KR20080053572A - Apparatus driving lift pin and device having it for manufacturing fpd - Google Patents

Abstract

A lift pin driving device and an apparatus for manufacturing a flat display device using the same are provided to accurately perform the lifting motion of lift pins by constantly adjusting tension of timing belts. A substrate is loading on a loading member, and plural lift pins penetrate the loading member to lift the substrate. The lift pins are installed on a pin plate which is lifted by a driving unit. The driving unit has a driving motor and plural pulleys coupled to a power transmission and driven by the driving motor. Tension of the power transmission is adjusted by a tensioner(200). The tensioner closely contacts a portion of the power transmission, and moves forward and backward. The tensioner has a tension roller(240) supporting a portion of the power transmission.

Description

Lift pin driving device and flat panel display device manufacturing apparatus having the same {Apparatus driving lift pin and device having it for manufacturing FPD}

1 is a cross-sectional view showing a configuration of a process chamber conventionally equipped with a lift pin drive device.

Figure 2 is a schematic perspective view of the lift pin drive in Figure 1;

Figure 3 is a cross-sectional view showing a problem of the conventional lift pin drive.

4 is a configuration diagram showing a configuration of a process chamber to which a lift pin driving device according to the present invention is applied.

5 is a perspective view showing the configuration of the lift pin driving device in FIG.

Figure 6 is a perspective view of a tensioner applied to the lift pin drive according to the present invention, Figure 6a is a front perspective view, Figure 6b is a rear perspective view.

7 is a front view of FIG. 6;

8 is a front view showing that the tensioner in FIGS. 6 to 7 is configured in two stages.

Figure 9 is a front view showing another embodiment of a tensioner applied to the lift pin drive device according to the present invention.

10 is a front view showing that the tensioner is composed of two stages in FIG.

<Description of the symbols for the main parts of the drawings>

50 chamber 52 upper electrode

54: lower electrode 60: lift pin

64: pin plate 66: female thread

100: lift pin drive device 102: drive motor

106: ball screw 110,120,130,140: pulley

150,152,154,156: timing belt 200: tensioner

210: fixing bracket 216: female thread

218: guide hole 240: tension roller

242: roller portion 244: sag prevention portion

The present invention relates to a lift pin module that drives a timing belt by using a single motor so that the entire pin can be lifted at the same time and accurately. More specifically, the lift pin can be more precisely prevented by sagging of the timing belt. A lift pin driving device capable of lifting and lowering, and a flat panel display device manufacturing apparatus having the same.

In general, lift pins are used to load / unload semiconductor wafers, glass substrates, and the like onto a mounting table (or stage) in semiconductor manufacturing equipment, flat panel display device manufacturing apparatuses, and the like.

Since the configuration in which the lift pins are used may be similarly applied to semiconductor manufacturing equipment or a flat panel display device manufacturing apparatus, a lift pin and a device for driving the same will be described with reference to a structure configured in the flat panel display device manufacturing apparatus.

Background Art [0002] Flat panel displays, which are widely used in recent years, include liquid crystal displays, plasma display devices, and organic light emitting devices.

A flat panel display device manufacturing apparatus for manufacturing such a flat panel display device uses a vacuum processing device for the surface treatment of the substrate, etc. In general, a load lock chamber, a transfer chamber, a process chamber and the like are used.

The load lock chamber alternates between atmospheric pressure and vacuum state to accept an unprocessed substrate from the outside or to take out the processed substrate to the outside, and the transfer chamber transfers the substrate between the chambers. Is provided so as to transfer the substrate is scheduled for processing to the load lock chamber, the process chamber serves to form a film or etching on the substrate using a plasma or thermal energy in a vacuum atmosphere.

FIG. 1 is a view schematically showing a process chamber among the above-mentioned chambers. Referring to this, a lift pin lift driving structure according to the related art will be described below.

As shown in FIG. 1, the process chamber is provided with a gate 11 at one side thereof so as to be converted into a vacuum state, and thus a chamber 10 in which process processing is performed therein, and an upper portion of the inside of the chamber 10. An upper electrode 12 positioned in an area and a lower electrode 14 positioned below the upper electrode 12 and mounted on the substrate.

Here, the upper electrode 12 is provided with a shower head for injecting a process gas to the substrate (S).

In particular, the lower electrode 14 is provided with a plurality of lift pins 20 so as to raise and lower the substrate when loading / unloading the substrate S. To this end, a plurality of pin holes 16 are formed in the lower electrode 14 to allow the lift pins 20 to pass therethrough.

Accordingly, the lift pin 20 lifts and lowers the substrate S while the lift pin 20 moves up and down along the pin hole 16 or mounts the substrate S inserted into the chamber 10 on the lower electrode 14. Done.

That is, the lift pin 20 lifts the substrate S carried by the transport equipment outside the chamber 10 by a predetermined height, and then lowers the substrate S when the transport equipment moves out of the chamber 10. It serves to mount on the upper portion of the lower electrode 14, and when discharging the processed substrate to reverse the above it is to play a role to be transported out of the chamber 10 after lifting the substrate again.

The lift pins 20 serving as described above are lifted by the lift pin driver 30, and the lift pin driver 30 is configured to lift the plurality of lift pins 20 simultaneously.

To this end, the lift pin drive device 30 is provided with a pin plate 35 to which a plurality of lift pins 20 are fixed to the lower portion of the chamber 10, and the pin plate 35 is ball screw driven. It consists of a drive motor 32 and a ball screw 33 to be elevated by.

The lift pin driving device 30 uses two or more drive motors as shown in FIGS. 1 and 2 to uniformly and stably lift the plurality of lift pins 20 including the pin plate 35. .

That is, as the substrate of the flat panel display element to be surface treated is enlarged, the lift pin driving device is also enlarged. As a result, it is difficult to raise and lower the pin plate and the lift pin as a whole with one driving motor. Likewise, by installing two driving motors 32 and ball screws at both middle portions of the pin plate 35, the pin plate 35 can be lifted.

In the drawing, reference numeral 22 denotes a bellows that seals the lift pin 20 exposed between the bottom surface of the chamber 10 and the pin plate 35 to maintain a vacuum inside the chamber 10. .

However, the above-described lift pin drive device 30 of the prior art, in order to simultaneously lift and lift all the lift pins 20 to the correct height at the same time precisely control the drive motor, using two drive motors 32 Because of this, there is a problem that simultaneous control of two drive motors 32 for raising and lowering all the lift pins 20 to the same height is not easy.

Here, if the control of the two driving motors 32 is not accurate, and the pin plate 35 is inclined and lifted, a phase difference occurs between the lift pins 20, and the substrate S is moved in such a state. Loading / unloading may cause a problem in that the substrate S may be damaged by the lift pin 20 or the like, or a limit may be generated to perform a better substrate processing process.

Of course, the compensation control system for compensating the phase difference of the lift pins 20 as described above can be compensated for the control of the motor, but this leads to a problem that the overall control structure is more complicated, and the cost of the equipment also increases. .

In addition, the process chamber as described above may be classified into a plasma enhanced (PE) method and a reactive ion etching (RIE) method according to a plasma forming method. The RIE method is generally used to apply electric power to a lower space of a chamber. The module is installed. Therefore, the configuration in which the two drive motors are installed in the lower space of the chamber is not easy to apply the RIE method, and even if applied to secure the space to install the electric module, such as a matching box as shown in FIG. In order to lift pin drive 30 must be further installed. In this case, since the length of the lift pin 20 as well as the bellows 22 is greatly increased, the cost of the lift pin driving system is remarkably unstable as well as expensive bellows are used.

As a result, the conventional lift pin driving device 30 as described above is to lift and lift the lift pins 20 by using the plurality of driving motor 32, not only the control operation of the two driving motor 32 is easy In addition, the lower structure of the chamber 10 is complicated, so that the layout design of the parts R is disadvantageous, and there are limitations in configuring the process equipment in various ways, and the cost of the equipment is increased, which is disadvantageous in cost reduction. .

The present invention has been made to solve the above problems, by using a single motor configured to be able to lift and lift the entire lift pin at the same time, the drive control is easy, the lifting operation of the lift pin can be made more accurately It is an object of the present invention to provide a lift pin driving device and a flat panel display device manufacturing apparatus having the same.

In addition, the present invention by installing a single motor in the edge region of the pin plate to avoid the lower center space of the chamber, it is possible to implement a variety of layout configuration of the chamber lower space, reducing the overall manufacturing cost of equipment to reduce the cost Another object of the present invention is to provide a lift pin driving device that can contribute and a flat panel display device manufacturing device having the same.

In particular, the present invention by the tensioner for adjusting the tension of the timing belt which is driven in conjunction with one motor to prevent the sagging of the timing belt at the same time, by precisely adjusting the tension of the timing belt to eventually lift the entire lift It is another object of the present invention to provide a lift pin drive device and a flat panel display device manufacturing device having the same, in which pins can be raised and lowered at the same time.

Lift pin drive device of the present invention for achieving the above object, the mounting means is mounted to the substrate; A plurality of lift pins disposed through the mounting means to lift and lower the substrate; A pin plate on which the lift pins are installed and lifted up and down; A driving means for elevating the pin plate, the driving motor comprising a plurality of pulleys connected to and interlocked with a power transmission means according to the driving of the driving motor; In order to adjust the tension of the power transmission means, it is in close contact with a part of the power transmission means, it is possible to include a tensioner having a tension roller to support the part of the power transmission means to prevent the deflection. It features.

In this case, the tensioner may include the tension roller, a moving bracket on which the tension roller is rotatably supported, a fixing bracket on which the moving bracket is installed to move back and forth, and the moving bracket from the fixed bracket in the front-rear direction. It is preferable that the configuration comprises a tension adjusting means for linear movement.

Here, the tension roller is preferably made of a roller portion which is in close contact with a part of the power transmission means, and a sag prevention portion formed under the roller portion but having a larger outer diameter than the roller portion.

In addition, the roller portion of the tension roller is formed in n stages, and the deflection prevention portion is formed in n stages, the n-stage roller portion is in close contact with each of a portion of the n-stage power transmission means located in the same vertical line. It is preferably configured to.

On the other hand, the tension roller may be formed of a roller portion in close contact with a portion of the power transmission means, and a sag prevention portion formed on the upper and lower portions of the roller portion and having a larger outer diameter than the roller portion.

In this case, the roller portion of the tension roller is formed in n stages, and the deflection prevention portion is formed in n + 1 stages, so that a portion of the n stage power transmission means positioned in the same vertical line is in close contact with each of the n stage roller portions. Preferably configured to be contactable.

Here, it is preferable that the power transmission means apply a timing belt.

On the other hand, a flat panel display device manufacturing apparatus having a lift pin driving apparatus according to the present invention, the chamber having a pin passage in the lower portion; A lower electrode formed to allow a substrate to be mounted in the chamber and having a plurality of pin passages formed therein; Means for driving a plurality of lift pins provided in the lower electrode pin passing portion of the chamber to be located in the lower space of the chamber to lift the substrate, characterized in that it comprises a lift pin drive device of the above configuration do.

In this case, it is preferable that an upper electrode is provided in the chamber so as to generate plasma while injecting a process gas to treat the surface of the substrate.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

4 to 5 are views illustrating a process chamber of a lift pin driving apparatus and a flat panel display device manufacturing apparatus including the same according to the present invention, and FIG. 4 illustrates a coupling relationship between the lift pin driving apparatus and the process chamber according to the present invention. FIG. 5 is a schematic view, and FIG. 5 is a perspective view illustrating a configuration of a lift pin driving device in FIG. 4.

As shown, the process chamber is provided with a chamber 50 made to process the surface of the substrate (S) in a vacuum atmosphere, the upper electrode 52 and the lower electrode 54 inside the chamber 50 It is arrange | positioned up and down.

Here, the upper chamber 52 is provided with a gate 51 for inputting and conveying the substrate S, and a shower head provided with a process gas for surface treatment of the substrate S.

The lower electrode 54 is a substrate mounting means, and is configured such that the substrate S to be surface treated is mounted on the upper portion thereof.

In particular, the lower electrode 54 is installed such that lift pins 60 for raising and lowering the substrate S are penetrated in the vertical direction during the substrate input and discharge process. The lower electrode 54 has a pin passing portion so that the lift pin 60 passes, and the pin passing portion is composed of pin holes 56 in the drawing.

A lift pin driver 100 for elevating the lift pins 60 is provided in the lower space of the chamber 50. Here, the pin 50 is formed in the chamber 50 so that the lift pin 60 extends to the lower portion of the chamber 50 to be operated by the lift pin driving device 100.

For reference, in the drawing, reference numeral 62 encloses the lift pin 60 exposed between the bottom surface of the chamber 50 and the pin plate 64 to maintain the vacuum state inside the chamber 50. Is the bellows.

The lift pin driving device 100 is basically a plurality of timing belts 150, 152, 154, 156, which are power transmission means, by one driving motor 102, to rotate the pulleys 110, 120, 130, and 140, thereby perpendicular to the top of the pulleys 110, 120, 130, and 140. As the ball screw 106 is installed to be configured to lift and lift the lift pins 60, such a configuration will be described in detail with reference to the drawings.

For reference, in describing the present invention, the power transmission means will be described as being a timing belt, but it will be apparent that the power transmission means may be various power transmission means known in the art such as a chain.

As shown in FIGS. 4 and 5, female threaded holes 66 are formed in each corner region of the pin plate 64 provided with the plurality of lift pins 60.

The female screw hole 66 is installed through the ball screw 106 having a predetermined length, the ball screw 106 is installed in the vertical direction on the upper end of each pulley (110, 120, 130, 140).

Accordingly, the pulleys 110, 120, 130, and 140 are rotatably supported under each corner region of the pin plate 64, and the pulleys 110, 120, 130, and 140 are adjacent to the pulleys and timing belts 150, 152, 154, and 156 which are power transmission means. Each is connected.

Among the pulleys 110, 120, 130, and 140, one driving motor 102 is installed at a position close to any one pulley 110, that is, the first pulley 110.

That is, a drive pulley 104 is installed on the shaft of the drive motor 102, and the drive pulley 104 is any of the pulleys 110, 120, 130, and 140 installed under each corner region of the pin plate 64. The first pulley 110, which is one pulley, is connected to the first timing belt 150.

The first pulley 110 is a first-stage pulley 112 to be connected as the driving pulley 104 and the first timing belt 150, and two consecutively located at the upper portion from the first-stage pulley 112. It consists of a single pulley 114 and a three-stage pulley 116 consists of a total of three stages.

In addition, the second pulley 120 positioned perpendicular to the first pulley 110 may be connected to the second pulley 114 and the second timing belt 152 of the first pulley 110. It consists of the two steps of pulleys 122 and the two-stage pulley 124 which is located in the upper part continuously from this one-stage pulley 122.

In addition, the third pulley 130 positioned in the horizontal direction with the second pulley 120 is connected to the second stage pulley 124 and the second timing belt 154 of the second pulley 120. The first pulley 132 and the fourth pulley 140 positioned in the horizontal direction are formed in the structure of the first pulley 132, the third pulley 116 and the fourth pulley 110 of the first pulley 110. It consists of a structure in which only one-stage pulley 142 for connecting as the timing belt 156 is formed.

On the other hand, the third pulley 130 and the fourth pulley 140 is shown as not connected to each other as a separate power transmission means, if necessary, the third pulley 130 and the fourth pulley 140, It is also possible to form separate stages and connect them with each other as a timing belt.

Here, the upper surface of the three-stage pulley 116 of the first pulley 110, the upper surface of the two-stage pulley 124 of the second pulley 120, the third pulley 130 and the fourth pulley 140 Since the first stage pulleys 132 and 142 are respectively positioned on the same horizontal plane, the ball screw 106 formed in the vertical direction on the upper surface thereof is also positioned on the same horizontal plane.

When the pulleys 110, 120, 130 and 140 are connected as the plurality of timing belts 150, 152, 154 and 156 as described above, the relationship in which the plurality of lift pins 60 are simultaneously lifted using one drive motor 102 will be described as follows. .

When the one driving motor 102 rotates in one direction, that is, the right direction, the first pulley 112 of the first pulley 110 connected as the driving pulley 104 and the first timing belt 150 is in the same direction. Rotate in the right direction.

Therefore, the two-stage pulley 114 and the three-stage pulley 116 formed on the same axis as the first-stage pulley 112 of the first pulley 110 also rotate in the same direction.

In addition, the first stage pulley 114 of the first pulley 110 and the second stage pulley 122 of the second pulley 120 connected as the second timing belt 152 also rotate in the right direction in the same direction. In addition, the two-stage pulley 124 formed on the same axis as the one-stage pulley 122 of the second pulley 120 is also rotated in the right direction in the same direction.

Therefore, the first pulley 110 and the second pulley 120 is rotated in conjunction with the right direction in the same direction.

In addition, the first pulley 132 of the second pulley 124 and the third pulley 130 connected as the third timing belt 154 of the second pulley 120 is also rotated in the right direction in the same direction. In addition, the first stage pulley 116 of the first pulley 110 and the fourth stage pulley 142 of the fourth pulley 140 connected as the fourth timing belt 156 also rotate in the right direction in the same direction.

Accordingly, the first pulley 110, the second pulley 120, the third pulley 130 and the fourth pulley 140 are rotated in the same direction by the rotation of one drive motor 102, respectively. By rotating at the same speed by the timing belts 150, 152, 154 and 156 which are the power transmission means connecting the pulleys 110, 120, 130 and 140, respectively, the ball screws 106 formed on the pulleys 110, 120, 130 and 140 rotate at the same speed. Will be

Accordingly, the ball screw 106 is rotated along the female threaded hole 66 formed in each corner region of the pin plate 64, thereby raising or lowering the pin plate 64, and thus the pin plate ( The plurality of lift pins 60 installed at regular intervals on the upper surface of the 64 pass through the pin holes 56 of the chamber 50 and the lower electrode 54, and thus the lift is performed accurately.

On the other hand, the timing belts 150, 152, 154 and 156, which are the power transmission means for connecting the pulleys 110, 120, 130 and 140, may be slumped down as the tension is loosened after a predetermined time elapses according to the material properties.

Accordingly, a tensioner 200 is provided to maintain the tension of the timing belts 150, 152, 154, and 156 at all times, and to prevent the timing belts from sagging down.

The tensioner 200 is installed in close proximity to one side of the timing belts 150, 152, 154, and 156 as shown in FIGS. 4 and 5 so as to maintain a uniform tension by applying a force to push one side of the timing belts inward. Will be done.

In other words, when the tension of the timing belts 150, 152, 154 and 156 is different from each other, the rotation speeds of the pulleys 110, 120, 130 and 140 connected by the timing belts are different from each other, and then the lifting and lowering is performed while the pin plate 64 does not maintain the correct level. As a result, since the substrate S is also not able to be raised and lowered in a precisely horizontal state, there is a problem in that the substrate is severely damaged or a limit is generated to perform a better substrate processing process. Is very important.

6A and 6B are enlarged perspective views of a tensioner having a very important function as described above, FIG. 6A is a front perspective view, FIG. 6B is a rear perspective view, and FIG. 7 is a front view for more accurately showing the internal structure of the tensioner.

As shown, the tensioner 200 is installed on one side of the timing belts 150, 152, 154, and 156 as power transmission means, and is fixed to the fixed bracket 210 and the inside of the fixed bracket 210 to move forward and backward. It includes a movable bracket 230, a tension adjusting means for moving the movable bracket 230 in the front and rear direction, and a tension roller 240 rotatably installed with respect to the movable bracket 230.

 The fixing bracket 210 is formed of a horizontal member 212 and the vertical member 214 in a substantially shape, and is installed in a fixed state by a separate support member (not shown), the movable bracket 230 is The upper horizontal member 232 and the lower horizontal member 234 and the vertical member 236 is formed in a substantially c shape.

On the other hand, the tension roller 240 is rotatably installed with respect to the upper horizontal member 232 and the lower horizontal member 234 of the movable bracket 230, the outside of the vertical member 214 of the fixing bracket 210 Tension adjusting means for linearly moving the movable bracket 230 is provided over the outer surface of the vertical member 236 of the movable bracket 230 from the side.

That is, the female screw hole 216 is formed in the vertical member 214 of the fixing bracket 210, and is provided with a length adjusting screw 250 of a predetermined length that rotates while being engaged with the female screw hole 216. .

The end of the length adjusting screw 250 is rotatably coupled to the outer surface of the vertical member 236 of the moving bracket 230 by a coupling means such as a pin.

Accordingly, as the length adjusting screw 250 rotates, the length adjusting screw 250 moves forward or backward along the female thread hole 216 of the fixing bracket 210, and moves the moving bracket 230 back and forth. Will be moved straight.

In addition, a plurality of guide holes 218 are formed at a predetermined interval in a position close to the female screw hole 216 of the fixing bracket 210, and the guide rod 252 having a predetermined length is formed in the guide hole 218. It is installed to pass through, the ends of the guide rods 252 is fixed to the outer surface of the vertical member 236 of the moving bracket 230.

The guide rod 252 is a linear movement while passing through the guide hole 218 of the fixing bracket 210 in accordance with the forward and backward movement of the moving bracket 230, the linear movement is moved without tilting the moving bracket 230 It is in charge of the function to make it happen.

Therefore, in the state where the tensioner 200 having the above configuration is installed on one side of the timing belts 150, 152, 154, and 156 which are power transmission means, to adjust the tension of the timing belts 150, 152, 154, 156, the length adjusting screw By rotating the 250, the tension roller 240 may be moved forward or backward.

That is, when one of the timing belts 150, 152, 154 and 156 has a loose tension in one of the timing belts, the tension adjusting screw 250 of the tensioner 200 may be rotated to move forward.

Then, the moving bracket 230 moves forward in accordance with the advancement of the length adjusting screw 250, and the tension roller 240 rotatably installed with respect to the moving bracket 230 also moves forward, thereby further improving the timing belt. When pressed, the tension is tightened.

However, the timing belts 150, 152, 154, and 156, whose tensions are controlled by the tensioner 200, are formed to have a long length, and thus may be sagging downward as the tension is loosened.

When the timing belts 150, 152, 154, and 156 sag downward as described above, power is not accurately transmitted between the pulleys 110, 120, 130, and 140 connected by the timing belts, and thus the rotation speed may be different.

That is, when the rotational speed of the pulleys 110, 120, 130 and 140 is different as described above, the pin plate 64 cannot be lifted to the horizontal state accurately. As a result, the substrate S itself cannot be lifted to the horizontal state precisely, so that the substrate is It may cause problems such as damage.

Thus, in the present invention, by forming the sag prevention portion in the upper and lower ends of the tension roller 240 of the tensioner 200, to prevent the above problems.

That is, as shown in FIGS. 6A to 7, the tension roller 240 includes a roller part 242 in which a part of the timing belts 150, 152, 154, and 156, which are power transmission means, comes into close contact with the lower part of the roller part 242. It consists of a deflection prevention part 244 having an outer diameter larger than the outer diameter of the roller part and is configured in a substantially long shape.

The roller portion 242 is configured to be equal to or slightly larger than the diameter of the timing belts 150, 152, 154, and 156 that are in contact, and configured so that the lower ends of the timing belts extend over the sag prevention portion 244.

Therefore, the timing belts 150, 152, 154 and 156 connected between the pulleys 110, 120, 130 and 140 are continuously rotated while being in close contact with the roller 242 of the tension roller 240, and a part of the lower end thereof is the tension roller. The sag prevention part 244 of the 240 is caught and does not sag down.

Here, the deflection prevention portion 244 of the tension roller 240 is formed in the upper and lower portions of the roller portion 242, as shown in Figure 8, the timing belt is the deflection prevention portion 244 By being positioned between them, both the function of guiding the rotation of the timing belt and the function of preventing the sag can be exerted.

Meanwhile, FIG. 9 is a front view illustrating a tensioner according to another embodiment of the present invention. As shown in FIG. 9, the roller part 242 of the tension roller 240-1 includes two stages, and the roller part 242. The sag prevention portion 244 may be configured at the bottom of each).

That is, the first stage pulley 112 of the first pulley 110 is connected to the driving pulley 104 of the driving motor 102 as the first timing belt 150 and two of the first pulleys 110. The short pulley 114 is connected to the first stage pulley 122 and the second timing belt 152 of the second pulley 120. The first timing belt 150 and the second timing belt 152 are It is located on the same axis line.

When the timing belt is positioned in two stages as described above, the tensioner 200 having the tension roller 240 having the roller portion 242 composed of two stages and the deflection preventing portion 244 formed thereon as shown in FIG. 9. ), It is possible to prevent sagging of the two timing belts at the same time.

Of course, the deflection prevention portion 244 of the tension roller 240 is formed in the upper and lower portions of the roller portion 242, as shown in Figure 10, the timing belt is the deflection prevention portion 244 By being positioned between them, both the function of guiding the rotation of the timing belt and the function of preventing the sag can be exerted.

Here, when the timing belt is installed in two or more stages, if the roller portion of the tension roller is formed to match the number of stages of the timing belt, and the deflection prevention portion provides a tensioner having one more than the roller portion, Even if the timing belts of the stages are installed on the same axis line, the sag can be prevented at the same time.

As described above, according to the lift pin driving apparatus and the flat panel display device manufacturing apparatus including the same according to the present invention, since the entire lift pin can be lifted and raised simultaneously with one driving motor, the driving motor is controlled. In addition to simplicity, the lifting operation of all the lift pins is more accurate.

In addition, one drive motor is installed in the edge region of the pin plate, and the timing belts, which are the power transmission means, are connected along the lower edge of the pin plate so that the pin plate can be lifted up and down accurately as one drive motor. There is no interference with surrounding components in the lower space, which can diversify the layout structure, and also reduce the overall equipment cost, which can contribute to product cost reduction.

In addition, in a plurality of timing belts, which are power transmission means for rotating a plurality of ball screws using one drive motor, a tensioner for adjusting the tension of these timing belts prevents sagging of the timing belts. As the ball screws are raised and lowered at the same speed, damage to the substrate is prevented by raising and lowering the lift pin more precisely, and thus, the manufacture of the accurate flat panel display device is very effective.

Claims (9)

Mounting means on which the substrate is mounted; A plurality of lift pins disposed through the mounting means to lift and lower the substrate; A pin plate on which the lift pins are installed and lifted up and down; A driving means for elevating the pin plate, the driving motor comprising a plurality of pulleys connected to and interlocked with a power transmission means according to the driving of the driving motor; In order to adjust the tension of the power transmission means, it is in close contact with a part of the power transmission means, it is possible to include a tensioner having a tension roller to support the part of the power transmission means to prevent the deflection. Lift pin drive. The method of claim 1, The tensioner may include the tension roller, a moving bracket on which the tension roller is rotatably supported, a fixed bracket on which the moving bracket is rotatably moved forward and backward, and linearly moving the moving bracket forward and backward from the fixed bracket. Lift pin drive comprising a tension control means for. The method of claim 1, The tension roller is a lift pin drive device, characterized in that consisting of a roller portion in close contact with a portion of the power transmission means and a deflection prevention portion formed below the roller portion and having a larger outer diameter than the roller portion. The method of claim 3, wherein The roller portion of the tension roller is formed in n stages, and the deflection prevention portion is formed in n stages, so that a portion of the n stage power transmission means positioned in the same vertical line is in close contact with each other so as to be in contact with each other. Lift pin drive, characterized in that. The method of claim 1, The tension roller is a lift pin drive device, characterized in that the roller portion is in close contact with a portion of the power transmission means, and formed in the upper and lower portions of the roller portion and the deflection prevention portion having an outer diameter larger than the roller portion. The method of claim 5, The roller portion of the tension roller is formed in n stages, and the deflection prevention portion is formed in n + 1 stages, so that a portion of the n stage power transmission means located in the same vertical line is in close contact with each other in the n stage roller portion. Lift pin drive, characterized in that configured to. The method of claim 1, The power transmission means is a lift pin drive, characterized in that the timing belt. A chamber having a pin passage in the lower portion; A lower electrode formed to allow a substrate to be mounted in the chamber and having a plurality of pin passages formed therein; Means for driving a plurality of lift pins provided in the lower electrode pin passing portion of the chamber to be located in the lower space of the chamber to lift the substrate, the lift pin according to any one of claims 1 to 7. Flat panel display device manufacturing apparatus comprising a drive device. The method of claim 8, And an upper electrode in the chamber so as to generate plasma while injecting a process gas to treat the surface of the substrate.

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