KR100800397B1 - 탑 코트 조성물 - Google Patents

탑 코트 조성물 Download PDF

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Publication number
KR100800397B1
KR100800397B1 KR1020067017757A KR20067017757A KR100800397B1 KR 100800397 B1 KR100800397 B1 KR 100800397B1 KR 1020067017757 A KR1020067017757 A KR 1020067017757A KR 20067017757 A KR20067017757 A KR 20067017757A KR 100800397 B1 KR100800397 B1 KR 100800397B1
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KR
South Korea
Prior art keywords
group
top coat
coat composition
compound
fluorine
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Expired - Fee Related
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KR1020067017757A
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English (en)
Korean (ko)
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KR20070007093A (ko
Inventor
카주히코 마에다
하루히코 코모리야
시니치 수미다
사토루 미야자와
미치타카 우타니
Original Assignee
샌트랄 글래스 컴퍼니 리미티드
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Publication of KR20070007093A publication Critical patent/KR20070007093A/ko
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Publication of KR100800397B1 publication Critical patent/KR100800397B1/ko
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04—Homopolymers or copolymers of esters
    • C09J133/14—Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Paints Or Removers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
KR1020067017757A 2004-03-31 2005-03-22 탑 코트 조성물 Expired - Fee Related KR100800397B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004104885 2004-03-31
JPJP-P-2004-00104885 2004-03-31
JP2004201439A JP4484603B2 (ja) 2004-03-31 2004-07-08 トップコート組成物
JPJP-P-2004-00201439 2004-07-08

Publications (2)

Publication Number Publication Date
KR20070007093A KR20070007093A (ko) 2007-01-12
KR100800397B1 true KR100800397B1 (ko) 2008-02-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067017757A Expired - Fee Related KR100800397B1 (ko) 2004-03-31 2005-03-22 탑 코트 조성물

Country Status (6)

Country Link
US (1) US7402626B2 (enExample)
EP (1) EP1720067A4 (enExample)
JP (1) JP4484603B2 (enExample)
KR (1) KR100800397B1 (enExample)
TW (1) TW200604749A (enExample)
WO (1) WO2005098541A1 (enExample)

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JP4484603B2 (ja) 2010-06-16
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