CN107934431B - Substrate conveying device and substrate detecting device - Google Patents
Substrate conveying device and substrate detecting device Download PDFInfo
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- CN107934431B CN107934431B CN201711395853.XA CN201711395853A CN107934431B CN 107934431 B CN107934431 B CN 107934431B CN 201711395853 A CN201711395853 A CN 201711395853A CN 107934431 B CN107934431 B CN 107934431B
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- 239000000758 substrate Substances 0.000 title claims abstract description 115
- 230000007246 mechanism Effects 0.000 claims abstract description 167
- 238000007599 discharging Methods 0.000 claims abstract description 122
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 17
- 230000006872 improvement Effects 0.000 abstract description 2
- 230000008569 process Effects 0.000 description 7
- 230000007547 defect Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003708 edge detection Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Intermediate Stations On Conveyors (AREA)
Abstract
The invention relates to the field of display panel detection, in particular to a substrate conveying device and a substrate detection device. Comprises a base; the transfer platform is used for bearing the substrate, is provided with a plurality of grooves and can move along the X direction; the transfer platform is provided with a platform support and is connected with the base through the platform support; the feeding conveying device is positioned at the feeding end and is provided with a plurality of rows of first feeding mechanisms along the Y direction; the discharging conveying device is positioned at the discharging end, and a plurality of rows of first discharging mechanisms are arranged on the discharging conveying device along the X direction; when the transfer platform is positioned at the feeding end, the first feeding mechanism enters the slot and is used for conveying the substrate to the transfer platform; when the transfer platform is positioned at the discharge end, the first discharge mechanism enters the slot and is used for moving the substrate out of the transfer platform. The device provided by the invention has the advantages of simple structure, convenience in arrangement of a transmission structure, small occupied space, capability of reducing the volume of the whole device, improvement of the conveying efficiency and safety of the glass substrate, and great popularization value.
Description
Technical Field
The invention relates to the field of display panel detection, in particular to a substrate conveying device and a substrate detection device.
Background
The manufacturing of the display panel requires a plurality of processes, and the processes of the processes, the handling and transmission among the processes, etc., in the processes, there may be abnormal production processes, various types of abnormal processes, or defects such as breakage, cracking or pollution may occur at the edge of the substrate, and these defects may have a significant influence on the quality of the flat panel display, so it is necessary to check whether the substrate has defects. For example, in the case of inspecting the edge of a substrate, the conventional method for inspecting the edge of a glass substrate is as follows: the glass substrate enters the transfer platform through the feeding conveying mechanism, the transfer platform bears the substrate and moves to the lower side of the CCD sensor, the edge of the glass substrate is detected through the CCD, and then the transfer platform drives the glass substrate to rotate by 90 degrees, and the other two sides of the glass substrate are detected. The existing edge detection mechanism is a device with complex structures such as a sucker or a clamping structure, which are connected with the discharging conveying mechanism, the transferring platform and the discharging conveying mechanism, the structure is usually arranged above the transferring platform, and the glass substrate is adsorbed or clamped from top to bottom and then transferred to the transferring platform. While a large amount of equipment space is required for arranging such substrate moving devices, the existing equipment space is limited, and how to arrange the substrate moving devices reasonably by using the limited space is a problem to be solved at present.
Disclosure of Invention
The invention aims to solve the problems that the prior glass substrate moving device in the background art is complex in structure and unfavorable for arrangement on a limited machine space, and provides a glass substrate edge detecting device.
The technical scheme of the invention is as follows: a substrate transfer apparatus includes a base; the method is characterized in that: the base is provided with a plurality of grooves,
the transfer platform is used for bearing the substrate, is provided with a plurality of grooves and can move along the X direction; the transfer platform is provided with a platform support and is connected with the base through the platform support;
the feeding conveying device is positioned at the feeding end and is provided with a plurality of rows of first feeding mechanisms along the Y direction; and
the discharging conveying device is positioned at the discharging end and is provided with a plurality of rows of first discharging mechanisms along the X direction;
when the transfer platform is positioned at the feeding end, the first feeding mechanism enters the slot and is used for conveying the substrate to the transfer platform; when the transfer platform is positioned at the discharge end, a first discharge mechanism enters the slot and is used for moving the substrate out of the transfer platform; the X direction is perpendicular to the Y direction.
The feeding conveying device further comprises a feeding support, the feeding support is arranged on the base, and the first feeding mechanism is arranged on the feeding support; the feeding support can move along the Z direction, so that the first feeding mechanism can enter or exit the slot; and is also provided with
The discharging and conveying device comprises a discharging support, wherein the discharging support is arranged on the base and can move along the Z direction, so that the first discharging mechanism can enter or exit the slot; the X direction, the Y direction and the Z direction are perpendicular to each other.
The transfer platform further comprises a platform support, wherein the platform support is arranged on the base in a sliding manner along the X direction and can move along the Z direction, so that the first feeding mechanism or the first discharging mechanism can enter or exit the slot.
The transfer platform further comprises a platform support, a platform guide rail extending along the X direction is arranged on the base, and the platform support is slidably arranged on the platform guide rail.
Further the pan feeding conveyer still contains the supplementary pan feeding mechanism that the multirow set up along the Y direction, supplementary pan feeding mechanism set up in the upstream end of first pan feeding mechanism, and with first pan feeding mechanism conveys the base plate extremely on the transfer platform.
Further the transfer platform still contains the platform support, correspond on the first pan feeding mechanism of multirow the platform support sets up the pan feeding portion of stepping down, correspond on the first discharge mechanism of multirow the platform support sets up the ejection of compact portion of stepping down.
Further the pan feeding conveyer both sides still contain the second pan feeding mechanism that sets up along the X direction, set up a plurality of second pan feeding diverters on the second pan feeding mechanism, every row of first pan feeding mechanism's both ends set up first pan feeding diverter respectively, first pan feeding diverter with second pan feeding diverter meshing transmission is connected.
The discharging and conveying device further comprises a plurality of rows of second discharging mechanisms arranged along the X direction, and the plurality of rows of second discharging mechanisms are arranged on the lower layers of the plurality of rows of first discharging mechanisms; the first discharging mechanism is provided with a plurality of first discharging steering gears, the second discharging mechanism is provided with a plurality of second discharging steering gears, and the first discharging steering gears are in meshed transmission connection with the second discharging steering gears.
Further the ejection of compact conveyer still contains two third discharge mechanisms that set up in the discharge end upper and lower reaches and set up along the Y direction, set up a plurality of third ejection of compact steering gears on the third discharge mechanism, third ejection of compact steering gear with the second ejection of compact steering gear meshing transmission of second discharge mechanism tip is connected.
A substrate inspection apparatus, characterized in that: the substrate conveying device according to any one of claims, and a detection unit, wherein the detection unit is disposed on at least one side of the table surface of the transfer platform, and is used for detecting the substrate when the transfer platform carries the substrate to move along the X direction.
The invention has the advantages that: 1. the feeding end and the output end of the transfer platform are connected by the feeding conveying device and the discharging conveying device, so that the occupation space of the conveying device can be greatly reduced, the arrangement difficulty of the transmission device is reduced, and the transmission mode is faster and more efficient;
2. the glass substrate can be aligned with the transfer platform quickly and conveniently by arranging the leaning mechanism, so that the detection of a subsequent detection unit and the rotation adjustment of the transfer platform are facilitated;
3. the discharging and conveying device is arranged to be of a three-stage transmission structure, so that the moving speed of each point on the glass substrate placed on the first discharging mechanism is ensured to be the same, and the glass substrate is stably and uniformly conveyed;
4. through setting up elevating system can be more convenient with glass substrate shift to move on the platform or follow and move out glass substrate on the platform of moving, reduced glass substrate's risk of collision breakage.
The device provided by the invention has the advantages of simple structure, convenience in arrangement of a transmission structure, small occupied space, capability of reducing the volume of the whole device, improvement of the conveying efficiency and safety of the glass substrate, and great popularization value.
Drawings
Fig. 1: an axial view 1 of the present invention;
fig. 2: an enlarged schematic view of portion a of fig. 1 of the present invention;
fig. 3: an axial view 2 of the present invention;
fig. 4: part B of fig. 3 is an enlarged schematic view of the present invention;
fig. 5: an axial view 3 of the present invention;
fig. 6: part C of fig. 5 is an enlarged schematic view of the present invention;
fig. 7: the first feeding mechanism is structurally schematic;
fig. 8: the first discharging mechanism is structurally schematic;
wherein: 1-a base; 11-a platform rail; 2-a transfer platform; 21-slotting; 3-a detection unit; 4-a feeding and conveying device; 41-a first feeding mechanism; 411—a first feed diverter; 42-feeding bracket; 43-auxiliary feeding mechanism; 44—a feed abdication part; 45-a second feeding mechanism; 451-a second feed diverter; 5-a discharge conveying device; 51-a first discharge mechanism; 511-a first discharge diverter; 52-a discharge bracket; 53-a second discharging mechanism; 531-a second discharge diverter; 54-a discharging abdication part; 55-a third discharging mechanism; 551-third discharge diverter.
Detailed Description
The invention will now be described in further detail with reference to the drawings and to specific examples.
As shown in fig. 1 to 8, the conveying device and the detecting device of the present embodiment are both fixed on a base 1, and the base 1 is a bearing foundation of the present embodiment. The conveying device comprises a transfer platform 2, a feeding conveying device 4 and a discharging conveying device 5 which are arranged on the base 1.
As shown in fig. 1 to 6, the transfer platform 2 of the present embodiment is configured to carry a substrate, on which a plurality of slots 21 are disposed and movable along the X direction, and the transfer platform 2 has a platform support, the platform support is disposed at the bottom of the transfer platform 2, and the transfer platform 2 is connected to the base 1 through the platform support.
As shown in fig. 5, the transfer platform 2 further includes a platform support slidably disposed on the base 1 along the X direction, for transferring the substrate between the feeding conveyor 4 and the discharging conveyor 5, and placing the substrate under the detecting device for detection by the detecting device. The transfer platform 2 further comprises a platform support, a platform guide rail 11 extending along the X direction is arranged on the base 1, and the platform support is arranged on the platform guide rail 11 in a sliding manner.
In an embodiment, a lifting mechanism is disposed between the transplanting platform 2 and the base 1, and is driven by the lifting mechanism to move along the Z direction, so that the first feeding mechanism 41 in the feeding conveying device 4 or the first discharging mechanism 51 in the discharging conveying device 5 can enter or exit the slot 21, so that the substrate carried on the transferring platform 2 can be conveyed along the X direction, and the substrate can be conveyed onto the transferring platform 2.
As shown in fig. 2, 4 and 7, a schematic structural diagram of a feeding conveyor 4 according to an embodiment is shown, where the feeding conveyor 4 is located at a feeding end of the transfer platform 2, and a plurality of rows of first feeding mechanisms 41 are disposed on the feeding end along the Y direction. The first feeding mechanism 41 of this embodiment is a horizontal rotating shaft arranged along the Y direction, the first feeding mechanism 41 is provided with rollers capable of rotating along with the first feeding mechanism 41, the rollers rotate around the axis of the first feeding mechanism 41, the substrate supported on the rollers is driven to move along the X direction, and multiple groups of first feeding mechanisms 41 are arranged at intervals along the X direction. The rollers on the first feeding mechanism 41 correspond to the slots 21, and when the transfer platform 2 moves along the Z direction, the rollers on the first feeding mechanism 41 penetrate through the slots 21 to jack up or put down the substrate on the transfer platform 2.
In one embodiment, the first feeding mechanism 41 is provided with first feeding deflectors 411 at two axial ends, and the first feeding deflectors 411 are of a gear structure, a spiral structure or other power steering conductive structures.
In an embodiment, the two sides of the feeding conveying device 4 further include second feeding mechanisms 45 disposed along the X direction, the second feeding mechanisms 45 are horizontal rotating shafts disposed along the X direction, the second feeding mechanisms 45 are driven to rotate around their own axes by the driving device, the second feeding mechanisms 45 are provided with a plurality of second feeding deflectors 451, the second feeding deflectors 451 are gear structures, spiral structures or other power steering conductive structures fixed on the second feeding mechanisms 45, the first feeding deflectors 411 are engaged with the second feeding deflectors 451 to be in transmission connection, the second feeding mechanisms 45 are driven by the driving device to rotate axially by the winder, and then power steering is achieved under the action of the first feeding deflectors 411 and the second feeding deflectors 451 to drive the first feeding mechanisms 411 to rotate around their own axes, so as to achieve transmission of the substrate in the X direction.
Therefore, the feeding and conveying device 4 of the present embodiment is of a secondary conveying structure, the driving device drives the second feeding mechanism 45 to rotate around its own axis, the second feeding diverter 451 is engaged with the first feeding diverter 411 to drive the first feeding mechanism 41 to rotate, thereby realizing the rotation of the roller on the first feeding mechanism 41 and driving the substrate carried on the roller to move along the X direction.
In an embodiment, in order to realize the transfer of the substrate between the transfer platform 2 and the feeding conveying device 4, the feeding conveying device 4 further includes a feeding support 42, the feeding support 42 is disposed on the base 1, the first feeding mechanism 41 is disposed on the feeding support 42, and the feeding support 42 can move along the Z direction, so that the first feeding mechanism 41 can enter or exit the slot 21. The lifting mechanism below the feeding support 42 drives the first feeding mechanism 41 to move along the Z direction, and the roller on the first feeding mechanism 41 passes through the slot 21 along the Z direction, so that the conveying of the bearing substrate on the roller and the transferring platform 2 is realized, and the substrate can be conveyed to the transferring platform 2.
The loading conveyor 4 is a conveyor that connects the substrate conveyor and the transfer platform 2, and the substrate on the substrate conveyor needs a transition when entering the loading conveyor 4, i.e., when transferring the substrate from the substrate conveyor to the transfer platform 2 and the first loading mechanism 41 stacked together. As shown in fig. 1 to 5, the feeding and conveying device 4 further includes a plurality of rows of auxiliary feeding mechanisms 43 disposed along the Y direction, and the auxiliary feeding mechanisms 43 are disposed at an upstream end of the first feeding mechanism 41 and convey the substrate with the first feeding mechanism 41 onto the transfer platform 2.
The auxiliary feeding mechanism 43 is also a roller transmission device like the first feeding mechanism 41 in practice, including a rotating shaft arranged in the Y direction and rollers fixed on the rotating shaft, and is driven to rotate about its own axis by a driving device. The auxiliary feeding mechanism 43 and the conveying door of the first feeding mechanism 41 are on the same horizontal plane, and are connected with the substrate conveying device and the transfer platform 2, so that the substrates are stably transferred to the transfer platform 2 and the first feeding mechanism 41 which are stacked together.
When the substrate enters the stacked transfer platform 2 and the first feeding mechanism 41, the positions of the substrates are not accurate, and the substrates need to be positioned by the positioning mechanism so as to be accurately positioned on the transfer platform 2, in this embodiment, a plurality of positioning mechanisms are arranged on the base 1, and the plurality of positioning mechanisms are arranged on the base 1 and are distributed around the substrate loaded on the first feeding mechanism 41 to drive the glass substrate to move to align with the transfer platform 2 along the X direction and the Y direction.
The leaning mechanism comprises a flexible cushion which is used for being contacted with the edge of the substrate, the cushion is arranged on an adjusting device which can move along the X direction, the Y direction and the Z direction, and the cushion is enabled to move along the X direction and the Y direction to move to the transfer platform 2 to align the two or move the substrate to align the substrate with the substrate range defined on the transfer platform 2 by synchronously driving the leaning mechanism around the substrate.
When the substrate is actually transferred, the substrate is transferred to the auxiliary feeding mechanism 43 by the substrate transfer device, and the auxiliary feeding mechanism 43 rotates to transfer the substrate in the X direction. At this time, the transfer platform 2 moves along the X direction to overlap with the first feeding mechanism 41, the first feeding mechanism 41 moves along the Z direction, and the rollers on the first feeding mechanism 41 pass through the slot 21, and the two completely overlap and cross together. The auxiliary feeding mechanism 43 rotates the substrate to move on the first feeding mechanism 41, the substrate is suspended above the transfer platform 2, and the substrate is driven by the positioning mechanism to move until the substrate is overlapped with the transfer platform 2. The first feeding mechanism 41 moves downwards along the Z direction, the substrate falls on the transfer platform 2, the transfer platform 2 conveys the substrate along the X direction, the substrate and the transfer platform are separated from the first feeding mechanism 41, and the process of transferring the substrate to the transfer platform 2 is completed.
As shown in fig. 1 to 3, 5, 6 and 8, a plurality of rows of first discharging mechanisms 51 are arranged along the Y direction, the first discharging mechanisms 51 are similar to the first feeding mechanisms 41 in structure, and are a rotating shaft horizontally arranged along the Y direction and rollers fixed on the rotating shaft, the rotating shaft is driven to rotate along the axis of the rotating shaft, the rollers rotate to drive the substrate to move along the X direction, and therefore the substrate on the transfer platform 2 is transferred to the first discharging mechanisms 51.
The discharging and conveying device 5 of the present embodiment needs to precisely control the conveying direction of the substrate, that is, it needs to ensure that the moving speed of each point on the substrate is the same, so the discharging and conveying device 5 of the present embodiment has a three-stage conveying structure. As shown in fig. 8, the discharging conveying device 5 further includes a plurality of rows of second discharging mechanisms 53 disposed along the X direction, the second discharging mechanisms 53 are rotating shafts disposed along the X direction, the plurality of rows of second discharging mechanisms 53 are disposed on the lower layer of the plurality of rows of first discharging mechanisms 51, the first discharging mechanisms 51 are provided with a plurality of first discharging diverters 511, the first discharging diverters 511 are gears or other power transmission structures, the second discharging mechanisms 53 are provided with a plurality of second discharging diverters 531, the second discharging diverters 531 are gears or other power transmission structures with the same structure as the first discharging diverters 511, and the first discharging diverters 511 are engaged with the second discharging diverters 531 for transmission connection.
The discharging and conveying device 5 further comprises two third discharging mechanisms 55 which are arranged at the upstream and downstream of the discharging end and are arranged along the Y direction, the third discharging mechanisms 55 are rotating shafts which are horizontally arranged along the Y direction, a plurality of third discharging diverters 551 are arranged on the third discharging mechanisms 55, and the third discharging diverters 551 are similar to the first discharging diverters 511 and the second discharging diverters 531 in structure and are power transmission structures such as gears. The third discharge diverter 551 is in meshed transmission connection with a second discharge diverter 531 at the end of the second discharge mechanism 53.
When the device is used, the power device drives the third discharging mechanism 55 to rotate, the third discharging steering device 551 is meshed with the second discharging steering device 531, power is transmitted to the second discharging mechanism 53, the driver rotates around the axis of the driver, the second discharging steering device 531 is meshed with the first discharging steering device 511 for transmission, and therefore the first discharging mechanism 51 is driven to rotate, and the roller driving panel on the first discharging mechanism 51 moves along the X direction.
Similarly, when the panel is transferred from the transfer platform 2 to the first discharging mechanism 51, the discharging conveyor 5 needs to move in the Z direction to change the height difference between the first discharging mechanism 51 and the transfer platform 2. As shown in fig. 1, 3 and 5, the discharging and conveying device 5 includes a discharging support 52, where the discharging support 52 is disposed on the base 1 and can move along the Z direction, so that the first discharging mechanism 51 can enter or exit the slot 21 in the X direction, the Y direction and the Z direction.
When the actual discharging and conveying device 5 discharges materials, the transfer platform 2 carries the substrate to move to the upper part of the first discharging mechanism 51 along the X direction, the first discharging mechanism 51 moves along the Z direction under the driving of the lifting mechanism, the first discharging mechanism 51 jacks up the substrate carried on the transfer platform 2 through the slot 21, then the first discharging mechanism 51 rotates around the axis under the driving of the third discharging mechanism 55 and the second discharging mechanism 53, and the roller drives the substrate to move along the X direction, so that the substrate is conveyed to the discharging device.
After the substrate is completely separated from the transfer platform 2, the first discharging mechanism 51 moves along the Z direction under the drive of the lifting mechanism, the first discharging mechanism 51 is separated from the slot 21, and the transfer platform 2 moves along the X direction and returns to the feeding conveying device 4 to be ready for receiving the next substrate to be detected.
When the transfer platform 2 is located at the feeding end, the first feeding mechanism 41 enters the slot 21 to transfer the substrate onto the transfer platform 2, and when the transfer platform 2 is located at the discharging end, the first discharging mechanism 51 enters the slot 21 to remove the substrate from the transfer platform 2, wherein the X direction is perpendicular to the Y direction.
As shown in fig. 3 and 5, the transfer platform 2 further includes a platform support, the multiple rows of first feeding mechanisms 41 are provided with feeding abdicating portions 44 corresponding to the platform support, and the multiple rows of first discharging mechanisms 51 are provided with discharging abdicating portions 54 corresponding to the platform support.
The substrate is transferred between the feeding conveyor 4 and the discharging conveyor 5 by the transfer platform 2, and a substrate detection unit 3 is arranged between the feeding conveyor 4 and the discharging conveyor, the detection unit 3 is arranged on at least one side of the table top of the transfer platform 2, and the detection unit 3 is used for detecting the substrate when the transfer platform 2 bears the substrate to move along the X direction. The detection unit 3 is an optical detection unit.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (7)
1. A substrate transfer apparatus includes a base (1); the method is characterized in that: the base (1) is provided with a plurality of grooves,
the transfer platform (2) is used for bearing a substrate, is provided with a plurality of grooves (21) and can move along the X direction; the transfer platform (2) is provided with a platform support and is connected with the base (1) through the platform support;
the feeding conveying device (4) is positioned at the feeding end, and a plurality of rows of first feeding mechanisms (41) are arranged on the feeding conveying device along the Y direction; and
the discharging and conveying device (5) is positioned at the discharging end and is provided with a plurality of rows of first discharging mechanisms (51) along the Y direction;
when the transfer platform (2) is positioned at the feeding end, the first feeding mechanism (41) enters the slot (21) and is used for conveying the substrate to the transfer platform (2); when the transfer platform (2) is positioned at the discharge end, a first discharge mechanism (51) enters the slot (21) and is used for moving the substrate out of the transfer platform (2); the X direction is perpendicular to the Y direction;
the feeding conveying device (4) comprises a feeding support (42), the feeding support (42) is arranged on the base (1), and the first feeding mechanism (41) is arranged on the feeding support (42); the feeding support (42) can move along the Z direction, so that the first feeding mechanism (41) can enter or exit the slot (21); and is also provided with
The discharging and conveying device (5) comprises a discharging support (52), wherein the discharging support (52) is arranged on the base (1) and can move along the Z direction, so that the first discharging mechanism (51) can enter or exit the slot (21); the X direction, the Y direction and the Z direction are perpendicular to each other;
the first feeding mechanism (41) is a horizontal rotating shaft arranged along the Y direction, rollers which can rotate along with the first feeding mechanism (41) are arranged on the first feeding mechanism (41), the rollers rotate around the axis of the first feeding mechanism (41), the substrate supported on the rollers is driven to move along the X direction, a plurality of groups of first feeding mechanisms (41) are arranged at intervals along the X direction, the rollers on the first feeding mechanism (41) correspond to the grooves (21), and when the transfer platform (2) moves along the Z direction, the rollers on the first feeding mechanism (41) penetrate through the grooves (21) to jack up or put down the substrate on the transfer platform (2);
the platform support is arranged on the base (1) in a sliding manner along the X direction and can move along the Z direction, so that the first feeding mechanism (41) or the first discharging mechanism (51) can enter or exit the slot (21);
the feeding conveying device (4) further comprises a plurality of rows of auxiliary feeding mechanisms (43) arranged along the Y direction, and the auxiliary feeding mechanisms (43) are arranged at the upstream end of the first feeding mechanism (41) and convey the substrate to the transfer platform (2) together with the first feeding mechanism (41).
2. The substrate transfer apparatus according to claim 1, wherein: the base (1) is provided with a platform guide rail (11) extending along the X direction, and the platform support is slidably arranged on the platform guide rail (11).
3. The substrate transfer apparatus according to claim 1, wherein: the multi-row first feeding mechanism (41) is provided with a feeding abdication part (44) corresponding to the platform support, and the multi-row first discharging mechanism (51) is provided with a discharging abdication part (54) corresponding to the platform support.
4. The substrate transfer apparatus according to claim 1, wherein: the feeding conveying device is characterized in that the two sides of the feeding conveying device (4) further comprise second feeding mechanisms (45) arranged along the X direction, a plurality of second feeding diverters (451) are arranged on the second feeding mechanisms (45), first feeding diverters (411) are respectively arranged at the two ends of each row of first feeding mechanisms (41), and the first feeding diverters (411) are in meshed transmission connection with the second feeding diverters (451).
5. The substrate transfer apparatus according to claim 1, wherein: the discharging and conveying device (5) further comprises a plurality of rows of second discharging mechanisms (53) arranged along the X direction, and the plurality of rows of second discharging mechanisms (53) are arranged on the lower layers of the plurality of rows of first discharging mechanisms (51); the first discharging mechanism (51) is provided with a plurality of first discharging steering gears (511), the second discharging mechanism (53) is provided with a plurality of second discharging steering gears (531), and the first discharging steering gears (511) are in meshed transmission connection with the second discharging steering gears (531).
6. The substrate transfer apparatus according to claim 5, wherein: the discharging and conveying device (5) further comprises two third discharging mechanisms (55) which are arranged at the upstream and downstream of the discharging end and are arranged along the Y direction, a plurality of third discharging steering gears (551) are arranged on the third discharging mechanisms (55), and the third discharging steering gears (551) are in meshed transmission connection with the second discharging steering gears (531) at the end parts of the second discharging mechanisms (53).
7. A substrate inspection apparatus, characterized in that: the substrate conveying device according to any one of claims 1-6 and a detection unit (3), wherein the detection unit (3) is arranged on at least one side of a table top of the transfer platform (2), and the detection unit (3) is used for detecting the substrate when the transfer platform (2) bears the substrate to move along the X direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711395853.XA CN107934431B (en) | 2017-12-21 | 2017-12-21 | Substrate conveying device and substrate detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711395853.XA CN107934431B (en) | 2017-12-21 | 2017-12-21 | Substrate conveying device and substrate detecting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107934431A CN107934431A (en) | 2018-04-20 |
| CN107934431B true CN107934431B (en) | 2024-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711395853.XA Active CN107934431B (en) | 2017-12-21 | 2017-12-21 | Substrate conveying device and substrate detecting device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108761868B (en) * | 2018-07-11 | 2024-01-05 | 武汉精测电子集团股份有限公司 | Automatic Gamma detection machine for display panel |
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