KR101779250B1 - 시트 모양 수지체, 수지 성형 장치, 수지 성형 방법 및 성형 제품의 제조 방법 - Google Patents
시트 모양 수지체, 수지 성형 장치, 수지 성형 방법 및 성형 제품의 제조 방법 Download PDFInfo
- Publication number
- KR101779250B1 KR101779250B1 KR1020150040945A KR20150040945A KR101779250B1 KR 101779250 B1 KR101779250 B1 KR 101779250B1 KR 1020150040945 A KR1020150040945 A KR 1020150040945A KR 20150040945 A KR20150040945 A KR 20150040945A KR 101779250 B1 KR101779250 B1 KR 101779250B1
- Authority
- KR
- South Korea
- Prior art keywords
- resin
- sheet
- cavity
- release film
- mold
- Prior art date
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 472
- 239000011347 resin Substances 0.000 title claims abstract description 472
- 238000000465 moulding Methods 0.000 title claims abstract description 67
- 238000000034 method Methods 0.000 title claims description 46
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 238000003825 pressing Methods 0.000 claims abstract description 10
- 230000007246 mechanism Effects 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 16
- 230000008569 process Effects 0.000 claims description 15
- 238000002844 melting Methods 0.000 claims description 9
- 230000008018 melting Effects 0.000 claims description 9
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 238000000748 compression moulding Methods 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract 1
- 238000012545 processing Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 description 58
- 230000001681 protective effect Effects 0.000 description 45
- 239000000758 substrate Substances 0.000 description 33
- 230000000694 effects Effects 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000037303 wrinkles Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000007717 exclusion Effects 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C43/183—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles the preformed layer being a lining, e.g. shaped in the mould before compression moulding, or a preformed shell adapted to the shape of the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/20—Making multilayered or multicoloured articles
- B29C43/203—Making multilayered articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Engineering & Computer Science (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Mechanical Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Led Device Packages (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014093364A JP6430143B2 (ja) | 2014-04-30 | 2014-04-30 | 樹脂成形装置及び樹脂成形方法並びに成形製品の製造方法 |
JPJP-P-2014-093364 | 2014-04-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20150125560A KR20150125560A (ko) | 2015-11-09 |
KR101779250B1 true KR101779250B1 (ko) | 2017-09-26 |
Family
ID=54441479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150040945A KR101779250B1 (ko) | 2014-04-30 | 2015-03-24 | 시트 모양 수지체, 수지 성형 장치, 수지 성형 방법 및 성형 제품의 제조 방법 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6430143B2 (zh) |
KR (1) | KR101779250B1 (zh) |
CN (1) | CN105034228B (zh) |
TW (1) | TWI597164B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210093149A (ko) * | 2020-01-17 | 2021-07-27 | 토와 가부시기가이샤 | 수지 성형 장치, 수지 성형품의 제조 방법 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6641209B2 (ja) * | 2016-03-22 | 2020-02-05 | 株式会社ディスコ | 保護部材形成装置 |
JP6763692B2 (ja) * | 2016-05-30 | 2020-09-30 | アピックヤマダ株式会社 | 樹脂供給方法および樹脂成形方法 |
CN111801756A (zh) * | 2018-02-23 | 2020-10-20 | 积水化学工业株式会社 | 构造体、光电转换元件的制造方法以及光电转换元件 |
WO2020115801A1 (ja) * | 2018-12-03 | 2020-06-11 | 日立化成株式会社 | 封止シート、封止構造体及び封止構造体の製造方法 |
JP7439575B2 (ja) * | 2020-03-06 | 2024-02-28 | 味の素株式会社 | 半導体装置の製造方法、及び、樹脂シート |
JP7200961B2 (ja) * | 2020-03-06 | 2023-01-10 | 味の素株式会社 | 半導体装置の製造方法、及び、樹脂シート |
JP7444453B2 (ja) * | 2020-11-25 | 2024-03-06 | アピックヤマダ株式会社 | 樹脂封止装置及び樹脂封止方法 |
WO2023238516A1 (ja) * | 2022-06-08 | 2023-12-14 | アピックヤマダ株式会社 | 樹脂封止装置及び樹脂封止方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003117933A (ja) | 2001-10-17 | 2003-04-23 | Matsushita Electric Works Ltd | 電子部品の製造方法 |
JP2009113443A (ja) | 2007-11-09 | 2009-05-28 | Toray Ind Inc | 微細形状転写シートの成形方法および微細形状転写シートの成形装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11330010A (ja) * | 1998-05-15 | 1999-11-30 | Fujitsu Ltd | 半導体装置の製造方法 |
JP4484329B2 (ja) * | 2000-07-21 | 2010-06-16 | アピックヤマダ株式会社 | 樹脂封止方法及び樹脂封止装置 |
JP2002231740A (ja) * | 2001-01-30 | 2002-08-16 | Towa Corp | 樹脂封止装置の型開閉機構 |
JP4326786B2 (ja) * | 2002-11-26 | 2009-09-09 | Towa株式会社 | 樹脂封止装置 |
JP4519398B2 (ja) * | 2002-11-26 | 2010-08-04 | Towa株式会社 | 樹脂封止方法及び半導体装置の製造方法 |
JP2007301950A (ja) * | 2006-05-15 | 2007-11-22 | Sumitomo Heavy Ind Ltd | 熱硬化性樹脂の成形方法及び成形装置 |
JP2009029930A (ja) * | 2007-07-26 | 2009-02-12 | Panasonic Electric Works Co Ltd | 離型フィルム付き接着シートの作製方法 |
KR101101669B1 (ko) * | 2009-12-01 | 2011-12-30 | 삼성전기주식회사 | 전자부품 제조장치 및 전자부품 제조방법 |
JP2012240348A (ja) * | 2011-05-23 | 2012-12-10 | Kyocera Chemical Corp | 複合シート、複合シートの製造方法、電子部品、および電子機器 |
JP6071216B2 (ja) * | 2012-02-28 | 2017-02-01 | Towa株式会社 | 樹脂封止用材料の製造方法及び樹脂封止装置 |
JP6039198B2 (ja) * | 2012-03-07 | 2016-12-07 | Towa株式会社 | 樹脂封止電子部品の製造方法及び樹脂封止電子部品の製造装置 |
JP6143665B2 (ja) * | 2013-12-26 | 2017-06-07 | Towa株式会社 | 半導体封止方法及び半導体封止装置 |
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2014
- 2014-04-30 JP JP2014093364A patent/JP6430143B2/ja active Active
-
2015
- 2015-01-13 TW TW104101056A patent/TWI597164B/zh active
- 2015-03-24 KR KR1020150040945A patent/KR101779250B1/ko active IP Right Grant
- 2015-04-03 CN CN201510156239.2A patent/CN105034228B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003117933A (ja) | 2001-10-17 | 2003-04-23 | Matsushita Electric Works Ltd | 電子部品の製造方法 |
JP2009113443A (ja) | 2007-11-09 | 2009-05-28 | Toray Ind Inc | 微細形状転写シートの成形方法および微細形状転写シートの成形装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210093149A (ko) * | 2020-01-17 | 2021-07-27 | 토와 가부시기가이샤 | 수지 성형 장치, 수지 성형품의 제조 방법 |
KR102361912B1 (ko) | 2020-01-17 | 2022-02-14 | 토와 가부시기가이샤 | 수지 성형 장치, 수지 성형품의 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
KR20150125560A (ko) | 2015-11-09 |
CN105034228B (zh) | 2018-12-25 |
CN105034228A (zh) | 2015-11-11 |
TWI597164B (zh) | 2017-09-01 |
TW201540501A (zh) | 2015-11-01 |
JP6430143B2 (ja) | 2018-11-28 |
JP2015208967A (ja) | 2015-11-24 |
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