KR20060053842A - 기판 검사장치 및 기판 검사방법 - Google Patents

기판 검사장치 및 기판 검사방법 Download PDF

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Publication number
KR20060053842A
KR20060053842A KR1020050064414A KR20050064414A KR20060053842A KR 20060053842 A KR20060053842 A KR 20060053842A KR 1020050064414 A KR1020050064414 A KR 1020050064414A KR 20050064414 A KR20050064414 A KR 20050064414A KR 20060053842 A KR20060053842 A KR 20060053842A
Authority
KR
South Korea
Prior art keywords
inspection
substrate
wiring pattern
voltage
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020050064414A
Other languages
English (en)
Korean (ko)
Inventor
마사미 야마모토
Original Assignee
니혼덴산리드가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니혼덴산리드가부시키가이샤 filed Critical 니혼덴산리드가부시키가이샤
Publication of KR20060053842A publication Critical patent/KR20060053842A/ko
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Leads Or Probes (AREA)
KR1020050064414A 2004-07-16 2005-07-15 기판 검사장치 및 기판 검사방법 Withdrawn KR20060053842A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00209583 2004-07-16
JP2004209583A JP2006029997A (ja) 2004-07-16 2004-07-16 基板検査装置及び基板検査方法

Publications (1)

Publication Number Publication Date
KR20060053842A true KR20060053842A (ko) 2006-05-22

Family

ID=35896538

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050064414A Withdrawn KR20060053842A (ko) 2004-07-16 2005-07-15 기판 검사장치 및 기판 검사방법

Country Status (4)

Country Link
JP (1) JP2006029997A (enExample)
KR (1) KR20060053842A (enExample)
CN (1) CN1721868A (enExample)
TW (1) TW200617413A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100868748B1 (ko) * 2007-11-26 2008-11-13 주식회사 오킨스전자 회로기판 검사장치 및 그 검사 방법
KR101021506B1 (ko) * 2007-04-10 2011-03-16 파나소닉 주식회사 반도체 디바이스의 검사 방법 및 반도체 디바이스의 검사장치

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5406480B2 (ja) * 2008-08-08 2014-02-05 東京エレクトロン株式会社 プローブ方法及びプローブ用プログラム
JP5797502B2 (ja) * 2011-09-08 2015-10-21 日本メクトロン株式会社 導通検査装置および導通検査方法
CN102928770B (zh) * 2012-11-15 2015-04-22 昆山迈致治具科技有限公司 Fpc测试治具
JP6339834B2 (ja) * 2014-03-27 2018-06-06 東京エレクトロン株式会社 基板検査装置
CN106324481B (zh) * 2016-08-23 2018-11-27 管仙福 一种用于集成电路的定位检测装置
CN112212782B (zh) * 2019-06-25 2023-01-17 合肥欣奕华智能机器股份有限公司 一种玻璃基板检测方法、装置及系统
US11668601B2 (en) 2020-02-24 2023-06-06 Kla Corporation Instrumented substrate apparatus
CN113030703A (zh) * 2021-03-11 2021-06-25 上海伊诺尔信息电子有限公司 一种双界面智能卡模块开短路的测试装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970461A (en) * 1989-06-26 1990-11-13 Lepage Andrew J Method and apparatus for non-contact opens/shorts testing of electrical circuits
JPH11509321A (ja) * 1996-07-11 1999-08-17 エクスサイト エレクトロ オプティカル システムズ リミテッド 非接触検査のための、レーザ誘導の金属プラズマ
JP3804046B2 (ja) * 2001-02-19 2006-08-02 日本電産リード株式会社 回路基板の検査装置および検査方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101021506B1 (ko) * 2007-04-10 2011-03-16 파나소닉 주식회사 반도체 디바이스의 검사 방법 및 반도체 디바이스의 검사장치
KR100868748B1 (ko) * 2007-11-26 2008-11-13 주식회사 오킨스전자 회로기판 검사장치 및 그 검사 방법

Also Published As

Publication number Publication date
TW200617413A (en) 2006-06-01
CN1721868A (zh) 2006-01-18
JP2006029997A (ja) 2006-02-02

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20050715

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid