KR100816392B1 - Apparatus for transferring substrate - Google Patents

Abstract

A substrate transfer apparatus is disclosed. The substrate transport apparatus of the present invention, the upper body is formed with a plurality of air injection holes on one surface facing the predetermined substrate to be transferred, the lower body is coupled to the upper body and forms a predetermined air flow space between the upper body And a substrate floating module having a blowing fan for generating air toward the air spraying hole, wherein a joining region between the upper and lower bodies is provided in the lower region of the air spraying holes. According to the present invention, at least the upper surface of the substrate floating module that is likely to contact the substrate is not provided with a coupling element such as a conventional countersunk head bolt, thereby preventing the occurrence of scratches on the substrate as well as the substrate. By reducing the cost, time, and labor of manufacturing floating modules, overall process loss can be suppressed.

Board, Glass Board, LCD, Transfer, Device, Floating

Description

Substrate Transfer Device {APPARATUS FOR TRANSFERRING SUBSTRATE}

1 is a schematic perspective view of a substrate transfer apparatus according to the prior art.

FIG. 2 is a side view of the countersunk head region of the substrate transport apparatus of FIG. 1. FIG.

Figure 3 is an enlarged view of Figure 2 is a view of a state in which the countersunk head bolt is normally fastened.

4 is a view of a state in which the countersunk bolt is abnormally fastened unlike FIG.

5 is a schematic perspective view of a substrate transfer apparatus according to a first embodiment of the present invention.

6 is an enlarged perspective view illustrating main parts of a substrate floating module in the substrate transfer apparatus of FIG. 5.

7 is a side view of FIG. 6.

8 is an enlarged perspective view illustrating main parts of a substrate floating module in a substrate transfer apparatus according to a second exemplary embodiment of the present invention.

9 is a side view of FIG. 8.

FIG. 10 is an enlarged side view of the main portion of the substrate floating module in the substrate transporting apparatus according to the third embodiment of the present invention; FIG.

11 is an enlarged side view of the main portion of the substrate floating module in the substrate transfer apparatus according to the fourth embodiment of the present invention.

* Explanation of symbols for the main parts of the drawings

10: apparatus main body 15: substrate transfer roller

20: substrate floating module 30: upper body

31: upper wall portion 32: air sprayer

33: first side wall portion 34: first flange portion

35: first open part 37: filter

39: buffer space 40: lower body

41: lower wall portion 43: second side wall portion

44: second flange portion 45: the second open portion

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device, and more particularly to scratching a substrate by preventing a coupling element such as a conventional countersunk head bolt from being provided on an upper surface of a substrate floating module having a high possibility of contact with the substrate. The present invention relates to a substrate transfer apparatus capable of preventing the occurrence of a large amount of metal, and reducing the cost, time, and labor required to manufacture a substrate injury module, and thus, in general, reducing process loss.

Recently, the flat panel display (FPD) has begun to emerge as the electronic display industry is rapidly developing among the semiconductor industries.

A flat panel display is a thinner and lighter image display device than a cathode ray tube (CRT), which is mainly used as a display for a TV or a computer monitor. Such flat panel displays include liquid crystal displays (LCDs), plasma display panels (PDPs), and organic light emitting diodes (OLEDs).

Among them, LCDs inject liquid crystals, which are solid and liquid intermediates, between two thin upper and lower glass substrates, and change the arrangement of liquid crystal molecules by the electrode voltage difference of the upper and lower glass substrates to generate contrast and display numbers or images. It is a device using a kind of optical switch phenomenon.

LCDs are now widely used in electronic clocks, electronic calculators, TVs, notebook PCs, electronic products, automobiles, aircraft speed displays and driving systems.

Previously, LCD TVs have a size of about 20 to 30 inches, and monitors have a mainstream size of 17 inches or less. In recent years, however, the preference for large TVs of 40 inches or larger and large monitors of 20 inches or larger has increased.

Therefore, manufacturers of LCDs have come to produce wider glass substrates. Currently, research is being conducted to increase the size of glass substrates to the 7th generation having widths of 1950 to 2250 mm or 1870 to 2200 mm, or to the 8th generation of 2160 to 2460 mm or more.

On the other hand, LCD is generally made of glass (Glass) material has a brittle characteristic that is very vulnerable to the impact from the outside. Therefore, if the LCD can be efficiently stored and transported from the pre-processing stage to the post-processing stage without manufacturing the LCD, it will not only improve productivity but also maintain the flat display quality. .

In particular, as described above, as the size of the LCD increases to the 7th generation or the 8th generation, etc. in recent years, special care is required in the storage and transfer of the LCD, in particular, the transfer. Therefore, in the transfer of the LCD, as described later, a separate dedicated transfer device is used. For reference, a flat display such as a PDP and an OLED, including an LCD, will be described below as a substrate.

1 is a schematic perspective view of a substrate transfer apparatus according to the prior art.

As shown in this figure, the substrate transfer apparatus according to the prior art, the apparatus main body 110, a plurality of substrate transfer rollers 115 are spaced apart from each other on both sides of the upper region of the apparatus main body 110, the substrate transfer The substrate floating module 120 is provided between the rollers 115.

As will be described later in detail, the plurality of substrate transfer rollers 115 are configured to directly contact the lower both sides of the substrate G to transfer the substrate G in one direction. Therefore, the substrate transfer rollers 115 are rotated at the same speed to each other at the corresponding position to transfer the substrate G in one direction.

At this time, as described above, since the substrate G is about 7 generations or 8 generations, and the size thereof is huge, when both sides of the substrate G are supported by only the plurality of substrate transfer rollers 115, the substrate is transferred. The central area of (G) is forced to sag downwards. In this case, when the substrate G is transported, the efficiency thereof is lowered, and the substrate G is brought into contact with the lower structure, such that the substrate G is bent or scratches are generated on the substrate G. ) Is likely to be damaged.

In order to prevent this, three substrate floating modules 120 are provided between the substrate transfer rollers 115 to inject air upward to prevent the substrate G from sagging downward. As a result, the substrate floating module 120 serves to float the central region of the substrate G upward by the pressure of the injected air.

FIG. 2 is a side view of the countersunk head region of the substrate transfer device of FIG. 1, and FIG. 3 is an enlarged view of the countersunk head bolt as shown in FIG. 2, and FIG. 4 is a countersunk head bolt unlike FIG. 3. Is a diagram of an abnormally fastened state.

As shown in these figures, the conventional substrate on the module 120, the module main body 140, and the upper surface of the module main body 140 is provided with a porous plate 130 coupled side by side with the substrate (G) do.

An air flow space 136 through which air flows is formed in the module body 140. A blowing fan 147 is provided in the lower portion of the module main body 140, and a filter 137 for filtering foreign substances in the air is provided at the upper portion of the blowing fan 147.

On the plate surface of the porous plate 130, a plurality of air injection holes 132 are formed, through which the air generated from the blowing fan 147 and the foreign matter filtered by the filter 137 is injected toward the substrate G. As shown in FIGS. 1 and 2, the porous plate 130 is coupled to the upper flange portion 141 of the module body 140 by a plurality of countersunk head bolts 150. A separate packing member 155 is further used at the lower end of the flange portion 141 for firm coupling of the countersunk head bolt 150.

However, in the conventional substrate transfer apparatus, as shown in FIG. 1, a plurality of countersunk head bolts 150 and a packing member 155 may be used to couple the porous plate 130 to the module main body 140. Since it is used, it takes a lot of cost and time for manufacturing the substrate injury module 120, and there is a problem that the overall process (Loss) is caused by increasing the number of work.

In particular, as shown in Figure 3, if the head 151 of the head bolt 150 is coupled in parallel with the upper surface 130a of the porous plate 130, there is no problem, as shown in Figure 4, the head bolt If 150 is not properly coupled and one side of the head 151 is coupled to protrude from the upper surface 130a of the porous plate 130 (see A), the substrate G is transferred due to the protruding A region (G). ), Scratches are generated, and the substrate G is likely to be damaged.

Therefore, the worker has to pay a great deal of attention so as to properly engage the countersunk head bolt 150 as shown in FIG. 3.

An object of the present invention is to prevent the occurrence of scratches on a substrate by preventing a coupling element such as a conventional countersunk head bolt from being provided at least on the upper surface of a substrate floating module that is likely to contact the substrate. In addition, to provide a substrate transfer apparatus that can reduce the overall process (Loss) generation by reducing the cost, time, and labor required to manufacture a substrate injury module.

The object is, according to the present invention, the upper body is formed with a plurality of air injection holes on one surface facing the predetermined substrate to be transferred, and the predetermined air flow space is formed between the upper body and the upper body And a substrate floating module having a lower body, and a blowing fan for generating air toward the air spray holes, wherein a coupling area between the upper and lower bodies is provided in the lower areas of the air spray holes. Achieved by a substrate transfer device.

Here, at least one of the upper body and the lower body forms a cylindrical structure having one surface open, and the coupling region is preferably formed in a region where the upper and lower bodies abut on the open regions of the upper and lower bodies.

The upper body may include an upper wall portion which forms an upper surface of the substrate-mounted module and has a plurality of air injection holes formed therein through the plate surface; A pair of first side wall portions extending from both side surfaces of the upper wall portion toward the lower body; And a first flange portion bent inward in a radial direction in a predetermined length, respectively, at an end portion of the first side wall portion so as to form a first opening portion in a central region.

The upper wall portion, the first side wall portion and the first flange portion may be integrally manufactured by a single material.

The lower body may include a lower wall portion forming a lower surface of the substrate upper module; A pair of second side wall portions extending from both side surfaces of the lower wall portion toward the upper body; And a second flange portion bent a predetermined length at an end portion of the second side wall portion so as to form a second opening portion communicating with the first opening portion in a central region, and facing the first flange portion.

The pair of second side wall portions are substantially perpendicular to the lower wall portion.

The pair of second side wall parts may have an inclination in which an inner diameter of the pair of second side wall parts increases from the lower wall part to the second flange part.

The lower wall portion, the second side wall portion and the second flange portion may be integrally manufactured by a single material.

The coupling region may be formed in the first and second flange portions facing each other.

The first and second flange portions are screwed together.

The plurality of air injection holes are preferably bored in a direction from the outside of the upper wall portion toward the inside of the upper body so that a burr that may be generated during drilling is not formed on the upper surface of the upper wall portion.

A filter is installed in the air flow space to filter foreign matters in the air generated in the blowing fan, wherein the filter is supported by the bracket and forms a predetermined buffer space between the upper surface of the upper body.

And a plurality of substrate transfer rollers arranged to be spaced apart from each other on both sides of an upper region of the apparatus main body and transferring the substrate, wherein a plurality of substrate floating modules are provided to be spaced apart from each other between the substrate transfer rollers.

The substrate may be a large glass substrate for an LCD (Liquid Crystal Display).

Hereinafter, with reference to the accompanying drawings will be described in detail for each embodiment of the present invention. In the description of each embodiment, the same reference numerals are given to the same configurations.

5 is a schematic perspective view of a substrate transfer apparatus according to a first embodiment of the present invention.

As shown in this figure, the substrate transfer apparatus according to the first embodiment of the present invention, the apparatus main body 10 and a plurality of substrate transfer rollers spaced apart from each other on both sides of the upper region of the apparatus main body 10 ( 15) and a plurality of substrate floating module 20 provided between the substrate transfer rollers (15).

Although not shown in detail, the apparatus body 10 is a portion forming the outer frame of the substrate transfer apparatus, and supports the substrate transfer roller 15 and the substrate floating module 20. In general, the substrate transfer device is so large that it is difficult to make it into a finished product and then move it into a place where the substrate transfer device is needed, for example, a clean room. Therefore, the substrate transfer roller 15 and the substrate floating module 20 including the apparatus body 10 are designed to be disassembled and assembled together, and then assembled at a corresponding place.

The plurality of substrate transfer rollers 15 are provided in plural so as to be spaced apart from each other on both sides of the upper portion of the apparatus main body 10. These substrate transfer rollers 15 are rotatably supported by a separate roller drive unit 18 to rotate at the same speed with each other in the correct position. The substrate G is conveyed in one direction by the substrate transfer rollers 15 while both side surfaces of the substrate G are in contact with the substrate transfer rollers 15.

Since the substrate G is in direct contact with the substrate transfer rollers 15, the substrate transfer rollers 15 may be formed of a material that does not damage the substrate G as much as possible, for example, a flexible material such as silicon. Do. Although not shown in detail, the roller driving unit 18 may further have a structure capable of moving in one direction with respect to the apparatus main body 10 in addition to supporting and rotating the substrate transfer rollers 15.

On the other hand, since the substrate G, which can be a flat panel display such as PDP and OLED, including the LCD described above, is large in size, such as 7th generation or 8th generation, both sides of the substrate G have a plurality of substrate transfer rollers. When transported in the state supported by (15), the center region of the substrate G is forced to sag downward due to the weight of the substrate G.

In this case, when the substrate G is transported, the efficiency thereof is lowered, and the substrate G is brought into contact with the lower structure, such that the substrate G is bent or scratches are generated on the substrate G. ) Is likely to be damaged.

Therefore, a plurality of substrate floating modules 20 are provided between the substrate transfer rollers 15 to prevent the substrate G from sagging downward by injecting air upward. Of course, when three or more substrate floating modules 20 are provided, it is possible to more effectively prevent the substrate G from sagging.

However, since the manufacturing cost of the substrate injury module 20 is expensive, it is difficult to install a lot indefinitely. Therefore, in the present embodiment, three substrate floating modules 20 are provided to be spaced apart from each other in consideration of cost-effectiveness. Hereinafter, the substrate floating module 20 will be described in detail.

FIG. 6 is an enlarged perspective view illustrating a main portion of the substrate floating module in the substrate transfer apparatus illustrated in FIG. 5, and FIG. 7 is a side view of FIG. 6.

As shown in these figures, the substrate floating module 20 according to the present embodiment, the upper body 30 and the lower body 40 are coupled to each other in the vertical direction to form an air flow space 36 therein It is provided.

The upper body 30 forms a tubular structure with its lower surface opened. That is, the inside is formed of an almost rectangular parallelepiped shape, with a part of which is open.

The upper body 30 forms the upper surface of the substrate floating module 20, the upper wall portion 31 through which a plurality of air injection holes 32 are formed in the plate surface, and the lower side on both sides of the upper wall portion 31 A predetermined length radius at each end of the pair of first side wall portions 33 extending substantially vertically toward the body 40 and at the ends of the first side wall portions 33 so that the first open portion 35 is formed in the central region. It includes a first flange portion 34 bent in the direction inward.

At this time, the upper wall portion 31, the first side wall portion 33 and the first flange portion 34 is preferably made of a single material integrally. For example, the upper body 30 may be integrally manufactured through sheet metal processing.

However, the plurality of air injection holes 32 formed in the upper wall portion 31 of the upper body 30 is formed by the method of drilling. At this time, the plurality of air injection holes 32 are drilled in the direction toward the inside of the upper body 30 from the outside of the upper wall portion 31.

Only then, the burrs 31a (Burr), which occur naturally during drilling, may be formed in the upper body 30 without being formed on the upper surface of the upper wall portion 31. If the inside of the upper body 30 is punctured toward the outer surface of the upper wall portion 31, the burr 31a is formed on the upper surface of the upper wall portion 31. In this case, the lower surface of the substrate G is burr 31a. It is not desirable because it can be scratched.

Inside the upper body 30, the air flow space 36 is provided with a filter 37 for filtering foreign matter in the air generated in the blower fan 47 to be described later. The filter 37 is formed to have a size substantially similar to the upper surface area of the upper body 30 and is disposed in parallel with the upper wall portion 31 to substantially remove foreign substances in the air that are directed to the substrate G through the air spray holes 32. It is a perfect filter.

The filter 37 may be any type such as a hepa filter or a prefilter. The filter 37 is fixed to the inner wall of the upper body 30 by a separate bracket 38, a predetermined buffer space 39 is further formed between the upper surface of the upper body 30 and the filter 37.

The buffer space 39 serves to diffuse the air so that the air generated from the blower fan 47 and filtered by the filter 37 may be uniformly injected through the air injection holes 32. Therefore, it is preferable to arrange the filter 37 at an appropriate position so that the buffer space 39 is necessarily formed.

The lower body 40 has a form substantially similar to the upper body 30, but is formed in a somewhat small volume. That is, the lower body 40 may consider the state which turned the upper body 30 upside down substantially. The lower body 40 is combined with the upper body 30 to form a predetermined air flow space 36 therein.

The lower body 40 may include a lower wall portion 41 forming a lower surface of the substrate floating module 20 and a pair of second side wall portions extending from both side surfaces of the lower wall portion 41 toward the upper body 30. 43 and the first flange portion are bent in a radially inward direction at an end portion of the second side wall portion 43 so that a second opening portion 45 is formed in communication with the first opening portion 35 in the central region. A second flange portion 44 facing the 34 is included.

Like the upper body 30, the lower wall portion 41, the second side wall portion 43, and the second flange portion 44 constituting the lower body 40 are integrally manufactured by a single material. At this time, the pair of second side wall portions 43 are held substantially at right angles to the lower wall portion 41.

Inside the lower body 40, a blowing fan 47 for generating air is provided. Since the length of the substrate floating module 20 is sufficiently long, a plurality of blower fans 47 provided in the lower body 40 are disposed at appropriate intervals. In the drawing, the blower fan 47 is shown in the shape of a fan blade to highlight the blower fan 47. However, the blower fan 47 may be a cross flow fan in addition to the axial fan.

On the other hand, since the substrate floating module 20 consists of two parts, the upper body 30 and the lower body 40 of the tubular structure, it is necessary to couple the upper and lower bodies 30 and 40 to each other. At this time, it is preferable that the coupling region B between the upper and lower bodies 30 and 40 is formed in an area where the upper and lower bodies 30 and 40 abut except for the upper surface of the upper body 30.

In the related art, the countersunk head bolt 150 (see FIGS. 3 and 4) is coupled to the upper surface of the perforated plate 130 (see FIGS. 3 and 4), thereby increasing the number of working hours or the substrate G. It caused many problems such as scratching.

In this embodiment, the problem of the prior art is solved by preventing the coupling region B between the upper and lower bodies 30 and 40 from being formed at least on the upper surface of the upper body 30. Therefore, the coupling region B between the upper and lower bodies 30 and 40 may be formed anywhere in the lower regions of the air injection holes 32 except for the upper surface of the upper body 30.

However, in view of the structures of the upper and lower bodies 30 and 40 described above, the coupling region B is the first and second open portions (open areas) in which the upper and lower bodies 30 and 40 are in contact with each other. 35, 45) is preferably formed in the region.

That is, when looking at the first and second open portions 35 and 45, the first flange portion 34 of the upper body 30 and the second flange portion 44 of the lower body 40 are in contact with each other. . Therefore, the upper and lower bodies 30 and 40 may be mutually coupled by using the screws 50 to couple the first and second flange portions 34 and 44 to each other. In this case, unlike the conventional work for coupling the countersunk head bolts (150, 3 and 4), there is an advantage that the operation is much easier because there is no need to tighten (fasten) precisely.

The assembly process of the substrate transfer device, including the assembly process of the substrate floating module 20 having such a configuration, and the operation thereof will be described below.

First, an upper body 30 having a filter 37 mounted therein and a lower body 40 having a blower fan 47 mounted therein are prepared. The relatively bulky upper body 30 is placed upside down on the upper portion of the relatively small lower body 40. Then, the first and second open portions 35 and 45 formed on the upper and lower bodies 30 and 40 communicate with each other, and the first and second flange portions 34 and 44 face each other.

In this state, the first and second flange portions 34 and 44 which are in contact with each other by using the screw 50 are coupled to each other. Of course, when the screw 50 is coupled, a packing (not shown) or seal may be further interposed between the first and second flange portions 34 and 44.

When the assembly of the substrate injury module 20 is completed by the simple method as described above, the three substrate injury modules 20 are mounted on the device body 10 so as to be spaced apart from each other. The space between the substrate floating module 20 provides a space in which a robot (not shown) for transporting the substrate G moves.

Next, the roller driving unit 18 and the plurality of substrate transfer rollers 15 coupled thereto are disposed and coupled to both sides of the apparatus main body 10 with the substrate floating module 20 therebetween.

When the assembly of the substrate transfer apparatus is completed, the robot grasps the substrate G to be transferred from the cassette or the work table and loads the substrate G onto the upper side of the substrate transfer apparatus. At this time, both side surfaces of the substrate G are supported by the substrate transfer roller 15.

In this state, when power is applied to the blowing fan 47 provided in the substrate floating module 20, the blowing fan 47 operates to generate air. After the foreign matter is filtered by the filter 37, the generated air is diffused through the buffer space 39 and then uniformly injected through the air injection holes 32. Accordingly, the substrate G is prevented from deflecting downward by the air injected.

Next, when the roller driving unit 18 operates and the substrate transfer roller 15 rotates, the substrate G loaded on the upper surface thereof is lifted up by the substrate transfer roller 15 in the state of being floated on the substrate floating module 20. It can be transported in one direction.

As such, according to the present invention, at least the coupling element such as the conventional countersunk head bolt 150 (see FIGS. 3 and 4) is not provided on the upper surface of the substrate floating module 20 that is likely to contact the substrate G. As a result, not only scratches can be prevented from occurring on the substrate G, but the cost, time, and labor required for manufacturing the substrate injury module 20 can be reduced, resulting in overall process loss. It becomes possible to suppress than before.

8 is an enlarged perspective view illustrating a main portion of the substrate floating module in the substrate transfer apparatus according to the second embodiment of the present invention, and FIG. 9 is a side view of FIG. 8.

The pair of second side wall portions 43 'formed in the lower body 40' in the substrate floating module 20 of the present embodiment is inclined unlike the first embodiment described above.

That is, the inner diameter of the lower wall portion 41 toward the second flange portion 44 ′ has an inclination of widening. In this case, there is an advantage that the air generated from the blowing fan 47 can be evenly directed toward the entire area of the filter 37 without being driven to the center area. Of course, compared to the first embodiment also has the advantage that the material cost used for the lower body 40 'is less required.

In the second embodiment, the coupling region B is formed in the first flange portion 34 of the upper body 30 and the second flange portion 44 'of the lower body 40'. In the second embodiment, the direction of the second flange portion 44 'is opposite to that of the second flange portion 44 of the first embodiment.

FIG. 10 is an enlarged side view of the main portion of the substrate floating module in the substrate transporting apparatus according to the third embodiment of the present invention; FIG.

As shown in this figure, without forming the first flange portion 34 (see FIG. 7) in the upper body 30 ″, the lower end of the lower side of the first side wall portion 33 of the upper body 30 ″ is formed. The coupling area B may be formed by inserting and fastening the screw 50 in the left and right directions after being arranged on the flange portion 44 ″ formed on the upper end of the second side wall portion 43 of 40 ″. As such, the coupling region B may be installed in any direction except for the upper surface of the upper wall portion 31.

11 is an enlarged side view of the main portion of the substrate floating module in the substrate transfer apparatus according to the fourth embodiment of the present invention.

In the above-described embodiments, the screw 50 is disclosed as a means for forming the coupling region B. However, as shown in FIG. 11, if necessary, the coupling region B may be formed by a method of pinching. have. In this case, it is preferable that the lower end of the first side wall part 33 is press-fitted to the upper end of the second side wall part 43.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

As described above, according to the present invention, at least the upper surface of the substrate floating module having a high possibility of contacting the substrate is prevented from providing a coupling element such as a conventional countersunk head bolt to prevent scratches on the substrate. In addition, by reducing the cost, time, and labor required to manufacture the board injury module, it is possible to suppress the overall loss caused by the process.

Claims (12)

Device body; A plurality of substrate transfer rollers disposed on both sides of an upper region of the apparatus main body to transfer the substrate; And The upper body is provided between the plurality of substrate transfer rollers, the upper body is formed with a plurality of air injection holes on one surface facing the predetermined substrate to be transported, a predetermined air flow space coupled to the upper body and between the upper body At least one substrate floating module having a lower body and a blowing fan for generating air toward the air injection hole, The upper body and the lower body to form a cylindrical structure with one surface open, the upper body, the upper wall portion to form an upper surface of the substrate on the module, the upper wall portion is formed through the plurality of air injection holes on the plate surface; A pair of first side wall portions extending from both side surfaces of the upper wall portion toward the lower body; And a first flange portion bent in a predetermined length radially inward at an end portion of the first side wall portion so as to form a first opening portion in a central region. A coupling region between the upper and lower bodies is provided in the lower regions of the air injection holes, and the coupling region is formed in an area where the upper and lower bodies abut on the open regions of the upper and lower bodies. Device. delete delete The method of claim 1, And said upper wall portion, said first side wall portion and said first flange portion are integrally fabricated from a single material. The method of claim 1, The lower body, A lower wall portion forming a lower surface of the substrate floating module; A pair of second side wall portions extending from both side surfaces of the lower wall portion toward the upper body; And And a second flange portion which is bent at a predetermined length at an end of the second side wall portion and faces the first flange portion so as to form a second opening portion communicating with the first opening portion in a central region. . The method of claim 5, And the pair of second side wall portions are substantially perpendicular to the lower wall portion. The method of claim 5, And the pair of second side wall portions have an inclination in which an inner diameter thereof widens from the lower wall portion to the second flange portion. The method of claim 5, And the lower wall portion, the second side wall portion, and the second flange portion are integrally manufactured by a single material. The method of claim 5, The coupling region is formed in the first and second flange portion facing each other, the first and second flange portion substrate transfer apparatus, characterized in that the screw coupling with each other. The method of claim 1, The plurality of air injection holes, the substrate transport apparatus characterized in that the perforated in the direction toward the inside of the upper body from the outside of the upper wall portion so that a burr (burr) that can be generated during the drilling is not formed on the upper surface of the upper wall portion. The method of claim 1, Is installed in the air flow space further comprises a filter for filtering foreign matter in the air generated in the blowing fan, The filter is supported by a bracket, substrate transfer apparatus, characterized in that to form a predetermined buffer space between the upper surface of the upper body. The method of claim 1, The at least one substrate floating module is a substrate transfer apparatus, characterized in that a plurality of substrate floating module is provided with a plurality of spaced apart from each other between the substrate transfer rollers.

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