surface of the optical filter housing portion. If it is such a structure, an infrared sensor element can receive infrared rays through a hole, without impairing the function to hold
- the holding body may be provided with an opening or a groove penetrating from the first recess to the outside of the holding body.
- the present invention it is possible to prevent the adhesive from coming into contact with the optical filter housed in the housing portion of the holding body, and it is possible to prevent the optical filter from being contaminated with the adhesive.
- FIG. The figure which shows the structural example of the infrared sensor 100 which concerns on embodiment of this invention.
- FIG. The figure which shows the application
- FIG. The figure which shows the adhesion process of the infrared sensor element 10 and the holding body 20.
- FIG. The figure which shows the modification (the 1) of the holding body.
- FIG. The figure which shows the modification (the 4) of the holding body.
- FIG. 1 is a cross-sectional view illustrating a configuration example of an infrared sensor 100 according to an embodiment of the present invention.
- the infrared sensor 100 includes an infrared sensor element 10, optical filters 30 a and 30 b facing the side having the light receiving surface of the infrared sensor element 10, and the infrared sensor element 10 and the optical filters 30 a and 30 b.
- maintain and the adhesive agent 40 are provided.
- the infrared sensor element 10 is an element for detecting infrared rays.
- the infrared sensor element 10 is, for example, a semiconductor package having infrared sensor chips 1a and 1b, a lead frame 3, a gold wire 5, and a mold resin 7.
- the infrared sensor chips 1a and 1b are quantum photodiodes capable of detecting infrared rays of 2000 nm to 7400 nm, for example.
- the infrared sensor chips 1a and 1b are provided on opposite surfaces of the light receiving surfaces 2a and 2b, respectively, by receiving the infrared light on the respective light receiving surfaces 2a and 2b and photoelectrically converting the received infrared light. Output from a pad terminal (not shown).
- the lead frame 3 is a terminal portion for outputting an electrical signal obtained by the infrared sensor chips 1 a and 1 b to the outside of the infrared sensor element 10.
- the lead frame 3 is obtained, for example, by subjecting a copper (Cu) plate to a plating (plating) process such as nickel (Ni) -palladium (Pd) -gold (Au).
- the gold wire 5 connects the pad terminal of the infrared sensor chips 1 a and 1 b and the lead frame 3. By this gold wire 5, an electrical signal is transmitted from the pad terminals of the infrared sensor chips 1a and 1b to the lead frame 3.
- the mold resin 7 forms the outer shape of the semiconductor package. With this mold resin 7, the infrared sensor chips 1a and 1b, the lead frame 3 and the gold wire 5 are sealed except for the light receiving surfaces 2a and 2b and a portion which functions as a terminal portion of the lead frame 3.
- the infrared sensor chips 1a and 1b may be the same type of chip, or may be classified into different types in terms of size, material, or detectable wavelength range. Also good.
- the optical filters 30a and 30b have a function of selectively transmitting light having a preset wavelength (that is, having high transmittance).
- the optical filters 30a and 30b are sandwiched between the holding body 20 and the infrared sensor element 10, and are disposed so as to cover the light receiving surfaces 2a and 2b of the infrared sensor chips 1a and 1b, respectively.
- the optical filters 30a and 30b may be the same type of filter, or may be filters classified into different types in terms of size, material, or transmissive wavelength range. .
- the optical filter 30a may have a function of transmitting only a long wavelength component of infrared rays
- the optical filter 30b may have a function of transmitting only a short wavelength component of infrared rays.
- FIGS. 2A and 2B are diagrams showing a configuration example of the holding body 20 according to the embodiment of the present invention.
- FIG. 2A is a perspective view showing a side of the holding body 20 facing the infrared sensor element 10.
- FIG. 2B is a cross-sectional view taken along line X2-X′2 of FIG.
- the holding body 20 includes housing portions 21a and 21b for housing the optical filters 30a and 30b, concave portions 23a and 23b, and groove portions 25a and 25b.
- the accommodating portions 21a and 21b are concave portions provided on the facing surface 20a of the holding body 20 on the side facing the infrared sensor element 10.
- the shapes and sizes of the accommodating portions 21a and 21b correspond to the shapes and sizes of the optical filters 30a and 30b to be accommodated, respectively. That is, the accommodating portions 21a and 21b have the same shape as the outer shapes of the optical filters 30a and 30b to be accommodated, respectively, and have the same dimensions (in practice, the optical filters 30a and 30b 30a and 30b).
- holes 22a and 22b having diameters smaller than those of the recesses 23a and 23b are provided on the bottom surfaces of the storage portions 21a and 21b, respectively.
- the holes 22 a and 22 b penetrate the holding body 20.
- the viewing angles of the light receiving surfaces 2a and 2b through the optical filters 30a and 30b are limited by the holes 22a and 22b, respectively.
- the accommodating portions 21a and 21b have a function of holding the optical filter. That is, since the holes 22a and 22b are smaller in diameter than the accommodating portions 21a and 21b, the infrared sensor element 10 does not impair the function of holding the optical filters 30a and 30b by the accommodating portions 21a and 214b. , 22b can receive infrared rays.
- recesses 23a and 23b are provided in the adhesion region 23 disposed on the holding body 20 at a position away from the accommodating portions 21a and 21b.
- the recesses 23 a and 23 b are shallow grooves provided on the facing surface 20 a of the holding body 20 on the side facing the infrared sensor element 10.
- the recesses 23a and 23b are arranged at positions away from the accommodating portions 21a and 21b.
- An adhesive can be applied to the recesses 23a and 23b (that is, the adhesive 40 is applied to the recesses 23a and 23b in the infrared sensor 100 (see FIG. 1)).
- the shape of the recesses 23a and 23b in plan view is, for example, each rectangular.
- the groove portions 25 a and 25 b are deep grooves provided on the facing surface 20 a of the holding body 20.
- the groove part 25a is arrange
- the groove part 25b is arrange
- d2 is greater than d1. Is also large (d1 ⁇ d2).
- the shape of the groove portions 25a and 25b in a plan view is, for example, a rectangular frame shape.
- the concave portion 23a and the groove portion 25a are integrated, and no gap such as a partition wall is provided between the concave portion 23a and the groove portion 25a.
- the recess 23b and the groove 25b are integrated, and no gap such as a partition is provided between the recess 23b and the groove 25b.
- the groove portions 25a and 25b are deeper than the recessed portions 23a and 23b. Due to the surface tension of the agent, wetting and spreading of the adhesive can be retained in the recesses 23a and 23b.
- FIG. 3 is an enlarged view of a part of the holding body 20.
- FIG. 4 is a diagram showing an application process of the adhesive 40.
- FIG. 5 is a diagram illustrating an adhesion process between the infrared sensor element 10 and the holding body 20.
- a groove 25 b is provided around the recess 23 b of the holding body 20.
- a groove 25a is also provided around the recess 23a.
- the optical filters 30a and 30b are respectively accommodated (mounted) in the accommodating portions 21a and 21b.
- the adhesive agent 40 is each apply
- the method of applying the adhesive 40 is not limited to the dispense method, but may be a stamp method.
- the coating amount and the coating position of the adhesive 40 be such that the adhesive 40 does not cover the grooves 25a and 25b.
- the facing surface 20a of the holding body 20 and the light receiving surface of the infrared sensor element 10 are made to face each other. In this state, as shown in FIG. 5, the infrared sensor element 10 is relatively pressed against the holding body 20. Thereby, the infrared sensor element 10 and the holding body 20 adhere, and the infrared sensor 100 is completed.
- the adhesive 40 is wet and spreads by the infrared sensor element 10 being relatively pressed against the holding body 20. And when the application amount of the adhesive 40 is large due to variations in the manufacturing process or the like, a part of the adhesive 40 that spreads out may be projected from the recesses 23a and 23b.
- the holding body 20 can store the adhesive 40 protruding from the recesses 23a and 23b in the grooves 25a and 25b, and can prevent the adhesive 40 from spreading to the accommodating parts 21a and 21b.
- the adhesive region 23 does not need to be formed with a recess, and even in that case, the adhesive 40 can be stored in the grooves 25a and 25b.
- the holding body 20 and the infrared sensor element 10 are bonded at a position away from the optical filters 30a and 30b. can do. Accordingly, the optical filters 30a and 30b can be held via the storage portions 21a and 21b provided on the holding body 20 without attaching an adhesive to the optical filters 30a and 30b themselves.
- the depth d1 of the recesses 23a and 23b from the facing surface 20a is about 0.01 mm to 0.1 mm.
- the depth d2 of the groove portions 25a and 25b from the bonding surface 20a is about 0.1 mm to 0.5 mm deeper than the bottom surfaces of the recesses 23a and 23b (that is, d2 is about d1 + 0.1 mm to 0.5 mm). Is desirable).
- the diameter (width) W1 of the recesses 23a and 23b is preferably about 0.05 mm to 2 mm, for example.
- the width W2 of the grooves 25a and 25b is preferably about 0.15 mm to 0.3 mm. Thereby, it is possible to ensure that the adhesive 40 does not spread over the grooves 25a and 25b while securing the adhesive force between the infrared sensor element 10 and the holding body 20.
- LCP liquid crystal polymer
- PPS polyphenyl sulfide resin
- PEEK polyether ether ketone
- polyimide resin is used in consideration of heat resistance from the viewpoint of reflow resistance at the time of mounting. It is desirable.
- a metal material such as a copper material plated with Ni—Pd—Au plating, silver plating or gold plating, or a stainless steel material.
- the material of the adhesive 40 it is desirable to use, for example, an epoxy resin or a silicone resin in consideration of heat resistance and adhesiveness.
- the embodiment of the present invention has the following effects. (1) When the infrared sensor element 10 and the holding body 20 are bonded, when the adhesive 40 protrudes from the bonding region 23 of the holding body 20 due to the wetting and spreading of the adhesive 40, the protruding adhesive 40 is removed. It can be stored in the grooves 25a and 25b. Therefore, it is possible to suppress the adhesive 40 protruding from the bonding region 23 from reaching the housing portions 21a and 21b. That is, the wetting and spreading of the adhesive 40 can be controlled by the structure of the holding body 20. Thereby, it can prevent that the adhesive agent 40 contacts the optical filters 30a and 30b accommodated in the accommodating portions 21a and 21b, and can prevent the optical filters 30a and 30b from being contaminated by the adhesive agent 40. it can.
- region 23 is each provided with the recessed part 23a, 23b.
- an adhesive agent can be apply
- the recesses 23a and 23b are formed integrally with the grooves 25a and 25b, respectively. Thereby, it becomes easy to keep the wetting and spreading of the adhesive in the grooves 25a and 25b due to the surface tension of the adhesive.
- the groove parts 25a and 25b are arrange
- hole 22a, 22b with a diameter smaller than this accommodating part 21a, 21b is provided in the bottom face of accommodating part 21a, 21b.
- the grooves 25a and 25b are arranged so as to surround the outer circumferences of the recesses 23a and 23b, respectively.
- the arrangement of the groove portions 25a and 25b is not limited to this.
- the groove portions 25a and 25b do not surround the outer periphery of the concave portions 23a and 23b, but are disposed only between the concave portions 23a and 23b and the accommodating portions 21a and 21b. It may be a configured. Even in such a configuration, the adhesive protruding from the recesses 23a and 23b can be stored in the grooves 25a and 25b, so that the optical filters 30a and 30b can be prevented from being contaminated by the adhesive 40.
- the holding body 20 may be provided with the opening part or groove part for air bleeding.
- the holding body 20 may be provided with openings 51 a and 51 b penetrating from the grooves 25 a and 25 b to the outside of the holding body 20 as openings for air bleeding.
- the infrared sensor element 10 is attached to the holding body 20, if air remains inside the infrared sensor 100 (that is, between the opposing surface of the holding body 20 and the infrared sensor element 10), this residual There is a possibility that the air expands due to a temperature rise in a later heating process or the like. For example, when the infrared sensor 100 is mounted on a printed circuit board by a solder reflow method, the residual air may be heated and expand.
- the infrared sensor element 10 includes the plurality of infrared sensor chips 1a and 1b and the plurality of optical filters 30a and 30b has been described.
- the holding body 20 has a plurality of accommodating portions 21a and 21b, a plurality of concave portions 23a and 23b, and a plurality of groove portions 25a and 25b.
- the infrared sensor element 10 may have one infrared sensor chip 1a and one optical filter 30a instead of a plurality.
- the holding body 20 may have one accommodating portion 21a, one concave portion 23a, and one groove portion 25a. . Even with such a configuration, the same effects as the effects (1) to (6) of the above-described embodiment can be obtained.
- the holding body 20 may be provided with an opening for air bleeding or a groove.
- the holding body 20 may be provided with a groove 51 a penetrating from the groove 25 a to the outside of the holding body 20 as a groove for releasing air.
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Abstract
Description
赤外線センサ素子110は、赤外線センサチップ101a、101bと、リードフレーム103と、金ワイヤ105と、モールド樹脂107と、を備える。赤外線センサチップ101a、101bは金ワイヤ105によってリードフレーム103と接続されている。また、赤外線センサチップ101a、101bと、リードフレーム103及び金ワイヤ105は、赤外線センサチップ101a、101bの受光面102a、102bと、リードフレーム103の外部端子となる部位を除いて、モールド樹脂107により封止されている。
赤外線センサ200を製造する工程では、この収容部121a、121bに光学フィルタ130a、130bを搭載すると共に、保持体120の接着剤塗布部123a、123bに接着剤140をそれぞれ塗布する。そして、この保持体120の接着剤塗布部123a、123bを有する側と、赤外線センサ素子110の受光面102a、102bを有する側とを対向させ、この状態で、保持体120に対して赤外線センサ素子110を相対的に押し当てる。これにより、保持体120と赤外線センサ素子110とが接着する。
そこで、この発明は、このような事情に鑑みてなされたものであって、光学フィルタが接着剤で汚染されることを防止できるようにした赤外線センサ及び保持体の提供を目的とする。
なお、本発明の「赤外線センサ素子」は、例えば、後述の赤外線センサ素子10が該当する。「第1の凹部」は、例えば、後述の溝部25a又は溝部25bの少なくとも一方が該当する。
また、上記の赤外線センサにおいて、前記第1の凹部と、前記第2の凹部とが一体的に形成されていることを特徴としてもよい。このような構成であれば、接着剤の表面張力により、接着剤の濡れ広がりを第2の凹部に留めることが容易となる。
また、上記の赤外線センサにおいて、前記光学フィルタ収容部の底面に、該光学フィルタ収容部より径の小さい孔部が設けられていることを特徴としてもよい。このような構成であれば、赤外線センサ素子は、光学フィルタ収容部による光学フィルタを保持する機能を損うことなく、孔部を通して赤外線を受光することができる。
また、上記の保持体において、前記第1の凹部と、前記第2の凹部とが一体的に形成されていることを特徴としてもよい。このような構成であれば、接着剤の表面張力により、接着剤の濡れ広がりを第2の凹部に留めることが容易となる。
また、上記の保持体において、前記第1の凹部は、前記第2の凹部の外周を囲むように配置されていることを特徴としてもよい。このような構成であれば、第2の凹部からはみ出した接着剤が第2の凹部の周囲全体(即ち、四方)へぬれ広がることを抑制することができる。
また、上記の保持体において、前記第1の凹部から該保持体の外部に至る貫通した開口部又は溝部が設けられていることを特徴としてもよい。このような構成であれば、保持体に赤外線センサ素子を取り付けた後で、赤外線センサの内部にエアが残留している場合でも、この残留エアの一部を開口部から逃がすことができる。これにより、残留エアが膨張することにより生じる力、例えば、残留エアが膨張して保持体から赤外線センサ素子を引き離そうとする力を低減することができる。
(実施形態)
図1は、本発明の実施形態に係る赤外線センサ100の構成例を示す断面図である。図1に示すように、この赤外線センサ100は、赤外線センサ素子10と、赤外線センサ素子10の受光面を有する側と向かい合う光学フィルタ30a、30bと、赤外線センサ素子10と光学フィルタ30a、30bとを保持する保持体20と、接着剤40と、を備える。
なお、この実施形態では、赤外線センサチップ1a、1bは、同一種類のチップであってもよいし、寸法、材質又は検出可能な波長範囲などの点から、異種類に分類されるチップであってもよい。
なお、この実施形態において、光学フィルタ30a、30bは同一種類のフィルタであってもよいし、寸法、材質又は透過可能な波長範囲などの点から、異種類に分類されるフィルタであってもよい。例えば、光学フィルタ30aは赤外線のうちの長波長の成分のみを透過させる機能を有し、光学フィルタ30bは赤外線のうちの短波長の成分のみを透過させる機能を有するものであってもよい。次に、保持体20の構成例について説明する。
即ち、この保持体20において、対向面20aから凹部23a、23bの底面までの深さをd1とし、対向面20aから溝部25a、25bの底面までの深さをd2としたとき、d2はd1よりも大きい(d1<d2)。また、溝部25a、25bの平面視による形状は、例えば、それぞれが矩形の枠型となっている。
図3は、保持体20の一部を拡大した図である。また、図4は、接着剤40の塗布工程を示す図である。図5は、赤外線センサ素子10と保持体20との接着工程を示す図である。
次に、保持体20の対向面20aと赤外線センサ素子10の受光面とを対向させる。そして、この状態で図5に示すように、保持体20に対して、赤外線センサ素子10を相対的に押し当てる。これにより、赤外線センサ素子10と保持体20とが接着して、赤外線センサ100が完成する。
本発明の実施形態は、以下の効果を奏する。
(1)赤外線センサ素子10と保持体20とを接着する際に、接着剤40のぬれ広がりにより、接着剤40が保持体20の接着領域23からはみ出した場合に、このはみ出した接着剤40を溝部25a、25bに溜めることができる。従って、接着領域23からはみ出した接着剤40が収容部21a、21bに到達することを抑制することができる。つまり、保持体20の構造により、接着剤40のぬれ広がりを制御することができる。これにより、収容部21a、21bに収容されている光学フィルタ30a、30bに接着剤40が接触することを防ぐことができ、光学フィルタ30a、30bが接着剤40で汚染されることを防ぐことができる。
(3)また、保持体20において、対向面20aから凹部23a、23bの各底面までの深さd1よりも、対向面20aから溝部25a、25bの底面までの深さをd2の方が大きい(d1<d2)。これにより、d1≧d2の場合と比べて、凹部23a、23bからはみ出した接着剤を第1の凹部により多く溜めることができる。
(5)また、溝部25a、25bは、凹部23a、23bの外周を囲むように配置されている。これにより、凹部23a、23bからはみ出した接着剤が、凹部23a、23bの周囲全体(即ち、四方)へぬれ広がることを抑制することができる。
(1)なお、上記の実施形態では、例えば、図2(a)及び(b)等で示したように、溝部25a、25bが凹部23a、23bの外周をそれぞれ囲むように配置されている場合について説明した。しかしながら、本発明において、溝部25a、25bの配置はこれに限定されるものではない。例えば、図6(a)及び(b)に示すように、溝部25a、25bは、凹部23a、23bの外周を囲むのではなく、凹部23a、23bと収容部21a、21bとの間にのみ配置された構成であってもよい。このような構成であっても、凹部23a、23bからはみ出した接着剤を溝部25a、25bで溜めることができるので、光学フィルタ30a、30bが接着剤40で汚染されることを防ぐことができる。
本発明は、以上に記載した実施形態に限定されうるものではない。当業者の知識に基づいて実施形態に設計の変更等を加えることが可能であり、そのような変更等を加えた態様も本発明の範囲に含まれる。
3、103リードフレーム
5、105a、105b、105c、105d 金ワイヤ
7、107 モールド樹脂
10、110 赤外線センサ素子
20、120 保持体
20a 対向面
21a、21b,121a、121b 収容部
22a、22b 孔部
23 接着領域
23a、23b、123a、123b 凹部
25a、25b 溝部
29 隔壁
30a、30b130a、130b 光学フィルタ
40、140 接着剤
51a、51b 開口部(又は、溝部)
90 ディスペンサ
100、200 赤外線センサ
Claims (14)
- 赤外線センサ素子と、
前記赤外線センサ素子の受光面と対向する光学フィルタと、
前記赤外線センサ素子と前記光学フィルタとを保持する保持体とを備え、
前記保持体は、
前記保持体の前記赤外線センサ素子と対向する側の対向面に設けられた光学フィルタ収容部と、
前記保持体の前記対向面に設けられ、前記光学フィルタ収容部から離れた位置に配置された接着領域と、
前記保持体の前記対向面に設けられ、前記接着領域と前記光学フィルタ収容部との間に配置された第1の凹部と、を有することを特徴とする赤外線センサ。 - 前記保持体は、前記接着領域に設けられた第2の凹部を有することを特徴とする請求項1に記載の赤外線センサ。
- 前記対向面から前記第1の凹部の底面までの距離が、前記対向面から前記第2の凹部の底面までの距離より大きいことを特徴とする請求項2に記載の赤外線センサ。
- 前記第1の凹部と、前記第2の凹部とが一体的に形成されていることを特徴とする請求項3に記載の赤外線センサ。
- 前記第1の凹部は、前記第2の凹部の外周を囲むように配置されていることを特徴とする請求項2から請求項4の何れか一項に記載の赤外線センサ。
- 前記光学フィルタ収容部の底面に、該光学フィルタ収容部より径の小さい孔部が設けられていることを特徴とする請求項1から請求項5の何れか一項に記載の赤外線センサ。
- 前記保持体には、前記第1の凹部から該保持体の外部に至る開口部又は溝部が設けられていることを特徴とする請求項1から請求項6の何れか一項に記載の赤外線センサ。
- 赤外線センサ素子と、前記赤外線センサ素子の受光面と対向する光学フィルタと、を保持する保持体であって、
前記保持体の一方の面に設けられた光学フィルタ収容部と、
前記一方の面に設けられ、前記光学フィルタ収容部から離れて配置された第1の凹部とを有することを特徴とする保持体。 - 前記一方の面に設けられた第2の凹部を有し、
前記第1の凹部は、前記第2の凹部と前記光学フィルタ収容部との間に配置されていることを特徴とする請求項8に記載の保持体。 - 前記一方の面から前記第1の凹部の底面までの距離が、前記一方の面から前記第2の凹部の底面までの距離より大きいことを特徴とする請求項9に記載の保持体。
- 前記第1の凹部と、前記第2の凹部とが一体的に形成されていることを特徴とする請求項10に記載の保持体。
- 前記第1の凹部は、前記第2の凹部の外周を囲むように配置されていることを特徴とする請求項9から請求項11の何れか一項に記載の保持体。
- 前記光学フィルタ収容部の底面に、該光学フィルタ収容部より径が小さい孔部が設けられていることを特徴とする請求項8から請求項12の何れか一項に記載の保持体。
- 前記第1の凹部から該保持体の外部に至る貫通した開口部又は溝部が設けられていることを特徴とする請求項8から請求項13の何れか一項に記載の保持体。
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JP2002134763A (ja) * | 2000-10-27 | 2002-05-10 | Kyocera Corp | 半導体受光素子収納用容器 |
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