TWI318195B - System for manufacturing flat-panel display - Google Patents

System for manufacturing flat-panel display

Info

Publication number
TWI318195B
TWI318195B TW95118518A TW95118518A TWI318195B TW I318195 B TWI318195 B TW I318195B TW 95118518 A TW95118518 A TW 95118518A TW 95118518 A TW95118518 A TW 95118518A TW I318195 B TWI318195 B TW I318195B
Authority
TW
Taiwan
Prior art keywords
panel display
manufacturing flat
flat
manufacturing
panel
Prior art date
Application number
TW95118518A
Other languages
Chinese (zh)
Other versions
TW200702264A (en
Inventor
Young-Jong Lee
Jun-Young Choi
Myung-Woo Han
Yun-Gi Kim
Hyo-Joong Kwon
Saeng Hyun Jo
Eun-Seok Kim
Eun-Youl Choi
Original Assignee
Advanced Display Proc Eng Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020050044606A external-priority patent/KR100737716B1/en
Priority claimed from KR1020050070304A external-priority patent/KR100965511B1/en
Priority claimed from KR1020050070302A external-priority patent/KR100959680B1/en
Priority claimed from KR1020050070301A external-priority patent/KR100934769B1/en
Priority claimed from KR1020050074381A external-priority patent/KR100965512B1/en
Priority claimed from KR1020050074379A external-priority patent/KR100959678B1/en
Priority claimed from KR1020050074380A external-priority patent/KR100934761B1/en
Application filed by Advanced Display Proc Eng Co filed Critical Advanced Display Proc Eng Co
Publication of TW200702264A publication Critical patent/TW200702264A/en
Application granted granted Critical
Publication of TWI318195B publication Critical patent/TWI318195B/en

Links

TW95118518A 2005-05-26 2006-05-24 System for manufacturing flat-panel display TWI318195B (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
KR1020050044606A KR100737716B1 (en) 2005-05-26 2005-05-26 Apparatus for processing substrate with plasma
KR20050052005 2005-06-16
KR1020050070304A KR100965511B1 (en) 2005-08-01 2005-08-01 System for transferring the substrate
KR1020050070302A KR100959680B1 (en) 2005-08-01 2005-08-01 System for transferring the substrate
KR1020050070301A KR100934769B1 (en) 2005-08-01 2005-08-01 Substrate Transfer System
KR1020050074381A KR100965512B1 (en) 2005-08-12 2005-08-12 Flat panel display manufacturing machine
KR1020050074379A KR100959678B1 (en) 2005-08-12 2005-08-12 Flat panel display manufacturing machine
KR1020050074380A KR100934761B1 (en) 2005-08-12 2005-08-12 Flat panel display device manufacturing device

Publications (2)

Publication Number Publication Date
TW200702264A TW200702264A (en) 2007-01-16
TWI318195B true TWI318195B (en) 2009-12-11

Family

ID=45073464

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95118518A TWI318195B (en) 2005-05-26 2006-05-24 System for manufacturing flat-panel display

Country Status (1)

Country Link
TW (1) TWI318195B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI725303B (en) * 2012-02-10 2021-04-21 美商布魯克斯自動機械公司 Substrate processing apparatus
JP2023103649A (en) * 2022-01-14 2023-07-27 株式会社アルバック Substrate processing device and substrate processing method

Also Published As

Publication number Publication date
TW200702264A (en) 2007-01-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees