KR102372101B1 - Lift drive assembly - Google Patents

Abstract

The present invention can provide a lift driving assembly capable of precisely controlling driving and having an improved space utilization characteristic and design characteristic. One embodiment of the present invention discloses a lift driving assembly, comprising: one or more lift pins arranged to overlap a material to be treated to support the material to be treated; one or more clamp parts arranged to be spaced apart from the lift pins; a movement part, that the lift pin and the clamp part are commonly connected in common, is formed to move up and down; and a driving part configured to provide a driving force to the movement part.

Description

Lift drive assembly

The present invention relates to a lift drive assembly.

With the development of technology, various electrical and electronic devices are being manufactured and used, and electrical or electronic properties of these electronic devices may be formed through various processes.

In addition, semiconductor processes using gas or plasma processing are used in various processes for forming such electrical or electronic properties.

In such a semiconductor process, a member for lifting the workpiece for arranging, supporting, or other various handling of the workpiece is used.

On the other hand, there is a limit in precisely controlling, designing, and disposing of a member for lifting the material to be treated according to the complexity and diversification of processes for the material to be treated.

The present invention may provide a lift driving assembly capable of precisely controlling driving and having improved space utilization characteristics and design characteristics.

In one embodiment of the present invention, one or more lift pins overlapped with a material to be treated and disposed to support the material to be treated, one or more clamp portions disposed to be spaced apart from the lift pins, the lift pins and the clamp portion are common A moving unit connected and formed to move upward and downward, a plurality of driving units connected to the moving unit and spaced apart from each other to provide a driving force to the moving unit, a driving connecting member formed to connect the plurality of driving units, and the driving connecting member a plurality of guide support members configured to control a path and arrangement, wherein the drive connecting members are commonly connected to all of the plurality of drives to move together, and the plurality of guide support members include at least the plurality of guide support members. Disclosed is a lift driving assembly comprising a driving connecting member disposed between two driving parts adjacent to each other among the driving parts to form a curved path in which a driving connecting member connected to the two driving parts adjacent to each other is disposed.
In this embodiment, the exercise unit may be formed to have regions disposed on both sides with at least an inner spaced therebetween.
In this embodiment, the clamp unit and the lift pin may include being arranged in each of the regions arranged on both sides of the movement unit.
In this embodiment, the regions disposed on both sides of the exercise unit may include those formed to be connected to each other.
In the present embodiment, the driving unit may include one that is arranged so as not to overlap with the separation space.
In this embodiment, the driving unit may include a shape of a rotating member that rotates and transmits a driving force of the rotational motion to the moving unit.
In this embodiment, a driving source provided separately from the driving connecting member and connected to the driving connecting member to provide a rotational force to the single type of the driving connecting member may be included.
In the present embodiment, the driving source may include a plurality of driving units and a plurality of driving units and the moving unit is distinguished from and arranged to be spaced apart from the plurality of driving units and the moving unit.
In this embodiment, the driving source includes a rotating member, and the rotating member is connected in direct contact with the single type of driving connecting member so that the rotational force of the rotating member is transmitted to the single type of driving connecting member. may include
In the present embodiment, the driving connecting member may include one that is disposed between the moving part and the target material and overlaps with one region based on a longitudinal direction of the lift pin or the clamp part.
In this embodiment, the guide support member is disposed between the moving part and the target material, and may include one that is disposed to overlap one area with respect to the longitudinal direction of the lift pin or the clamp part.
In this embodiment, it further includes a cover unit and a base unit respectively disposed on the upper and lower sides of the exercise unit, the exercise unit may include moving between the cover unit and the base unit.
In this embodiment, the driving unit may include a structure disposed between the cover unit and the base unit to be connected to the cover unit and the base unit.
In this embodiment, the driving connecting member may include a one disposed between the cover unit and the base unit.
In this embodiment, the guide support member may include being connected to one surface of the cover unit or the base unit.
Other aspects, features and advantages other than those described above will become apparent from the following drawings, claims, and detailed description of the invention.

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The lift drive assembly according to the present invention can easily improve exhaust characteristics.

1 is a schematic cross-sectional view showing a lift driving assembly according to an embodiment of the present invention.
FIG. 2 is an exemplary enlarged view of a region of the lift driving assembly of FIG. 1 .
3 to 5 are views showing various examples of the moving part of the lift driving assembly according to an embodiment of the present invention.
6 is a view illustrating an example of a driving unit of a lift driving assembly according to an embodiment of the present invention.
7 and 8 are views illustrating an example of driving the lift driving assembly of FIG. 1 .
FIG. 9 is an exemplary perspective view of the lift drive assembly of FIG. 1 ;
FIG. 10 is a view illustrating a state in which one region is removed for explanation of FIG. 9 .
11 is a plan view viewed from one direction of FIG. 10 .

Hereinafter, the configuration and operation of the present invention will be described in detail with reference to the embodiments of the present invention shown in the accompanying drawings.

Since the present invention can apply various transformations and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and a method for achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when described with reference to the drawings, the same or corresponding components are given the same reference numerals, and the overlapping description thereof will be omitted. .

In the following embodiments, terms such as first, second, etc. are used for the purpose of distinguishing one component from another, not in a limiting sense.

In the following examples, the singular expression includes the plural expression unless the context clearly dictates otherwise.

In the following embodiments, terms such as include or have means that the features or components described in the specification are present, and the possibility that one or more other features or components will be added is not excluded in advance.

In the drawings, the size of the components may be exaggerated or reduced for convenience of description. For example, since the size and thickness of each component shown in the drawings are arbitrarily indicated for convenience of description, the present invention is not necessarily limited to the illustrated bar.

In the following embodiments, the x-axis, the y-axis, and the z-axis are not limited to three axes on a Cartesian coordinate system, and may be interpreted in a broad sense including them. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may refer to different directions that are not orthogonal to each other.

In cases where certain embodiments may be implemented otherwise, a specific process sequence may be performed different from the described sequence. For example, two processes described in succession may be performed substantially simultaneously, or may be performed in an order opposite to the order described.

FIG. 1 is a schematic cross-sectional view showing a lift driving assembly according to an embodiment of the present invention, and FIG. 2 is an enlarged view illustrating an area of the lift driving assembly of FIG. 1 .

The lift driving assembly 100 of the present embodiment may include one or more lift pins 110A and 110B, one or more clamping units 120A and 120B, a moving unit 130 , and a driving unit 150 .

As an example, when the one or more lift pins 110A and 110B and the one or more clamp parts 120A and 120B are disposed, the one or more clamp parts 120A and 120B are disposed outside the one or more lift pins 110A and 110B. can be As a specific example, one or more clamp parts 120A and 120B may be disposed to be farther than one or more lift pins 110A and 110B from the center of the target material TS.

The lift drive assembly 100 described herein may be used for a variety of applications. It can be used for performing a semiconductor process on a target material (TS) such as a substrate including a wafer by introducing one or more gases, and can be used for various purposes such as an etching process, a cleaning process, an ashing process, a deposition process, or an ion implantation process. can be applied to the field.

Also, as an example, the material to be processed TS may include a tray on which a substrate is mounted.

The material to be treated TS may be disposed in the arrangement unit SPC. For example, the upper surface of the arrangement unit SPC may have a shape supporting the material to be processed TS. As a specific example, the placement unit SPC may be a chuck that supports the material to be treated TS.

One or more lift pins 110A and 110B may be formed to support the material to be processed TS. For example, one or more lift pins 110A and 110B are disposed at a position overlapping the target material TS, and at least at a certain point in time, specifically, from the arrangement unit SPC to load or unload the target material TS. It may be formed so as to support the lower surface of the material to be treated (TS) during the upward movement that separates the material to be treated (TS).

The one or more lift pins 110A and 110B may include a plurality of pins, for example, a first lift pin 110A and a second lift pin 110B disposed to be spaced apart from each other. As a specific example, the first lift pin 110A and the second lift pin 110B may be disposed to face each other with the separation space SA positioned inside the movement unit 130 therebetween.

As an optional embodiment, the first lift pin 110A and the second lift pin 110B may be disposed to face each other with a region including the center of the material to be treated TS therebetween, and as an example, the material to be treated It may be arranged at a position symmetrical with respect to the center of (TS).

The one or more lift pins 110A and 110B may have various shapes capable of supporting the material TS, for example, one end is connected to the moving unit 130, and the material to be processed ( It may have a structure elongated in a direction toward TS).

Also, the one or more lift pins 110A and 110B may correspond to and overlap the placement unit SPC when supporting the material TS to be processed, and may be disposed to penetrate, for example.

As an optional embodiment, each of the one or more lift pins 110A and 110B may be formed to have two members that are separated from each other and disposed to be spaced apart from each other. For example, the first lift pin 110A or the second lift pin 110B includes a lower member 111 and an upper member 112 , and the lower member 111 is connected to the moving part 130 , and the upper member Reference numeral 112 may be disposed on the upper side of the lower member 111 at a position distinct from and overlapping with the lower member 111 . Accordingly, the movement of the moving unit 130, for example, the lower member 111 and the upper member 112 can be spaced apart when descending, and when the moving unit 130 rises, the lower member 111 is moved to the upper member 112 ) and can exercise together.

For movement in this configuration, one or more of the lift pins 110A, 110B and the placement unit SPC may have various exemplary configuration changes, and as a specific example, as shown in FIG. 2 , the placement unit SPC is It may include a through portion SPH formed to extend upwardly from the lower end and a locking portion SPT connected to the through portion SPH. For example, the locking part SPT may have a larger area than the through part SPH and may be formed to have a stepped shape.

An extended portion 112H may be formed at an upper end of the upper member 112 of the one or more lift pins 110A, 110B, and the expanded portion 112H may be formed in another area of the upper member 112, for example, an extended portion ( 112H) may have a shape having a greater width than a region adjacent to the lower side. Through this, the extended portion 112H of the upper member 112 may be supported by the locking portion SPT, the lower member 111 does not support the upper member 112 and the lower member 111 does not support the upper member (SPT). 112) and the upper member 112 in a spaced state may maintain a position.

One or more clamping units 120A and 120B may be formed to fix the material to be processed TS. For example, the one or more clamping units 120A and 120B has one region supporting the upper surface of the target material TS, specifically, the surface opposite to the surface facing the placement unit SPC among the surfaces of the processing target material TS. can be formed to do so.

To this end, the one or more clamp parts 120A and 120B may have various morphological structures, for example, may be formed to include an extension part 121 and a fixing part 122, respectively.

Each of the extension portions 121 of the one or more clamping portions 120A and 120B is formed such that one end is connected to the moving portion 130 .

Each fixing part 122 of the one or more clamping parts 120A and 120B is connected to the extension part 121, and at least one area of the fixing part 122 faces one area of the upper surface of the processing target material TS. For example, one region of the fixing part 122 may be formed to contact or apply pressure to the upper surface of the material to be processed TS.

As an optional embodiment, each of the fixing parts 122 of the one or more clamping parts 120A and 120B may have a form connected to each other for effective support for the target material TS, for example, one or more clamping parts ( It may have an extended shape to correspond in common to 120A and 120B, and may be formed to include a ring-like shape (eg, as shown in FIG. 9 ) as a specific example.

A contact or pressure may be applied to the upper surface of the target material TS through one or more clamping units 120A and 120B, and an appropriate fixing process for the target material TS may be easily performed.

The one or more clamping parts 120A and 120B may include a plurality of clamping parts, for example, a first clamping part 120A and a second clamping part 120B being spaced apart from each other. As a specific example, the first clamp unit 120A and the second clamp unit 120B may be disposed to face each other with the separation space SA positioned inside the exercise unit 130 therebetween.

As an optional embodiment, the first clamp part 120A and the second clamp part 120B may be disposed to face each other with a region including the center of the processing target material TS therebetween, and as an example, the processing target material It may be arranged at a position symmetrical with respect to the center of (TS).

In addition, as an example, the one or more clamping parts 120A and 120B may be disposed to be spaced apart from the one or more lift pins 110A and 110B, and as a specific example, the one or more clamping parts 120A and 120B may be arranged in a placement unit (SPC). It is disposed to be spaced apart from and at least the extension part 121 may be formed to be disposed around the placement unit SPC.

The movement unit 130 may be formed such that one or more lift pins 110A and 110B and one or more clamp portions 120A and 120B are commonly connected, for example, one or more lift pins 110A and 110B and one or more clamps. The parts 120A and 120B may be disposed to overlap the exercise part 130 .

Through this, one or more lift pins 110A, 110B and one or more clamps 120A, 120B when the movement unit 130 moves, for example, an upward movement in a direction toward the placement unit SPC and a downward movement in a direction away from it. ) can be moved at the same time, for example, it can be controlled to move up and down.

The moving part 130 may have various shapes, for example, it may have a shape similar to a plate to have an area overlapping with one or more lift pins 110A and 110B and one or more clamp parts 120A and 120B, through which Precise control characteristics can be improved during ascending and descending movements.

In addition, as an optional embodiment, the exercise unit 130 may be formed such that a spaced space SA is defined in an area adjacent thereto, for example, an inner area. It can correspond to an empty space without doing it. As a specific example, the separation space SA may have a shape that does not overlap an area including the central point of the arrangement unit SPC.

3 to 5 are views showing various examples of the moving part of the lift driving assembly according to an embodiment of the present invention.

For example, FIG. 3 is a plan view viewed from the direction K of FIG. 1 , and for convenience of explanation, other members except for the moving part 130 may not be shown.

Referring to FIG. 3 , the exercise unit 130 includes a first area 131 and a second area 132 disposed to face each other with the separation space SA interposed therebetween, and a first area in the first area 131 is provided. The lift pin 110A and the first clamp unit 120A may be connected to each other, and the second lift pin 110B and the second clamp unit 120B may be connected to the second region 132 .

In addition, as an optional embodiment, as shown in FIG. 4 , a connection area connecting the first area 131 and the second area 132 disposed to face each other with the separation space SA of the exercise unit 130 interposed therebetween. 130B. Through this structure, it is possible to effectively control the movement of the exercise unit 130, for example, it is possible to precisely control the upward and downward movement while maintaining a horizontal state.

In addition, as another optional embodiment, referring to FIG. 5 , the exercise unit 130 includes a first area 131 and a second area 132 disposed to face each other with the separation space SA interposed therebetween, and the first A third region 133 connecting the first region 131 and the second region 132 may be included between the region 131 and the second region 132 . For example, the first area 131 , the second area 132 , and the third area 133 may be arranged around the separation space SA. As a specific example, the separation space SA may be surrounded by the movement unit 130 , and may have an open shape in an area in which one side of the first area 131 and one side of the second area 132 face each other.

At least one lift pin 110A, 110B, 110C and at least one clamp unit 120A, 120B, 120C are disposed to be spaced apart from each other in the first area 131 , the second area 132 , and the third area 133 . can As a specific example, the first lift pin 110A and the first clamp unit 120A are disposed to be connected to the first region 131 , and the second lift pin 110B and the second clamp unit are connected to the second region 132 . The 120B may be connected to each other, and the third lift pin 110C and the third clamp unit 120C may be connected to the third region 133 .

Through this configuration, it is possible to increase the effect of improving the balance of the movement of the exercise unit 130 .

As an optional embodiment, the first lift pins 110A, the second lift pins 110B, and the third lift pins 110C are disposed at positions symmetrical with respect to the center of gravity during the rising and falling motions of the exercise unit 130 and , the first clamp unit 120A, the second clamp unit 120B, and the third clamp unit 120C may be disposed at positions symmetrical with respect to the center of gravity.

In addition, as an optional embodiment, the first lift pin 110A, the second lift pin 110B, and the third lift at positions symmetrical with respect to the center of gravity of the placement unit SPC during the rising and falling motions of the exercise unit 130 . The pin 110C is arranged, and the first clamp unit 120A, the second clamp unit 120B, and the third clamp unit 120C are arranged at positions symmetrical with respect to the center of gravity of the arrangement unit SPC. can

As an optional embodiment, the separation space SA may be an area in which a flow path is formed to allow one or more gases to pass therethrough, and may correspond to, for example, an exhaust flow path. As a specific example, it may be an area corresponding to a flow path through which one or more gases used in one or more treatments of the material to be treated TS pass.

Through this, it is possible to easily form an exhaust flow path during the treatment process of the target material TS in which the lift driving assembly 100 is used, for example, downward exhaust, specifically, overlapping the target material TS and avoiding the target material TS. The formation of the exhaust passage in a direction away from the lower surface of the treatment material TS may be easily performed, and driving control of the motion unit 130 may be facilitated together with the formation of the exhaust passage.

Through this, one or more lift pins (eg, 110A, 110B, 110C in FIG. 5) and one or more clamp parts (eg, 120A, 120B, 120C in FIG. 5) are easily disposed on the moving part 130, and downward direction Movement for the treatment of the material to be treated (TS) while reducing or preventing the interference with the exhaust flow path to ) can control safe and precise ascending and descending movements.

The driving unit 150 may be formed to provide a driving force to the exercise unit 130 . The driving unit 150 may provide a driving force to smooth the upward movement and downward movement of the movement unit 130 , for example, in a direction closer to the placement unit SPC and in the opposite direction, and may provide a driving force in various ways. can provide

As an example, the driving unit 150 may be connected to one or more motor members or may be formed to include a motor member to transmit a driving force to the exercise unit 130 .

As an optional embodiment, the driving unit 150 may cause the movement unit 130 to move upward and downward by using a rotational driving force, for example, the driving unit 150 may transmit the driving force to the movement unit 130 in the form of a rotational motion. And, as an example, it may have a shape including a screw member.

In addition, as a specific example, the driving unit 150 may be disposed at a plurality of positions spaced apart from each other and formed to rotate, respectively, and transmit a driving force through the plurality of rotational movements to the exercise unit 130 to the exercise unit 130 . can make you exercise.

In addition, as an example, the driving unit 150 may control the precise movement of the moving unit 130 by transmitting a driving force to the moving unit 130 using a continuous drive connection type member such as a belt or a chain.

6 is a view illustrating an example of a driving unit of a lift driving assembly according to an embodiment of the present invention.

Referring to FIG. 6 , the driving unit 150 may include a shape formed to rotate in the rotational direction R1 , and as an example, at least one area of the outer surface of the driving unit 150 on the surface corresponding to the moving unit 130 . A screw member shape may be formed.

A driving force through movement in the rotational direction R1 and the opposite direction of the driving unit 150 may be transmitted to the moving unit 130 to cause the moving unit 130 to move upward or downward. The driving unit 150 may be disposed to overlap the exercise unit 130 or to penetrate the moving unit 130 to effectively transmit a driving force through the rotation of the driving unit 150 to the exercise unit 130 .

In addition, as a specific example, the driving unit 150 may move while being connected to the base unit (BTU), and during the rotational movement of the driving unit 150, the driving unit 150 and the base unit (BTU) do not ascend and descend without moving. The exercise unit 130 connected to the driving unit 150 can perform upward and downward movements, thereby reducing or preventing unnecessary vibration or shaking during the movement of the exercise unit 130, thereby improving precise motion control characteristics.

In this case, the driving unit 150 may overlap the moving unit 130 . In addition, the driving unit 150 and the base unit (BTU) may be arranged so as to not overlap at least a spaced apart space (eg, SA of FIGS. 2 to 5 ).

Through this, in the lift driving assembly 100 of the present embodiment, one or more lift pins 110A, 110B, 110C and one or more clamp parts 120A, 120B, 120C are raised and lowered by the movement of the moving part 130 in a downward direction. It is possible to increase the effect of reducing or preventing interference with the exhaust passage.

7 and 8 are views illustrating an example of driving the lift driving assembly of FIG. 1 . For convenience of description, the target material TS and the driving unit 150 are omitted in FIGS. 7 and 8 .

Referring to FIG. 7 , the movement unit 130 moves upward by D1, and accordingly, one or more clamp units 120A and 120B may rise to have a gap H1 with the placement unit SPC, and at least one lift pin ( The lower member 111 and the upper member 112 of 110A and 110B may be connected.

Referring to FIG. 8 , the exercise unit 130 rises by D2, and D2 may have a larger value than D1 of FIG. 7 . Accordingly, one or more clamp parts 120A and 120B are raised to have a spacing H2 with the arrangement unit SPC, and the spacing H2 may be larger than the spacing H1 of FIG. 7 . In this case, an area on the upper side of the one or more lift pins 110A and 110B, for example, an area including the end of the upper member 112 may protrude to the upper portion of the placing unit SPC, and thus the material to be treated Support and lift for (TS) can be easily performed.

FIG. 9 is an exemplary perspective view of the lift drive assembly of FIG. 1 ;

FIG. 10 is a view illustrating a state in which one region is removed for explanation of FIG. 9 , and FIG. 11 is a plan view viewed from one direction of FIG. 10 .

Referring to FIG. 9 , the lift driving assembly 100 may include a cover unit TPU, a base unit BTU, an exercise unit 130 , and a driving unit 150 . For convenience of description, FIG. 10 is illustrated by removing the cover unit (TPU), the base unit (BTU), and the fixing part 122 , and FIG. 11 is illustrated by removing the cover unit (TPU).

In addition, for the convenience of description, the material to be treated or the arrangement unit is not shown and a detailed description thereof is omitted.

The movement unit 130 may move upward and downward, for example, in the Z-axis direction of FIGS. 9 and 10 . As a specific example, the exercise unit 130 may move between the cover unit TPU and the base unit BTU, and may move along the plurality of driving units 150 while being connected to the driving unit 150 .

The exercise unit 130 may have a form that surrounds at least both sides with a spaced space SA, and as a specific example, an area of one side has an open shape while surrounding the spaced space SA, and an open area of one side is a spaced apart space (SA) may be formed to be connected. Through this, it is possible to easily form an exhaust flow path downward corresponding to the separation space SA, and it is possible to improve the convenience of access and management to the separation space SA.

As an optional embodiment, the movement unit 130 may be formed to define a space SA similar to a quadrangle, for example, may have a region having inner edges parallel to each other on both sides and a region connecting therebetween, As a specific example, it may be formed to have a region having a shape similar to that of a “c”.

At least one lift pin (110A, 110B, 110C) and at least one clamp unit (120A, 120B, 120C) may be arranged to be connected to a plurality of regions different from each other of the movement unit 130, for example, the movement unit 130 and They may be arranged to overlap. The one or more lift pins 110A, 110B, 110C and the one or more clamp parts 120A, 120B, 120C can easily perform upward and downward movements simultaneously through the upward and downward movement of the exercise unit 130 .

At least one lift pin (110A, 110B, 110C) and one or more clamp units (120A, 120B, 120C) in the movement unit 130 may be disposed at a position surrounding the separation space (SA), for example, one side The first lift pin 110A and the first clamp portion 120A are disposed adjacent to each other and the second lift pin 110B and the second clamp portion ( 120B) may be disposed adjacent to each other.

And between the area in which the first lift pin 110A and the first clamp unit 120A are arranged and the area in which the second lift pin 110B and the second clamp unit 120B are arranged in the area of the movement unit 130 . A third lift pin 110C and a third clamp unit 120C may be disposed in the curved region connecting both regions.

In an alternative embodiment, each of the one or more lift pins 110A, 110B, and 110C may be disposed to be at the same distance from the center point of one area, for example, the placement unit SPC. Also, as an alternative embodiment, each of the one or more lift pins 110A, 110B, 110C may have a planar arrangement similar to a triangle, specifically, an equilateral triangle.

In addition, as another example, each of the one or more clamping units 120A, 120B, and 120C may be arranged to be at the same distance from the center point of an area, for example, the placement unit SPC. Also, as an optional embodiment The one or more clamping units 120A, 120B, and 120C may have a planar arrangement similar to a triangle, for example, an equilateral triangle.

The exercise unit 130 may move upward and downward through the driving unit 150 . The driving unit 150 may transmit a driving force to the moving unit 130 in various ways. For example, the driving unit 150 may have a rotational motion, and as a specific example, it is disposed to be spaced apart from each other and has a thread at least on the side surface. It may be a screw member type.

As an example, a plurality of driving units 150 may be arranged in plural, specifically, three spaced apart from each other to each rotate and each has a screw surface formed in at least one area of a side surface corresponding to the moving unit 130 . It may be a screw member type.

The three driving units 150 may be connected to the exercise unit 130 and disposed to overlap the exercise unit 130 . The driving unit 150 is disposed to be spaced apart from each of the at least one lift pin 110A, 110B, 110C and the at least one clamp unit 120A, 120B, 120C, and one or more lift pins 110A, 110B, 110C and one or more It is possible to smoothly maintain the respective motions of the clamp units 120A, 120B, and 120C.

The plurality of driving units 150 may be disposed in various positions, and the two driving units 150 may be disposed on both sides of the moving unit 130 facing each other with the separation space SA therebetween. It can be arranged in a symmetrical position as In addition, the other driving unit 150 may be disposed on the exercise unit 130 to correspond to the region therebetween, and as a specific example, may be disposed at the same distance from the other two driving units 150 on both sides. Through this, when the driving force is transmitted to the exercise unit 130 through the driving unit 150, the uniformity of the driving force transmission can be improved to improve the control precision of the motion of the exercise unit 130, and the movement unit 130 maintains a horizontal level during the ascending and descending motions. ability can be improved.

As an optional embodiment, the plurality of driving units 150 may be connected to each other by a driving connecting member DBT. The driving connecting member DBT may be formed to continuously move in one direction and the opposite direction, and may have, for example, a chain or belt type structure.

When the driving connecting member DBT moves in one direction, a plurality of driving units 150 connected thereto, for example, three driving units 150 arranged to be spaced apart from each other, rotate along the direction of the driving connecting member DBT. Also, a driving force is transmitted to the exercise unit 130 through this rotational movement, so that the exercise unit 130 can perform upward and downward movements.

For precise control of this movement, the driving unit 150 may be connected to the base unit (BTU), which is the reference point of the movement, and through this, the driving unit 150 is rotated during the rotational movement of the driving unit 150 without moving up and down the movement unit connected thereto. By controlling the 130 to move upward and downward, vibration and noise generation during the movement of the exercise unit 130 may be reduced or prevented.

The movement unit 130 may have various shapes so as to receive the rotational motion of the driving unit 150 as a driving force to perform upward and downward movements. It may have a corresponding form.

As an alternative embodiment, the drive connecting member DBT may be connected to the drive source DMT, for example, the drive source DMT may be a motor that provides rotational force. The driving connecting member DBT may continuously and easily move through the driving source DMT, and thus the plurality of driving units 150 may be easily rotated.

In an optional embodiment, the driving source DMT may include a rotation member DAS connected to the driving connecting member DBT in direct contact with the rotating member DAS. The rotation member DAS may be connected to the driving source DMT to receive a driving force from the driving source DMT, and may be formed to transmit the received driving force to the driving connection member DBT.

The driving source DMT may be disposed to be spaced apart from the exercise unit 130 to improve precise control characteristics of the movement of the exercise unit 130 , and to improve leveling ability and low vibration characteristics during exercise. For example, the driving source DMT may be disposed to be spaced apart from the movement unit 130 and connected to the base unit BTU. Through this, the driving source DMT is operated while being fixed to the base unit BTU, thereby improving the quietness and precision control ability of the driving force transmission of the driving source DMT.

In an alternative embodiment, one or more guide support members AST may be disposed to support and guide the drive connecting member DBT. For example, a plurality of guide support members AST may be disposed. The plurality of guide support members AST can guide while supporting the movement of the drive connecting member DBT without limiting it, and can control the position of the drive connecting member DBT, for example, the drive connecting member DBT ( The path of DBT) may be arranged to be bent at a predetermined angle.

Through this, the plurality of guide support members AST can easily control the path or the area in which the driving connecting member DBT is disposed, for example, the driving connecting member DBT is the moving part 130 or the base unit BTU. ) overlapping the moving unit 130 or the base unit (BTU) and can be controlled to be arranged in a non-overlapping position with the separation space (SA).

The plurality of guide support members AST may be disposed in various places. For example, the plurality of guide support members AST may be disposed to be spaced apart from the movement unit 130 and connected to one surface, for example, a lower surface of the cover unit TPU. Through this, it is possible to prevent unnecessary contact or noise generation during the movement of the exercise unit 130 .

In an optional embodiment, the rotation member DAS connected to the drive source DMT may have a function of the guide support member AST and guide the path of the drive connection member DBT.

In addition, the position and number of the plurality of guide support members AST may be determined in various ways, and the plurality of driving units 150 are disposed to be adjacent to each other at positions spaced apart from each other so as to be adjacent to each other to determine the path of the driving connecting member DBT and the arrangement thereof. The position can be controlled, for example, various arrangements can be controlled so that the driving connecting member DBT avoids the separation space SA and does not overlap.

Through this, the lift driving assembly 100 of the present embodiment easily forms an exhaust flow path corresponding to the separation space SA, and one or more lift pins 110A, 110B, 110C and One or more lift pins 110A, 110B, 110C and one or more lift pins 110A, 110B, 110C and one or more while reducing or preventing interference or restriction in the exhaust flow path through the upward and downward movement of the movement unit 130 while the one or more clamping units 120A, 120B, and 120C are positioned The clamp portions 120A, 120B, and 120C can be easily moved up and down in one piece.

One or more lift pins 110A, 110B, 110C and one or more clamp parts 120A, 120B, 120C can be disposed and moved while easily forming an exhaust flow path to correspond to the area overlapped with the material to be treated TS. It is possible to improve space use efficiency of a device to which the driving assembly 100 is applied, and to improve the convenience of designing a compact device.

In addition, since the exercise unit 130 commonly connected to one or more lift pins 110A, 110B, 110C and one or more clamp units 120A, 120B, 120C receives driving force through the plurality of driving units 150 during movement, the exercise unit It is possible to improve the stability and leveling ability of the ascending and descending movement of 130 .

Meanwhile, a driving connecting member DBT such as a belt connecting the plurality of driving units 150 may be disposed, for example, one driving connecting member DBT integrally connected to all three driving units 150 . It may be arranged to be connected. Through this, it is possible to improve the uniformity of the motion of the driving unit 150 , and thereby reduce the bias to one side during the motion of the exercise unit 130 , thereby increasing the uniformity of motion and the ability to maintain a level.

As an optional embodiment, when the driving connecting member DBT is disposed, the path of the driving connecting member DBT may be easily controlled by using the plurality of guide supporting members AST. For example, it may be connected to the plurality of driving units 150 while bending the path of the driving connecting member DBT in at least one region. Through this, the driving connecting member DBT may be disposed so as not to overlap with the separation space SA, and the path and arrangement area of the driving connecting member DBT may be effectively reduced.

As a result, it is possible to easily form an exhaust flow path downward to correspond to the separation space SA, and it is possible to easily improve the freedom and convenience of compact design of the lift driving assembly 100 and an apparatus using the same.

As such, the present invention has been described with reference to the embodiments shown in the drawings, which are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. . Accordingly, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

The specific implementations described in the embodiment are only embodiments, and do not limit the scope of the embodiment in any way. In addition, unless there is a specific reference such as "essential", "importantly", etc., it may not be a necessary component for the application of the present invention.

In the specification of embodiments (especially in the claims), the use of the term “the” and similar referential terms may be used in both the singular and the plural. In addition, when a range is described in the embodiment, it includes the invention to which individual values belonging to the range are applied (unless there is a description to the contrary), and each individual value constituting the range is described in the detailed description. . Finally, the steps constituting the method according to the embodiment may be performed in an appropriate order, unless the order is clearly stated or there is no description to the contrary. The embodiments are not necessarily limited according to the order of description of the above steps. The use of all examples or exemplary terms (eg, etc.) in the embodiment is merely for describing the embodiment in detail, and unless it is limited by the claims, the scope of the embodiment is limited by the examples or exemplary terminology. it is not In addition, those skilled in the art will appreciate that various modifications, combinations, and changes may be made according to design conditions and factors within the scope of the appended claims or equivalents thereof.

100: lift drive assembly 110A: first lift pin
110B: second lift pin 110C: third lift pin
111: lower member 112: upper member
112H: extended portion 120A: first clamp portion
120B: second clamp unit 120C: third clamp unit
121: extended portion 122: fixed portion
130: exercise unit 130B: connection area
131: first area 132: second area
133: third area 150: driving unit
SPC: batch unit TS: material to be treated
SA: separation space BTU: base unit
TPU: Cover unit DBT: Drive connection member
DMT: drive source DAS: rotating member
AST: Guide support member SPH: Penetration
SPT: catch

Claims (19)

one or more lift pins overlapping the target material and disposed to support the target material;
one or more clamps arranged to be spaced apart from the lift pins;
an exercise unit connected to the lift pin and the clamp unit in common and configured to move upward and downward; and
a plurality of driving units connected to the moving unit to provide a driving force to the moving unit and spaced apart from each other;
a driving connecting member formed to connect the plurality of driving units; and
a plurality of guide support members configured to control the path and placement of the drive connecting members;
The drive connecting member has a single form that is connected in common to all of the plurality of drive units to move together,
The plurality of guide support members are disposed between at least two driving parts adjacent to each other among the plurality of driving parts so that a driving connecting member connected to the two driving parts adjacent to each other forms a curved path.
lift drive assembly. According to claim 1,
The moving part is formed to have regions disposed on both sides with at least an inner spaced therebetween, the lift driving assembly. 3. The method of claim 2,
The clamp portion and the lift pin are disposed in each of the regions disposed on both sides of the movement portion, lift driving assembly. 3. The method of claim 2,
Regions disposed on both sides of the moving part include those formed to be connected to each other. 3. The method of claim 2,
The lift driving assembly, including those arranged so that the driving unit does not overlap with the separation space. According to claim 1,
The driving unit includes a shape of a rotating member for rotational movement, and transmitting a driving force of the rotational movement to the moving unit. delete delete delete delete According to claim 1,
and a drive source provided separately from the drive connecting member and connected to the drive connecting member to provide a rotational force to the single type of the drive connecting member. 12. The method of claim 11,
and the drive source is distinct from the plurality of driving units and the moving unit and disposed to be spaced apart from the plurality of driving units and the moving unit. 12. The method of claim 11,
The drive source comprises a rotating member,
and the rotating member is formed to be directly contacted with and connected to the single-type driving connecting member so that the rotational force of the rotating member is transmitted to the single-shaped driving connecting member. According to claim 1,
The drive connecting member is disposed between the moving part and the target material and is disposed to overlap one area in a longitudinal direction of the lift pin or clamp part. According to claim 1,
The guide support member is disposed between the moving part and the material to be processed, and is disposed to overlap one area with respect to the length direction of the lift pin or the clamp part. According to claim 1,
Further comprising a cover unit and a base unit respectively disposed on the upper side and the lower side of the exercise unit,
The moving part comprises moving between the cover unit and the base unit, the lift driving assembly. 17. The method of claim 16,
The drive unit comprises a portion disposed between the cover unit and the base unit to be connected to the cover unit and the base unit. 17. The method of claim 16,
and the drive connecting member is disposed between the cover unit and the base unit. 17. The method of claim 16,
The guide support member includes being connected to one surface of the cover unit or the base unit, the lift driving assembly.

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