JP5647148B2 - 基板を輸送する静電エンドエフェクタ装置、システム、および方法 - Google Patents
基板を輸送する静電エンドエフェクタ装置、システム、および方法 Download PDFInfo
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S414/135—Associated with semiconductor wafer handling
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/30—End effector
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/30—End effector
- Y10S901/40—Vacuum or mangetic
Description
本出願は、2009年1月11日出願の「ELECTROSTATIC END EFFECTOR APPARATUS,SYSTEMS AND METHODS FOR TRANSPORTING SUBSTRATES」という名称の米国仮特許出願第61/143,807号(代理人整理番号第13249/L号)に対する優先権を主張する。同出願を、あらゆる目的で全体として参照により本明細書に組み込む。
Claims (15)
- 電子デバイス製造システム構成要素間で基板を輸送するための基板輸送システムであって、
ロボット構成要素と、
前記ロボット構成要素に結合された静電エンドエフェクタであって、基部と、前記基部上の電極対と、タッチダウン部材と、前記基板と前記電極対の間に間隙を形成するように適合されたスペーサ部材とを含む静電エンドエフェクタを備え、
前記タッチダウン部材は、前記電極対の上部表面によって形成された平面からずれた上部表面を有し、かつ前記スペーサ部材の高さより低い高さであり、
前記電極対による静電荷が、前記電子デバイス製造システム構成要素間での輸送中に、前記基板を前記静電エンドエフェクタの前記基部上に位置決めされた前記スペーサ部材及び前記タッチダウン部材に固定するように適合されている、基板輸送システム。 - 前記スペーサ部材の少なくとも1つに取り付けられた切換可能な接地回路を備える、請求項1に記載の基板輸送システム。
- 電子デバイス製造システム内のシステム構成要素間で基板を輸送するための静電エンドエフェクタ装置であって、
ロボット構成要素に接続されるように適合された基部と、
前記基部上に位置決めされた電極対と、
前記基板と前記電極対の間に間隙を提供するように適合された、前記基部上に位置決めされたスペーサ部材、及び、前記基部及び前記電極対の1つ、又は、両方に設置されたタッチダウン部材と
を備え、
前記タッチダウン部材は、前記電極対の上部表面によって形成された平面からずれた上部表面を有し、かつ前記スペーサ部材の高さより低い高さであり、
前記電極対による静電荷が、前記システム構成要素間での輸送中に、前記基板を前記静電エンドエフェクタの前記基部上に位置決めされた前記スペーサ部材及び前記タッチダウン部材に固定するように適合されている、静電エンドエフェクタ装置。 - 前記スペーサ部材が、前記基部上に取り付けられた少なくとも3つのドーム状パッドを備える、請求項3に記載の静電エンドエフェクタ装置。
- 前記静電エンドエフェクタが少なくとも0.2gの締付け力を生成するように適合されている、請求項3に記載の静電エンドエフェクタ装置。
- 前記電極対が、前記基部上に取り付けられた導電板から構成される、請求項3に記載の静電エンドエフェクタ装置。
- 前記導電板の上部表面上に誘電体層が形成されていない、請求項6に記載の静電エンドエフェクタ装置。
- 前記基部上に取り付けられた導電板から構成される複数の電極対をさらに備える、請求項3に記載の静電エンドエフェクタ装置。
- 前記スペーサ部材の少なくとも1つが導電性である、請求項3に記載の静電エンドエフェクタ装置。
- 導電性の前記スペーサ部材に接続された接地回路の電気的リードをさらに備える、請求項9に記載の静電エンドエフェクタ装置。
- 前記電極対との接触を防ぐため、前記タッチダウン部材は、静電荷の影響を受けて前記基板がゆがむ間、前記基板の曲げ運動を制限する、請求項3に記載の静電エンドエフェクタ装置。
- 前記スペーサ部材が前記基板との3点接触を形成するように適合され、前記基板と前記電極対の間の前記間隙が635ミクロン未満である、請求項3に記載の静電エンドエフェクタ装置。
- 前記電極対の各電極が、254ミクロン未満の厚さを有する薄い導電層から構成される、請求項3に記載の静電エンドエフェクタ装置。
- 電子デバイス製造システムの構成要素間で基板を輸送する方法であって、
エンドエフェクタの導電スペーサ部材上に基板を取り付けるステップと、
前記エンドエフェクタ上に位置決めされた電極対に電圧を印加することによって静電荷を生成して前記基板を前記導電スペーサ部材へ引き付け、それによって前記基板と前記電極対の間に間隙を形成するステップと、
前記基板をゆがめて少なくとも1つのタッチダウンパッドに接触させるのに十分な、電圧を介した引力を印加するステップであって、前記少なくとも1つのタッチダウンパッドは、前記電極対の上部表面によって形成された平面からずれた上部表面を含み、かつ前記導電スペーサ部材の高さより低い高さであるステップと、
前記輸送中に前記静電荷を維持しながら、前記製造システムのシステム構成要素間で前記基板を輸送するステップと
を含む方法。 - 前記静電荷の生成を終わらせるステップと、前記基板から残りの静電荷を中和するため、前記導電スペーサ部材と連通している切換可能な接地回路を閉じるステップをさらに含む、請求項14に記載の方法。
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US14380709P | 2009-01-11 | 2009-01-11 | |
US61/143,807 | 2009-01-11 | ||
PCT/US2010/020496 WO2010080997A1 (en) | 2009-01-11 | 2010-01-08 | Electrostatic end effector apparatus, systems and methods for transporting susbtrates |
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JP5647148B2 true JP5647148B2 (ja) | 2014-12-24 |
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KR (1) | KR101689550B1 (ja) |
CN (1) | CN102349145B (ja) |
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