KR101195678B1 - 회로 기판의 검사 방법 및 검사 장치 - Google Patents

회로 기판의 검사 방법 및 검사 장치 Download PDF

Info

Publication number
KR101195678B1
KR101195678B1 KR1020110018835A KR20110018835A KR101195678B1 KR 101195678 B1 KR101195678 B1 KR 101195678B1 KR 1020110018835 A KR1020110018835 A KR 1020110018835A KR 20110018835 A KR20110018835 A KR 20110018835A KR 101195678 B1 KR101195678 B1 KR 101195678B1
Authority
KR
South Korea
Prior art keywords
inspection
probe
test
terminal
contact position
Prior art date
Application number
KR1020110018835A
Other languages
English (en)
Korean (ko)
Other versions
KR20110102179A (ko
Inventor
겐고 츠찌다
게이이찌로 사사미네
Original Assignee
야마하 파인 테크 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 야마하 파인 테크 가부시키가이샤 filed Critical 야마하 파인 테크 가부시키가이샤
Publication of KR20110102179A publication Critical patent/KR20110102179A/ko
Application granted granted Critical
Publication of KR101195678B1 publication Critical patent/KR101195678B1/ko

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/08Measuring resistance by measuring both voltage and current
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • H05K1/0268Marks, test patterns or identification means for electrical inspection or testing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020110018835A 2010-03-08 2011-03-03 회로 기판의 검사 방법 및 검사 장치 KR101195678B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010050432A JP2011185702A (ja) 2010-03-08 2010-03-08 回路基板の電気検査方法及び電気検査装置
JPJP-P-2010-050432 2010-03-08

Publications (2)

Publication Number Publication Date
KR20110102179A KR20110102179A (ko) 2011-09-16
KR101195678B1 true KR101195678B1 (ko) 2012-10-30

Family

ID=44601496

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110018835A KR101195678B1 (ko) 2010-03-08 2011-03-03 회로 기판의 검사 방법 및 검사 장치

Country Status (4)

Country Link
JP (1) JP2011185702A (zh)
KR (1) KR101195678B1 (zh)
CN (1) CN102193061B (zh)
TW (1) TWI436078B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5991034B2 (ja) * 2012-06-08 2016-09-14 日本電産リード株式会社 電気特性検出方法及び検出装置
JP5727976B2 (ja) * 2012-07-31 2015-06-03 ヤマハファインテック株式会社 プリント基板の絶縁検査装置及び絶縁検査方法
JP5797240B2 (ja) * 2013-08-12 2015-10-21 太洋工業株式会社 プリント基板検査装置
WO2018101234A1 (ja) * 2016-12-01 2018-06-07 日本電産リード株式会社 抵抗測定装置及び抵抗測定方法
CN111726942B (zh) * 2019-03-22 2024-01-12 维亚机械株式会社 钻孔加工装置及钻孔加工方法
JP7371885B2 (ja) * 2019-07-08 2023-10-31 ヤマハファインテック株式会社 電気検査装置及び保持ユニット
US11255877B2 (en) * 2020-07-17 2022-02-22 Acculogic Corporation Method and apparatus for testing printed circuit boards
CN113701637B (zh) * 2021-09-29 2024-01-30 牧德科技股份有限公司 电测治具扎针位置估算方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008261678A (ja) 2007-04-11 2008-10-30 Hioki Ee Corp 検査プローブ接触検知機構および回路基板検査装置
JP2010038691A (ja) 2008-08-04 2010-02-18 Sumitomo Electric Ind Ltd 回路基板、その製造方法、電気検査ジグ、および電気検査装置
JP2010048681A (ja) 2008-08-22 2010-03-04 Hioki Ee Corp 回路基板検査装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2718754B2 (ja) * 1989-04-17 1998-02-25 株式会社日立製作所 基板の検査方法と検査装置
JPH07212100A (ja) * 1994-01-24 1995-08-11 Okano Denki Kk プローブ装置
JP2001101637A (ja) * 1999-09-29 2001-04-13 Nitto Denko Corp 磁気ヘッドサスペンションの製造方法
JP4462732B2 (ja) * 2000-07-31 2010-05-12 富士通株式会社 プローブヘッド
JP2003172746A (ja) * 2001-12-05 2003-06-20 Micro Craft Kk プリント配線基板の検査端ユニット
JP3625813B2 (ja) * 2002-08-05 2005-03-02 マイクロクラフト株式会社 配線基板検査用の検査プローブ接触測定方法及びその装置
JP2004228332A (ja) * 2003-01-23 2004-08-12 Yamaha Fine Technologies Co Ltd 電気検査装置
DE10320925B4 (de) * 2003-05-09 2007-07-05 Atg Test Systems Gmbh & Co.Kg Verfahren zum Testen von unbestückten Leiterplatten
JP4212489B2 (ja) * 2004-02-19 2009-01-21 日置電機株式会社 回路基板検査用プロービング装置および回路基板検査装置
JP2005326371A (ja) * 2004-05-17 2005-11-24 Nidec-Read Corp 基板検査装置、基板検査方法及び検査用接触子の移動制御プログラム
JP2007121183A (ja) * 2005-10-31 2007-05-17 Hioki Ee Corp 回路基板検査装置
JP2009019907A (ja) * 2007-07-10 2009-01-29 Hioki Ee Corp 検査装置
CN101493497B (zh) * 2008-01-24 2011-04-20 中芯国际集成电路制造(上海)有限公司 一种可提高测试效率的应力迁移测试方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008261678A (ja) 2007-04-11 2008-10-30 Hioki Ee Corp 検査プローブ接触検知機構および回路基板検査装置
JP2010038691A (ja) 2008-08-04 2010-02-18 Sumitomo Electric Ind Ltd 回路基板、その製造方法、電気検査ジグ、および電気検査装置
JP2010048681A (ja) 2008-08-22 2010-03-04 Hioki Ee Corp 回路基板検査装置

Also Published As

Publication number Publication date
TWI436078B (zh) 2014-05-01
CN102193061B (zh) 2014-02-26
CN102193061A (zh) 2011-09-21
TW201142325A (en) 2011-12-01
KR20110102179A (ko) 2011-09-16
JP2011185702A (ja) 2011-09-22

Similar Documents

Publication Publication Date Title
KR101195678B1 (ko) 회로 기판의 검사 방법 및 검사 장치
TWI245908B (en) Method of testing non-componented circuit boards
JP2012231040A (ja) 温度校正装置及び温度校正方法
CN102879646B (zh) 基板检查装置和基板检查方法
JP2015163902A (ja) 回路基板の電気検査方法及び電気検査装置
JP2017036997A (ja) 両面回路基板の検査装置及び検査方法
CN207380193U (zh) 飞针测试机
JP6479441B2 (ja) 基板検査装置および基板検査方法
JP6643169B2 (ja) 処理装置、検査装置および処理方法
JP2014071091A (ja) プローブユニットおよび検査装置
JP5899961B2 (ja) 絶縁検査装置及び絶縁検査方法
CN109946524B (zh) 测定装置及测定方法
JP5290672B2 (ja) 回路基板検査装置
CN109521234A (zh) 飞针测试机
JP2013076633A (ja) 回路基板検査装置および回路基板検査方法
JP2001235505A (ja) 回路基板検査装置
JP6576176B2 (ja) プローブユニットおよび基板検査装置
JP6366460B2 (ja) プロービング装置、回路基板検査装置およびプロービング方法
JP5698436B2 (ja) 回路断線検査装置
JP6058325B2 (ja) 基板検査装置および基板検査方法
JP2014016300A (ja) 基板検査装置および基板検査方法
JP4422038B2 (ja) 測定方法および測定装置
JP5896878B2 (ja) 評価装置および評価方法
JP7199675B1 (ja) プローブカードの検査装置
KR101292047B1 (ko) Pcb 카본저항 검사장치

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20150918

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20160921

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20170919

Year of fee payment: 6