KR101402631B1 - 전자부품 이재장치, 전자부품 핸들링 장치 및 전자부품 시험장치 - Google Patents

전자부품 이재장치, 전자부품 핸들링 장치 및 전자부품 시험장치 Download PDF

Info

Publication number
KR101402631B1
KR101402631B1 KR1020120148416A KR20120148416A KR101402631B1 KR 101402631 B1 KR101402631 B1 KR 101402631B1 KR 1020120148416 A KR1020120148416 A KR 1020120148416A KR 20120148416 A KR20120148416 A KR 20120148416A KR 101402631 B1 KR101402631 B1 KR 101402631B1
Authority
KR
South Korea
Prior art keywords
test
electronic component
tray
holding means
dut
Prior art date
Application number
KR1020120148416A
Other languages
English (en)
Korean (ko)
Other versions
KR20130076720A (ko
Inventor
하루키 나카지마
히로유키 키쿠치
츠요시 야마시타
Original Assignee
가부시키가이샤 아드반테스트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아드반테스트 filed Critical 가부시키가이샤 아드반테스트
Publication of KR20130076720A publication Critical patent/KR20130076720A/ko
Application granted granted Critical
Publication of KR101402631B1 publication Critical patent/KR101402631B1/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
    • B65G17/12—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface comprising a series of individual load-carriers fixed, or normally fixed, relative to traction element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020120148416A 2011-12-28 2012-12-18 전자부품 이재장치, 전자부품 핸들링 장치 및 전자부품 시험장치 KR101402631B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-289392 2011-12-28
JP2011289392A JP2013137284A (ja) 2011-12-28 2011-12-28 電子部品移載装置、電子部品ハンドリング装置、及び電子部品試験装置

Publications (2)

Publication Number Publication Date
KR20130076720A KR20130076720A (ko) 2013-07-08
KR101402631B1 true KR101402631B1 (ko) 2014-06-05

Family

ID=48677089

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120148416A KR101402631B1 (ko) 2011-12-28 2012-12-18 전자부품 이재장치, 전자부품 핸들링 장치 및 전자부품 시험장치

Country Status (5)

Country Link
US (2) US9340361B2 (zh)
JP (1) JP2013137284A (zh)
KR (1) KR101402631B1 (zh)
CN (2) CN103185813B (zh)
TW (2) TWI583970B (zh)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090314607A1 (en) * 2006-07-27 2009-12-24 Advantest Corporation Electronic device conveying method and electronic device handling apparatus
JP2014085230A (ja) 2012-10-24 2014-05-12 Advantest Corp 電子部品ハンドリング装置、電子部品試験装置、及び電子部品の試験方法
CN104044908B (zh) * 2013-03-15 2016-03-02 纬创资通(昆山)有限公司 用来自动卸载电路板的卸载系统
KR102090004B1 (ko) * 2014-01-07 2020-03-17 삼성전자 주식회사 반도체 테스트 장치와 이의 동작 방법
TWI552259B (zh) * 2014-03-20 2016-10-01 Hon Tech Inc Electronic component transfer device and its application equipment
TWI668174B (zh) * 2015-05-27 2019-08-11 日商精工愛普生股份有限公司 電子零件搬送裝置及電子零件檢查裝置
TWI615914B (zh) * 2016-01-18 2018-02-21 晶體管搬運檢測之結構
CN108016819A (zh) * 2017-11-28 2018-05-11 重庆市川仁精密机械有限公司 一种高速传输皮带线
IT201800004814A1 (it) 2018-04-24 2019-10-24 Stazione e metodo di controllo del circuito elettrico di sigarette elettroniche
CN110884833B (zh) * 2019-10-30 2021-06-22 宁夏共享机床辅机有限公司 托盘输送机
CN113535488A (zh) * 2020-04-20 2021-10-22 华为技术有限公司 电子产品的处理方法及装置、控制单元
KR102377693B1 (ko) * 2020-07-17 2022-03-23 주식회사 에스티아이테크 결로 방지 구조의 전자 부품용 시험 장치
JP2022021241A (ja) * 2020-07-21 2022-02-02 株式会社アドバンテスト 電子部品ハンドリング装置及び電子部品試験装置
US20220033195A1 (en) * 2020-07-28 2022-02-03 Nps Co.,Ltd. Cutting System
TWI786794B (zh) * 2020-12-03 2022-12-11 日商山田尖端科技股份有限公司 樹脂密封裝置
CN113253087B (zh) * 2021-06-18 2021-11-02 陕西开尔文测控技术有限公司 一种碳化硅动态检测设备
US11834276B2 (en) 2021-10-28 2023-12-05 Express Scripts Strategic Development, Inc. Shuttle for moving packages through a filling system
CN113960457B (zh) * 2021-12-23 2022-03-18 江苏森服电磁环境技术有限公司 一种滤波器生产用滤波性能检测装置
CN117184903B (zh) * 2023-11-07 2024-02-13 四川名人居门窗有限公司 一种玻璃吸盘车

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000037636A (ko) * 1998-12-01 2000-07-05 정문술 모듈 아이씨 핸들러의 리테스트용 트레이 공급장치
JP2006337044A (ja) 2005-05-31 2006-12-14 Yamaha Motor Co Ltd Ｉｃハンドラー
JP2010014632A (ja) 2008-07-06 2010-01-21 Ueno Seiki Kk 外置き型テストユニット、その制御方法及び制御プログラム

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3204756A (en) * 1962-12-11 1965-09-07 Otto Hansel G M B H Apparatus for the intermittent transport of workpieces, especially for the feeding of wrappers, labels, or the like in wrapping machines
US3430780A (en) * 1967-06-28 1969-03-04 Clark Equipment Co Inflatable material moving device
US3648852A (en) * 1970-03-05 1972-03-14 La Salle Machine Tool Air cushion support apparatus for transfer structure
AT355988B (de) * 1978-11-13 1980-04-10 Sticht Walter Fertigungsanlage fuer in zwei oder mehreren schritten herzustellende bauteile
FR2537108B1 (fr) * 1982-12-01 1987-04-03 Dubuit Mach Dispositif de transfert pour la circulation de supports porte-objet au droit d'au moins un poste de traitement
JPS63241944A (ja) * 1987-03-30 1988-10-07 Toshiba Corp 電子部品検査装置
US5170876A (en) * 1988-03-03 1992-12-15 Walter Sticht Installation for manufacturing and/or assembling components
JPH0618745Y2 (ja) * 1989-02-16 1994-05-18 トヨタ自動車株式会社 治具パレット台車の搬送装置
JPH0555328A (ja) * 1991-08-28 1993-03-05 Nippon Steel Corp 半導体デバイスの信頼性評価試験装置
JP2560767Y2 (ja) 1991-12-25 1998-01-26 株式会社アドバンテスト Ｉｃ試験装置のｉｃ搬送機構
US5244143A (en) * 1992-04-16 1993-09-14 International Business Machines Corporation Apparatus and method for injection molding solder and applications thereof
JP2511570Y2 (ja) * 1993-08-03 1996-09-25 桑野電機株式会社 電子部品搬送用キャリアの循環装置
JP3062517B2 (ja) 1993-09-17 2000-07-10 萩原エンジニアリング株式会社 物品整列装置
JPH07231026A (ja) 1994-02-16 1995-08-29 Fujitsu Ltd 半導体装置及び半導体装置の搬送方法
KR970007078Y1 (en) * 1994-06-03 1997-07-15 Lg Semicon Co Ltd Devices feeding apparatus
JP3294978B2 (ja) 1994-10-11 2002-06-24 株式会社アドバンテスト Ｉｃキャリア
US6043667A (en) * 1997-04-17 2000-03-28 International Business Machines Corporation Substrate tester location clamping, sensing, and contacting method and apparatus
TW432221B (en) * 1998-05-29 2001-05-01 Advantest Corp Tray for electronic device, the transporting apparatus of tray for electronic device and testing apparatus for electronic device
SG98373A1 (en) * 1998-11-25 2003-09-19 Advantest Corp Device testing apparatus
SG102563A1 (en) * 1999-01-11 2004-03-26 Advantest Corp Testing apparatus for electronic device board
JP2001228206A (ja) * 2000-02-17 2001-08-24 Advantest Corp 部品試験装置およびそれに用いる部品保持装置
JP2003066104A (ja) * 2001-08-22 2003-03-05 Advantest Corp インサートおよびこれを備えた電子部品ハンドリング装置
JP2003185703A (ja) 2001-12-20 2003-07-03 Seiko Epson Corp 部品検出方法、部品検出装置、ｉｃハンドラ及びｉｃ検査装置
JP3739752B2 (ja) 2003-02-07 2006-01-25 株式会社 ハリーズ ランダム周期変速可能な小片移載装置
MY140086A (en) 2004-07-23 2009-11-30 Advantest Corp Electronic device test apparatus and method of configuring electronic device test apparatus
WO2006114836A1 (ja) * 2005-04-07 2006-11-02 Advantest Corporation 電子部品のピックアンドプレース機構、電子部品ハンドリング装置および電子部品の吸着方法
JP4876640B2 (ja) * 2006-03-09 2012-02-15 セイコーエプソン株式会社 ワーク搬送装置およびワーク搬送方法
US7513716B2 (en) 2006-03-09 2009-04-07 Seiko Epson Corporation Workpiece conveyor and method of conveying workpiece
KR100942527B1 (ko) 2006-10-04 2010-02-12 가부시키가이샤 아드반테스트 전자부품 시험장치
EP2139795A2 (de) * 2006-11-30 2010-01-06 Nov Hau AG Engineering Verfahren zum transport von gegenständen
DE102006056943A1 (de) 2006-11-30 2008-06-12 A20 Ag Verfahren zum Transport von Gegenständen
JP2008164595A (ja) * 2006-12-05 2008-07-17 Ueno Seiki Kk 高低温化装置及び高低温テストハンドラ
JP5022381B2 (ja) * 2006-12-21 2012-09-12 株式会社アドバンテスト 電子部品試験装置及び電子部品の試験方法
DE112007003606T5 (de) 2007-07-30 2010-06-10 Advantest Corp. Temperatursteuerung für elektronische Bauelemente
KR100865910B1 (ko) * 2007-07-30 2008-11-10 미래산업 주식회사 핸들러 및 그를 이용한 반도체 소자 제조방법
WO2009144790A1 (ja) 2008-05-28 2009-12-03 株式会社アドバンテスト 電子部品ハンドリング装置、電子部品試験装置および電子部品保持トレイ
ITUD20080136A1 (it) 2008-06-13 2009-12-14 Baccini S P A Impianto per la lavorazione di piastre per circuiti elettronici
DE102008037188A1 (de) * 2008-08-11 2010-02-18 Krones Ag Vorrichtung und Verfahren zum Bilden von Stückgüterzusammenstellungen
JP4787872B2 (ja) 2008-10-16 2011-10-05 東京エレクトロン株式会社 基板搬送処理装置
TW201022112A (en) * 2008-12-12 2010-06-16 Chroma Ate Inc Independent test machine for semiconductor elements and testing and sorting system
WO2010137137A1 (ja) 2009-05-27 2010-12-02 株式会社アドバンテスト バルブ装置及び電子部品の温度調整装置
JP2011226806A (ja) 2010-04-15 2011-11-10 Advantest Corp 電子部品ハンドリング装置、電子部品試験装置及び電子部品試験方法
JP2013137285A (ja) * 2011-12-28 2013-07-11 Advantest Corp ピッチ変更装置、電子部品ハンドリング装置、及び電子部品試験装置
JP2013137286A (ja) * 2011-12-28 2013-07-11 Advantest Corp 電子部品試験装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000037636A (ko) * 1998-12-01 2000-07-05 정문술 모듈 아이씨 핸들러의 리테스트용 트레이 공급장치
JP2006337044A (ja) 2005-05-31 2006-12-14 Yamaha Motor Co Ltd Ｉｃハンドラー
JP2010014632A (ja) 2008-07-06 2010-01-21 Ueno Seiki Kk 外置き型テストユニット、その制御方法及び制御プログラム

Also Published As

Publication number Publication date
CN103185813B (zh) 2016-05-11
KR20130076720A (ko) 2013-07-08
US20150203300A1 (en) 2015-07-23
US20130168203A1 (en) 2013-07-04
TW201516430A (zh) 2015-05-01
CN104678285A (zh) 2015-06-03
CN104678285B (zh) 2018-05-04
TW201337283A (zh) 2013-09-16
TWI480559B (zh) 2015-04-11
TWI583970B (zh) 2017-05-21
CN103185813A (zh) 2013-07-03
US9586760B2 (en) 2017-03-07
JP2013137284A (ja) 2013-07-11
US9340361B2 (en) 2016-05-17

Similar Documents

Publication Publication Date Title
KR101402631B1 (ko) 전자부품 이재장치, 전자부품 핸들링 장치 및 전자부품 시험장치
KR101421102B1 (ko) 전자부품 시험장치
KR101372240B1 (ko) 피치변경장치, 전자부품 핸들링 장치 및 전자부품 시험장치
KR100390636B1 (ko) 전자부품 시험장치
JP5022381B2 (ja) 電子部品試験装置及び電子部品の試験方法
US20080074118A1 (en) Pick-And-Place Mechanism Of Electronic Device, Electronic Device Handling Apparatus And Suction Method Of Electronic Device
KR100911337B1 (ko) 테스트핸들러용 캐리어보드 이송장치 및 테스트핸들러
JP2000035460A (ja) トレイ移送ア―ム、電子部品試験装置およびトレイの搬送方法
JP5961286B2 (ja) 電子部品移載装置、電子部品ハンドリング装置、及び電子部品試験装置
KR20220011575A (ko) 전자부품 핸들링장치 및 전자부품 시험장치
WO2009107231A1 (ja) 電子部品移載装置およびそれを備えた電子部品試験装置
JP2000131384A (ja) 電子部品試験装置用吸着装置
JP2000356666A (ja) 電子部品試験用トレイ搬送装置、電子部品の試験装置および試験方法
KR20220011576A (ko) 전자부품 핸들링장치 및 전자부품 시험장치
WO2007083357A1 (ja) 電子部品試験装置及び電子部品の試験方法
JP2000206189A (ja) 部品搬送装置および部品試験装置
KR101333399B1 (ko) 기판 언로드 장치
KR100724149B1 (ko) 고온 테스트 핸들러의 모듈아이시 핸들링방법
JP2000171521A (ja) 電子部品吸着装置および電子部品試験装置
JP2000296915A (ja) チャンバ内部材移動装置および部品ハンドリング装置

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20170427

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20180425

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20190425

Year of fee payment: 6