TWI318195B - System for manufacturing flat-panel display - Google Patents
System for manufacturing flat-panel displayInfo
- Publication number
- TWI318195B TWI318195B TW95118518A TW95118518A TWI318195B TW I318195 B TWI318195 B TW I318195B TW 95118518 A TW95118518 A TW 95118518A TW 95118518 A TW95118518 A TW 95118518A TW I318195 B TWI318195 B TW I318195B
- Authority
- TW
- Taiwan
- Prior art keywords
- panel display
- manufacturing flat
- flat
- manufacturing
- panel
- Prior art date
Links
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050044606A KR100737716B1 (en) | 2005-05-26 | 2005-05-26 | Apparatus for processing substrate with plasma |
KR20050052005 | 2005-06-16 | ||
KR1020050070304A KR100965511B1 (en) | 2005-08-01 | 2005-08-01 | System for transferring the substrate |
KR1020050070302A KR100959680B1 (en) | 2005-08-01 | 2005-08-01 | System for transferring the substrate |
KR1020050070301A KR100934769B1 (en) | 2005-08-01 | 2005-08-01 | Substrate Transfer System |
KR1020050074381A KR100965512B1 (en) | 2005-08-12 | 2005-08-12 | Flat panel display manufacturing machine |
KR1020050074379A KR100959678B1 (en) | 2005-08-12 | 2005-08-12 | Flat panel display manufacturing machine |
KR1020050074380A KR100934761B1 (en) | 2005-08-12 | 2005-08-12 | Flat panel display device manufacturing device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200702264A TW200702264A (en) | 2007-01-16 |
TWI318195B true TWI318195B (en) | 2009-12-11 |
Family
ID=45073464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95118518A TWI318195B (en) | 2005-05-26 | 2006-05-24 | System for manufacturing flat-panel display |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI318195B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI725303B (en) * | 2012-02-10 | 2021-04-21 | 美商布魯克斯自動機械公司 | Substrate processing apparatus |
JP2023103649A (en) * | 2022-01-14 | 2023-07-27 | 株式会社アルバック | Substrate processing device and substrate processing method |
-
2006
- 2006-05-24 TW TW95118518A patent/TWI318195B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200702264A (en) | 2007-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |