KR100959678B1 - Flat panel display manufacturing machine - Google Patents

Abstract

The present invention relates to a flat panel display device manufacturing apparatus, and more particularly, when a cluster type manufacturing apparatus is applied to an in-line type system, a flat panel applied to an in-line system having a load lock chamber stacked up and down. A display device manufacturing apparatus.

That is, the present invention is a flat panel display device manufacturing apparatus comprising a load lock chamber, a transfer chamber, and a process chamber to perform a predetermined process on a substrate, wherein the plurality of load lock chambers are stacked and function independently of each other. A stacked load lock chamber, the load line chamber being provided with a conveyor line for carrying in and taking out the substrate, the conveyor line comprising: an import conveyor for continuously supplying a substrate in front of the load lock chamber; A carry-out conveyor receiving a substrate loaded by the carry-in conveyor at the rear of the load lock chamber; A lift conveyor provided at any one position selected from the loading conveyor or the loading conveyor to move the substrate to a position of an upper load lock chamber; It relates to a flat panel display device manufacturing apparatus comprising a.

Flat panel display device manufacturing apparatus, in-line, cluster, upper and lower load lock chamber, import conveyor, export conveyor, lifting conveyor, lifting means

Description

Flat panel display device manufacturing device {FLAT PANEL DISPLAY MANUFACTURING MACHINE}

1 is a schematic view showing a conventional flat panel display device manufacturing apparatus.

2 is a plan view illustrating a state in which a flat panel display device manufacturing apparatus according to an embodiment of the present invention is provided in a cluster type.

3 and 4 are side cross-sectional views and planar cross-sectional views illustrating a vertical load lock chamber and a conveyor line for transferring a substrate to each load lock chamber of a flat panel display device manufacturing apparatus according to an embodiment of the present invention.

5 and 6 are a plan view and a side view showing various embodiments of the stopper provided in the loading and unloading conveyor of the flat panel display device manufacturing apparatus.

7 and 8 are a plan view showing the operating state of the aligner for aligning the substrate in the loading and unloading conveyor.

9 and 10 are plan views showing the operating state of the aligner for aligning the substrate in the lifting conveyor provided in the loading and unloading conveyor.

11A to 11F are process diagrams illustrating a process of loading and unloading a substrate into upper and lower load lock chambers of the flat panel display device manufacturing apparatus.

12 and 13 are side cross-sectional views and planar cross-sectional views illustrating upper and lower load lock chambers and a conveyor line for transferring substrates to respective load lock chambers of a flat panel display device manufacturing apparatus according to another embodiment of the present invention.

14A to 14F are process diagrams illustrating a process of loading and unloading a substrate into upper and lower load lock chambers of the flat panel display device manufacturing apparatus.

<Description of Symbols for Main Parts of Drawings>

122, 124: upper and lower load lock chamber 130: horizontal movement means

132, 142, 162: first, second and third stopper

134: lift pin

140, 150: import and export conveyor 160: lifting conveyor

168: lifting means S, S ₁ , S ₂ , S ₃ , S ₄ , S ₅ : substrate

222, 224: upper and lower load lock chamber 230: horizontal movement means

232, 242, 262: first, second and third stopper

234: lift pin

240, 250: import and export conveyor 260: lifting conveyor

268: lifting means

The present invention relates to a flat panel display device manufacturing apparatus, and more particularly, when a cluster type manufacturing apparatus is applied to an in-line type system, a flat panel applied to an in-line system having a load lock chamber stacked up and down. A display device manufacturing apparatus.

In general, as a device for manufacturing a flat panel display (FPD), as shown in FIG. 1, the load lock chamber 20, the transfer chamber 22, and the process chamber 24 are sequentially connected. The flat panel display device manufacturing apparatuses 10a and 10b are frequently used.

At this time, the load lock chamber 20 is connected to the outside, and serves to bring in a new substrate to be processed from the outside or to take out the substrate is completed in the flat panel display device manufacturing apparatus to the outside.

The inside of the load lock chamber 20 is in contact with the outside while repeatedly maintaining a vacuum state and an atmospheric pressure state. Therefore, a mounting table (not shown) for loading a substrate is provided therein, and one or more substrates (not shown in the drawing) may be stacked thereon.

The load lock chamber 20 is also provided with a pumping device (not shown) and a venting device (not shown) to change the interior of the load lock chamber 20 into a vacuum atmosphere and an atmospheric atmosphere.

In addition, the transfer chamber 22 is connected to the load lock chamber 20 and the process chamber 24, a transfer robot (not shown) is provided therein, the load lock chamber 20 and the process chamber It functions as an intermediate passage through which the substrates are brought in or taken out between the substrates 24, and is always maintained in a vacuum atmosphere so that the substrates inside the process chamber 24 can be loaded even when the substrates in the process chamber 24 are taken out or brought into the process chamber 24. Allow the atmosphere to be maintained in a vacuum.

In addition, the process chamber 24 is provided with a mounting table (not shown in the drawing) capable of mounting a substrate therein and a processing device (not shown in the drawing) capable of performing a predetermined process on the substrate. Etching or the like is performed on the substrate under the following conditions.

The flat panel display device manufacturing apparatuses 10a and 10b described above are provided in a clean room in order to prevent contamination of the substrate to be processed and to increase the precision of the processing on the substrate.

In the clean room, in the flat panel display device manufacturing apparatuses 10a and 10b, several devices are arranged in parallel. In this case, each of the flat panel display device manufacturing apparatuses 10a and 10b is connected to one external substrate supply unit 30 to form a single flat panel display device manufacturing system as a whole.

That is, at least two flat panel display device manufacturing apparatuses 10a and 10b are connected in parallel to form one flat panel display device manufacturing system. All flat panel display device manufacturing apparatuses 10a and 10b provided in one flat panel display device manufacturing system are driven independently.

Therefore, the external substrate supply robot 34 provided in one external substrate supply unit 30 moves along the moving rail 32 and is processed through the load lock chamber 20 of each of the flat panel display device manufacturing apparatuses 10a and 10b. Supplies the necessary substrates, stores the processed substrates, and transports them to the place where the next process is to be made.

In the above-described flat panel display device manufacturing apparatus (10a, 10b), the load lock chamber 20 is continuously pumped in and out of the atmospheric pressure and vacuum atmosphere, so that the pumping for forming the inside of the vacuum Various failures can occur if the device and the venting device to bring it back into the atmosphere are constantly operating.

In addition, as described above, since the substrates are sequentially supplied by the single supply robot 34 to the various flat panel display device manufacturing apparatuses 10a and 10b, there is a problem in that the process completion time is delayed and the substrate transfer is difficult.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and its object is to provide a cluster type flat panel display device manufacturing apparatus, which is performed by a conveyor line in which substrates are supplied in a row in a load lock chamber stacked up and down. However, the present invention provides a flat panel display device manufacturing apparatus which allows the loading and unloading of substrates to be performed in different load lock chambers.

In the flat panel display device manufacturing apparatus comprising a load lock chamber, a transfer chamber, and a process chamber to perform a predetermined process on a substrate in order to achieve the above object, a plurality of load lock chambers are stacked and each independently A stacked load lock chamber functioning, the load line chamber is provided with a conveyor line for loading and unloading the substrate, the conveyor line, the loading conveyor for continuously supplying the substrate in front of the load lock chamber; A carry-out conveyor receiving a substrate loaded by the carry-in conveyor at the rear of the load lock chamber; A lift conveyor provided at any one position selected from the loading conveyor or the loading conveyor to move the substrate to a position of an upper load lock chamber; By including, it is preferable to carry out the substrate in any one of the upper and lower load lock chamber and to carry out the substrate to the other, so that it is easily carried out by a conveyor line when supplying and receiving each of the substrates.

Further, the elevating conveyor in the present invention is provided in the dispensing conveyor to bring the substrate into the lower load lock chamber and to carry the substrate out of the upper load lock chamber, whereby the elevating conveyor is a rear position of the load lock chamber. The substrate provided in the lower load lock chamber is carried out to the upper load lock chamber.

In addition, the lifting conveyor according to the present invention is provided in the loading conveyor to bring a substrate into the upper load lock chamber and to take out the substrate from the lower load lock chamber, whereby the lifting conveyor is a front position of the load lock chamber. The substrate provided in the upper load lock chamber is carried out to the lower load lock chamber.

In addition, the loading conveyor in the present invention is provided with a second stopper provided to limit the position of the starting substrate to be moved up and down at a terminal close to the load lock chamber among the substrates to be loaded, thereby precisely limiting the position of the substrate. Therefore, it is preferable.

The second stopper may further include a second detection part connected to the second stopper and detecting a presence of the substrate from the lower side of the second stopper to output a signal according to the presence or absence of the substrate. The front end of the substrate is preferably detected by the second detection unit, so that the position of the substrate can be recognized more accurately.

In addition, in the present invention, a control unit connected to the second detection unit is further provided, wherein the control unit controls whether the second stopper operates by receiving a signal output from the second detection unit, thereby controlling whether the second stopper operates. It is preferable to control precisely.

Further, in the present invention, since an aligner for aligning the substrate is further provided at the end of the loading conveyor provided on the load lock chamber side, the substrate alignment can be performed on the loading conveyor.

In addition, in the present invention, each is provided so as to be parallel to the frame for fixing both ends of the roller provided in the elevating conveyor, the aligner is further provided to align the substrate brought into or out of the upper load lock chamber by horizontally moving in and outward direction. This is preferable because the substrate alignment is carried out after the unloading in the upper and lower load lock chamber.

Hereinafter, an embodiment of the flat panel display device manufacturing apparatus of the present invention will be described with reference to the accompanying drawings.

A flat panel display device manufacturing apparatus according to an embodiment of the present invention is composed of a load lock chamber 122, 124, the transfer chamber 126 and a plurality of process chambers 128 stacked up and down as shown in FIG. It is made of a cluster type and has a structure in which each is arranged in an in-line form, and the loading and unloading of the substrate S is also performed by an inline conveyor line.

First, the load lock chambers 122 and 124 are provided with a plurality of stacked up and down so that a plurality of substrates can be carried in or out as the vacuum state and the atmospheric pressure are circulated, respectively, and each of the substrates is transferred inside or outside. Function.

Next, the transfer chamber 126 transfers the substrate S from the upper and lower load lock chambers 122 and 124 sequentially while maintaining the inside thereof in a vacuum state, and transfers the substrate S to the adjacent process chamber 128. A robot (not shown) is provided and receives the substrate S from the adjacent process chamber 128 and sequentially delivers the substrate S to the stacked load lock chambers 122 and 124.

Next, the process chamber 128 is connected to the transfer chamber 126 and functions to perform a predetermined process on the substrate S loaded into the vacuum chamber, and at least one is provided.

The flat panel display device manufacturing apparatus 110 has the same structure and function as that of the related art, and thus detailed description thereof will be omitted.

Here, the upper and lower load lock chambers 122 and 124 are provided to be stacked in a plurality of vertical direction as shown in Figures 3 and 4, each of which is provided to be connected to and closed with the transfer chamber 126, this embodiment In Eh, the number is limited to two, and the number may be increased or decreased.

The upper and lower load lock chambers 122 and 124 have lower load lock chambers 124 for carrying in the substrate S, and the upper load lock chambers 122 for carrying out the substrate S.

And a lower load lock chamber having a conveyor line for sequentially loading and discharging the substrate S into the flat panel display device manufacturing apparatus 110 in front and rear of the upper and lower load lock chambers 122 and 124. Substrate entrances and exits, which are passages through which the substrate S moves, are formed on the front wall of the front and rear surfaces of the upper load lock chamber 122, respectively, and gate valves G, which open and close the substrate entrances and exits, are respectively provided at the substrate entrances. It is provided.

Here, the conveyor line is a lifting conveyor 160 interposed with the horizontal movement means 130 and the rollers provided so as to overlap without interfering with the rollers of the carry-in, take-out conveyor 140, 150 and the take-out conveyor 150. Is generically.

And the loading and unloading conveyors 140 and 150 in the longitudinal direction are provided at a position close to the gate valve G provided in front and rear of the lower load lock chamber 124. In addition, horizontal movement means 130, which is a roller conveyor, is provided at the same line and the same height as the loading and unloading conveyors 140 and 150 at the lower side of the lower load lock chamber 124, respectively.

Here, the horizontal movement means 130 provided in the upper load lock chamber 122 and the lower load lock chamber 124 respectively have the same structure and function, so only one of them will be described in detail.

The horizontal moving unit 130 is arranged such that a plurality of rollers are arranged at an appropriate interval between a pair of frames provided in parallel with a roller driving unit (not shown in the drawing) for driving each roller uniformly. Here, the horizontal movement means 130 is provided by a roller drive type to prevent the bottom surface of the substrate (S) is damaged as the contact area with the substrate (S) is small.

In addition, a plurality of lift pins 134 are provided at a lower side of the horizontal moving means 130 in a vertical direction for each of the rollers arranged thereon, and each lift pin 134 is fixed to one plate. In addition, a separate driving means (not shown) is provided to provide a driving force to lift and lift the lift pin 134.

In addition, a first stopper 132 is provided at one side of the horizontal moving means 130, that is, at the end of the direction in which the substrate S proceeds, and the first stopper 132 is positioned at the substrate S. FIG. It functions to limit the

The first stopper 132 is operated by a first detection unit (not shown) as shown in FIGS. 5 and 6, and when the first detection unit detects that the substrate S is present, the output signal is removed. One stopper 132 is transmitted and the first stopper 132 is operated.

Here, the first stopper 132 is a lever type and is positioned in a state parallel to the advancing direction of the substrate S, and then rotates simultaneously in an opposite inner direction when the substrate S enters the substrate S. The position of S) is defined. 5 (a) (b)]

In addition, the first stopper 132 of another embodiment is vertically lifted up to a position higher than the height of the loading and unloading of the substrate S to limit the position of the substrate S. FIG. (See Fig. 6 (a) (b).)

On the other hand, the first stopper 132 is used to select any one of the lever type or lifting type.

Although not shown in the drawing, the first detector detects the presence or absence of the substrate S by using a laser displacement sensor to operate the first stopper 132 when it is detected that the substrate S exists. Function

Here, the first detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and receives the received signal. Output If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that no light is received is output.

On the other hand, the first detection unit is electrically connected to a control unit (not shown in the drawing), if it is determined that the substrate (S) exists according to the presence of the substrate (S) operation of the horizontal moving means 130 and the roller drive unit When the substrate S approaches the first stopper 132 according to the rotation speed control of the roller by controlling the controller, the roller is rotated at a low speed to prevent the substrate S from being damaged by the collision.

3 and 4, the loading conveyor 140 is arranged such that a plurality of rollers have a proper distance between a pair of frames provided to be parallel to each other and have a proper length, and uniformly move each roller at a predetermined position. A roller driving unit (not shown in the figure) for driving in a state is provided.

Here, the carry-in conveyor 140 is provided by a roller drive type to prevent the bottom surface of the substrate (S) is damaged as the contact area with the substrate (S) is small.

In addition, the loading conveyor 140 includes a second stopper 142 for stopping the position of the substrate S, and the second stopper 142 includes the lower load lock chamber 124 of the substrate S to be loaded. The end both sides of the frame adjacent to the function to stop the front substrate (S) to be elevated.

As shown in FIGS. 5 and 6, the third stopper 142 is operated by a second detection unit (not shown), and when the second detection unit detects that the substrate S is present, the output signal is output. The second stopper 142 is operated by transmitting to the second stopper 142, respectively.

Here, the second stopper 142 is positioned in a state parallel to the advancing direction of the substrate S in a lever manner, and then rotates simultaneously in an opposite inner direction when the substrate S enters, thereby adjusting the position of the substrate S. FIG. It is limited. 5 (a) (b)]

The second stopper 142 of another embodiment is vertically lifted to a position higher than the height of the loading and unloading of the substrate S, thereby positioning and stopping the front end of the substrate S. On the other hand, the second stopper 142 is used to select any one of the lever type or lifting type. (See Fig. 6 (a) (b).)

Although not shown in the drawing, the second detector detects the presence or absence of the substrate S at the lower portion of the substrate S by a laser displacement sensor and outputs a signal according to the presence or absence of the substrate S. When it is detected that the substrate S is present, the second stopper 142 operates.

Here, the second detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and the light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and receives the received signal. Output If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that no light is received is output.

On the other hand, the second detection unit is electrically connected to the control unit, and if it is detected that the substrate (S) is present in accordance with the presence of the substrate (S), the operation of the loading conveyor 140 and the roller drive unit by controlling the roller When the substrate S approaches the second stopper 142 according to the rotation speed control, the roller is rotated at a low speed to prevent damage by the collision.

That is, when the substrate S is detected by the second detector, the controller controls the second stopper 142 to stop the substrate S based on the output signal of the second detector.

And an rear end of the loading conveyor 140 is provided with an aligner (Alligner) for aligning the substrate (S) carried into the lower load lock chamber 124, the aligner is shown in Figures 7 and 8 A plurality of arrays are installed in the frames provided at both ends of the rollers so as to have appropriate intervals, and are uniformly driven, but are coupled to the rotating members 144 and the front ends of the rotating members 144 rotating inward in a state parallel to the frame. It consists of a flexible contact member 146 to press both sides of the substrate (S).

That is, a plurality of rotating members 144 fixed to the contact member 146 are provided at both ends of the frame and rotated in a uniform direction of the substrate S by a driving means (not shown). The circumferential surface of) is pressed to align both sides of the twisted substrate (S) in contact.

3 and 4, the unloading conveyor 150 is arranged such that a plurality of rollers have a proper distance between a pair of frames provided to be parallel to each other and have a proper length and uniformly move each roller at a predetermined position. It is provided with a roller drive unit for driving.

Here, the transport conveyor 150 is provided in a roller-driven manner to prevent the bottom surface of the substrate S from being damaged as the contact area with the substrate S is small.

A lifting conveyor 160 is provided at the front end of the carrying conveyor 150 to raise or lower the position of the substrate S to the upper and lower load lock chambers 122 and 124.

The elevating conveyor 160 has a roller drive unit for arranging a plurality of rollers to have a proper distance between a pair of frames provided to be parallel with a proper length and uniformly driving each roller at a predetermined position.

And the lifting conveyor 160 is provided by a roller drive type to prevent the bottom surface of the substrate (S) is damaged as the contact area with the substrate (S) is small.

The elevating conveyor 160 lowers the substrate S carried out through the upper load lock chamber 122 from the tip of the carrying conveyor 150 to the height of the carrying conveyor 150. It is provided at the same height as the conveyor 150, the rollers of the elevating conveyor 160 is interposed so as not to interfere with each other on the roller provided in the transport conveyor 150.

In addition, a third stopper 162 is provided at the rear end of both frames of the elevating conveyor 160 to limit the moving position of the substrate S.

The third stopper 162 is operated by a third detector (not shown) as shown in FIGS. 5 and 6, and when the third detector detects that the substrate S is present, the output signal is removed. It transmits to 3 stopper 162, and the said 3rd stopper 162 is operated by the transmitted signal.

Here, the third stopper 162 is a lever type, and is positioned in a state parallel to the advancing direction of the substrate S, and then rotates simultaneously in the opposite inward direction when entering the substrate S to stop the substrate S. Let's do it. 5 (a) (b)]

The fourth stopper 162 of another embodiment is vertically lifted up to a position higher than the height of the loading and unloading of the substrate S to stop the substrate S. FIG. (See Fig. 6 (a) (b).)

On the other hand, the third stopper 162 selects and uses either a lever type or a lift type.

Although not shown in the drawing, the third detector detects the presence or absence of the substrate S by using a laser displacement sensor and outputs the result as a signal.

Here, the third detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and the light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and receives the received signal. Output If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that no light is received is output.

On the other hand, when the third detection unit is electrically connected to the control unit is detected that the substrate (S) is present in accordance with the presence of the substrate (S) whether or not the operation of the third stopper 162 and the upper load lock chamber 122 It controls the lifting means 168 for elevating the lifting elevator 160 of the furnace in the vertical direction.

And elevating means 168 is provided for each of the center of the bottom surface of the both sides of the elevating conveyor 160.

That is, the function of lifting and lowering by the lifting means 168 to move the substrate (S) to the same height as the horizontal moving means 130 provided in the upper load lock chamber 122. The elevating means 168 is controlled by the controller by detection signals by the third stopper 162 and the third detector.

Here, the elevating means 168 is provided with any one of a drive motor and a screw (Screw) for converting a pneumatic cylinder or a rotational movement in a linear reciprocating motion to a linear reciprocating motion, is provided in each of the bottom center of the frame.

And the lifting conveyor 160 is further provided with an aligner for aligning the substrate (S) taken out of the upper load lock chamber 122 as shown in Figure 9 and 10, the aligner is the lifting conveyor 160 The rollers of) are provided to be parallel to the frame fixed at both ends thereof, and are horizontally moved in and outward so as to contact and contact the substrate S, and at the same time, the substrate S is aligned.

That is, the aligner is composed of a guide part 164 and a driving part 166, the guide part 164 is provided on both sides in parallel with the frame of the elevating conveyor 160 and the substrate (S) alignment It is formed in a plate-like shape moving in the longitudinal direction and extending in the longitudinal direction in contact with both side surfaces of the substrate (S).

In this case, the guide part 164 serves to guide the entering of the substrate S so as not to be misaligned. In particular, the guide part 164 may impart a softness to a portion in contact with the substrate S, and the substrate S enters. Opposite sides of the inlet portion are formed to be inclined by an appropriate length or a curved surface is formed to prevent breakage when colliding with the substrate (S).

The drive unit 166 is fixed to at least one point of the outer wall of the guide unit 164 by a pneumatic cylinder to drive the guide unit 164 in the inner and outer direction and is fixed to the frame.

Therefore, in the substrate loading and unloading process of the flat panel display device manufacturing apparatus of the present embodiment, first, the substrate S ₁ and the substrate S ₂ are sequentially transferred by the rollers of the loading conveyor 140, as shown in FIG. 11A. Of the substrate S ₁ is aligned by the aligner provided at the rear end of the loading conveyor 140, and then moves therein along the horizontal moving means 130 of the lower load lock chamber 124. .

Here, the substrate S ₂ detects the second detection unit provided under the rear end of the loading conveyor 140, and transmits an output signal to the second stopper 142, and the second stopper 142 outputs the output signal. By operating the loading conveyor 140 is stopped.

The substrate S ₂ moved is aligned after being aligned by an aligner provided at the rear end of the loading conveyor 140 and waits.

The first detector detects the substrate S ₁ , which is moved into the lower load lock chamber 124 by the horizontal moving unit 130, and transmits an output signal to the first stopper 132. As the first stopper 132 is operated by the output signal of the first detector, the horizontal movement means 130 is stopped, and the substrate S ₁ is also stopped. And the inside of the lower load lock chamber 124 is sealed.

Next, referring to FIG. 11B, the loaded substrate S ₁ is moved into the process chamber by a transfer robot (not shown) provided in the transfer chamber 126 to process the plasma.

In this case, the lower load lock chamber 124 is switched from the vacuum state to the atmospheric pressure state.

In addition, the substrate S ₂ waiting at the rear end of the loading conveyor 140 is loaded into the lower load lock chamber 124.

The first detector detects the substrate S ₂ , which is moved by the roller driving unit of the horizontal moving unit 130, and transmits an output signal to the first stopper 132 and the first stopper ( 132 operates by the output signal to stop the horizontal moving means (130).

Next, referring to FIG. 11C, the processed substrate S ₁ is carried into the upper load lock chamber 122 by a transfer robot (not shown) provided in the transfer chamber 126.

The substrate S ₁ is moved by the horizontal moving means 130 provided in the upper load lock chamber 122, and then the interior of the upper load lock chamber 122 is converted from a vacuum state into an atmospheric pressure state. .

Next, referring to FIG. 11D, the substrate S ₂ provided in the lower load lock chamber 124 is moved into the process chamber by a transfer robot provided in the transfer chamber 126 to form a plasma. Process.

Then, the inside of the lower load lock chamber 124 is switched from the vacuum state to the atmospheric pressure state.

Next, referring to FIG. 11E, the processed substrate S ₁ is carried out from the upper load lock chamber 122.

At this time, since the lifting conveyor 160 provided in the carrying conveyor 150 is first lifted by the driving of the lifting means 168, the substrate S ₁ is lifted by the driving of the horizontal moving means 130. Go to 160.

And the substrate (S ₁ ) located in the lifting conveyor 160 is aligned by the aligner.

And the inside of the upper load lock chamber 122 is converted to a vacuum state at atmospheric pressure.

Substrate S ₃ , which is waiting at the rear end of the loading conveyor 140, is loaded into the lower load lock chamber 124, and the substrate S ₄ positioned at the rear is provided below the rear end of the loading conveyor 140. The second detection unit detects this and transmits the detected output signal to the second stopper 142. The second stopper 142 is operated by the output signal to stop the loading conveyor 140.

And the substrate (S ₄ ) moved is aligned after waiting by the aligner provided at the rear end of the loading conveyor 140.

Next, referring to FIG. 11F, the substrate S ₁ positioned on the elevating conveyor 160 has its elevating conveyor 160 lowered by the elevating means 168 to the same height as the unloading conveyor 150. After being positioned, the substrate S ₁ is moved in the movement direction of the unloading conveyor 150.

Thereafter, the remaining substrates S _2, S _{3 ,} S _{4 , and} S ₅ ) are also moved after the process treatment.

The flat panel display device manufacturing apparatus according to another embodiment of the present invention has the same structure and function as that of the previous embodiment, and thus a detailed description thereof will be omitted.

12 and 13, the upper and lower load lock chambers 222 and 224 are provided so as to be stacked in a plurality of vertical directions, each of which is connected and closed with the transfer chamber 226. Limited to dogs and the number can be increased or decreased.

The upper and lower load lock chambers 222 and 224 have upper load lock chambers 222 for carrying in the substrate S, and the lower load lock chambers 224 for carrying out the substrate S.

In addition, front and rear of the upper and lower load lock chambers 222 and 224 are provided with a conveyor line for sequentially loading and discharging the substrate S into the flat panel display device manufacturing apparatus, and the upper load lock chamber 222 having the conveyor line. Substrate entrances and exits, which are passages through which the substrate S moves, are respectively formed on the front and rear surfaces of the lower load lock chamber 224, respectively, and gate valves G are provided at the substrate entrances to open and close the substrate entrances. .

Here, the conveyor line is a generic term for the lifting conveyor 260, the roller is interposed so that the horizontal moving means 230 and the carry-in, take-out conveyors 240, 250 and the rollers of the carry-in conveyor 240 overlap without interfering with the rollers. do.

In addition, the loading and unloading conveyors 240 and 250 in the longitudinal direction are provided at positions close to the gate valve G provided in front and rear of the lower load lock chamber 224. In addition, horizontal movement means 230, which is a roller conveyor, is provided at the same line and the same height as the loading and unloading conveyors 240 and 250 in the lower side of the lower load lock chamber 224, respectively.

Here, the upper load lock chamber 222 and the lower load lock chamber 224 is formed only in the installation direction of the gate valve (G) provided in the substrate entrance and exit in the previous embodiment and the horizontal movement means provided therein ( 230 has the same structure and function as those of the foregoing embodiment, and thus detailed description thereof will be omitted.

On the other hand, reference numeral 232, which has not been described, is the first stopper, and 234 is the lift pin.

The loading conveyor 240 is a roller driving unit (not shown in the drawing) is arranged so that a plurality of rollers are arranged at an appropriate interval between a pair of frames provided to be parallel to have a proper length and uniformly at a predetermined position ) Is provided.

Here, the loading conveyor 240 is provided by a roller drive type to prevent the bottom surface of the substrate (S) is damaged as the contact area with the substrate (S) is small.

And the loading conveyor 240 is provided with a second stopper 242 for stopping the position of the substrate (S), the second stopper 242 at the end of the substrate (S) close to the lower load lock chamber 124 It is provided at a position spaced rearward as half the length of.

The second stopper 242 signals that the front substrate S exists according to the presence or absence of the front substrate S in the rear position by the length of the substrate S positioned in front of the second stopper 242. If the output is to stop the substrate (S) provided in the rear to serve to function.

Here, since the second stopper 242 is formed in the same structure as the stopper of the previous embodiment, a detailed description thereof will be omitted.

The second stopper 242 is operated by a second detector (not shown), and when the second detector detects the presence of the substrate S, the second stopper 242 transmits an output signal to the second stopper 242, respectively. To operate the second stopper 242.

Although not shown in the drawing, the second detector detects the presence or absence of the substrate S at the lower portion of the substrate S by a laser displacement sensor and outputs a signal according to the presence or absence of the substrate S. When it is detected that the substrate S exists, the second stopper 242 operates.

Here, the second detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and the light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and receives the received signal. Output If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that no light is received is output.

On the other hand, the second detection unit is electrically connected to the control unit, and if it is detected that the substrate (S) is present in accordance with the presence of the substrate (S), the operation of the loading conveyor 240 and the roller drive unit is controlled by the control unit roller When the substrate S approaches the second stopper 242 according to the rotation speed control of the roller, the roller is rotated at a low speed to prevent damage by the collision.

That is, when the substrate S is detected by the second detector, the controller controls the second stopper 242 to stop the substrate S based on the output signal of the second detector.

The carrying-out conveyor 250 has a roller driving unit for arranging a plurality of rollers having a proper distance between a pair of frames provided to be parallel with a proper length and driving each roller uniformly at a predetermined position.

Here, the carrying-out conveyor 250 is provided in a roller-drive type to prevent the bottom surface of the substrate S from being damaged as the contact area with the substrate S is small.

Unlike the loading conveyor 240, the aligner is not provided at the front end of the loading conveyor 250.

The rear end of the loading conveyor 240 is provided with a lifting conveyor 260 to move the position of the substrate (S) to the position of the upper load lock chamber 222.

The elevating conveyor 260 is arranged so that a plurality of rollers have an appropriate interval between a pair of frames provided to be parallel with a proper length and is provided with a roller driving unit for driving each roller uniformly at a predetermined position.

In addition, the elevating conveyor 260 is provided in a roller-drive type to prevent the bottom surface of the substrate S from being damaged as the contact area with the substrate S is small.

The elevating conveyor 260 is provided at the rear end of the carrying conveyor 240 to elevate and move the substrate S positioned in the carrying conveyor 240 to the upper load lock chamber 122. Initially provided at the same height as the loading conveyor 240, the rollers of the lifting conveyor 260 is interposed on the rollers provided in the loading conveyor 240 so as not to interfere with each other.

In addition, a third stopper 262 is provided at both rear ends of the elevating conveyor 160 to limit the moving position of the substrate S.

The third stopper 262 is operated by a third detection unit (not shown), and when the third detection unit detects that the substrate S is present, transmits the output signal to the third stopper 262 and transmits the output signal. The third stopper 262 is operated by the signal.

Here, since the structure and function of the third stopper 262 is the same as the second stopper 242, a detailed description thereof will be omitted.

Although not shown in the drawing, the third detector detects the presence or absence of the substrate S by using a laser displacement sensor and outputs the result as a signal, and has the same structure and function as the second detector. The detailed description is omitted.

On the other hand, if the third detection unit is controlled by the control unit and electrically connected to detect the presence of the substrate (S) in accordance with the presence of the substrate (S), the operation of the third stopper 262 and the upper load lock chamber The lifting means 268 which raises and lowers the lifting conveyor 260 to 222 is controlled.

And elevating means 268 is provided for each of the center of the bottom surface of the both sides of the elevating conveyor 260.

That is, the function of lifting and lowering by the lifting means 268 to move the substrate (S) to the same height as the horizontal moving means 230 provided in the upper load lock chamber 222. The elevating means 268 is controlled by the controller by detection signals by the third stopper 262 and the third detector.

In addition, since the elevating means 268 has the same structure and function as that of the previous embodiment, a detailed description thereof will be omitted.

In addition, the elevating conveyor 260 is further provided with an aligner for aligning the substrate (S) before being loaded into the upper load lock chamber 222, the aligner is the same structure as that provided in the elevating conveyor in the previous embodiment Functions with and will not be described in detail.

Therefore, in the substrate loading and unloading process of the flat panel display device manufacturing apparatus of the present embodiment, first, the substrate S ₁ and the substrate S ₂ are sequentially transferred by the rollers of the loading conveyor 240, as shown in FIG. When the substrate S ₁ detects this and outputs a signal to the controller, the controller operates the third stopper 262 according to the output signal. Stop (S ₁ ).

In addition, the substrate S ₂ detects the second detection unit provided below the rear end spaced from the rear end of the loading conveyor 240 and outputs an output signal to the controller. The controller stops the second stopper 242 according to the output signal. By operating) the loading conveyor 240 is stopped, the substrate (S ₂ ) is also stopped and the standby state.

Next, referring to FIG. 14B, the substrate S ₁ arranged on the elevating conveyor 260 may load the substrate S ₁ by an elevating means 268 that elevates the elevating conveyor 260. Raise to lock chamber 222 height.

Then, the substrate S ₁ seated on the lift conveyor 260 is aligned by an aligner provided on the lift conveyor 260.

At this time, the substrate S ₂ stopped by the second stopper 242 maintains the standby state.

Next, referring to FIG. 14C, the substrate S ₁ positioned on the elevating conveyor 260 is loaded into the upper load lock chamber 222 by driving the roller driving unit of the elevating conveyor 260. The lifting conveyor 260 is lowered by the lifting means 268.

Next, referring to FIG. 14D, the lifting conveyor 260 is lowered to the same height as the loading conveyor 240, and then the substrate S ₁ loaded into the upper load lock chamber 222 is a transfer chamber ( 226 is moved into the process chamber by a transport robot (not shown in the figure) provided in the interior and is processed.

Then, the substrate S ₂ waiting to be loaded is moved in the direction of the lifting conveyor 260 by driving the roller driving unit of the loading conveyor 240. When the third detection unit detects this and outputs a signal to the controller, the controller outputs the signal. In response to the signal, the third stopper 262 is operated to stop the substrate S ₂ .

The substrate S ₂ arranged on the lifting conveyor 260 raises the substrate S ₁ to the height of the upper load lock chamber 222 by the lifting means 268 for elevating the lifting conveyor 260. do.

In addition, the substrate S ₃ detects the second detection unit provided below the rear end spaced from the rear end of the loading conveyor 240, and outputs an output signal to the controller. The controller stops the second stopper 242 according to the output signal. By operating) the loading conveyor 240 is stopped, the substrate (S ₃ ) is also stopped and the standby state.

Next, referring to FIG. 14E, the substrate S ₂ is loaded into the upper load lock chamber 222 by driving the roller driver of the lifting conveyor 260.

In addition, the processed substrate S ₁ is loaded into the lower load lock chamber 224 by a transport robot (not shown) provided in the transport chamber 226.

Next, referring to FIG. 14F, the processed substrate S ₁ is carried out to the transport conveyor 250 by driving the roller driver of the horizontal moving unit 230 provided in the lower load lock chamber 224.

Then, the substrate S ₃ is stopped by the third stopper 262 on the lift conveyor 260 by driving the roller drive unit of the loading conveyor 240 to the lowered lift conveyor 260.

Thereafter, the substrate S ₄ to be processed is maintained in the standby state by the second stopper 242.

Thereafter, the remaining substrates S _{2 ,} S _{3 ,} S _{4 , and} S ₅ are also moved after the process in the same manner as described above.

Such a flat panel display device manufacturing apparatus of the present invention is provided with a load lock chamber stacked up and down, but the substrate supply is also carried out in an in-line form while taking the cluster-type manufacturing device in an in-line form, each of the manufacturing apparatus as a lower load lock chamber The loading and unloading conveyors, which allow the substrate to be loaded and taken out into the upper load lock chamber, have an elevating conveyor on the unloading conveyor, thereby shortening the process time and reducing the charge space.

Claims (36)

In a flat panel display device manufacturing apparatus comprising a load lock chamber, a transfer chamber, and a process chamber to perform a predetermined process on a substrate, The load lock chamber is a stacked load lock chamber in which a plurality of two are stacked and function independently of each other, Conveyor lines are provided for loading and unloading the substrate into the load lock chamber, The conveyor line, An import conveyor for continuously supplying a substrate in front of the load lock chamber; A carry-out conveyor receiving a substrate loaded by the carry-in conveyor at the rear of the load lock chamber; And a lifting conveyor provided at any one position selected from the loading conveyor or the loading conveyor to move the substrate to a position of an upper load lock chamber. And each conveyor is a roller type in which a plurality of conveyors are arranged at appropriate intervals, and a roller driving unit for driving a plurality of rollers uniformly is provided. The method of claim 1, wherein the lifting conveyor, The flat display device manufacturing apparatus, characterized in that provided in the carrying conveyor to load the substrate into the lower load lock chamber, and to take out the substrate from the upper load lock chamber. The method of claim 1, wherein the lifting conveyor, The flat panel display device manufacturing apparatus, characterized in that provided in the loading conveyor to bring the substrate into the upper load lock chamber, and to take out the substrate from the lower load lock chamber. The carry-on conveyor of claim 1, wherein And a second stopper provided at a distal end of the load lock chamber to limit a position of the selection substrate to be loaded. The carry-on conveyor of claim 1, wherein And a second stopper provided at a position spaced forward by the length of the substrate at an end adjacent to the load lock chamber to limit a standby position of the substrate. delete The method of claim 4 or 5, wherein the second stopper, And a lift type stopper which vertically rises to a position higher than the height of the substrate to stop the substrate. The method of claim 4 or 5, wherein the second stopper, And a lever type stopper which is positioned in a state parallel to the advancing direction of the substrate and rotates in an opposite inward direction when entering the substrate to stop the substrate. The second stopper according to claim 4 or 5, And a second detector connected to the second stopper and configured to detect a presence of the substrate at the lower side of the second stopper and output a signal according to the presence or absence of the substrate. The method of claim 9, wherein the second detection unit, The light emitting unit and the light receiving unit is integrally formed, but the light is emitted from the light emitting unit is a laser displacement sensor that is refracted at the same time and the light is received at the light receiving unit and outputs a signal. The method of claim 10, The control unit is further provided to be connected to the second detection unit, the control unit, And controlling the operation of the second stopper by receiving the signal output from the second detection unit. The method of claim 1, Flat panel display device manufacturing apparatus characterized in that it further comprises an aligner (Alligner) for aligning the substrate at the end of the loading conveyor provided on the load lock chamber side. The method of claim 12, wherein the aligner, Arranged to be arranged at an appropriate interval on each of the frames provided on both ends of the roller are driven uniformly, and the rotation member is rotated inwardly in a state parallel to the frame, and coupled to the front end of the rotation member in contact with both sides of the substrate Flat panel display device manufacturing apparatus characterized in that consisting of a contact member. delete The method of claim 1, wherein the lifting conveyor, And a roller of the elevating conveyor interposed so as not to interfere with the rollers of the unloading conveyor. The method of claim 15, wherein the lifting conveyor, Among the substrates to be carried out, the substrate is provided at a position spaced rearward from the end adjacent to the load lock chamber by a length of the substrate, and when the selection substrate exists according to the presence of the selection substrate, a third stopper is provided to limit the movement of the late substrate. Flat panel display device manufacturing apparatus characterized in that. The method of claim 16, wherein the third stopper, And a substrate movement is stopped by a lifting type that vertically rises to a position higher than the height of the substrate. The method of claim 16, wherein the third stopper, And a substrate positioned in a state parallel to the advancing direction of the substrate to stop the movement of the substrate by a lever type that rotates in an opposite inward direction when the substrate enters the substrate. The third stopper according to claim 17 or 18, And a third detector connected to the third stopper and configured to detect a presence of the substrate at the lower side of the third stopper and output a signal according to the presence or absence of the substrate. The method of claim 19, wherein the third detection unit, The light emitting unit and the light receiving unit is integrally formed, but the light is emitted from the light emitting unit is a laser displacement sensor that is refracted at the same time and the light is received at the light receiving unit and outputs a signal. The method of claim 20, The control unit is further provided to be electrically connected to the third detection unit, the control unit, And receiving a signal output from the third detection unit to control whether the third stopper is operated and whether the substrate is lifted to the upper load lock chamber. According to claim 1, The lifting conveyor, Flat panel display device manufacturing apparatus characterized in that the lifting means are provided in each of the central portion of the frame for fixing the roller provided on both sides to raise and lower the lifting conveyor to an appropriate height. The method of claim 22, wherein the lifting means, Flat panel display device manufacturing apparatus characterized in that the linear reciprocating cylinder. The method of claim 22, wherein the lifting means, Flat panel display device manufacturing apparatus characterized in that the drive motor and screw to convert the rotational movement to a linear reciprocating motion. 23. The method of claim 22, It is provided so as to be parallel to the frame for fixing both ends of the roller provided in the elevating conveyor, it is further provided with an aligner for aligning the substrate brought into or out of the upper load lock chamber by moving horizontally in and outward direction. Flat panel display device manufacturing apparatus. The method of claim 25, wherein the aligner, A guide part provided at both sides in parallel with the frame and moved inward when the substrate is aligned to be in contact with both sides of the substrate, and coupled to at least one point of the outer wall of the guide part to drive the guide part inward and outward Flat panel display device manufacturing apparatus characterized in that made. The method of claim 1, Substrate entrances and exits are formed on mutually opposite sidewalls of the upper and lower load lock chambers, respectively, and a gate valve is provided to open and close the substrate entrance and exit. The method of claim 27, wherein the load lock chamber, A horizontal moving means interposed between the carrying-in conveyor and the carrying-out conveyor in the upper and lower sides of the substrate to move the substrate to receive the substrate before the process or to transfer the substrate to the outside after the process. Display device manufacturing device. The method of claim 28, wherein the horizontal movement means, Flat panel display device manufacturing apparatus characterized in that the roller conveyor. The method of claim 29, wherein the horizontal movement means, A plurality of flat panel display device manufacturing apparatus is provided with a plurality between each of the roller is arranged, the lift pin (Lift pin) is further provided in the load lock chamber to raise and lower the substrate to the appropriate height when the loading or unloading of the substrate. The method of claim 30, And a first stopper for limiting the position of the substrate at an end of the horizontal moving means in which the substrate enters. The method of claim 31, wherein the first stopper, And a lift type stopper which vertically rises to a position higher than the height of the substrate to stop the substrate. The method of claim 31, wherein the first stopper, And a lever type stopper which is positioned in a state parallel to the advancing direction of the substrate and rotates in an opposite inward direction when entering the substrate to stop the substrate. The first stopper according to claim 32 or 33, And a first detector connected to the first stopper and configured to detect a presence of the substrate at a lower side of the first stopper and output a signal according to the presence or absence of the substrate. The method of claim 34, wherein the first detection unit, The light emitting unit and the light receiving unit is integrally formed, but the light is emitted from the light emitting unit is a laser displacement sensor that is refracted at the same time and the light is received at the light receiving unit and outputs a signal. 36. The method of claim 35, And a control unit connected to the first detection unit to control the operation of the first stopper by receiving a signal output from the first detection unit.

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