TW200617413A - Substrate inspection device and substrate inspecting method - Google Patents

Substrate inspection device and substrate inspecting method

Info

Publication number
TW200617413A
TW200617413A TW094123344A TW94123344A TW200617413A TW 200617413 A TW200617413 A TW 200617413A TW 094123344 A TW094123344 A TW 094123344A TW 94123344 A TW94123344 A TW 94123344A TW 200617413 A TW200617413 A TW 200617413A
Authority
TW
Taiwan
Prior art keywords
substrate
wiring
top surface
ammeter
inspected
Prior art date
Application number
TW094123344A
Other languages
English (en)
Chinese (zh)
Inventor
Masami Yamamoto
Original Assignee
Nidec Read Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Read Corp filed Critical Nidec Read Corp
Publication of TW200617413A publication Critical patent/TW200617413A/zh

Links

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
TW094123344A 2004-07-16 2005-07-11 Substrate inspection device and substrate inspecting method TW200617413A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004209583A JP2006029997A (ja) 2004-07-16 2004-07-16 基板検査装置及び基板検査方法

Publications (1)

Publication Number Publication Date
TW200617413A true TW200617413A (en) 2006-06-01

Family

ID=35896538

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094123344A TW200617413A (en) 2004-07-16 2005-07-11 Substrate inspection device and substrate inspecting method

Country Status (4)

Country Link
JP (1) JP2006029997A (enExample)
KR (1) KR20060053842A (enExample)
CN (1) CN1721868A (enExample)
TW (1) TW200617413A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101021506B1 (ko) * 2007-04-10 2011-03-16 파나소닉 주식회사 반도체 디바이스의 검사 방법 및 반도체 디바이스의 검사장치
KR100868748B1 (ko) * 2007-11-26 2008-11-13 주식회사 오킨스전자 회로기판 검사장치 및 그 검사 방법
JP5406480B2 (ja) * 2008-08-08 2014-02-05 東京エレクトロン株式会社 プローブ方法及びプローブ用プログラム
JP5797502B2 (ja) * 2011-09-08 2015-10-21 日本メクトロン株式会社 導通検査装置および導通検査方法
CN102928770B (zh) * 2012-11-15 2015-04-22 昆山迈致治具科技有限公司 Fpc测试治具
JP6339834B2 (ja) * 2014-03-27 2018-06-06 東京エレクトロン株式会社 基板検査装置
CN106324481B (zh) * 2016-08-23 2018-11-27 管仙福 一种用于集成电路的定位检测装置
CN112212782B (zh) * 2019-06-25 2023-01-17 合肥欣奕华智能机器股份有限公司 一种玻璃基板检测方法、装置及系统
US11668601B2 (en) 2020-02-24 2023-06-06 Kla Corporation Instrumented substrate apparatus
CN113030703A (zh) * 2021-03-11 2021-06-25 上海伊诺尔信息电子有限公司 一种双界面智能卡模块开短路的测试装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970461A (en) * 1989-06-26 1990-11-13 Lepage Andrew J Method and apparatus for non-contact opens/shorts testing of electrical circuits
JPH11509321A (ja) * 1996-07-11 1999-08-17 エクスサイト エレクトロ オプティカル システムズ リミテッド 非接触検査のための、レーザ誘導の金属プラズマ
JP3804046B2 (ja) * 2001-02-19 2006-08-02 日本電産リード株式会社 回路基板の検査装置および検査方法

Also Published As

Publication number Publication date
KR20060053842A (ko) 2006-05-22
CN1721868A (zh) 2006-01-18
JP2006029997A (ja) 2006-02-02

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