KR102096074B1 - 기판 프로세싱 장치 - Google Patents

기판 프로세싱 장치 Download PDF

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Publication number
KR102096074B1
KR102096074B1 KR1020167021551A KR20167021551A KR102096074B1 KR 102096074 B1 KR102096074 B1 KR 102096074B1 KR 1020167021551 A KR1020167021551 A KR 1020167021551A KR 20167021551 A KR20167021551 A KR 20167021551A KR 102096074 B1 KR102096074 B1 KR 102096074B1
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South Korea
Prior art keywords
transfer
arm
substrate
transport
axis
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Korean (ko)
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KR20160098524A (ko
Inventor
알렉산더 크루피세브
율리시스 길크리스트
로버트 티. 카베니
다니엘 뱁스
Original Assignee
브룩스 오토메이션 인코퍼레이티드
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Publication of KR20160098524A publication Critical patent/KR20160098524A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/904—Devices for picking-up and depositing articles or materials provided with rotary movements only
    • H01L21/67161—
    • H01L21/67184—
    • H01L21/67196—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0461—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the presence of two or more transfer chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
KR1020167021551A 2012-02-10 2013-02-11 기판 프로세싱 장치 Active KR102096074B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201261597507P 2012-02-10 2012-02-10
US61/597,507 2012-02-10
US201261660900P 2012-06-18 2012-06-18
US61/660,900 2012-06-18
US201261662690P 2012-06-21 2012-06-21
US61/662,690 2012-06-21
PCT/US2013/025513 WO2013120054A1 (en) 2012-02-10 2013-02-11 Substrate processing apparatus

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020147024510A Division KR102359364B1 (ko) 2012-02-10 2013-02-11 기판 프로세싱 장치

Publications (2)

Publication Number Publication Date
KR20160098524A KR20160098524A (ko) 2016-08-18
KR102096074B1 true KR102096074B1 (ko) 2020-04-01

Family

ID=48948087

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020167021551A Active KR102096074B1 (ko) 2012-02-10 2013-02-11 기판 프로세싱 장치
KR1020237014866A Ceased KR20230067705A (ko) 2012-02-10 2013-02-11 기판 프로세싱 장치
KR1020227003606A Active KR102529273B1 (ko) 2012-02-10 2013-02-11 기판 프로세싱 장치

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020237014866A Ceased KR20230067705A (ko) 2012-02-10 2013-02-11 기판 프로세싱 장치
KR1020227003606A Active KR102529273B1 (ko) 2012-02-10 2013-02-11 기판 프로세싱 장치

Country Status (6)

Country Link
US (4) US12142511B2 (cg-RX-API-DMAC7.html)
JP (5) JP6843493B2 (cg-RX-API-DMAC7.html)
KR (3) KR102096074B1 (cg-RX-API-DMAC7.html)
CN (2) CN104349872B (cg-RX-API-DMAC7.html)
TW (3) TWI725303B (cg-RX-API-DMAC7.html)
WO (1) WO2013120054A1 (cg-RX-API-DMAC7.html)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
KR20220042646A (ko) 2020-09-28 2022-04-05 현대중공업지주 주식회사 기판이송장치

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