KR100816391B1 - Apparatus for transferring substrate - Google Patents

Abstract

A substrate transfer apparatus is disclosed. Substrate transfer apparatus of the present invention, the apparatus body; A roller unit installed on both sides of the upper region of the apparatus main body to be spaced apart from each other to transfer the substrate, and spaced apart in one direction from a corresponding installation position of the apparatus main body; A plurality of substrate floating modules provided at predetermined intervals between the roller units to float the substrates; And a redirection mechanism for redirecting the substrate floating by the substrate floating module to at least one predetermined angle. According to the present invention, it is possible to easily redirect the substrate to be transported in an injured state, and the apparatus is simple, so that the equipment cost can be reduced and the power consumed to redirect the substrate can be reduced.

Board, Glass Board, LCD, Transfer, Device, Floating, Rotating, AFC

Description

Substrate Transfer Device {APPARATUS FOR TRANSFERRING SUBSTRATE}

1 is a schematic perspective view of a substrate transfer apparatus according to a first embodiment of the present invention.

FIG. 2 is an enlarged perspective view illustrating main parts of a substrate floating module in the substrate transfer apparatus of FIG. 1.

3 is a side view of FIG. 2.

4 is a partially enlarged plan view illustrating the process of rotating the substrate of FIG. 1 by 90 degrees.

5 to 7 are views showing step by step the process of rotating the substrate by the turning mechanism respectively.

8 is a schematic cross-sectional view of a substrate transfer apparatus according to a second embodiment of the present invention.

9 is a schematic cross-sectional view of a substrate transfer apparatus according to a third embodiment of the present invention.

10 is a schematic cross-sectional view of a substrate transfer apparatus according to a fourth embodiment of the present invention.

* Explanation of symbols for the main parts of the drawings

10: apparatus main body 15: substrate transfer roller

18: roller lifting drive unit 20: substrate floating module

22: upper body 24: air sprayer

26: lower body 28: blowing fan

29: filter 29a: buffer space

40: direction change mechanism 42: elevating / rotating bar

46: direction change pad 60: robot

The present invention relates to a substrate transfer apparatus, and more particularly, it is possible to easily redirect the substrate to be transported in the floating state, the device is simple, reducing the equipment cost and reduce the power consumed to redirect the substrate It relates to a substrate transfer apparatus that can be.

Recently, the flat panel display (FPD) has begun to emerge as the electronic display industry is rapidly developing among the semiconductor industry.

A flat panel display is a thinner and lighter image display device than a cathode ray tube (CRT), which is mainly used as a display for a TV or a computer monitor. Such flat panel displays include liquid crystal displays (LCDs), plasma display panels (PDPs), and organic light emitting diodes (OLEDs).

Among them, LCDs inject liquid crystals, which are solid and liquid intermediates, between two thin upper and lower glass substrates, and change the arrangement of liquid crystal molecules by the electrode voltage difference of the upper and lower glass substrates to generate contrast and display numbers or images. It is a device using a kind of optical switch phenomenon.

LCDs are now widely used in electronic clocks, electronic calculators, TVs, notebook PCs, electronic products, automobiles, aircraft speed displays and driving systems.

Previously, LCD TVs have a size of about 20 to 30 inches, and monitors have a mainstream size of 17 inches or less. In recent years, however, the preference for large TVs of 40 inches or larger and large monitors of 20 inches or larger has increased.

Therefore, manufacturers of LCDs have come to produce wider glass substrates. Currently, research is being conducted to increase the size of glass substrates to the 7th generation having widths of 1950 to 2250 mm or 1870 to 2200 mm, or to the 8th generation of 2160 to 2460 mm or more.

On the other hand, LCD is generally made of glass (Glass) material has a brittle characteristic that is very vulnerable to the impact from the outside. Therefore, if the LCD can be efficiently stored and transported from the pre-processing stage to the post-processing stage without manufacturing the LCD, it will not only improve productivity but also maintain the flat display quality. .

In particular, as described above, as the size of the LCD increases to the 7th generation or the 8th generation, etc. in recent years, special care is required in the storage and transfer of the LCD, in particular, the transfer.

Conventional substrate transfer devices were mostly roller type. However, when the substrate is transported by the rollers, since the substrate is directly contacted with the rollers, the substrate is easily damaged, such as a scratch, and the high-speed transfer to the substrate is impossible. there was.

In addition, during the transfer of the substrate, it is not uncommon that the substrate should be turned (rotated) by 90 degrees or 180 degrees. Therefore, in the case of the conventional roller type substrate transfer apparatus, the substrate may be changed while the substrate is fixed between the rollers. Complex turnover mechanisms have been disclosed to enable this. However, such a turning mechanism should be provided so as not to overlap with the roller for conveying the substrate, and the apparatus must be complicated and equipment costs can be increased because the substrate must be turned in a state where the substrate is fixed after being raised at the position for turning the substrate. In addition to this, there is a problem in that power consumption for turning the substrate increases.

On the other hand, in order to overcome the problems of the roller-type substrate transfer apparatus as described above, the substrate transfer apparatus that the roller is in contact only on both sides of the substrate entering the roots and the center region of the substrate can be lifted and transported by a separate substrate floating module. Has been disclosed. Such a substrate transfer device has already been filed by the present applicant.

However, such a conventional substrate transfer apparatus has a problem in that it is difficult to change the direction (rotation) of the substrate to 90 degrees or 180 degrees during the transfer of the substrate because no other substrate redirection means is provided.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transfer apparatus which can easily redirect a substrate to be transported in an injured state, and the apparatus is simple, thereby reducing equipment costs and reducing power consumed to redirect the substrate.

The above object, according to the present invention, the apparatus main body; A roller unit installed on both sides of the upper region of the apparatus main body so as to be spaced apart from each other to transfer the substrate, and spaced apart in one direction from a corresponding installation position of the apparatus main body; A plurality of substrate floating modules provided at predetermined intervals between the roller units to float the substrate; And a redirection mechanism for redirecting the substrate lifted by the substrate floating module at least in one direction at a predetermined angle.

Here, it is preferable that the direction change mechanism redirects the roller unit to at least one predetermined angle in a state where the roller unit is lowered toward the apparatus main body and the substrate is lifted by the substrate floating module.

The redirection mechanism is provided in the apparatus body, the lifting / rotating bar capable of lifting up and down toward the substrate through the spacing and rotatable in the forward and reverse directions at the position; And a turning pad provided at an end of the elevating / rotating bar and contacting a lower surface of the substrate to change the direction of the substrate.

The direction switching pad is preferably formed of a soft material.

It may further include a guide support for projecting the horizontal state of the substrate is provided to protrude through the spacing is changed direction.

The redirection mechanism may include: a column provided in the apparatus body and capable of advancing and retracting toward the substrate; A vacuum pad provided at an end of the column to absorb a lower surface of the substrate; And a rotation driving unit for advancing and retracting the column and rotating the column in a forward and reverse direction while the vacuum pad is adsorbed on the substrate.

The substrate is a large glass substrate for liquid crystal display (LCD).

Hereinafter, with reference to the accompanying drawings will be described in detail for each embodiment of the present invention. In the description of each embodiment, the same reference numerals are given to the same configurations.

1 is a schematic perspective view of a substrate transfer apparatus according to a first embodiment of the present invention, Figure 2 is an enlarged perspective view of the main portion of the substrate injury module in the substrate transfer apparatus shown in Figure 1, Figure 3 is a side view of FIG. 4 is a partially enlarged plan view illustrating the process of rotating the substrate of FIG. 1 by 90 degrees.

As shown in these figures, the substrate transport apparatus according to the first embodiment of the present invention is largely spaced apart from each other on both sides of the apparatus main body 10 and the upper region of the apparatus main body 10 to transport the substrate G. The roller unit 15 and the plurality of substrate on the module 20 is provided with a predetermined distance (H, see Fig. 5) between the roller unit 15 to each other.

Although not shown in detail, the apparatus body 10 is a portion forming the outer frame of the substrate transfer apparatus, and supports the roller unit 15 and the substrate floating module 20.

In general, the substrate transfer device is so large that it is difficult to make it into a finished product and then move it into a place where the substrate transfer device is needed, for example, a clean room. Therefore, the roller unit 15 and the substrate floating module 20 including the apparatus body 10 are designed to be mutually disassembled and assembled at the corresponding place.

The roller unit 15 is installed to be accessible and spaced in one direction at the corresponding position. In the case of the present embodiment, when the direction of the substrate (G) is switched, the roller unit 15 is moved up and down by the lifting drive unit 15b to be described later. However, the roller unit 15 may alternatively move left and right. Even if the roller unit 15 moves from side to side, there is no problem in reorienting the substrate G floating by the turning mechanism 40.

The roller unit 15 not only rotatably supports the plurality of rotatable substrate transfer rollers 15a and the substrate transfer rollers 15a, but also the lifting holes capable of lifting up and down the device body 10 together with the substrate transfer rollers 15a. Eastern part 15b. Although the elevation driving unit 15b is schematically illustrated, it is assumed that the elevation driving unit 15b is equipped with an actuator or an LM Guide as a means for the elevation.

The substrate G is conveyed in one direction by the substrate transfer rollers 15a in a state in which both side surfaces of the substrate G are in contact with the substrate transfer rollers 15a. Since the substrate G is in direct contact with the substrate transfer rollers 15a as described above, the substrate transfer rollers 15a are preferably formed of a material that does not damage the substrate G as much as possible, for example, a flexible material such as silicon. Do.

On the other hand, since the substrate G, which can be a flat panel display such as PDP and OLED, including the LCD described above, is large in size, such as 7th generation or 8th generation, both sides of the substrate G have a plurality of substrate transfer rollers. When transported in the state supported by the 15a, the central region of the substrate G is forced to sag downward due to the weight of the substrate G.

In this case, when the substrate G is transferred, the efficiency of the substrate G may be lowered, and the substrate G may come into contact with the lower structure such that the substrate G may be bent or scratch may occur on the substrate G. G) is likely to be damaged.

Therefore, a plurality of substrate floating modules 20 are provided between the substrate transfer rollers 15a to prevent the substrate G from sagging downward by injecting air upward. Of course, when three or more substrate floating modules 20 are provided, it is possible to more effectively prevent the substrate G from sagging.

However, since the manufacturing cost of the substrate injury module 20 is expensive, it is difficult to install a lot indefinitely. Therefore, in the present embodiment, in consideration of cost-effectiveness, three substrate floating modules 20 are provided with a predetermined interval H therebetween. Hereinafter, the substrate floating module 20 will be described in detail.

Referring to FIGS. 2 and 3, each of the three substrate floating modules 20 includes an upper body 22 and a lower body 26 that are coupled to each other in the vertical direction to form an air flow space therein. Equipped.

The upper body 22 forms a tubular structure with its lower surface opened. That is, the inside is formed of an almost rectangular parallelepiped shape, with a part of which is open.

The upper body 22 forms the upper surface of the substrate floating module 20, the upper wall portion 22a through which a plurality of air injection holes 24 are formed on the plate surface, and the lower body on both sides of the upper wall portion 22a. A pair of first side wall portions 22b extending substantially vertically toward 26 and a first length radially inwardly predetermined length at ends of the first side wall portions 22b so as to form an opening in the central region; A flange portion 22c.

Inside the upper body 22, a filter 29 for filtering foreign matter in the air generated in the blower fan 28 to be described later is provided. The filter 29 is formed to have a size substantially similar to the upper surface area of the upper body 22 and is disposed in parallel with the upper wall portion 22a to substantially remove foreign substances in the air that are directed to the substrate G through the air spray holes 24. It is a perfect filter.

At this time, the buffer space 29a existing between the filter 29 and the upper wall portion 22a is generated from the blower fan 28 so that the air filtered by the filter 29 is uniform through the air injection holes 24. It serves to diffuse the air so that it can be injected.

The lower body 26 has a shape substantially similar to the upper body 22, but is formed in a somewhat small volume. In other words, the lower body 26 may be regarded as the state in which the upper body 22 is turned upside down. The lower body 26 is combined with the upper body 22 to form a predetermined air flow space therein.

The lower body 26 includes a lower wall portion 26a forming the lower surface of the substrate floating module 20 and a pair of second side wall portions extending from the both side surfaces of the lower wall portion 26a toward the upper body 22. 26b) and the first flange portion 22c and the bolt (with the first flange portion 22c facing each other and the first flange portion 22c being bent in a predetermined length radially inward at the end of the second side wall portion 26b so that the central region is opened. 27) a second flange portion 26c coupled thereto.

Inside the lower body 26, a blowing fan 28 for generating air is provided. Since the length of the substrate floating module 20 is sufficiently long, a plurality of blower fans 28 provided in the lower body 26 are disposed at appropriate intervals. The blowing fan 28 may be any of a cross flow fan and an axial flow fan.

Accordingly, when the substrate G is loaded to the upper side of the substrate transfer device, and then power is applied to the blower fan 28 provided in the substrate floating module 20, the blower fan 28 is operated to thereby cause air. Occurs. After the foreign matter is filtered by the filter 29, the generated air is diffused through the buffer space 29a and then uniformly sprayed through the air injection holes 24. Accordingly, the substrate G is prevented from deflecting downward by the air injected.

Next, when the substrate transfer roller 15a is rotated, the substrate G loaded on the upper surface of the substrate transfer roller 15a may be transferred in one direction by the substrate transfer roller 15a in the state of being floated on the substrate floating module 20.

On the other hand, as shown in Figs. 1 and 4 by the substrate transfer device, while the substrate G is transferred in the long side G1 direction, for example, the end surface G2 of the substrate G is the substrate floating module 20. It is necessary to turn (rotate) the board | substrate G so that it may be parallel with it.

At this time, the rotation of the substrate G is performed by the turning mechanism 40 provided in the substrate transfer apparatus. This will be described with reference to FIGS. 5 to 7.

5 to 7 are views showing step by step the process of rotating the substrate by the turning mechanism respectively.

As shown in these figures, the redirecting mechanism 40 serves to redirect the substrate G to at least one predetermined angle. Therefore, the direction change mechanism 40 may be provided in any area | region of this board | substrate conveyance apparatus. In addition, you may change the direction of the board | substrate G by holding either surface of the upper surface and the side surface of the board | substrate G.

In the case of this embodiment, the turning mechanism 40 contacts the lower surface of the substrate G to turn the substrate G. However, in order for the direction change mechanism 40 to operate as described above, the roller unit 15 is lowered toward the apparatus main body 10 by the elevating drive unit 15b and the substrate G is moved by the substrate floating modules 20. It is preferred to operate in the injured state of FIGS. 6 and 7. Only then will it be possible to reduce the effort, time and power lost in reversing the direction of the substrate (G).

The turning mechanism 40 of the present embodiment includes a lifting / rotating bar 42 and a turning pad 46.

The elevating / rotating bar 42 is provided in the apparatus main body 10, and then elevates up and down toward the substrate G, and serves to rotate in the forward and reverse directions at the corresponding position.

Of course, in order for the elevating / rotating bar 42 to elevate, the elevating structure, for example, a telescopic bar such as an antenna of a vehicle, or an elevating cylinder, must be provided. And in order for the lifting / rotating bar 42 to rotate, a bevel gear structure including a motor, a rack and pinion structure, and a chain structure should be provided. However, since this is only a general structure, a detailed description thereof will be omitted.

The turning pad 46 is coupled to the upper end of the elevating / rotating bar 42 to directly contact the lower surface of the substrate G in a state of being raised by the elevating / rotating bar 42 by a predetermined height.

The turning pad 46 is rotated by the rotation of the elevating / rotating bar 42 in a state of directly contacting the lower surface of the substrate G. When the turning pad 46 contacts the lower surface of the substrate G as described above, and the turning pad 46 rotates at the position, the substrate G which is floated by the air turns even if its area is large. It can be easily redirected by the rotational friction of the pad 46. Therefore, it is enough to rotate the board | substrate G with little power.

Since the turning pad 46 is a portion where the substrate G is in direct contact, the turning pad 46 is formed of a material that does not damage the substrate G as much as possible, for example, a soft material such as silicon. Would be desirable.

The operation of the substrate transfer apparatus having such a configuration and the series of operations in which the direction of the substrate G is switched will be mainly described with reference to FIGS. 5 to 7 as follows.

First, the robot (not shown) grasps the substrate (G) to be transferred from the cassette or the workbench and loads it onto the substrate transfer apparatus. At this time, both side surfaces of the substrate G are supported by the substrate transfer rollers 15a of the roller unit 15.

In this state, as shown in FIGS. 2 and 3, when power is applied to the blowing fan 28 provided in the three substrate floating modules 20, the blowing fan 28 operates to generate air. . The generated air is filtered by the filter 29 and then diffused through the buffer space 29a, and then uniformly injected through the air injection holes 24. Therefore, the substrate G is raised to a certain height while being prevented from deflecting downward by the injected air.

Next, the substrate transfer roller 15a is operated so that the substrate G supported by the substrate transfer rollers 15a is lifted up by the substrate transfer roller 15a by the substrate transfer roller 15a in a state in which the substrate transfer roller 15a is lifted up. 20) to move along the longitudinal direction. This state is the state of FIG. 5.

As described above, when the direction of the substrate G is to be changed while the substrate G is moving, the operation of the substrate transfer rollers 15a is stopped by the control signal. Subsequently, as shown in FIG. 6, the roller unit 15 is moved downward by a predetermined distance toward the apparatus main body 10 by the elevating driving part 15b.

Even if the roller unit 15 descends, since the air is continuously injected through the three substrate floating modules 20, the substrate G takes an injured state.

In this state, the turning mechanism 40 is operated. That is, as shown in FIG. 6, the elevating / rotating bar 42 ascends a predetermined height through the spacing H so that the turning pad 46 contacts the lower surface of the substrate G.

Then, as shown in FIG. 7, when the elevating / rotating bar 42 rotates, the direction switching pad 46 in contact with the lower surface of the substrate G rotates in the same direction, thereby rubbing the substrate G by friction. Will rotate. As a result, the substrate G is easily rotated so that its direction can be changed.

As described above, according to the present embodiment, the substrate G can be easily rotated even during the transfer of the substrate G, and the apparatus is simple, thereby reducing the equipment cost and reducing the power consumed to rotate the substrate G. It becomes possible.

8 is a schematic cross-sectional view of a substrate transfer apparatus according to a second embodiment of the present invention.

Referring to this figure, a separate guide support 48 is further provided at a spaced interval H at a position different from the above-described first embodiment. The guide support 48 may also be the same as the structure of the elevating / rotating bar 42 described above.

The guide support part 48 serves to prevent the horizontal direction of the substrate G from being shaken while the direction change mechanism 40 is operated to change the direction of the substrate G. Accordingly, the upper end of the guide support 48 may be formed of a soft material that does not damage the substrate G, and may be partially rounded.

9 is a schematic cross-sectional view of a substrate transfer apparatus according to a third embodiment of the present invention.

In the present embodiment, the direction change mechanism 50 is provided in a manner different from that described above. That is, the direction change mechanism 50 is provided in the apparatus main body 10 and is provided in the column 52 which can be moved forward and backward toward the said board | substrate G, and is provided in the edge part of the column 52, and the lower surface of the board | substrate G is provided. Vacuum pad 54 for adsorbing the gas, and the rotary drive unit 56 for advancing and retracting the column 52 and rotating the column 52 in the forward and reverse directions while the vacuum pad 54 is adsorbed on the substrate G. )

Accordingly, in order to change the direction of the substrate G, first, the column 52 arranged in the apparatus main body 10 along the longitudinal direction of the substrate floating module 20 is vertically erected by the driving unit 56. The lower surface of the substrate G is approached.

In this state, a vacuum is formed in the vacuum pad 54 so that the vacuum pad 54 sucks the lower surface of the substrate G. As shown in FIG. The degree of adsorption may be inadequate. When the vacuum pad 54 adsorbs the lower surface of the substrate G, the column 52 is rotated by the operation of the rotary driver 56, whereby the substrate G can be switched in its position. will be.

10 is a schematic cross-sectional view of a substrate transfer apparatus according to a fourth embodiment of the present invention.

In the case of the above-described embodiments, all have a structure for holding the lower surface of the substrate (G) to rotate the substrate (G). However, as in the present embodiment, a separate robot 60 is mounted on the side of the apparatus body 10, and the pad 62 formed at the end of the robot 60 approaches the upper surface of the substrate G so that the substrate ( You may change the direction of the board | substrate G in the state which hold | covered the upper surface of G).

In the case of the present embodiment, since the pad 62 holds the upper surface of the substrate G by the robot 60 while the substrate G is in an injured state, the pad 62 may provide a much better effect than the prior art. There is no

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

As described above, according to the present invention, it is possible to easily redirect the substrate transported in an injured state, and the apparatus is simple, thereby reducing the equipment cost and reducing the power consumed to redirect the substrate.

Claims (7)

Device body; A roller unit installed on both sides of the upper region of the apparatus main body so as to be spaced apart from each other to transfer the substrate, and spaced apart in one direction from a corresponding installation position of the apparatus main body; A plurality of substrate floating modules provided at predetermined intervals between the roller units to float the substrate; And The roller unit is lowered toward the apparatus main body includes a direction switching mechanism for redirecting the substrate at least a predetermined angle in a state in which the substrate is floating by the substrate floating module, The redirection mechanism, A robot provided on a side surface of the device body independently of the device body; And A pad provided at an end of the robot and holding a top surface of the substrate in an upper region of the substrate based on an operation of the robot, And the robot is rotated while the pad is operated to grip the upper surface of the substrate to rotate the substrate. delete delete delete delete delete delete

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