KR101752375B1 - 온다이 커패시터를 위한 언더 범프 금속화 - Google Patents

온다이 커패시터를 위한 언더 범프 금속화 Download PDF

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KR101752375B1
KR101752375B1 KR1020117004569A KR20117004569A KR101752375B1 KR 101752375 B1 KR101752375 B1 KR 101752375B1 KR 1020117004569 A KR1020117004569 A KR 1020117004569A KR 20117004569 A KR20117004569 A KR 20117004569A KR 101752375 B1 KR101752375 B1 KR 101752375B1
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conductor
forming
under bump
bump metallization
layer
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KR20110042336A (ko
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네일 맥렐란
페이 구오
다니엘 충
테렌스 츙
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에이티아이 테크놀로지스 유엘씨
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US9478510B2 (en) * 2013-12-19 2016-10-25 Texas Instruments Incorporated Self-aligned under bump metal
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JP6332547B2 (ja) * 2015-02-27 2018-05-30 株式会社村田製作所 キャパシタおよび電子機器
US9859358B2 (en) * 2015-05-26 2018-01-02 Altera Corporation On-die capacitor (ODC) structure
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US10621387B2 (en) 2018-05-30 2020-04-14 Seagate Technology Llc On-die decoupling capacitor area optimization
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EP2308066A1 (en) 2011-04-13
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US8314474B2 (en) 2012-11-20
US20100019347A1 (en) 2010-01-28
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