KR101162135B1 - 회절 소자 및 광학 장치 - Google Patents

회절 소자 및 광학 장치 Download PDF

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Publication number
KR101162135B1
KR101162135B1 KR1020057014183A KR20057014183A KR101162135B1 KR 101162135 B1 KR101162135 B1 KR 101162135B1 KR 1020057014183 A KR1020057014183 A KR 1020057014183A KR 20057014183 A KR20057014183 A KR 20057014183A KR 101162135 B1 KR101162135 B1 KR 101162135B1
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South Korea
Prior art keywords
grating
diffraction element
diffraction
substrate
convex portion
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Korean (ko)
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KR20050109475A (ko
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히로마사 사토
히로타카 나시
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아사히 가라스 가부시키가이샤
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Polarising Elements (AREA)
KR1020057014183A 2003-03-13 2004-03-12 회절 소자 및 광학 장치 Expired - Lifetime KR101162135B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00068214 2003-03-13
JP2003068214 2003-03-13
JP2003078133 2003-03-20
JPJP-P-2003-00078133 2003-03-20
PCT/JP2004/003305 WO2004081620A1 (ja) 2003-03-13 2004-03-12 回折素子および光学装置

Publications (2)

Publication Number Publication Date
KR20050109475A KR20050109475A (ko) 2005-11-21
KR101162135B1 true KR101162135B1 (ko) 2012-07-03

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KR1020057014183A Expired - Lifetime KR101162135B1 (ko) 2003-03-13 2004-03-12 회절 소자 및 광학 장치

Country Status (5)

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US (1) US7142363B2 (enExample)
EP (1) EP1602947A4 (enExample)
JP (2) JPWO2004081620A1 (enExample)
KR (1) KR101162135B1 (enExample)
WO (1) WO2004081620A1 (enExample)

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US7961393B2 (en) 2004-12-06 2011-06-14 Moxtek, Inc. Selectively absorptive wire-grid polarizer
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US7630133B2 (en) 2004-12-06 2009-12-08 Moxtek, Inc. Inorganic, dielectric, grid polarizer and non-zero order diffraction grating
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US7800823B2 (en) 2004-12-06 2010-09-21 Moxtek, Inc. Polarization device to polarize and further control light
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US7554734B1 (en) * 2006-04-28 2009-06-30 Johan Christer Holm Polarization independent grating
US8755113B2 (en) 2006-08-31 2014-06-17 Moxtek, Inc. Durable, inorganic, absorptive, ultra-violet, grid polarizer
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JP5181552B2 (ja) * 2007-07-04 2013-04-10 株式会社リコー 回折光学素子および光ビーム検出手段および光走査装置および画像形成装置
US8040607B2 (en) * 2008-04-25 2011-10-18 Jds Uniphase Corporation Surface-relief diffraction grating
US7821900B2 (en) * 2008-05-15 2010-10-26 Northrop Grumman Systems Corporation Diffractive optical element and method of designing the same
US8248696B2 (en) 2009-06-25 2012-08-21 Moxtek, Inc. Nano fractal diffuser
CN103097925B (zh) * 2010-08-06 2016-04-13 旭硝子株式会社 衍射光学元件和计测装置
US8611007B2 (en) 2010-09-21 2013-12-17 Moxtek, Inc. Fine pitch wire grid polarizer
US8913321B2 (en) 2010-09-21 2014-12-16 Moxtek, Inc. Fine pitch grid polarizer
US8873144B2 (en) 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
US8913320B2 (en) 2011-05-17 2014-12-16 Moxtek, Inc. Wire grid polarizer with bordered sections
US8922890B2 (en) 2012-03-21 2014-12-30 Moxtek, Inc. Polarizer edge rib modification
JP2017004004A (ja) * 2012-03-26 2017-01-05 旭硝子株式会社 透過型回折素子
JP6007830B2 (ja) 2012-03-26 2016-10-12 旭硝子株式会社 透過型回折素子
WO2014016403A1 (de) * 2012-07-27 2014-01-30 Seereal Technologies S.A. Polarisationsgitter für schräge einfallswinkel
JP2014092730A (ja) * 2012-11-06 2014-05-19 Canon Inc 回折格子、それを用いた光学装置
WO2014118925A1 (ja) 2013-01-31 2014-08-07 株式会社島津製作所 レーザパルス圧縮用回折格子及びレーザ装置
JP2015028528A (ja) * 2013-07-30 2015-02-12 キヤノン株式会社 透過型回折光学素子及び計測装置
JP6356557B2 (ja) * 2013-09-30 2018-07-11 株式会社豊田中央研究所 レンズおよびその製造方法
US9348076B2 (en) 2013-10-24 2016-05-24 Moxtek, Inc. Polarizer with variable inter-wire distance
US9720147B2 (en) 2014-03-28 2017-08-01 Lumentum Operations Llc Reflective diffraction grating and fabrication method
JP6510231B2 (ja) * 2014-08-27 2019-05-08 京セラ株式会社 携帯電子機器
JP2017142465A (ja) * 2016-02-12 2017-08-17 古河電気工業株式会社 光操作装置および光源装置
CN106094087B (zh) * 2016-08-02 2019-07-23 中国科学院微电子研究所 一种单级衍射光栅
JP2018061155A (ja) * 2016-10-06 2018-04-12 レノボ・シンガポール・プライベート・リミテッド 情報処理装置、情報処理装置の制御方法、及び情報処理装置の制御プログラム
JP2017033019A (ja) * 2016-10-28 2017-02-09 株式会社島津製作所 レーザ装置におけるチャープパルス増幅方法
JP7071374B2 (ja) 2017-01-05 2022-05-18 マジック リープ， インコーポレイテッド プラズマエッチングによる高屈折率ガラスのパターン化
JP2018146624A (ja) * 2017-03-01 2018-09-20 Ａｇｃ株式会社 透過型回折素子および反射防止構造
US10712475B2 (en) 2017-08-16 2020-07-14 Lumentum Operations Llc Multi-layer thin film stack for diffractive optical elements
US10802185B2 (en) * 2017-08-16 2020-10-13 Lumentum Operations Llc Multi-level diffractive optical element thin film coating
US10914954B2 (en) 2018-08-03 2021-02-09 Facebook Technologies, Llc Rainbow reduction for waveguide displays
US10761330B2 (en) * 2018-01-23 2020-09-01 Facebook Technologies, Llc Rainbow reduction in waveguide displays
US10845596B2 (en) 2018-01-23 2020-11-24 Facebook Technologies, Llc Slanted surface relief grating for rainbow reduction in waveguide display
JP7327907B2 (ja) * 2018-04-25 2023-08-16 デクセリアルズ株式会社 偏光板及び偏光板の製造方法
CN115390173A (zh) * 2018-06-11 2022-11-25 Ａｇｃ株式会社 衍射光学元件、投影装置及计测装置
EP3588150A1 (en) 2018-06-29 2020-01-01 Thomson Licensing An optical device comprising multi-layer waveguides
CN109581570B (zh) * 2018-11-23 2021-09-07 京东方科技集团股份有限公司 金属线栅及其制造方法、显示面板、显示装置
EP3671322A1 (en) 2018-12-18 2020-06-24 Thomson Licensing Device for forming an outgoing electromagnetic wave from an incident electromagnetic wave
EP3671310A1 (en) 2018-12-18 2020-06-24 Thomson Licensing Optical manipulation apparatus for trapping or moving micro or nanoparticles
EP3671293A1 (en) 2018-12-21 2020-06-24 Thomson Licensing An optical device comprising at least one diffraction grating having a grating pitch above the wavelength
US11150394B2 (en) * 2019-01-31 2021-10-19 Facebook Technologies, Llc Duty cycle range increase for waveguide combiners
US11487053B2 (en) 2019-02-26 2022-11-01 Ii-Vi Delaware, Inc. Partially etched phase-transforming optical element
CN113646668A (zh) 2019-04-11 2021-11-12 应用材料公司 用于光学装置的多深度膜
CN112389111A (zh) * 2019-08-19 2021-02-23 中钞特种防伪科技有限公司 光学防伪元件及光学防伪产品
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JP2023059010A (ja) * 2021-10-14 2023-04-26 三菱ケミカル株式会社 導光板
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JP2013024625A (ja) * 2011-07-19 2013-02-04 Seiko Epson Corp 分光装置、検出装置及び分光装置の製造方法

Also Published As

Publication number Publication date
JP2010262320A (ja) 2010-11-18
EP1602947A1 (en) 2005-12-07
JPWO2004081620A1 (ja) 2006-06-15
JP5077404B2 (ja) 2012-11-21
US20060001972A1 (en) 2006-01-05
US7142363B2 (en) 2006-11-28
WO2004081620A1 (ja) 2004-09-23
EP1602947A4 (en) 2007-03-28
KR20050109475A (ko) 2005-11-21

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