KR100700461B1 - 전자방출소자, 전자원, 화상표시장치 및 영상수신 표시장치 - Google Patents

전자방출소자, 전자원, 화상표시장치 및 영상수신 표시장치 Download PDF

Info

Publication number
KR100700461B1
KR100700461B1 KR1020050056103A KR20050056103A KR100700461B1 KR 100700461 B1 KR100700461 B1 KR 100700461B1 KR 1020050056103 A KR1020050056103 A KR 1020050056103A KR 20050056103 A KR20050056103 A KR 20050056103A KR 100700461 B1 KR100700461 B1 KR 100700461B1
Authority
KR
South Korea
Prior art keywords
insulator
electron
conductive film
halogen
silicon oxide
Prior art date
Application number
KR1020050056103A
Other languages
English (en)
Korean (ko)
Other versions
KR20060048587A (ko
Inventor
미키 타무라
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20060048587A publication Critical patent/KR20060048587A/ko
Application granted granted Critical
Publication of KR100700461B1 publication Critical patent/KR100700461B1/ko

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165—Surface conduction emission type cathodes

Landscapes

  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Cold Cathode And The Manufacture (AREA)
KR1020050056103A 2004-06-29 2005-06-28 전자방출소자, 전자원, 화상표시장치 및 영상수신 표시장치 KR100700461B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004191634A JP3848341B2 (ja) 2004-06-29 2004-06-29 電子放出素子、電子源、画像表示装置、および映像受信表示装置、並びに電子放出素子の製造方法
JPJP-P-2004-00191634 2004-06-29

Publications (2)

Publication Number Publication Date
KR20060048587A KR20060048587A (ko) 2006-05-18
KR100700461B1 true KR100700461B1 (ko) 2007-03-29

Family

ID=35504925

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050056103A KR100700461B1 (ko) 2004-06-29 2005-06-28 전자방출소자, 전자원, 화상표시장치 및 영상수신 표시장치

Country Status (4)

Country Link
US (1) US20050285497A1 (ja)
JP (1) JP3848341B2 (ja)
KR (1) KR100700461B1 (ja)
CN (1) CN100452274C (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101192490B (zh) * 2006-11-24 2010-09-29 清华大学 表面传导电子发射元件以及应用表面传导电子发射元件的电子源
JP2009277460A (ja) * 2008-05-14 2009-11-26 Canon Inc 電子放出素子及び画像表示装置
JP2010009965A (ja) * 2008-06-27 2010-01-14 Canon Inc 電子放出素子とその製造方法、電子源及び画像表示装置
US9425393B2 (en) 2008-12-19 2016-08-23 The Trustees Of The University Of Pennsylvania Non-volatile resistance-switching thin film devices
US10224481B2 (en) * 2014-10-07 2019-03-05 The Trustees Of The University Of Pennsylvania Mechanical forming of resistive memory devices

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000021300A (ja) * 1998-07-06 2000-01-21 Canon Inc 電子放出素子、電子源、画像形成装置及びそれらの製造方法
JP2002208343A (ja) * 2001-01-12 2002-07-26 Canon Inc 電子放出素子、電子放出素子用ガラス基板、電子源、および画像形成装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07335641A (ja) * 1994-06-03 1995-12-22 Sony Corp シリコン酸化膜の形成方法及び半導体装置の酸化膜
US6246168B1 (en) * 1994-08-29 2001-06-12 Canon Kabushiki Kaisha Electron-emitting device, electron source and image-forming apparatus as well as method of manufacturing the same
JP2900837B2 (ja) * 1995-05-31 1999-06-02 日本電気株式会社 電界放射型冷陰極装置及びその製造方法
JPH1055753A (ja) * 1996-08-08 1998-02-24 Canon Inc 電子放出素子の製造方法及び電子放出素子並びにそれを用いた電子源及び画像形成装置
TW405155B (en) * 1997-07-15 2000-09-11 Toshiba Corp Semiconductor device and its manufacture
JP3320387B2 (ja) * 1998-09-07 2002-09-03 キヤノン株式会社 電子源の製造装置及び製造方法
JP3154106B2 (ja) * 1998-12-08 2001-04-09 キヤノン株式会社 電子放出素子、該電子放出素子を用いた電子源並びに該電子源を用いた画像形成装置
JP3131782B2 (ja) * 1998-12-08 2001-02-05 キヤノン株式会社 電子放出素子、電子源並びに画像形成装置
JP2000311597A (ja) * 1999-02-23 2000-11-07 Canon Inc 電子放出素子の製造方法及び装置、駆動方法並びに調整方法
JP3323850B2 (ja) * 1999-02-26 2002-09-09 キヤノン株式会社 電子放出素子およびこれを用いた電子源およびこれを用いた画像形成装置
JP3323849B2 (ja) * 1999-02-26 2002-09-09 キヤノン株式会社 電子放出素子およびこれを用いた電子源およびこれを用いた画像形成装置
JP2002190535A (ja) * 2000-12-21 2002-07-05 Mitsubishi Electric Corp 半導体装置及びその製造方法
JP3728281B2 (ja) * 2001-08-28 2005-12-21 キヤノン株式会社 電子源基板及び画像形成装置
JP3884351B2 (ja) * 2002-08-26 2007-02-21 株式会社 日立ディスプレイズ 画像表示装置およびその製造方法
US20050224722A1 (en) * 2004-03-30 2005-10-13 Applied Materials, Inc. Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to large area electron beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000021300A (ja) * 1998-07-06 2000-01-21 Canon Inc 電子放出素子、電子源、画像形成装置及びそれらの製造方法
JP2002208343A (ja) * 2001-01-12 2002-07-26 Canon Inc 電子放出素子、電子放出素子用ガラス基板、電子源、および画像形成装置

Also Published As

Publication number Publication date
US20050285497A1 (en) 2005-12-29
CN100452274C (zh) 2009-01-14
KR20060048587A (ko) 2006-05-18
JP3848341B2 (ja) 2006-11-22
CN1725415A (zh) 2006-01-25
JP2006012723A (ja) 2006-01-12

Similar Documents

Publication Publication Date Title
KR100491703B1 (ko) 전자방출소자, 전자원, 화상형성장치, 그리고,전자방출소자 및 전자방출장치의 제조방법
KR100860894B1 (ko) 전자방출소자, 그것을 이용한 전자원, 화상표시장치 및 정보표시장치, 및 이들의 제조방법
KR100702037B1 (ko) 전자방출소자 및 그 제조방법
KR100700461B1 (ko) 전자방출소자, 전자원, 화상표시장치 및 영상수신 표시장치
JP4366235B2 (ja) 電子放出素子、電子源及び画像表示装置の製造方法
JP3135118B2 (ja) 電子源形成用基板、電子源及び画像形成装置並びにそれらの製造方法
JP2007214032A (ja) 電子放出素子、電子源及び画像表示装置の製造方法
JP3944155B2 (ja) 電子放出素子、電子源及び画像表示装置の製造方法
KR101055304B1 (ko) 전자방출소자 및 화상표시장치
JP3703448B2 (ja) 電子放出素子、電子源基板、表示装置及び電子放出素子の製造方法
KR20040060823A (ko) 화상형성장치
JP3397569B2 (ja) 表面伝導型電子放出素子およびその製造方法、ならびに同電子放出素子を備えた電子源、画像形成装置
JP2000182513A (ja) 電子放出素子、電子源、画像形成装置及びそれらの製造方法
JP3919792B2 (ja) 電子放出素子、電子源、画像表示装置、及び、それらの製造方法
US8125134B2 (en) Electron-emitting device, method of manufacturing the same, electron source, and image display apparatus
EP1032012B1 (en) Electron-emitting device, electron source, and manufacture method for image-forming apparatus
JP2002313223A (ja) インクジェット装置並びにそれを用いた電子放出素子、電子源及び画像形成装置の製造方法
JP3428806B2 (ja) 電子放出素子、電子源基板、および画像形成装置の製造方法
JP3943864B2 (ja) 電子源基板及びその製造方法並びに電子源基板を用いた画像形成装置
JP2000231876A (ja) 電子放出素子、電子源、画像形成装置及びそれらの製造方法
JPH1012136A (ja) 電子放出素子の製造方法、電子放出素子、該素子を用いた電子源、表示パネルおよび画像形成装置
JP2002251954A (ja) 電子放出素子、電子源及び画像形成装置の製造方法
JP2004207131A (ja) 画像形成装置の製造方法
JP2000243231A (ja) 電子源基板およびそれを用いた画像形成装置
JP2004207124A (ja) 電子放出素子の製造方法

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20120224

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20130221

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee