KR100457762B1 - 기판캐리어 - Google Patents

기판캐리어 Download PDF

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Publication number
KR100457762B1
KR100457762B1 KR10-1998-0703924A KR19980703924A KR100457762B1 KR 100457762 B1 KR100457762 B1 KR 100457762B1 KR 19980703924 A KR19980703924 A KR 19980703924A KR 100457762 B1 KR100457762 B1 KR 100457762B1
Authority
KR
South Korea
Prior art keywords
substrate
fastening
housing
substrates
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-1998-0703924A
Other languages
English (en)
Korean (ko)
Other versions
KR19990071648A (ko
Inventor
다니엘 에이. 밥스
리차드 이. 슐츠
Original Assignee
엔티그리스 케이먼 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엔티그리스 케이먼 리미티드 filed Critical 엔티그리스 케이먼 리미티드
Publication of KR19990071648A publication Critical patent/KR19990071648A/ko
Application granted granted Critical
Publication of KR100457762B1 publication Critical patent/KR100457762B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Packaging Frangible Articles (AREA)
KR10-1998-0703924A 1995-11-27 1996-11-26 기판캐리어 Expired - Fee Related KR100457762B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US8/563,134 1995-11-27
US08/563,134 US5853214A (en) 1995-11-27 1995-11-27 Aligner for a substrate carrier
US08/563,134 1995-11-27
PCT/US1996/018879 WO1997019868A1 (en) 1995-11-27 1996-11-26 Aligner for a substrate carrier

Publications (2)

Publication Number Publication Date
KR19990071648A KR19990071648A (ko) 1999-09-27
KR100457762B1 true KR100457762B1 (ko) 2005-06-13

Family

ID=24249239

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-1998-0703924A Expired - Fee Related KR100457762B1 (ko) 1995-11-27 1996-11-26 기판캐리어

Country Status (7)

Country Link
US (1) US5853214A (enExample)
JP (1) JP2000501243A (enExample)
KR (1) KR100457762B1 (enExample)
CN (1) CN1079775C (enExample)
AU (1) AU1274297A (enExample)
DE (1) DE19681656C2 (enExample)
WO (1) WO1997019868A1 (enExample)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
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JP3838786B2 (ja) * 1997-09-30 2006-10-25 信越ポリマー株式会社 精密基板収納容器及びその位置決め構造並びに精密基板収納容器の位置決め方法
KR100247138B1 (ko) * 1997-11-20 2000-03-15 구본준, 론 위라하디락사 유리기판 적재용 카세트
US6341703B1 (en) * 1998-04-06 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd Wafer cassette having dividers of different length or color
US6808668B2 (en) * 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US6871741B2 (en) 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
KR100330480B1 (ko) * 2000-02-17 2002-04-01 황인길 웨이퍼 돌출 방지 장치
DE10045202A1 (de) * 2000-09-13 2002-04-11 Infineon Technologies Ag Kassette für flache Werkstücke
DE10046942A1 (de) * 2000-09-21 2002-04-25 Infineon Technologies Ag Verfahren zum Transport von Wafern
US6634882B2 (en) * 2000-12-22 2003-10-21 Asm America, Inc. Susceptor pocket profile to improve process performance
KR100683121B1 (ko) * 2001-05-07 2007-02-15 삼성전자주식회사 웨이퍼 카세트와 웨이퍼 카세트의 도어 개폐 장치
US6923325B2 (en) * 2001-07-12 2005-08-02 Entegris, Inc. Horizontal cassette
US6824343B2 (en) 2002-02-22 2004-11-30 Applied Materials, Inc. Substrate support
US20030168175A1 (en) * 2002-03-08 2003-09-11 Kim Kyung-Tae Substrate alignment apparatus
KR100480821B1 (ko) * 2002-05-17 2005-04-07 엘지.필립스 엘시디 주식회사 정전기 방지용 패널 수납장치
DE10232469B4 (de) * 2002-07-17 2004-08-05 Asys Automatic Systems Gmbh & Co. Kg Transportsystem mit einer kassettenartigen Stapelvorrichtung
US7108899B2 (en) * 2002-09-11 2006-09-19 Entegris, Inc. Chip tray with tacky surface
TW568095U (en) * 2002-10-09 2003-12-21 Foxsemicon Integrated Tech Inc Substrate cassette and it's stopper
TW542218U (en) * 2002-10-09 2003-07-11 Foxsemicon Intergated Technolo Substrate supporting rod and substrate cassette using the same
KR100675627B1 (ko) * 2002-10-10 2007-02-01 엘지.필립스 엘시디 주식회사 기판 수납용 카세트
US6916147B2 (en) * 2002-10-25 2005-07-12 Applied Materials, Inc. Substrate storage cassette with substrate alignment feature
TW549569U (en) * 2002-11-13 2003-08-21 Foxsemicon Integrated Tech Inc Substrate cassette
KR100488519B1 (ko) * 2002-11-21 2005-05-11 삼성전자주식회사 Ｌｃｄ용 글라스 적재 카세트
TWM243458U (en) * 2003-02-27 2004-09-11 Innolux Display Corp Substrate cassette
KR20050003759A (ko) * 2003-07-04 2005-01-12 비오이 하이디스 테크놀로지 주식회사 유리기판 수납용 카세트
TWI310850B (en) * 2003-08-01 2009-06-11 Foxsemicon Integrated Tech Inc Substrate supporting rod and substrate cassette using the same
US7100772B2 (en) * 2003-11-16 2006-09-05 Entegris, Inc. Wafer container with door actuated wafer restraint
KR101010481B1 (ko) * 2003-12-13 2011-01-21 엘지디스플레이 주식회사 기판 거치대
TWI268265B (en) * 2004-08-13 2006-12-11 Au Optronics Corp Glass substrate cassette
KR100573896B1 (ko) * 2004-08-16 2006-04-26 동부일렉트로닉스 주식회사 웨이퍼 이탈방지 장치 및 방법
CN2762903Y (zh) * 2004-12-30 2006-03-08 鸿富锦精密工业（深圳）有限公司 光学元件清洗机构
JP4934595B2 (ja) 2005-01-18 2012-05-16 エーエスエム アメリカ インコーポレイテッド 薄膜成長用反応装置
TWI262753B (en) * 2005-03-18 2006-09-21 Allied Material Technology Cor Substrate cassette
TWI315002B (en) * 2005-04-15 2009-09-21 Innolux Display Corp Substrate cassette
EP1883105B8 (en) * 2005-05-06 2013-03-27 Shin-Etsu Polymer Co., Ltd. Substrate storage container and method of producing the same
US20060283770A1 (en) * 2005-06-03 2006-12-21 Applied Materials, Inc. Transportation fixture and package for substrate rack
EP1902465A2 (en) 2005-07-08 2008-03-26 Asyst Technologies, Inc. Workpiece support structures and apparatus for accessing same
TWM309202U (en) * 2006-08-15 2007-04-01 Gudeng Prec Industral Co Ltd Wafer pod and wafer holding device thereof
CN101503128B (zh) * 2008-02-04 2010-12-22 北京京东方光电科技有限公司 装载箱和装卸系统
SG157975A1 (en) * 2008-06-18 2010-01-29 Mfg Integration Technology Ltd Adaptive clamp width adjusting device
US8453841B1 (en) 2009-04-23 2013-06-04 Western Digital Technologies, Inc. Disk placement and storage assembly with disk cassette and disk slotter
JP5501688B2 (ja) * 2009-07-30 2014-05-28 東京エレクトロン株式会社 基板位置合わせ機構、それを用いた真空予備室および基板処理システム
KR20110019511A (ko) * 2009-08-20 2011-02-28 삼성전자주식회사 매거진의 로킹 장치
TWM419217U (en) * 2011-06-08 2011-12-21 Chipbond Technology Corp Electronic component carrier Cleaning rack
US9764987B2 (en) 2012-03-02 2017-09-19 Dynamic Material Systems, LLC Composite ceramics and ceramic particles and method for producing ceramic particles and bulk ceramic particles
US10399907B2 (en) 2012-03-02 2019-09-03 Dynamic Material Systems, LLC Ceramic composite structures and processing technologies
KR101898134B1 (ko) * 2012-03-30 2018-10-05 삼성전자주식회사 리드 프레임 이송용 매거진
US20140069844A1 (en) * 2012-09-07 2014-03-13 Medtronic, Inc. Circuit board magazine having retention bar with a locking mechanism
CN103448048B (zh) * 2013-09-09 2015-11-25 深圳市华星光电技术有限公司 基板存放架
CN104743341A (zh) * 2015-01-20 2015-07-01 京东方科技集团股份有限公司 挡块、基板卡匣组件
CN106829197B (zh) * 2017-02-03 2018-10-09 成都思力普科技有限责任公司 一种便携式标本运输箱
CN106586264B (zh) * 2017-02-03 2018-12-21 扬州市生态科技新城润业中小企业服务中心有限公司 一种标本运输箱
JP6378403B2 (ja) * 2017-06-21 2018-08-22 光洋サーモシステム株式会社 基板支持構造
US10872803B2 (en) 2017-11-03 2020-12-22 Asm Ip Holding B.V. Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
US10872804B2 (en) 2017-11-03 2020-12-22 Asm Ip Holding B.V. Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
CN111029236A (zh) * 2018-10-09 2020-04-17 北京北方华创微电子装备有限公司 支撑装置及反应腔室
CN110181473B (zh) * 2019-05-11 2023-12-22 中建八局第一建设有限公司 一种钢管堆放装置
KR102809937B1 (ko) * 2019-06-06 2025-05-19 램 리써치 코포레이션 회전 정렬이 필요한 에지 링의 자동화된 이송
JP7344681B2 (ja) * 2019-06-18 2023-09-14 株式会社ディスコ ウエーハユニットの飛び出し防止治具
CN213503368U (zh) * 2020-06-01 2021-06-22 三赢科技（深圳）有限公司 物料架
US11594438B2 (en) * 2021-06-04 2023-02-28 STATS ChipPAC Pte. Ltd. Semiconductor manufacturing device to securely hold semiconductor panels for transport and manufacturing processes
TWI793703B (zh) * 2021-06-04 2023-02-21 家登精密工業股份有限公司 閉鎖裝置及具有閉鎖裝置之容器
CN114889982B (zh) * 2022-06-23 2024-04-12 江苏奥蓝工程玻璃有限公司 一种预装有校准机构便于运输的镀膜玻璃

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153164A (en) * 1978-06-13 1979-05-08 Kasper Instruments, Inc. Carrier for semiconductive wafers
US5064236A (en) * 1990-11-09 1991-11-12 John Stanfield Dish carrier

Family Cites Families (5)

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US2953253A (en) * 1958-02-17 1960-09-20 William P Henderson Windshield container
US3486631A (en) * 1967-09-29 1969-12-30 John T Shaler Co Basket for polished wafers
US3682083A (en) * 1971-07-19 1972-08-08 Jose R Puente Processing rack for photographic glass plates
US4418820A (en) * 1981-10-23 1983-12-06 Nagle Joseph J Circuit board case
US4858764A (en) * 1988-06-20 1989-08-22 Hughes Aircraft Company Adjustable carrier device for ceramic substrates and the like

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153164A (en) * 1978-06-13 1979-05-08 Kasper Instruments, Inc. Carrier for semiconductive wafers
US5064236A (en) * 1990-11-09 1991-11-12 John Stanfield Dish carrier

Also Published As

Publication number Publication date
CN1202866A (zh) 1998-12-23
WO1997019868A1 (en) 1997-06-05
DE19681656C2 (de) 2002-08-01
KR19990071648A (ko) 1999-09-27
CN1079775C (zh) 2002-02-27
US5853214A (en) 1998-12-29
DE19681656T1 (de) 1998-10-29
AU1274297A (en) 1997-06-19
JP2000501243A (ja) 2000-02-02

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