KR20080053574A - Apparatus driving lift pin and device having it for manufacturing fpd - Google Patents

Abstract

A lift pin driving device and an apparatus for manufacturing a flat display device using the same are provided to lift a substrate horizontally by accurately performing the lifting motion of lift pins. A substrate is loading on a loading member, and plural lift pins penetrate the loading member to lift the substrate. The lift pins are installed on a pin plate which is lifted by a driving unit. The driving unit has a driving motor and plural pulleys coupled to a power transmission and driven by the driving motor. Tension of the power transmission is adjusted by a tensioner(200). The tensioner has a tension roller(240) movable forward and rearward, a guide member guiding linear motion of the movable bracket, a movable bracket(230) supporting the tension roller, a stationary bracket(210) for the guide member, and a tension adjusting member moving the movable bracket.

Description

Lift pin driving device and flat panel display device manufacturing apparatus having the same {Apparatus driving lift pin and device having it for manufacturing FPD}

1 is a cross-sectional view showing a configuration of a process chamber conventionally equipped with a lift pin drive device.

Figure 2 is a schematic perspective view of the lift pin drive in Figure 1;

Figure 3 is a cross-sectional view showing a problem of the conventional lift pin drive.

4 is a configuration diagram showing a configuration of a process chamber to which a lift pin driving device according to the present invention is applied.

5 is a perspective view showing the configuration of the lift pin driving device in FIG.

Figure 6 is a perspective view of a tensioner applied to the lift pin drive according to the present invention, Figure 6a is a front perspective view, Figure 6b is a rear perspective view.

FIG. 7 is a front view of FIG. 6A

8 is a cross-sectional view of FIG. 6A.

9 and 10 are perspective views showing another embodiment of the tensioner applied to the lift pin drive device according to the present invention.

<Description of the symbols for the main parts of the drawings>

50 chamber 52 upper electrode

54: lower electrode 60: lift pin

64: pin plate 66: female thread

100: lift pin drive device 102: drive motor

106: ball screw 110,120,130,140: pulley

150,152,154,156: timing belt 200: tensioner

210: fixing bracket 216: female thread

218: guide hole 222: indicator

224,224-1,224-2: guide member

224a, 224a-1.224a-2: horizontal member

224b, 224b-1,224b-2: Vertical member

The present invention relates to a lift pin module for driving a timing belt by using a single motor so that the entire pin can be lifted at the same time and accurately. More specifically, it is possible to accurately adjust the tension of the timing belt, thereby more accurately lifting the lifter. A lift pin driving device capable of elevating a pin and a flat panel display device manufacturing apparatus having the same.

In general, lift pins are used to load / unload semiconductor wafers, glass substrates, and the like onto a mounting table (or stage) in semiconductor manufacturing equipment, flat panel display device manufacturing apparatuses, and the like.

Since the configuration in which the lift pins are used may be similarly applied to semiconductor manufacturing equipment or a flat panel display device manufacturing apparatus, a lift pin and a device for driving the same will be described with reference to a structure configured in the flat panel display device manufacturing apparatus.

Background Art [0002] Flat panel displays, which are widely used in recent years, include liquid crystal displays, plasma display devices, and organic light emitting devices.

A flat panel display device manufacturing apparatus for manufacturing such a flat panel display device uses a vacuum processing device for the surface treatment of the substrate, etc. In general, a load lock chamber, a transfer chamber, a process chamber and the like are used.

The load lock chamber alternates between atmospheric pressure and vacuum state to accept an unprocessed substrate from the outside or to take out the processed substrate to the outside, and the transfer chamber transfers the substrate between the chambers. Is provided so as to transfer the substrate is scheduled for processing to the load lock chamber, the process chamber serves to form a film or etching on the substrate using a plasma or thermal energy in a vacuum atmosphere.

FIG. 1 is a view schematically showing a process chamber among the above-mentioned chambers. Referring to this, a lift pin lift driving structure according to the related art will be described below.

As shown in FIG. 1, the process chamber is provided with a gate 11 at one side thereof so as to be converted into a vacuum state, and a chamber 10 in which process processing is performed therein, and an upper portion of the inside of the chamber 10. An upper electrode 12 positioned in an area and a lower electrode 14 positioned below the upper electrode 12 and mounted on the substrate.

Here, the upper electrode 12 is provided with a shower head for injecting a process gas to the substrate (S).

In particular, the lower electrode 14 is provided with a plurality of lift pins 20 so as to raise and lower the substrate when loading / unloading the substrate S. To this end, a plurality of pin holes 16 are formed in the lower electrode 14 to allow the lift pins 20 to pass therethrough.

Accordingly, the lift pin 20 lifts and lowers the substrate S while the lift pin 20 moves up and down along the pin hole 16 or mounts the substrate S inserted into the chamber 10 on the lower electrode 14. Done.

That is, the lift pin 20 lifts the substrate S carried by the transport equipment outside the chamber 10 by a predetermined height, and then lowers the substrate S when the transport equipment moves out of the chamber 10. It serves to mount on the upper portion of the lower electrode 14, and when discharging the processed substrate to reverse the above it is to play a role to be transported out of the chamber 10 after lifting the substrate again.

The lift pins 20 serving as described above are lifted by the lift pin driver 30, and the lift pin driver 30 is configured to lift the plurality of lift pins 20 simultaneously.

To this end, the lift pin driving device 30 includes a pin plate 35 having a plurality of lift pins 20 fixed to the lower portion of the chamber 10, and the pin plate 35 is driven by a ball screw driving method. It consists of a drive motor 32 and the ball screw 33 so that it can be lifted up and down by.

The lift pin driving device 30 uses two or more drive motors as shown in FIGS. 1 and 2 to uniformly and stably lift the plurality of lift pins 20 including the pin plate 35. .

That is, as the substrate of the flat panel display element to be surface treated is enlarged, the lift pin driving device is also enlarged. As a result, it is difficult to raise and lower the pin plate and the lift pin as a whole with one driving motor. Likewise, by installing two driving motors 32 and ball screws at both middle portions of the pin plate 35, the pin plate 35 can be lifted.

In the drawing, reference numeral 22 denotes a bellows that seals the lift pin 20 exposed between the bottom surface of the chamber 10 and the pin plate 35 to maintain a vacuum inside the chamber 10. .

However, the above-described lift pin drive device 30 of the prior art, in order to simultaneously lift and lift all the lift pins 20 to the correct height at the same time precisely control the drive motor, using two drive motors 32 Because of this, there is a problem that simultaneous control of two drive motors 32 for raising and lowering all the lift pins 20 to the same height is not easy.

Here, when the control of the two driving motors 32 is not accurate, and the pin plate 35 is lifted in an inclined state, a phase difference occurs between the lift pins 20, and thus the substrate S may be moved. Loading / unloading may cause a problem in that the substrate S may be damaged by the lift pin 20 or the like, or a limit may be generated to perform a better substrate processing process.

Of course, the compensation control system for compensating the phase difference of the lift pins 20 as described above can be compensated for the control of the motor, but this leads to a problem that the overall control structure is more complicated, and the cost of the equipment also increases. .

In addition, the process chamber as described above may be classified into a plasma enhanced (PE) method and a reactive ion etching (RIE) method according to a plasma forming method. The RIE method is generally used to apply electric power to a lower space of a chamber. The module is installed. Therefore, the configuration in which the two drive motors are installed in the lower space of the chamber is not easy to apply the RIE method, and even if applied to secure the space to install the electric module, such as a matching box as shown in FIG. In order to lift pin drive 30 must be further installed. In this case, since the length of the lift pin 20 as well as the bellows 22 is greatly increased, the cost of the lift pin driving system is remarkably unstable as well as expensive bellows are used.

As a result, the conventional lift pin driving device 30 as described above is to lift and lift the lift pins 20 by using the plurality of driving motors 32, not only the control operation of the two drive motors 32 is easy, In addition, since the lower structure of the chamber 10 is complicated, the layout design of the components R is disadvantageous, and there are limitations in configuring the process equipment in various ways, and the cost of the equipment is increased, which is disadvantageous in cost reduction.

The present invention has been made to solve the above problems, by using a single motor configured to be able to lift and lift the entire lift pin at the same time, the drive control is easy, the lifting operation of the lift pin can be made more accurately It is an object of the present invention to provide a lift pin driving device and a flat panel display device manufacturing apparatus having the same.

In addition, the present invention by installing a single motor in the edge region of the pin plate to avoid the lower center space of the chamber, it is possible to implement a variety of layout configuration of the chamber lower space, reducing the overall manufacturing cost of equipment to reduce the cost Another object of the present invention is to provide a lift pin driving device that can contribute and a flat panel display device manufacturing device having the same.

In particular, the present invention is to adjust the tension of the timing belt precisely by adjusting the tensioner for adjusting the tension of the timing belt which is driven in conjunction with a single motor without twisting, thereby precisely adjusting the tension of the timing belt It is another object of the present invention to provide a lift pin drive device and a flat panel display device manufacturing device having the same, in which pins can be raised and lowered at the same time.

Lift pin driving apparatus according to the present invention for achieving the above object, the mounting means is mounted to the substrate; A plurality of lift pins disposed through the mounting means to lift and lower the substrate; A pin plate on which the lift pins are installed and lifted up and down; A driving means for elevating the pin plate, the driving motor comprising a plurality of pulleys connected to and interlocked with a power transmission means according to the driving of the driving motor; A tension roller for adjusting the tension of the power transmission means, the tension roller which is in close contact with the power transmission means, and is capable of advancing forward and backward, a movement bracket on which the tension roller is rotatably supported, and the movement bracket is straight without tilting back, left, and right. And a tensioner comprising a guide means for enabling movement, a fixed bracket on which the guide means is installed, and a tension adjusting means for linearly moving the moving bracket in the front-rear direction from the fixed bracket.

In this case, the fixing bracket of the tensioner is formed of a horizontal member and a vertical member and is formed in a substantially a shape, and the guide means are provided on both sides of the horizontal member of the fixing bracket, and on both sides of the bottom of the horizontal member of the fixing bracket. It is preferably made of a guide member installed side by side.

Here, the guide member of the guide means, consisting of a horizontal member and a vertical member may be formed in a substantially a shape, consisting of a horizontal member and a vertical member may be formed in a substantially b shape, the upper horizontal member and the vertical member and the lower It may be formed in a substantially c shape by consisting of a horizontal member.

In addition, it is preferable that a scale is displayed on the outer surface of the indicator.

On the other hand, a flat panel display device manufacturing apparatus having a lift pin driving apparatus according to the present invention, the chamber having a pin passage in the lower portion; A lower electrode formed to allow a substrate to be mounted in the chamber and having a plurality of pin passages formed therein; Means for driving a plurality of lift pins provided in the lower electrode pin passing portion of the chamber to be located in the lower space of the chamber to lift the substrate, characterized in that it comprises a lift pin drive device of the above configuration do.

In this case, it is preferable that an upper electrode is provided in the chamber so as to generate plasma while injecting a process gas to treat the surface of the substrate.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

4 to 5 are views illustrating a process chamber of a lift pin driving apparatus and a flat panel display device manufacturing apparatus including the same according to the present invention, and FIG. 4 illustrates a coupling relationship between the lift pin driving apparatus and the process chamber according to the present invention. FIG. 5 is a schematic view, and FIG. 5 is a perspective view illustrating a configuration of a lift pin driving device in FIG. 4.

As shown, the process chamber is provided with a chamber 50 made to process the surface of the substrate (S) in a vacuum atmosphere, the upper electrode 52 and the lower electrode 54 inside the chamber 50 It is arrange | positioned up and down.

Here, the upper chamber 52 is provided with a gate 51 for inputting and conveying the substrate S, and a shower head provided with a process gas for surface treatment of the substrate S.

The lower electrode 54 is a substrate mounting means, and is configured such that the substrate S to be surface treated is mounted on the upper portion thereof.

In particular, the lower electrode 54 is installed such that lift pins 60 for raising and lowering the substrate S are penetrated in the vertical direction during the substrate input and discharge process. The lower electrode 54 has a pin passing portion so that the lift pin 60 passes, and the pin passing portion is composed of pin holes 56 in the drawing.

A lift pin driver 100 for elevating the lift pins 60 is provided in the lower space of the chamber 50. Here, the pin 50 is formed in the chamber 50 so that the lift pin 60 extends to the lower portion of the chamber 50 to be operated by the lift pin driving device 100.

For reference, reference numeral 62 in the drawing encloses the lift pin 60 exposed between the bottom surface of the chamber 50 and the pin plate 64 to maintain the vacuum state inside the chamber 50. Bellows.

The lift pin driving device 100 is basically a plurality of timing belts 150, 152, 154, 156, which are power transmission means, by one driving motor 102, to rotate the pulleys 110, 120, 130, and 140, thereby perpendicular to the top of the pulleys 110, 120, 130, and 140. As the ball screw 106 is installed to be configured to lift and lift the lift pins 60, such a configuration will be described in detail with reference to the drawings.

For reference, in describing the present invention, the power transmission means will be described as being a timing belt, but it will be apparent that the power transmission means may be various power transmission means known in the art such as a chain.

As shown in FIGS. 4 and 5, female threaded holes 66 are formed in each corner region of the pin plate 64 provided with the plurality of lift pins 60.

The female screw hole 66 is installed through the ball screw 106 having a predetermined length, the ball screw 106 is installed in the vertical direction on the upper end of each pulley (110, 120, 130, 140).

Accordingly, the pulleys 110, 120, 130, and 140 are rotatably supported under each corner region of the pin plate 64, and the pulleys 110, 120, 130, and 140 are adjacent to the pulleys and timing belts 150, 152, 154, and 156 which are power transmission means. Each is connected.

Among the pulleys 110, 120, 130, and 140, one driving motor 102 is installed at a position close to any one pulley 110, that is, the first pulley 110.

That is, a drive pulley 104 is installed on the shaft of the drive motor 102, and the drive pulley 104 is any of the pulleys 110, 120, 130, and 140 installed under each corner region of the pin plate 64. The first pulley 110, which is one pulley, is connected to the first timing belt 150.

The first pulley 110 is a first-stage pulley 112 to be connected as the driving pulley 104 and the first timing belt 150, and two consecutively located at the upper portion from the first-stage pulley 112. Stage pulley 114 and three-stage pulley 116 is composed of a total of three stages.

In addition, the second pulley 120 positioned perpendicular to the first pulley 110 may be connected to the second pulley 114 and the second timing belt 152 of the first pulley 110. It consists of the two steps of pulleys 122 and the two-stage pulley 124 which is located in the upper part continuously from this one-stage pulley 122.

In addition, the third pulley 130 positioned in the horizontal direction with the second pulley 120 is connected to the second stage pulley 124 and the second timing belt 154 of the second pulley 120. The first pulley 132 and the fourth pulley 140 positioned in the horizontal direction are formed in the structure of the first pulley 132, the third pulley 116 and the fourth pulley 110 of the first pulley 110. It consists of a structure in which only one-stage pulley 142 for connecting as the timing belt 156 is formed.

On the other hand, the third pulley 130 and the fourth pulley 140 is shown as not connected to each other as a separate power transmission means, if necessary, the third pulley 130 and the fourth pulley 140, It is also possible to form separate stages and connect them with each other as a timing belt.

Here, the upper surface of the three-stage pulley 116 of the first pulley 110, the upper surface of the two-stage pulley 124 of the second pulley 120, the third pulley 130 and the fourth pulley 140 Since the first stage pulleys 132 and 142 are respectively positioned on the same horizontal plane, the ball screw 106 formed in the vertical direction on the upper surface thereof is also positioned on the same horizontal plane.

When the pulleys 110, 120, 130 and 140 are connected as the plurality of timing belts 150, 152, 154 and 156 as described above, the relationship in which the plurality of lift pins 60 are simultaneously lifted using one drive motor 102 will be described as follows. .

When the one driving motor 102 rotates in one direction, that is, the right direction, the first pulley 112 of the first pulley 110 connected as the driving pulley 104 and the first timing belt 150 is in the same direction. Rotate in the right direction.

Therefore, the two-stage pulley 114 and the three-stage pulley 116 formed on the same axis as the first-stage pulley 112 of the first pulley 110 also rotate in the same direction.

In addition, the first stage pulley 114 of the first pulley 110 and the second stage pulley 122 of the second pulley 120 connected as the second timing belt 152 also rotate in the right direction in the same direction. In addition, the two-stage pulley 124 formed on the same axis as the one-stage pulley 122 of the second pulley 120 is also rotated in the right direction in the same direction.

Therefore, the first pulley 110 and the second pulley 120 is rotated in conjunction with the right direction in the same direction.

In addition, the first pulley 132 of the second pulley 124 and the third pulley 130 connected as the third timing belt 154 of the second pulley 120 is also rotated in the right direction in the same direction. In addition, the first stage pulley 116 of the first pulley 110 and the fourth stage pulley 142 of the fourth pulley 140 connected as the fourth timing belt 156 also rotate in the right direction in the same direction.

Accordingly, the first pulley 110, the second pulley 120, the third pulley 130 and the fourth pulley 140 are rotated in the same direction by the rotation of one drive motor 102, respectively. By rotating at the same speed by the timing belts 150, 152, 154 and 156 which are the power transmission means connecting the pulleys 110, 120, 130 and 140, respectively, the ball screws 106 formed on the pulleys 110, 120, 130 and 140 rotate at the same speed. To be.

Accordingly, the ball screw 106 is rotated along the female threaded hole 66 formed in each corner region of the pin plate 64, thereby raising or lowering the pin plate 64, and thus the pin plate ( The plurality of lift pins 60 installed at regular intervals on the upper surface of the 64 pass through the pin holes 56 of the chamber 50 and the lower electrode 54, and thus the lift is performed accurately.

On the other hand, the timing belts 150, 152, 154 and 156, which are the power transmission means for connecting the pulleys 110, 120, 130 and 140, may be loosened after a certain time depending on their material properties.

Accordingly, a tensioner 200 is provided to keep the tension of the timing belts 150, 152, 154, and 156 uniformly.

The tensioner 200 is installed in close proximity to one side of the timing belts 150, 152, 154, and 156 as shown in FIGS. 4 and 5 so as to maintain a uniform tension by applying a force to push one side of the timing belts inward. Will be done.

In other words, when the tension of the timing belts 150, 152, 154 and 156 is different from each other, the rotation speeds of the pulleys 110, 120, 130 and 140 connected by the timing belts are different from each other, and then the lifting and lowering is performed while the pin plate 64 does not maintain the correct level. As a result, since the substrate S is also not able to be raised and lowered in a precisely horizontal state, there is a problem in that the substrate is severely damaged or a limit is generated to perform a better substrate processing process. Is very important.

Figure 6 is an enlarged perspective view of a tensioner having a very important function as described above, Figure 6a is a front perspective view, Figure 6b is a rear perspective view, Figures 7 and 8 are a front view for more accurately showing the internal configuration of the tensioner and It is a cross section.

As shown, the tensioner 200 is installed on one side of the timing belts 150, 152, 154, and 156 as power transmission means, and is fixed to the fixed bracket 210 and the inside of the fixed bracket 210 to move forward and backward. Possible movement bracket 230, tension adjusting means for moving the movement bracket 230 in the front and rear direction, guide means for horizontal movement of the movement bracket 230 horizontally linearly without tilting back and forth, and the movement It comprises a tension roller 240 rotatably installed with respect to the bracket (230).

 The fixing bracket 210 is formed of a horizontal member 212 and the vertical member 214 in a substantially a shape, and is installed in a fixed state by a separate support member (not shown), the fixing bracket 210 of the Guide means are installed on the horizontal member 212.

The guide means includes an indicator 222 formed on both sides of the horizontal member 212 of the fixing bracket 210 by a predetermined height, and a guide member 224 installed on both sides of the bottom surface of the horizontal member 212. .

Here, a scale is displayed on the outer surface of the indicator 222, the guide member 224 is also formed of a horizontal shape (224a) and the vertical member (224b) is approximately a shape.

In addition, the moving bracket 230 is composed of an upper horizontal member 232, a lower horizontal member 234 and a vertical member 236 formed in a substantially c shape, the upper horizontal member 232 is a guide of the guide means The linear movement is performed along the member 224. The linear movement is performed by closely following the bottom surface of the horizontal member 224a of the guide member 224 and the inner surface of the vertical member 224b. Linear movement is possible.

That is, the upper horizontal member 232 of the moving bracket 230 is in close contact with the bottom surface of the horizontal member 224a of the guide member 224 of the guide means, so that the forward inclination or backward inclination does not occur and is also vertical. By being in close contact with the inner surface of the member 224b, linear movement is possible without inclination to the left and right sides, respectively.

On the other hand, the tension roller 240 is rotatably installed with respect to the upper horizontal member 232 and the lower horizontal member 234 of the movable bracket 230, the outside of the vertical member 214 of the fixing bracket 210 Tension adjusting means for linearly moving the movable bracket 230 is provided over the outer surface of the vertical member 236 of the movable bracket 230 from the side.

That is, the female screw hole 216 is formed in the vertical member 214 of the fixing bracket 210, and is provided with a length adjusting screw 250 of a predetermined length that rotates while being engaged with the female screw hole 216. .

The end of the length adjusting screw 250 is rotatably coupled to the outer surface of the vertical member 236 of the moving bracket 230 by a coupling means such as a pin.

Therefore, as the length adjusting screw 250 rotates, the length adjusting screw 250 moves forward or backward along the female thread hole 216 of the fixing bracket 210, and moves the moving bracket 230 forward and backward. Will be moved straight.

On the other hand, a plurality of guide holes 218 are formed at a predetermined interval in the position close to the female screw hole 216 of the fixing bracket 210, the guide rod 252 of a predetermined length is formed in the guide hole 218 It is installed to pass through, the ends of the guide rods 252 is fixed to the outer surface of the vertical member 236 of the moving bracket 230.

The guide rod 252 is a linear movement while passing through the guide hole 218 of the fixing bracket 210 in accordance with the forward and backward movement of the moving bracket 230, the linear movement is moved without tilting the moving bracket 230 It will be responsible for assisting to make it happen.

Therefore, in the state in which the tensioner 200 having the above configuration is installed on one side of the timing belts 150, 152, 154 and 156 which are the power transmission means, in order to adjust the tension of the timing belts 150, 152, 154 and 156, the length adjusting screw ( By rotating the 250, the tension roller 240 may be moved forward or backward.

That is, when one of the timing belts 150, 152, 154 and 156 has a loose tension in one of the timing belts, the tension adjusting screw 250 of the tensioner 200 may be rotated to move forward.

Then, the moving bracket 230 is advanced along the guide means according to the advancement of the length adjusting screw 250, and thus the tension roller 240 rotatably installed with respect to the moving bracket 230 is also advanced. As the timing belt is pressed further, the tension is tightened.

In this case, the operator may adjust the forward length of the tension roller 240 in comparison with the tension roller of the tensioner installed on the other timing belts by using the scale displayed on the outer surface of the indicator 222 which is the guide means of the tensioner 200. This can make the job easier.

In addition, the tension roller 240 is rotatably installed so that the movement bracket 230 can be linearly moved without tilting back, forth, left and right along the guide member 224 of the guide means, so that the tension roller 240 accurately Since the linear movement is made, the tension of the timing belts 150, 152, 154 and 156 can be accurately controlled as desired.

9 and 10 are perspective views illustrating a tensioner according to another embodiment of the present invention. As shown in the drawing, the guide member 224-1 of the guide means of the tensioner is horizontal as in the previous embodiment. It is not composed of the member and the vertical member is formed in the substantially a shape, but consists of the horizontal member 224a-1 and the vertical member 224b-1, but may be formed in the approximately b shape, and also the guide member 224-2. ) May be approximately c-shaped so that the two-stage horizontal member 224a-2 and the vertical member 224b-2 are formed therebetween.

That is, among the guide means of the tensioner, the guide member 224-1 is in the shape of N, and the upper horizontal member 232 of the moving bracket 230 is the horizontal member 224a-1 of the guide member 224-1. When the linear movement in the front and rear direction along the upper surface is to be made, the upper horizontal member 232 of the moving bracket 230 is seated while being in close contact with the upper surface of the horizontal member 224a-1 of the guide member 224-1 Since the linear movement is made in a state, the possibility of sag caused by the load is eliminated, and thus the linear movement can be made more stable.

In addition, of the guide means of the tensioner 200, the guide member 224-2 is in the c shape, the upper horizontal member 232 of the moving bracket 230 is the upper horizontal member of the guide member 224-2 ( 242a-2) When the linear movement in the front and rear direction along the lower surface and the lower horizontal member 242a-2 upper surface is to be made, the upper horizontal member 232 of the moving bracket 230 of the guide member 242-2 Since the linear movement is performed while being in close contact with the lower surface of the upper horizontal member 242a-2 and the upper surface of the lower horizontal member 242a-2, the possibility of sag caused by the load is eliminated and the straight line is more stable. It will be possible to move.

As described above, according to the lift pin driving apparatus and the flat panel display device manufacturing apparatus including the same according to the present invention, since the entire lift pin can be lifted and raised simultaneously with one driving motor, the driving motor is controlled. In addition to simplicity, the lifting operation of all the lift pins is more accurate.

In addition, one drive motor is installed in the edge region of the pin plate, and the timing belts, which are the power transmission means, are connected along the lower edge of the pin plate so that the pin plate can be lifted up and down accurately as one drive motor. There is no interference with the surrounding components in the sub space, which allows the layout structure to be diversified. Also, the overall equipment cost is reduced, which contributes to product cost reduction.

In addition, in a plurality of timing belts, which are power transmission means for rotating a plurality of ball screws using a single drive motor, a tensioner for adjusting the tension of these timing belts is precisely linearly moved without tilting back, forth, left, and right. By being possible, the ball screws are raised and lowered at the same speed, thereby preventing the damage of the substrate and the like by raising and lowering the more accurate lift pins, thereby making a very accurate flat panel display device.

Claims (9)

Mounting means on which the substrate is mounted; A plurality of lift pins disposed through the mounting means to lift and lower the substrate; A pin plate on which the lift pins are installed and lifted up and down; A driving means for elevating the pin plate, the driving motor comprising a plurality of pulleys connected to and interlocked with a power transmission means according to the driving of the driving motor; A tension roller for adjusting the tension of the power transmission means, the tension roller which is in close contact with the power transmission means, and is capable of advancing forward and backward, a movement bracket on which the tension roller is rotatably supported, and the movement bracket is straight without tilting back, left, or right And a tensioner comprising a guide means for enabling movement, a fixed bracket on which the guide means is installed, and a tension adjusting means for linearly moving the moving bracket forward and backward from the fixed bracket. Pin drive. The method of claim 1, The fixing bracket of the tensioner is formed of a horizontal member and a vertical member and is formed in a substantially a-shape. The guide means is installed on both sides of the indicator installed on both sides of the horizontal member of the fixing bracket and on the bottom of the horizontal member of the fixing bracket. Lift pin drive, characterized in that consisting of a guide member. The method of claim 2, The guide member of the guide means is composed of a horizontal member and a vertical member lift pin drive device characterized in that formed in approximately a shape. The method of claim 2, The guide member of the guide means is composed of a horizontal member and a vertical member, characterized in that the lift pin drive, characterized in that formed in approximately b shape. The method of claim 2, The guide member of the guide means is composed of an upper horizontal member, a vertical member and a lower horizontal member, the lift pin driving device, characterized in that formed in a substantially c shape. The method of claim 2, Lift pin drive device characterized in that the scale is displayed on the outer surface of the indicator. The method of claim 1, The power transmission means is a lift pin drive, characterized in that the timing belt. A chamber having a pin passage in the lower portion; A lower electrode formed to allow a substrate to be mounted in the chamber and having a plurality of pin passages formed therein; Means for driving a plurality of lift pins provided in the lower electrode pin passing portion of the chamber to be located in the lower space of the chamber to lift the substrate, the lift pin according to any one of claims 1 to 7. Flat panel display device manufacturing apparatus comprising a drive device. The method of claim 8, And an upper electrode in the chamber so as to generate plasma while injecting a process gas to treat the surface of the substrate.

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