KR101329481B1 - Apparatus for loading and unloading glass substrate - Google Patents

Abstract

The present invention is provided with a chamber body for opening and closing the entrance and exit of the glass substrate, the chamber body is formed so that the opening for the entrance and exit of the process chamber on the side to which the process chamber is connected; A conveyor transfer unit installed inside the chamber body and receiving a glass substrate from an external substrate transfer table through an entrance and / or loading the inside of the chamber body or unloading the substrate transfer unit; And a substrate lift / transporter for loading and unloading a glass substrate into the process chamber by raising and lowering the fork through the conveyor, as well as raising and lowering the fork through the opening.
According to the present invention, it is possible to stably load and unload a large-area glass substrate in a process chamber, and to increase the reliability of vacuum interruption, thereby increasing the productivity and yield of the manufacturing process for the glass substrate. To help.

Description

Glass substrate loading / unloading device {APPARATUS FOR LOADING AND UNLOADING GLASS SUBSTRATE}

The present invention relates to a glass substrate loading / unloading apparatus, and more particularly, to a glass substrate loading configured to enable stable loading and unloading of a large-area glass substrate in a process chamber, and to increase reliability for vacuum interruption. / Unloading device.

In general, in order to manufacture a flat panel display panel or the like, various unit processes for pattern formation on a glass substrate are performed, for example, etching, cleaning, and drying processes. Most of such unit processes are performed in a plurality of processing units, for example, a process chamber, for carrying out the process, and a transfer device such as a conveyor is installed to transfer the glass substrate to the process chamber.

Meanwhile, glass substrates used in the manufacture of solar cells, vacuum glasses, etc. as well as flat panel displays such as LCDs and OLEDs are becoming larger and larger, so that various vacuum robots and glasses can be processed in order to proceed with optimized manufacturing processes. A substrate transfer device, a vacuum logistics system, and the like are required.

As shown in FIG. 1, the transfer apparatus of the glass substrate according to the related art includes a transfer chamber 11 for introducing the glass substrate into the process chamber 21, and a load lock chamber using the glass substrate in a vacuum state at atmospheric pressure. (12), the atmospheric pressure robot 13 which injects a glass substrate into the load lock chamber 12 in front of the load lock chamber 12, the conveyor roller 14 which conveys a glass substrate to the atmospheric robot 13, etc. The process can be carried out by.

However, the glass substrate transfer apparatus according to the prior art is not only complicated in structure, but also has a large number of transfer chambers 11, a load lock chamber 12, an atmospheric robot 13, a conveyor roller 14, and the like. As the unit is made up of not only increases the area required for installation, but also requires a lot of cost and effort for manufacturing, and had a problem in that there are limitations in installing various process lines.

In addition, such a conventional transfer technique is difficult to perform a process for manufacturing a large-area glass substrate, the need to solve the problem of difficulty in blocking the vacuum and stable transfer required for the process due to the large-area glass substrate Had

In order to solve the conventional problems as described above, the present invention allows the large-sized glass substrates to be loaded and unloaded in the process chamber stably, and to increase the reliability of the vacuum interruption, thereby making a manufacturing process for the glass substrates. The purpose is to bring increased productivity and yield.

In addition, the present invention, in order to put the glass substrate in the process chamber, to combine the functions of the transfer chamber, vacuum robot, load lock chamber, atmospheric pressure robot, etc., thereby minimizing the installation area, it is required for manufacturing The aim is to reduce costs and effort, and to install various process lines in the vacuum process of large area flat glass substrates.

Other objects of the present invention will be readily understood through the following description of the embodiments.

In order to achieve the object as described above, according to an aspect of the present invention, in the device for loading and unloading a glass substrate, the entrance and exit for the entrance and exit of the glass substrate is provided to be opened and closed, the process chamber is connected A chamber body formed at a side thereof to open and close an opening for entering and exiting the process chamber; A conveyor transfer unit installed inside the chamber body and receiving a glass substrate from an external substrate transfer table through the entrance and loading the inside of the chamber body or unloading the substrate transfer unit; And a substrate lifting and transporting unit for elevating and inserting the fork through the opening, and for loading or unloading the glass substrate into the process chamber by elevating the fork through the conveyor transporting unit. Is provided.

The conveyor conveying unit, the conveyor rollers are arranged in plurality to be parallel to each other; Roller pulleys provided on one side of the conveyor roller; A belt rotatably installed by a plurality of belt pulleys to connect the roller pulleys to each other; A connection pulley connected to the belt and installed to rotate the belt; And it may include a conveyor motor for providing a rotational force through the connection pulley reducer.

The substrate lifting and lowering unit may include a lifting cylinder installed below the chamber body and having a piston rod vertically inserted through a first through hole formed in the chamber body; An LM guide fixed to an end of the piston rod to be elevated by an operation of the lifting cylinder, and installed along a direction of loading and unloading a glass substrate in the process chamber; A first bellows member installed inside the first through hole to cover the end of the piston rod to block vacuum, and having an upper end and a lower end fixed to the LM guide and the chamber body; A fork base installed in the LM guide in a linear motion and having a plurality of forks supporting the glass substrate in parallel with each other; A transfer belt having both ends supported by a belt pulley to be installed in parallel with the LM guide, and having a fork base fixed thereto; And a belt rotating part installed at the LM guide and linearly reciprocating the fork base by rotating the transport belt.

The substrate lifting and lowering unit is composed of first and second forks, wherein the forks are positioned up and down, and the fork base is composed of first and second fork bases connecting the first and second forks to each other. The first fork base is installed so as to surround the upper and both sides of the second fork base, the first and the LM guide is installed in parallel with each other to guide the linear movement of each of the first and second fork base and It consists of a second LM guide, the conveying belt is fixed to each of the first and second fork base consists of first and second conveying belts installed by the first and second belt pulley, respectively, the belt rotation The first and second belt rotation unit for rotating each of the first and second conveyance belt may be made.

The chamber body has openings formed at both sides thereof, and the substrate transfer table and the process chamber are connected at right angles to each other, and the conveyor transfer unit includes a plurality of conveyor rollers installed side by side to transfer glass substrates. It includes, the substrate lifting and transporting portion, the fork is positioned between the conveyor rollers can be moved fork the glass substrate so as to be orthogonal to the moving direction of the glass substrate by the conveyor transporting portion.

According to the glass substrate loading / unloading apparatus according to the present invention, it is possible to stably load and unload a large-sized glass substrate in a process chamber, and to increase the reliability of vacuum blocking, thereby To increase the productivity and yield of the manufacturing process.

In addition, according to the glass substrate loading / unloading apparatus of the present invention, in order to put the glass substrate into the process chamber, the functions of the transfer chamber, the vacuum robot, the load lock chamber, the atmospheric robot, etc. are combined, and thus the installation area is reduced. In addition to minimizing, it is possible to reduce the cost and effort required for manufacturing, and various process lines can be installed in the vacuum process of a large area flat glass substrate.

1 is a plan view showing a glass substrate loading / unloading apparatus according to the prior art,
2 is a plan view showing a glass substrate loading / unloading apparatus according to an embodiment of the present invention,
3 is a front view showing a glass substrate loading / unloading apparatus according to an embodiment of the present invention,
Figure 4 is a side view showing a glass substrate loading / unloading apparatus according to an embodiment of the present invention,
5 is a front view showing the interior of the glass substrate loading / unloading apparatus according to an embodiment of the present invention,
6 is a front view showing the main portion of the glass substrate loading / unloading apparatus according to an embodiment of the present invention,
7 is a side view for explaining the operation of the glass substrate loading / unloading apparatus according to an embodiment of the present invention.

While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but is to be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention, And the scope of the present invention is not limited to the following examples.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like or corresponding elements are denoted by the same reference numerals, and redundant explanations thereof will be omitted.

2 is a plan view showing a glass substrate loading / unloading apparatus according to an embodiment of the present invention, Figure 3 is a front view showing a glass substrate loading / unloading apparatus according to an embodiment of the present invention, Figure 4 Is a side view illustrating a glass substrate loading / unloading apparatus according to an embodiment of the present invention.

2 to 4, the glass substrate loading / unloading apparatus 100 according to an embodiment of the present invention is an apparatus for loading and unloading the glass substrate 1 into the process chamber 200. The chamber body 110 may include a conveyor transporter 120 and a substrate lift transporter 130.

The chamber body 110 may be provided so that the entrance and exit 111 for entrance and exit of the glass substrate 1 may be opened or closed on one side or both sides as in the present embodiment, and the process chamber 200 may be connected to the process chamber 200. The opening 113 for the entrance and exit of the) is formed to be openable and closed. Here, the process chamber 200 may use various chambers for performing a process for manufacturing a flat panel display panel, a solar cell, a vacuum glass, etc. using the glass substrate 1, and may be necessary for the process to perform the manufacturing process. Ensure that the vacuum is supplied and maintained.

The chamber body 110 may have a door installed to open and close the doorway 111 and the opening 113, respectively. In this embodiment, the door body 111 and the doorway 113 may be used to open and close the doorway 111 and the opening 113. Gate valves 112 and 114 may be installed, respectively.

5 and 6, the conveyor transporter 120 is installed inside the chamber body 110, and receives the glass substrate 1 from the substrate carrier 300 through the doorway 111. To be loaded in or unloaded to the substrate carrier 300 that is outside the chamber body 110, for example, a plurality of arranged along the transfer direction of the glass substrate 1 by the substrate carrier 300, A plurality of conveyor rollers 121 rotatably installed to be parallel to each other, a roller pulley 122 provided on one side of each conveyor roller 121, and a plurality of belt pulleys 124 to connect the roller pulleys 122 to each other. Belt 123 is rotatably installed by a), a connecting pulley 125 connected to the belt 123 and installed to rotate the belt 123, and a connection pulley 125 by the reducer 127. It may include a conveyor motor 126 to provide a rotational force.

The belt 123 may be formed of, for example, a timing belt, and the roller pulley 122 and the connection pulley 125 may be rotatably installed on the support 128 on which the conveyor roller 121 is rotatably installed. Can be. In addition, the connection pulley 125 is made of a plurality of zigzag arrangement as in this embodiment so that the belt 123 is connected in a zigzag to stably transmit the rotational force to the belt 123, which one from the conveyor motor 126 Through the reducer 127, for example, the rotational force may be transmitted by the bevel gears.

On the other hand, the substrate carrier 300 is installed horizontally on the outside of the chamber body 110, the glass substrate 1 on the upper surface through the doorway 111 to load into the chamber body 110, or the chamber body ( Conveyor for unloading from 110 may be provided, such a conveyor may be made of a conveyor belt operated by the driving of the motor, or may be made of a conveyor roller.

The substrate lifting and lowering unit 130 lifts and lifts the forks 131a and 131b between the conveyor transfer unit 120, for example, the conveyor rollers 121, and protrudes and inserts the forks 131a and 131b through the opening 113. The substrate 1 is loaded into or unloaded from the process chamber 200.

Substrate lift transfer unit 130 may be made of a single, or may be made of a plurality as in this embodiment, for example, the fork (131a, 131b), the lifting cylinder 132, LM guide (linear motion guide; 133a, 133b) ), A first bellows member 134, fork bases 135a and 135b, transfer belts 136a and 136b, and belt rotation parts 137 and 138.

The forks 131a and 131b may be provided to be located at the same height in a plurality, or may be formed of a plurality of first forks 131a and a second fork 131b to be positioned up and down as in the present embodiment, and the glass on the upper surface. The substrate 1 may be formed in the form of a plurality of bars (horizontal bar) is installed horizontally to be seated, the assembly can be achieved by the first fork base (135a) and the second fork base (135b), respectively.

The lifting cylinder 132 is a cylinder operated by hydraulic pressure or pneumatic pressure supplied from the outside, and is installed in the cylinder support part 117 fixed to the lower side of the chamber body 110, and has a first through hole formed in the chamber body 110. The piston rod 132a is inserted vertically upward through the 115.

The LM guides 133a and 133b are fixed to the end of the piston rod 132a to be elevated by the operation of the lifting cylinder 132, and the direction of loading and unloading the glass substrate 1 into the process chamber 200 is adjusted. The first fork base 135a and the second fork base 135b are installed alongside each other in parallel with each other on the elevating member 132b fixed to the end of the piston rod 132a to guide the linear motion of each of the first fork base 135a and 135b. The first LM guide 133a and the second LM guide 133b may be formed, and each of the first LM guide 133a and the second LM guide 133b may be formed in plurality.

The first bellows member 134 is made of a corrugated structure and a material that can bend or deform, and can be stretched. The first bellows member 134 is installed inside the first through hole 115 to block the vacuum by wrapping the end of the piston rod 132a. The upper and lower ends are fixed to the LM guides 133a and 133b and the chamber body 110, respectively. Here, the first bellows member 134 may have an upper end fixed to the lower surfaces of the LM guides 133a and 133b via the elevating member 132b. Therefore, the first bellows member 134 is fixed to the bottom surface of the elevating member 132b, the upper end of which is lower than the LM guides 133a, 133b, and the lower end of the chamber body 110, specifically, It is fixed to maintain the airtight in the cylinder support portion 117 is provided on the lower surface of the chamber body 110 to secure the lifting cylinder 132, thereby enabling vacuum blocking of the area exposed by the first through-hole 115 To lose.

The fork bases 135a and 135b are made of a single or, as in the present embodiment, the first fork base 135a and the second fork for fixing the first fork 131a and the second fork 131b side by side in large numbers, respectively. It may be made of a base (135b), the first fork base (135a) is installed to surround the upper and both sides of the second fork base (135b) is installed so as to linearly move without interference between each other, the first LM guide By being installed in the 133a and the 2nd LM guide 133b so that linear movement is possible, respectively, it is guided by the 1st LM guide 133a and the 2nd LM guide 133b so that it can linearly reciprocate.

Both ends of the conveyance belts 136a and 136b are supported by the belt pulleys 136c and 136d so as to be installed in parallel with the LM guides 133a and 133b, and one side of the fork bases 135a and 135b is fixed and rotated. Linear reciprocating motion of the fork bases 135a and 135b, as in the present embodiment, is fixed to each of the first fork base 135a and the second fork base 135b so that both ends thereof have a plurality of first belt pulleys 136c. And a first conveyance belt 136a and a second conveyance belt 136b respectively installed by the plurality of second belt pulleys 136d. Here, the first belt pulley 136c is rotatably installed in the first LM guide 133a so that the first conveyance belt 136a moves up and down together with the first LM guide 133a, and the second belt pulley 136b. ) Is rotatably installed in the second LM guide 133b so that the second conveyance belt 136b moves up and down together with the second LM guide 133b.

The belt rotation parts 137 and 138 are installed in the LM guides 133a and 133b, and are elevated by the lifting cylinder 132 together with the LM guides 133a and 133b, and the feed belts 136a and 136b rotate. 135b) is a linear reciprocating motion, which consists of a first fork 131a and a second fork 131b of different heights as in this embodiment, in order to horizontally move them, respectively, the first conveying belt 136a and the second conveying belt. A first belt rotation part 137 and a second belt rotation part 138 for rotating each of them (136b).

Each of the belt rotation parts 137 and 138 includes a transfer motor 137a and 138a installed at the lower side of the chamber body 110, reducers 137b and 138b installed to reduce the rotational force of the transfer motors 137a and 138a, and a reducer. Rotational force transmission from the rotational shafts 137c and 138c and the rotational shafts 137c and 138c installed to penetrate perpendicularly to the second through hole 116 formed in the chamber body 110 so as to receive the rotational force from the rotational force 137b and 138b. It is connected to rotate the first conveyance belt 136a and the second conveyance belt 136b by receiving rotational force through the members 137e and 138e, and the first LM guide 133a and the second LM guide 133b. Connecting pulleys 137d and 138d rotatably installed on the mounting members 137f and 138f respectively fixed to the mounting member, and magnet chambers installed on the rotating shafts 137c and 138c and fixed to the mounting members 137f and 138f, respectively. magnet seal; 137g, 138g) and the inner side of the second through hole 116 in order to close the vacuum by wrapping the rotating shafts 137c, 138c. Installed in the upper and lower ends may include installation members 137f and 138f and second bellows members 137h and 138h fixed to the chamber body 110.

The transfer motors 137a and 138a are installed by the motor support part 118 fixed to the lower portion of the chamber body 110. In addition, the reduction gears 137b and 138b are fixed to one side of the transfer motors 137a and 138a.

The rotating shafts 137c and 138c are coupled to be connected to the reduction gears 137b and 138b so as to receive the rotational force of the transfer motors 137a and 138a through the reduction gears 137b and 138b, and by the magnet chambers 137g and 138g. The installation members 137f and 138f are rotatably installed while maintaining airtightness.

The connection pulleys 137d and 138d are, for example, similarly to the connection pulley 125 of the conveyor transporter 120, and are provided in a plurality so as to be arranged in a zigzag manner in the installation members 137f and 138f. Each of the two conveying belts 136b is connected to rotate the first conveying belt 136a and the second conveying belt 136b by rotation, and each of the rotating force transmitting members 137e made of bevel gears. , 138e) is rotated by receiving rotational force from the rotation shafts 137c and 138c.

The chamber body 110 may have openings 111 formed at both sides thereof, and the substrate support 300 may be connected to the process chamber 200 at right angles. Conveyor transfer unit 120 may include a plurality of conveyor rollers 121 are installed side by side for the transfer of the glass substrate (1), the substrate lift transfer unit 130 is a fork (131a,) between the conveyor rollers 121 As the 131b is positioned, the forks 131a and 131b move the glass substrate 1 so as to be orthogonal to the moving direction of the glass substrate 1 by the conveyor transfer part 120.

On the other hand, the glass substrate loading / unloading apparatus 100 according to the present invention is to move the glass substrate 1 or a component moving with it on the movement path of the glass substrate 1 for the position control of the glass substrate 1 By providing a sensing sensor for sensing, it is possible to control the conveyor motor 126, the lifting cylinder 132, the transfer motors (137a, 138a), etc. for transferring the glass substrate 1 by receiving the detection signal of the sensing sensor. Alternatively, the control unit may control the transfer position of the glass substrate 1 by controlling rotation angles of the conveyor motor 126 and the transfer motors 137a and 138a that are formed of a step motor or a servo motor.

The operation of the glass substrate loading / unloading apparatus according to the present invention will be described.

After mounting the glass substrate 1 on the substrate carrier 300, the door 111 is opened by the gate valve 112, and the conveyor of the substrate carrier 300 is operated to move the glass substrate 1. It is positioned on the conveyor roller 121 by transferring the inside of the chamber body 110 through the doorway 111. Then, the conveyor roller 121 is rotated by the driving of the conveyor motor 126 so that the glass substrate 1 is completely inserted into the chamber body 110.

When the glass substrate 1 is loaded into the chamber body 110, the entrance and exit 111 is blocked by the gate valve 112, and thus the inside of the chamber body 110 is supplied from a vacuum supply unit (not shown). The vacuum is brought into a vacuum state.

Then, by raising the belt rotating parts 137 and 138 and the fork bases 135a and 135b by driving the lifting cylinder 132, as shown in FIG. 7, the first fork (below the conveyor roller 121) 131a is raised to the upper side of the conveyor roller 121, thereby the first fork 131a raises the glass substrate 1 placed on the conveyor roller 121, the transfer of the first belt rotating part 137 By rotating the first conveyance belt 136a by driving the motor 137a, the first fork base 135a is linearly moved along the first LM guide 133a, and the opening opened by the gate valve 114 ( Through the 113, the first fork 131a moves inside the process chamber 200 while supporting the glass substrate 1.

In addition, a substrate support (not shown) provided in the process chamber 200 may support the glass substrate 1 supported by the first fork 131a instead. Then, the first transfer belt 136a moves the first fork 131a and the first fork base 135a into the chamber body 110 by the reverse rotation of the transfer motor 137a of the first belt rotation part 137. It is to be returned to, and to close the opening 113 to perform a predetermined process for the glass substrate 1 in the process chamber 200.

In addition, in order to unload the glass substrate 1 from the finished process chamber 200, the opening 113 is opened by the gate valve 114, and then the transfer motor 137a of the first belt rotation part 137 is opened. The first fork 131a is inserted into the process chamber 200 through the opening 113 by the driving and the rotation of the first conveyance belt 136a, and the glass substrate 1 is disposed above the first fork 131a. When the load is placed, the first fork 131a is returned to the inside of the chamber body 110 together with the glass substrate 1 by the reverse rotation of the transfer motor 137a of the first belt rotation part 137, and the lifting cylinder 132 is provided. When the first fork 131a is lowered by driving, the glass substrate 1 of the first fork 131a is seated on the conveyor roller 121.

Then, the door 111 is opened by the gate valve 112, and the conveyor motor 126 is driven so that the glass substrate 1 is transferred to the substrate transfer table 300 through the door 111. The glass substrate 1 is unloaded from the chamber body 110 by the conveyor driving of the carriage 300 so as to be positioned on the substrate carrier 300. The glass substrate 1 located on the substrate carrier 300 is transferred using a vacuum chuck or the like for subsequent processing.

In addition, loading and unloading of the glass substrate 1 to the chamber body 110 are performed using the substrate carriers 300 respectively positioned on both sides of the chamber body 110. By alternately operating the second belt rotation part 137, 138, the first fork 131a and the second fork 131b may load and unload the glass substrate 1 into the process chamber 1, respectively. When one of the first fork 131a and the second fork 131b having different heights loads or unloads the glass substrate 1 into the process chamber 1, the other supports the glass substrate 1. In the state it is waiting in the chamber body (110).

Although the present invention has been described with reference to the accompanying drawings, it is to be understood that various changes and modifications may be made without departing from the spirit of the invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the equivalents of the claims, as well as the following claims.

1: glass substrate 110: chamber body
111: outlet 112: gate valve
113 opening 114 gate valve
115: first through hole 116: second through hole
117: cylinder support 118: motor support
120: conveyor conveying unit 121: conveyor roller
122: roller pulley 123: belt
124: belt pulley 125: connection pulley
126: conveyor motor 127: reducer
128: support 130: substrate lift transfer unit
131a: first fork 131b: second fork
132: lifting cylinder 132a: piston rod
132b: lifting member 133a: first LM guide
133b: second LM guide 134: first bellows member
135a: first fork base 135b: second fork base
136a: first conveyance belt 136b: second conveyance belt
136c: first belt pulley 136d: second belt pulley
137: first belt rotation part 137a: feed motor
137b: reducer 137c: shaft
137d: connection pulley 137e: torque transmission member
137f: Mounting member 137g: Magnet seal
137h: second bellows member 138: second belt rotation part
138a: Feed motor 138b: Reducer
138c: Rotating shaft 138d: Connection pulley
138e: Rotational force transmitting member 138f: Mounting member
138g: magnet thread 138h: second bellows member
200: process chamber 300: substrate transfer table

Claims (5)

An apparatus for loading and unloading a glass substrate,
A chamber body provided to open and close an entrance and exit of a glass substrate, and an opening for entrance and exit of the process chamber to a side to which the process chamber is connected;
A conveyor transfer unit installed inside the chamber body and receiving a glass substrate from an external substrate transfer table through the entrance and loading the inside of the chamber body or unloading the substrate transfer unit; And
And a substrate lifting and transporting unit for raising and lowering the fork between the conveyor transporting units and protruding and inserting the fork through the opening, thereby loading or unloading the glass substrate into the process chamber.
The conveyor transfer unit,
Conveyor rollers are arranged in plurality to be parallel to each other;
Roller pulleys provided on one side of the conveyor roller;
A belt rotatably installed by a plurality of belt pulleys to connect the roller pulleys to each other;
A connection pulley connected to the belt and installed to rotate the belt; And
And a conveyor motor providing a rotational force through the connection pulley to reducer.
The substrate lift and transfer unit,
An elevating cylinder installed below the chamber body, the piston rod being vertically inserted through a first through hole formed in the chamber body;
An LM guide fixed to an end of the piston rod to be elevated by an operation of the lifting cylinder, and installed along a direction of loading and unloading a glass substrate in the process chamber;
A first bellows member installed inside the first through hole to cover an end of the piston rod to block vacuum, and having an upper end and a lower end fixed to the LM guide and the chamber body;
A fork base installed in the LM guide in a linear motion and having a plurality of forks supporting the glass substrate in parallel with each other;
A transfer belt having both ends supported by a belt pulley to be installed in parallel with the LM guide, and having a fork base fixed thereto; And
And a belt rotating part installed at the LM guide and configured to linearly reciprocate the fork base by rotating the conveying belt. delete delete The method of claim 1, wherein the substrate lift transfer unit,
The fork is composed of the first and second forks positioned up and down, the fork base is composed of a first and second fork base for connecting the first and second forks a plurality, respectively, the first fork base The first and second LM guides are installed to surround the second fork base and both sides, and the LM guides are installed side by side to guide linear movement of each of the first and second fork bases. The conveying belt is fixed to each of the first and second fork bases and consists of first and second conveying belts installed by the first and second belt pulleys, respectively, and the belt rotating part includes the first and the second 2. A glass substrate loading / unloading device, comprising: first and second belt rotating portions for rotating each of the conveying belts. The method of claim 1 or 4, wherein the chamber body,
The openings are formed at both sides,
The substrate carrier is connected to the process chamber at right angles,
The conveyor transfer unit,
It includes a plurality of conveyor rollers installed side by side for the transfer of the glass substrate,
The substrate lift and transfer unit,
And the fork moves the glass substrate so that the fork is positioned between the conveyor rollers so that the fork is orthogonal to the moving direction of the glass substrate by the conveyor transfer unit.

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