KR101426277B1 - Apparatus driving lift pin and device having it for manufacturing FPD - Google Patents

Abstract

The lift pin driving apparatus and the flat panel display device manufacturing apparatus having the lift pin driving apparatus according to the present invention are characterized in that a lift pin lifting and driving apparatus is formed at an edge region of a fin plate provided with a plurality of lift pins, And a tensioner for adjusting the tension of the timing belts simultaneously prevents deflection of the timing belts so that the tension of the timing belts can be adjusted to be constant The lifting operation of all of the lift pins can be accurately performed, and as a result, the lifting and lowering operation can be performed in a state in which the substrate is accurately maintained in the horizontal position.

Flat panel display, substrate, lift pin, pin plate, belt, tensioner

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a lift pin driving device,

1 is a cross-sectional view showing a structure of a process chamber provided with a lift pin driving device in the related art.

Figure 2 is a schematic perspective view of the lift pin drive device in Figure 1;

3 is a cross-sectional view illustrating a problem of a conventional lift pin driving apparatus.

FIG. 4 is a view showing a configuration of a process chamber to which a lift pin driving apparatus according to the present invention is applied. FIG.

FIG. 5 is a perspective view showing the structure of a lift pin driving device in FIG. 4; FIG.

FIG. 6 is a perspective view of a tensioner applied to a lift pin driving apparatus according to the present invention. FIG. 6A is a front perspective view, and FIG. 6B is a rear perspective view.

Fig. 7 is a front view of Fig. 6; Fig.

Fig. 8 is a front view showing that the tensioners in Figs. 6 to 7 are configured in two stages. Fig.

9 is a front view showing another embodiment of the tensioner applied to the lift pin driving device according to the present invention.

10 is a front view showing that the tensioner is composed of two stages in Fig.

Description of the Related Art

50: chamber 52: upper electrode

54: lower electrode 60: lift pin

64: Pin plate 66: Female thread

100: lift pin drive device 102: drive motor

106: ball screw 110,120,130,140: pulley

150, 152, 154, 156: timing belt 200: tensioner

210: Fixing bracket 216: Female thread

218: Guide hole 240: Tension roller

242: roller portion 244: anti-sagging portion

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a lift pin module capable of simultaneously raising and lowering the entire pins by driving a timing belt by using a single motor, more specifically, by preventing the timing belt from sagging, And a flat panel display device manufacturing apparatus having the lift pin driving device.

2. Description of the Related Art In general, lift pins are used for loading / unloading semiconductor wafers, glass substrates, and the like on a stage (or a stage) in semiconductor manufacturing equipment, flat panel display device manufacturing equipment and the like.

Since the structure in which these lift pins are used can be similarly applied to a semiconductor manufacturing apparatus or a flat panel display device manufacturing apparatus, a lift pin and an apparatus for driving the lift pin will be described focusing on a structure of a flat panel display device manufacturing apparatus.

Description of the Related Art [0002] Flat panel displays (LCDs), liquid crystal displays, plasma display devices, and organic light emitting devices,

A flat panel display device manufacturing apparatus for manufacturing such a flat panel display device uses a vacuum processing apparatus for surface treatment of a substrate. In general, a load lock chamber, a transfer chamber, a process chamber, and the like are used.

Wherein the load lock chamber has a function of receiving an unprocessed substrate from the outside or taking out the processed substrate to the outside while alternating between an atmospheric pressure state and a vacuum state, and the transport chamber is a transportation robot for transporting the substrate between the chambers To transfer the substrate to be processed to the load lock chamber, and the process chamber serves to form a film on the substrate or to perform etching using plasma in a vacuum atmosphere or using thermal energy.

FIG. 1 is a schematic view of a process chamber of the above-described chambers. Referring to FIG. 1, a conventional lift pin lifting / lowering driving structure will be described.

As shown in FIG. 1, the process chamber includes a chamber 10 having a gate 11 on one side thereof and capable of switching to a vacuum state, in which process processing is performed, And a lower electrode 14 positioned below the upper electrode 12 and on which the substrate is mounted.

The upper electrode 12 is provided with a shower head for spraying a process gas onto the substrate S.

Particularly, the lower electrode 14 is provided with a plurality of lift pins 20 for raising and lowering the substrate when loading / unloading the substrate S. For this purpose, the lower electrode 14 is formed with a plurality of pin holes 16 through which the lift pins 20 pass.

The lift pins 20 lift and lower the substrate S along the pin holes 16 or lift the substrate S or mount the substrate S placed in the chamber 10 on the lower electrode 14 .

That is, the lift pin 20 lifts the substrate S carried by the transportation equipment from the outside of the chamber 10 by a predetermined height and then moves down the substrate S when the transportation equipment moves out of the chamber 10 The lower electrode 14 is mounted on the upper part of the chamber 10, and when the processed substrate is discharged, the substrate is taken out of the chamber 10 after the substrate is lifted again.

The lift pins 20 acting as the above are raised and lowered by the lift pin driving device 30, which is configured to lift and lift the plurality of lift pins 20 at the same time.

To this end, the lift pin driving device 30 is provided with a pin plate 35 having a plurality of lift pins 20 fixed to a lower portion of the chamber 10, and the pin plate 35 is driven by a ball screw driving method A drive motor 32 and a ball screw 33 so as to be able to be lifted and lowered.

The lift pin driving device 30 uses two or more driving motors as shown in FIGS. 1 and 2 so as to uniformly and stably lift and lift a plurality of lift pins 20 including the pin plate 35 .

In other words, as the substrate of the flat panel display device to be surface-treated becomes larger, the lift pin driving apparatus becomes larger, and as a result, it is difficult to elevate the pin plate and the lift pin as a whole in one driving motor. Two drive motors 32 and ball screws are provided at both intermediate portions of the pin plate 35 so that the pin plate 35 can be raised and lowered.

In the drawing, reference numeral 22 denotes a bellows for holding a vacuum state inside the chamber 10 by sealing a lift pin 20 exposed between the bottom surface of the chamber 10 and the fin plate 35 .

However, the lift pin driving device 30 of the related art as described above needs to precisely control the driving motor in order to elevate and lift all the lift pins 20 at an accurate height, but the two driving motors 32 are used There is a problem that simultaneous control of the two drive motors 32 for raising and lowering all the lift pins 20 at the same height is difficult.

If the control of the two drive motors 32 is not correct and the pin plate 35 is raised and lowered in an inclined state, a phase difference is generated between the lift pins 20, There is a problem that the substrate S is damaged by the lift pins 20 or the like or a limitation is imposed on performing a better substrate processing process.

Of course, it is possible to compensate the control of the motor by providing a compensation control system for compensating for the phase difference of the lift pins 20. However, the overall control structure is complicated and the cost of equipment is increased .

In addition, the above-described process chamber may be roughly classified into a PE (Plasma Enhanced) method and an RIE (Reactive Ion Etching) method in accordance with a plasma forming method. In the RIE method, The module is installed. Therefore, it is not easy to apply the RIE method to the structure in which two driving motors are installed in the lower space of the chamber, and even if applied, it is necessary to secure the space for installing the electric field module such as the matching box, The lift pin driving device 30 should be installed further downward. At this time, since the length of the bellows 22 as well as the lift pins 20 becomes long, the lift pin driving system becomes remarkably unstable, and the cost is increased due to the high cost of the bellows.

As a result, the conventional lift pin driving apparatus 30 as described above lifts and lifts the lift pins 20 by using the plurality of driving motors 32, so that the control operation of the two driving motors 32 is not easy, And the lower structure of the chamber 10 is also complicated, so that the layout design of the components R is disadvantageous. Further, there are limitations in constructing the process equipment in a more various manner, and the cost of the equipment also increases, .

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide an elevator system and a elevator system in which a single motor can be used to accurately elevate and lift all the lift pins simultaneously, And a flat panel display device manufacturing apparatus having the same.

In addition, the present invention avoids the lower central space of the chamber and installs it in the edge area of the fin plate, so that the layout of the lower space of the chamber can be variously implemented, and the manufacturing cost of the whole equipment can be reduced, And a flat panel display device manufacturing apparatus provided with the lift pin driving device.

In particular, in the present invention, a tensioner for adjusting the tension of a timing belt, which is a power transmission means driven in conjunction with a single motor, simultaneously prevents sagging of the timing belt, thereby precisely adjusting the tension of the timing belt, The present invention also provides a lift pin driving apparatus and a flat panel display device manufacturing apparatus provided with the lift pin driving apparatus.

According to an aspect of the present invention, there is provided a lift pin driving apparatus including: mounting means for mounting a substrate; A plurality of lift pins arranged to penetrate the mounting means to lift the substrate; A pin plate on which the lift pins are installed and on which the lift pins are mounted; A drive means for moving up and down the pin plate, the drive means including a drive motor and a plurality of pulleys linked by the power transmission means and driven by the drive motor; And a tensioner for adjusting a tension of the power transmitting means and having a tension roller which is in close contact with a part of the power transmitting means and is capable of moving forward and backward and which supports a part of the power transmitting means to prevent sagging thereof .

In this case, the tensioner may include: a tensioning roller; a moving bracket rotatably supported by the tension roller; a fixing bracket for allowing the moving bracket to move back and forth; And a tension adjusting means for linearly moving the workpiece.

Preferably, the tension roller includes a roller portion in contact with and in contact with a part of the power transmitting means, and a sag preventing portion formed at a lower portion of the roller portion and having an outer diameter larger than that of the roller portion.

The plurality of stages of rollers of the tension roller are formed in a plurality of stages, and the plurality of stages of power transmission means located in the same vertical line on the plurality of stages of rollers are in close contact with each other. .

The tension roller may include a roller portion in contact with and in contact with a portion of the power transmitting means, and a sag preventing portion formed on the upper and lower portions of the roller portion and having an outer diameter larger than that of the roller portion.

In this case, the roller portion of the tension roller is formed in a plurality of stages, and the sag prevention portion is formed by one more number of stages than the roller portion, and the plurality of stages of power transmission means It is preferable that a part of them is in close contact with each other so as to be contactable.

Here, it is preferable that the power transmitting means is a timing belt.

According to another aspect of the present invention, there is provided an apparatus for manufacturing a flat panel display device having a lift pin driving device, the flat panel display device including: a chamber having a pin passing portion at a lower portion thereof; A lower electrode on which a substrate can be mounted in the chamber and having a plurality of pin passage portions; And a plurality of lift pins provided in the lower electrode pin passing portion of the chamber so as to be able to move up and down the substrate in a lower space of the chamber, do.

In this case, it is preferable that an upper electrode is provided in the chamber so that plasma can be generated while spraying the process gas to process the surface of the substrate.

Best Mode for Carrying Out the Invention Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

4 to 5 are views showing a process chamber of a lift pin driving apparatus and a flat panel display device manufacturing apparatus having the same according to the present invention. Fig. 5 is a perspective view showing the configuration of the lift pin driving device in Fig. 4; Fig.

As shown, the process chamber includes a chamber 50 configured to process a surface of the substrate S in a vacuum atmosphere, and an upper electrode 52 and a lower electrode 54 are formed in the chamber 50. [ As shown in Fig.

Here, the upper chamber 52 is provided with a shower head in which a gate 51 is provided for loading and carrying the substrate S, and a process gas is provided for the surface treatment of the substrate S.

The lower electrode 54 is a substrate mounting means, and is configured so that the substrate S to be surface-treated can be mounted on the upper surface.

Particularly, the lower electrode 54 is installed so that the lift pins 60 that vertically move the substrate S in the process of inserting and discharging the substrates are vertically penetrated. The lower electrode 54 is formed with a pin passage portion through which the lift pin 60 passes, which pin hole 56 is formed in the drawing.

In the lower space of the chamber 50, there is provided a lift pin driving apparatus 100 that lifts and lifts the lift pins 60. Herein, the chamber 50 is formed with pin holes that extend to the lower portion of the chamber 50 so that the lift pins 60 can be operated by the lift pin driving apparatus 100. [

A reference numeral 62 indicates a state in which the lift pin 60 exposed between the bottom surface of the chamber 50 and the pin plate 64 is sealed to maintain a vacuum state in the chamber 50 Lt; / RTI >

The lift pin driving apparatus 100 basically includes a plurality of timing belts 150, 152, 154 and 156 which are power transmission means driven by a single driving motor 102 to rotate the pulleys 110, 120, 130 and 140 to rotate the pulleys 110, 120, So that the lift pins 60 can be lifted and lowered by rotating the ball screws 106 installed on the base plate 100. Such a structure will be described in detail with reference to the drawings.

For reference, in describing the present invention, it is described that the power transmission means is limited to the timing belt, but it is noted that the power transmission means may be various power transmission means conventionally known such as a chain.

4 and 5, a female screw hole 66 is formed in each corner area of the pin plate 64 provided with the plurality of lift pins 60.

Ball screws 106 having a predetermined length are inserted through the female screw holes 66 so that the ball screws 106 are vertically installed at the upper ends of the pulleys 110, 120, 130 and 140.

Accordingly, the pulleys 110, 120, 130 and 140 are rotatably supported under the corner areas of the pin plate 64, and the pulleys 110, 120, 130 and 140 are driven by pulleys and timing belts 150, 152, 154, Respectively.

One of the pulleys 110, 120, 130, and 140, that is, one of the pulleys, that is, a position near the first pulley 110, is provided with one drive motor 102.

That is, a driving pulley 104 is installed on the axis of the driving motor 102, and the driving pulley 104 is connected to the pulley 110, 120, 130, 140 installed at the bottom of each corner area of the pin plate 64 And is connected as the first timing belt 150 with the first pulley 110 as one pulley.

The first pulley 110 includes a first stage pulley 112 connected to the drive pulley 104 as a first timing belt 150 and a second stage pulley 112 extending continuously from the first stage pulley 112 A single pulley 114 and a three-stage pulley 116, which are three stages in total.

The second pulley 120 positioned in the vertical direction with respect to the first pulley 110 is connected to the second timing belt 152 of the first pulley 110 by a two- Stage pulley 122 and a two-stage pulley 124 positioned continuously from the one-stage pulley 122. The two-

The third pulley 130 positioned in the horizontal direction with respect to the second pulley 120 is connected to the second timing pulley 124 of the second pulley 120 by a third timing belt 154 And a fourth pulley 140 positioned in the horizontal direction with respect to the first pulley 110 is formed by a three-stage pulley 116 of the first pulley 110 and a fourth pulley And a single-stage pulley 142 for connecting as the timing belt 156 is formed.

The third pulley 130 and the fourth pulley 140 are not connected to each other as separate power transmission means. However, if necessary, the third pulley 130 and the fourth pulley 140 A separate stage may be formed and connected to each other as a timing belt.

Here, the upper surface of the three-stage pulley 116 of the first pulley 110, the upper surface of the two-stage pulley 124 of the second pulley 120, and the upper surface of the third pulley 130 and the fourth pulley 140 Each of the one-stage pulleys 132 and 142 is positioned on the same horizontal plane, so that the ball screw 106 formed in the vertical direction on the upper plane is also located on the same horizontal plane.

A description will be made of a relationship in which a plurality of lift pins 60 are simultaneously lifted and lowered by using one driving motor 102 while the respective pulleys 110, 120, 130 and 140 are connected as a plurality of timing belts 150, 152, 154 and 156 .

When the one drive motor 102 rotates in one direction or the right direction, the one-stage pulley 112 of the first pulley 110 connected as the first pulley 104 and the first timing belt 150 is rotated in the same direction In the right direction.

Accordingly, the two-stage pulley 114 and the three-stage pulley 116 formed on the same axial line as the one-stage pulley 112 of the first pulley 110 are also rotated in the right direction in the same direction.

The one-stage pulley 122 of the second pulley 120 connected to the two-stage pulley 114 of the first pulley 110 and the second timing belt 152 is also rotated in the right direction , The two-stage pulley 124 formed on the same axial line as the one-stage pulley 122 of the second pulley 120 also rotates in the right direction in the same direction.

Accordingly, the first pulley 110 and the second pulley 120 rotate in the right direction, which is the same direction, and rotate.

The one-stage pulley 132 of the third pulley 130 connected to the two-stage pulley 124 of the second pulley 120 and the third timing belt 154 is also rotated in the right direction The one-stage pulley 142 of the fourth pulley 140 connected to the three-stage pulley 116 of the first pulley 110 and the fourth timing belt 156 is also rotated in the right direction in the same direction.

Accordingly, the first pulley 110, the second pulley 120, the third pulley 130, and the fourth pulley 140 rotate in the same direction by the rotation of one driving motor 102 The ball screws 106 formed on the respective pulleys 110, 120, 130 and 140 are rotated at the same speed by the timing belts 150, 152, 154 and 156 which are power transmission means connecting the pulleys 110, 120, 130 and 140, .

The ball screw 106 is rotated along the female screw hole 66 formed in each corner area of the pin plate 64 so that the pin plate 64 is raised or lowered, A plurality of lift pins 60 installed at predetermined intervals on the upper surface of the chamber 50 and the lower electrode 54 pass through the respective pin holes 56 of the chamber 50 and the lower electrode 54,

Meanwhile, timing belts (150, 152, 154, and 156), which are power transmission means for connecting the pulleys 110, 120, 130, and 140, may be slackened due to loosening of tension when a predetermined time has elapsed.

Accordingly, the tensioner 200 is provided to always keep the tension of the timing belts 150, 152, 154, 156 uniform and prevent the timing belts from falling down.

4 and 5, the tensioner 200 is installed close to one side of the timing belts 150, 152, 154 and 156 to apply a force to push one side of the timing belts inward, thereby maintaining a uniform tension It will be done.

In other words, when the tension of the timing belts 150, 152, 154 and 156 is different from each other, the rotational speeds of the pulleys 110, 120, 130 and 140 connected to each other by the timing belts are different from each other. As a result, the substrate S can not be raised or lowered in a state in which the substrate S is maintained in a precisely horizontal state, and there is a problem that the substrate is severely damaged or a limitation is imposed on performing a better substrate processing process. Therefore, Is very important.

6A and 6B are enlarged perspective views of a tensioner having a very important function as described above, wherein FIG. 6A is a front perspective view, FIG. 6B is a rear perspective view, and FIG. 7 is a front view for more precisely showing the internal configuration of the tensioner.

As shown in the figure, the tensioner 200 is installed on one side of the timing belts 150, 152, 154 and 156 as power transmission means and includes a fixing bracket 210 and a fixing bracket 210 installed inside the fixing bracket 210, Tensioning means for moving the moving bracket 230 in the forward and backward directions and tension roller 240 rotatably installed on the moving bracket 230. The moving bracket 230 is movable in the forward and backward directions.

 The fixing bracket 210 is formed of a horizontal member 212 and a vertical member 214 and is formed in a substantially A shape and is installed in a state of being fixed by a separate supporting member not shown, The upper horizontal member 232, the lower horizontal member 234, and the vertical member 236, and is formed in a substantially C shape.

A tension roller 240 is rotatably mounted on the upper horizontal member 232 and the lower horizontal member 234 of the moving bracket 230 and the outer side of the vertical member 214 of the fixing bracket 210 Tensioning means for linearly moving the moving bracket 230 is provided from the moving bracket 230 to the outer surface of the vertical member 236 of the moving bracket 230.

The vertical member 214 of the fixing bracket 210 is provided with a female screw hole 216 and a length adjusting screw 250 having a predetermined length rotated while being fastened to the female screw hole 216 .

The end of the length adjusting screw 250 is rotatably coupled to the outer surface of the vertical member 236 of the moving bracket 230 by a coupling means such as a pin.

The length adjusting screw 250 is moved forward or backward along the female screw hole 216 of the fixing bracket 210 to rotate the moving bracket 230 in the forward and backward directions As shown in FIG.

A plurality of guide holes 218 are formed at predetermined intervals in the vicinity of the female screw hole 216 of the fixing bracket 210. Guide rods 252 of a predetermined length are inserted into the guide holes 218 The ends of the guide rods 252 are fixed to the outer surface of the vertical member 236 of the moving bracket 230.

The guide bar 252 is linearly moved while passing through the guide hole 218 of the fixing bracket 210 in accordance with the forward and backward movement of the moving bracket 230. The guide bar 252 is moved linearly without inclination of the moving bracket 230 And the like.

In order to adjust the tension of the timing belts 150, 152, 154 and 156 in a state where the tensioner 200 having the above-described structure is installed on one side of the timing belts 150, 152, 154 and 156 serving as power transmission means, The tension roller 240 may be advanced or retracted by rotating the roller 250.

That is, if the tension of one of the timing belts 150, 152, 154, 156 is loose and the tension of the timing belt is to be tightened, the length adjusting screw 250 of the tensioner 200 may be rotated forward.

As the length adjusting screw 250 is advanced, the moving bracket 230 advances, and the tension roller 240 rotatably installed on the moving bracket 230 advances. Accordingly, As you press it, its tension will be tightened.

However, since the timing belts 150, 152, 154, 156 whose tension is controlled by the tensioner 200 are formed to have a long length, there is a possibility that the timing belts 150 are lowered as the tension is loosened.

When the timing belts 150, 152, 154 and 156 are sagged downward as described above, power is not accurately transmitted between the pulleys 110, 120, 130 and 140 connected by the timing belts, so that the rotational speeds thereof may be different.

That is, if the rotation speeds of the pulleys 110, 120, 130 and 140 are different from each other as described above, the pin plate 64 can not be raised and lowered accurately in a horizontal state. As a result, It is possible to cause problems such as damage.

Accordingly, in the present invention, the tensioner roller (240) is provided at the upper and lower ends of the tensioner (200) to prevent sagging.

6A to 7, the tension roller 240 includes a roller portion 242 in which a portion of the timing belts 150, 152, 154, and 156 serving as power transmission means are closely contacted to each other, And an anti-sag preventing portion 244 having an outer diameter larger than the outer diameter of the roller portion.

The roller portion 242 is configured to be equal to or slightly larger than the diameters of the timing belts 150, 152, 154, 156 to be contacted, and the lower ends of the timing belts are configured to span the slack prevention portion 244.

Accordingly, when the timing belts 150, 152, 154, 156 connected to the pulleys 110, 120, 130, 140 and continuously rotated are in contact with and contact with the roller portion 242 of the tension roller 240, Is prevented from being caught by the slack prevention part (244) of the base (240).

8, the slack prevention part 244 of the tension roller 240 is formed at the upper part and the lower part of the roller part 242 so that the timing belt is prevented from sagging prevention part 244, It is possible to provide both the function of guiding the rotation of the timing belt and the function of preventing the sagging.

9 is a front view illustrating a tensioner according to another embodiment of the present invention. As shown in FIG. 9, the roller portion 242 of the tension roller 240-1 has two stages, and the roller portion 242 The anti-sag preventing portion 244 may be formed at the lower portion of the sagging portion 242.

That is, the one-stage pulley 112 of the first pulley 110 is connected to the driving pulley 104 of the driving motor 102 as the first timing belt 150, The first timing belt 150 and the second timing belt 152 are connected to each other by a single pulley 122 of the second pulley 120 and a second timing belt 152, And are located on the same axis line.

When the timing belt is positioned in two stages as described above, the tensioner 200 (shown in Fig. 9) having the tension roller 240 having the roller portion 242 of two stages and the sag preventing portion 244 formed at the lower portion thereof So that deflection of the timing belts of the two stages can be prevented at the same time.

10, the slack prevention part 244 of the tension roller 240 may be formed at the upper and lower parts of the roller part 242 so that the timing belt is prevented from sagging prevention part 244, It is possible to provide both the function of guiding the rotation of the timing belt and the function of preventing the sagging.

When the timing belt is provided in two or more stages, if the roller portion of the tension roller is formed so as to match the number of stages of the timing belt and the sag prevention portion is formed by one more than the roller portion, Even if the timing belts are installed on the same axial line, the deflection of the timing belts can be prevented at the same time.

As described above, according to the lift pin driving apparatus and the flat panel display device manufacturing apparatus having the lift pin driving apparatus according to the present invention, since the entire lift pins can be simultaneously lifted and lowered using one driving motor, And the lifting operation of all the lift pins can be performed more accurately.

In addition, one drive motor is installed in the edge region of the fin plate, and the timing belts as the power transmission means are connected along the lower side edge of the fin plate so that the fin plate can be accurately raised and lowered as one drive motor, There is no interference with peripheral components in the lower space, so that the layout structure can be diversified and the cost of the entire equipment can be reduced, thereby contributing to the cost reduction of the product.

In addition, in a plurality of timing belts as power transmission means for rotating a plurality of ball screws by using one driving motor, a tensioner for adjusting the tension of the timing belts prevents deflection of the timing belts, Since the ball screws are lifted and lowered at the same speed, damage or the like of the substrate is prevented by more accurate lifting and lowering of the lift pins, and thus, an accurate flat panel display device can be manufactured.

Claims (9)

Mounting means for mounting the substrate; A plurality of lift pins arranged to penetrate the mounting means to lift the substrate; A pin plate on which the lift pins are installed and on which the lift pins are mounted; A drive means for moving up and down the pin plate, the drive means including a drive motor and a plurality of pulleys linked by the power transmission means and driven by the drive motor; The power transmission device according to any one of claims 1 to 3, further comprising: a power transmitting unit for transmitting the power transmitted from the power transmitting unit to the power transmitting unit; A tension roller having a roller portion formed at a lower portion of the roller portion and having a larger outer diameter than the roller portion to prevent a portion of the power transmission means from sagging, A moving bracket rotatably supported by the tension roller, A fixing bracket for allowing the movable bracket to be movable forward and backward, And a tensioner configured to tension the moving bracket from the fixing bracket in a forward and backward direction. delete delete The method according to claim 1, Wherein the roller portion of the tension roller is formed in a plurality of stages and the sag prevention portion is formed in the same number of stages as the roller portion, Respectively, so as to be brought into contact with each other. The method according to claim 1, Wherein the tension roller comprises a roller portion in contact with and in contact with a part of the power transmission means and a sag preventing portion formed on the upper and lower portions of the roller portion and having an outer diameter larger than that of the roller portion. 6. The method of claim 5, Wherein the roller portion of the tension roller is formed in a plurality of stages, and the sag prevention portion is formed by a plurality of stages which are one more than the roller portion, and a plurality of stages of power transmission means located on the same vertical line- The lift pins being in contact with each other. The method according to claim 1, Wherein the power transmission means is a timing belt. A chamber having a pin passage portion at a lower portion thereof; A lower electrode on which a substrate can be mounted in the chamber and having a plurality of pin passage portions; And means for driving the plurality of lift pins provided in the lower electrode pin passage portion of the chamber so as to be able to move up and down the substrate by being positioned in a lower space of the chamber, characterized in that in any one of Claims 1 to 4 And a lifting pin driving device according to the present invention. 9. The method of claim 8, Wherein an upper electrode is provided in the chamber so as to generate a plasma while spraying a process gas to process the surface of the substrate.

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