TWI315002B - Substrate cassette - Google Patents

Substrate cassette Download PDF

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Publication number
TWI315002B
TWI315002B TW094112026A TW94112026A TWI315002B TW I315002 B TWI315002 B TW I315002B TW 094112026 A TW094112026 A TW 094112026A TW 94112026 A TW94112026 A TW 94112026A TW I315002 B TWI315002 B TW I315002B
Authority
TW
Taiwan
Prior art keywords
substrate carrier
groove
frame
rod
adjusting rod
Prior art date
Application number
TW094112026A
Other languages
Chinese (zh)
Other versions
TW200636328A (en
Inventor
Tze-Wei Chou
Original Assignee
Innolux Display Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innolux Display Corp filed Critical Innolux Display Corp
Priority to TW094112026A priority Critical patent/TWI315002B/en
Priority to US11/403,703 priority patent/US20060231515A1/en
Publication of TW200636328A publication Critical patent/TW200636328A/en
Application granted granted Critical
Publication of TWI315002B publication Critical patent/TWI315002B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Description

1315002 九、發明說明: 【發明所屬之技術領域】 於液晶顯示震 本發明係關於-種基板載具,尤其係關於一種 置製私中用於裝載及搬運基板之基板载具。 【先前技術】 *液晶顯錢置之縣涉及麵基板之職及搬運,經常 藉機械設備或以人工徒手的方式搬 顶運或移動,而破螭基板係極脆 弱之物…所以容綠製程中因受碰撞、摔落簡壞,相對增加 了生產成本。業界常使賴具來搬運_基板,提高工作效率的 同時亦可避免上述情形的發生。 -種先前技術之基板載具如第—圖所示,該基板載且丨包括架 體11、組裝姉體11上之二挾持裝置12及挾持裝置12定位於 架體11上之_裝置13。其中,二挾持裝置12她—定距離以收 容基板。親11上每隔特定麟設有與_裝413配合之通孔 鲁14,鎖固裝置13與通孔14配合將二挾持裝置12固定於架體11内之 不同位置以便承载不同尺寸規格之基板。 對應不同尺寸規格之基板,調整基板載具丨之二相對挾持裝置 12之間距時,需要借助一定的外界工具,如板手、螺絲起子等等, 才能將鎖固裝置13完全卸下,然後調整挾持裝置12於架體u内之 位置,再藉由該工具將鎖固裝置13安裝好,才能完成二相對挾持 裝置12間收容空間之變化以適應不同尺寸規格之基板。惟,完全 1315002 222之間之複數個支掉體223及複數個調節桿224。該上邊桿⑵及 •下邊桿222上具有相對設置之導引槽225,每一支撐體您之垂直方 向上排佈有複數個板狀支撐肋咖,每一支撐肋細均與水平方 向平打’於每上、下_鄰之支獅2231間形成—插槽迎,每 一插槽2232可供放置一塊玻璃基板。 ^ 賴節杆224之上端部穿過上邊桿221之導引槽2Μ後伸入上框 架211上之分叉溝槽215,該上端部還具有彈簧224卜該上端部還 籲具有外職,通過具有㈣紋之螺帽2242仙、外螺紋配合,使 螺帽2242緊固文裝於上端部;該調節桿224之下端部2如穿過下邊 桿222上之導引槽225後落入下框架212上之分叉溝槽215内。 研參閱第二圖、第四圖及第五圖,第四_挾持裝置移動時 基板載具之立體示細,第五圖係第四,部份之放大示意圖。 因該調節桿224之上端部具有彈簧2241,當該調節桿似之上端部 穿過上邊桿221上之導引槽225後,該彈簧:加則位於調節桿a4之 ^上端部與上邊桿221之下表面之間,從而給該調節桿224提供一向 下之彈I*生力。§亥基板載具2需載置不同尺寸規格之基板時,用雙手 握持门下邊和"222上之二根調節桿224,輕微用力向上提起該調 節桿224 ’即可克服調節桿224上之彈箐2241之彈性力,使調節桿 224上端之螺帽2242位於調整裝置214之分叉溝槽215上方。將調節 桿224移動到調整裝置214上所標示之對應之分叉溝槽215内,移動 调節桿224時挾持裝置22也隨之滑動至預定的位置,此時鬆開握住 8 1315002 範圍 爲限,舉凡熟爾技藝之人均依本 Η ……·變化,皆應涵蓋於以下申請 發明之精神所作之等效修舞或 園内 【圖式簡單說明】 第-圖係先前技術基域具之立體示意圖。 第-圖係本發明基域具之立體示意圖。 第三圖係本發日絲板载具之挾持裝置之立體示意圖。 #第四圖係本發明基板载具之挾持裝置移動時之立:立 第五圖係第四圖ν部份之放大示意圖。 ;'、〜、圖 【主要元件符號說明】 基板載具 2 架體 上框架 211 下框架 21 架桿 213 調整裝置 212 分叉溝槽 215 第一表面 214 第二表面 2152 挾持裝置 2151 上邊桿 221 下邊桿 22 ' 支撐體 223 支撐肋 222 插槽 2232 調節桿 2231 彈簧 2241 螺帽 224 下端部 2243 導引槽 2242 2251315002 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a substrate carrier, and more particularly to a substrate carrier for mounting a substrate for loading and transporting. [Prior Art] *The liquid crystal display of the county is related to the position and handling of the surface substrate, often by mechanical equipment or by hand or by hand to move the top or move, and the broken substrate is extremely fragile... so the green process Due to the collision and the fall, the production cost is relatively increased. The industry often uses the rig to carry the _ substrate to improve work efficiency while avoiding the above situation. A prior art substrate carrier, as shown in the first figure, includes a frame 11, a two holding device 12 on the assembled body 11, and a device 13 on which the holding device 12 is positioned on the frame 11. Among them, the second holding device 12 is arranged at a distance to accommodate the substrate. Each of the specific linings is provided with a through hole 14 matched with the _ 413, and the locking device 13 cooperates with the through hole 14 to fix the two holding devices 12 at different positions in the frame 11 to carry substrates of different sizes. . Corresponding to the substrate of different size specifications, when adjusting the distance between the substrate carrier and the holding device 12, a certain external tool such as a wrench, a screwdriver or the like is required to completely remove the locking device 13 and then adjust. The holding device 12 is placed in the frame u, and the locking device 13 is installed by the tool, so that the change of the receiving space between the two holding devices 12 can be completed to adapt to different sizes of substrates. However, a plurality of branches 223 and a plurality of adjustment rods 224 are completely between 1315002 and 222. The upper side rod (2) and the lower side rod 222 have oppositely disposed guiding grooves 225, and each supporting body is arranged with a plurality of plate-shaped supporting ribs in the vertical direction, and each supporting rib is evenly flattened with the horizontal direction. Each of the upper and lower _ neighboring lions 2231 forms a slot-welcoming, and each slot 2232 can be used to place a glass substrate. ^ The upper end of the struts 224 passes through the guiding groove 2 of the upper rod 221 and then extends into the bifurcated groove 215 on the upper frame 211. The upper end also has a spring 224, and the upper end also has a foreign position. The nut of the (four) pattern is 2242, and the external thread is matched, so that the nut 2242 is fastened to the upper end; the lower end 2 of the adjusting rod 224 passes through the guiding groove 225 on the lower rod 222 and falls into the lower frame. 212 in the bifurcated groove 215. Referring to the second, fourth and fifth figures, the fourth _ holding device moves when the substrate carrier is three-dimensionally thin, and the fifth figure is the fourth and partial enlarged view. Since the upper end portion of the adjusting rod 224 has a spring 2241, when the adjusting rod is like the upper end portion passing through the guiding groove 225 on the upper side rod 221, the spring is added to the upper end portion and the upper side rod 221 of the adjusting rod a4. Between the lower surfaces, thereby providing the adjustment rod 224 with a downward force I*. §When the substrate carrier 2 is to be placed on a substrate of different sizes, hold the bottom of the door and the two adjustment levers 224 on the "222 with both hands, and lift the adjustment lever 224 ' with a slight force to overcome the adjustment rod 224. The elastic force of the upper magazine 2241 is such that the nut 2242 at the upper end of the adjusting rod 224 is located above the branching groove 215 of the adjusting device 214. The adjusting rod 224 is moved into the corresponding bifurcated groove 215 indicated on the adjusting device 214. When the adjusting rod 224 is moved, the holding device 22 is also slid to a predetermined position, and then the grip 8 1315002 is released. Limits, all those who are skilled in the craftsmanship according to this Η··changes, should cover the equivalent of the spirit of the invention in the following application of the equivalent of the dance or the garden [simplified description of the map] The first picture is the three-dimensional structure of the prior art schematic diagram. The first figure is a perspective view of the basic domain of the present invention. The third figure is a perspective view of the holding device of the hairpin carrier of the present invention. The fourth figure is the vertical movement of the holding device of the substrate carrier of the present invention: the fifth drawing is an enlarged view of the portion of the fourth figure ν. ; ', ~, Fig. [Description of main component symbols] Substrate carrier 2 Shelf upper frame 211 Lower frame 21 Rack 213 Adjustment device 212 Bifurcation groove 215 First surface 214 Second surface 2152 Holding device 2151 Upper side rod 221 Bottom side Rod 22 ' Support 223 Support rib 222 Slot 2232 Adjustment rod 2231 Spring 2241 Nut 224 Lower end 2243 Guide groove 2242 225

Claims (1)

.1315002 十、申請專利範園: 1. 一種基板載具,其包括: -架體’其包括相對設置之上框架及下框架,該上、下框架 之間形成放置空間’該上、下框架上設有複數侧整裝置; 二挾持裝置’相對設置於放置空間内,分別包括上、下邊桿 及複數個支擇體; 其p在於母凋整裝置具有溝槽,該溝槽之主幹溝槽延 • 彳_出複數個分叉縣,該挾持裝置進-步包純數個調節 桿,該·桿提供―彈性力㈣固定挾絲置,徒手反向 提起調節桿以克服該彈性力,並移動該調節桿使其於該調 整裝置之溝槽内移動,移動該調節桿至溝槽之其中一分叉 溝槽内’該調節桿帶動該挾持裝置移動至預定位置,鬆開 手後該調節桿職供之_力將二麟裝置固定至所處位 置以讀疋—挾持裝置之間距,用以收容不同尺寸之基板。 夤2·如申請專利範圍第1項所述之基板載具,其中該上、下框架分 別包括四個--對應設置之調整裝置。 3. 刚觸1酬叙基_,財每—挾持裝置之 上邊杯及下邊桿上具有相對設置之導引槽。 4. J315002 5.=申請專利範圍第4項所述之基板載具,其中該調節桿之下端 部穿過下邊桿上之導引槽後落入下框架上之調整裂置之分又溝 槽内。 / 6·如申請專利範圍第5項所述之基板載具,其中該調整裝置之分 . 叉溝槽内壁具有第一表面及第二表面。 刀 7.如ΐ請專魏圍第6項所述之基板載具,其中第—表面之間距 大於第二表面之間距,該第一表面與第二表面形成—台階。 蠊8.如申請專利範圍第7項所述之基板载具,其中該調節杆之上端 部上設有螺帽。 9·如申請專利範圍第8項所述之基板载具,其中該調節桿之上端 部設有彈簧。 10.如申請專利範圍第丨項所述之基板載具,其中該上框架上之調 整裝置之分叉溝槽有標示刻度。 11·如申請專利範圍第i柄述之基板載具,其中該上框架及下框 4 架之間具有複數個支撐該上框架及下框架之架桿。 Λ I2.如申請專利範圍第1項所述之基板載具,其中每一支撐體之 垂直方向上排佈有複數個板狀支撐肋。 13·如申請專利範圍第12項所述之基板载具,其中相鄰之上、下 支撐肋之間形成一插槽。 14·如申請專利範圍第1項所述之基板載具,其中該架體之材料 為金屬材質。 12 1315002 15. 如申請專利範圍第1項所述之基板載具 為導電性樹脂材質。 16. 如申請專利範圍第1項所述之基板載具 料為金屬材質。 其中該架體之材料 其中調整裝置之材 13.1315002 X. Patent Application Park: 1. A substrate carrier comprising: - a frame body - comprising a relatively disposed upper frame and a lower frame, the upper and lower frames forming a space between the upper and lower frames The plurality of holding devices are disposed on the upper side; the second holding device is disposed opposite to the placement space, and includes upper and lower side rods and a plurality of supporting bodies respectively; wherein the female wetting device has a groove, and the main groove of the groove延• 彳 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Moving the adjusting rod to move in the groove of the adjusting device, moving the adjusting rod into one of the bifurcation grooves of the groove, the adjusting rod drives the holding device to move to a predetermined position, and the adjustment is released after releasing the hand The lever is used to fix the Erlin device to its position to read the distance between the holding devices to accommodate substrates of different sizes. The substrate carrier of claim 1, wherein the upper and lower frames respectively comprise four adjustment devices corresponding to the arrangement. 3. Just touch 1 reward base _, each of the holding-up device has a relatively set guiding groove on the upper cup and the lower side rod. 4. J315002 5. The substrate carrier of claim 4, wherein the lower end of the adjusting rod passes through the guiding groove on the lower rod and falls onto the lower frame to adjust the splitting and the groove. Inside. The substrate carrier of claim 5, wherein the inner wall of the fork groove has a first surface and a second surface. 7. The substrate carrier according to item 6, wherein the first surface is larger than the second surface, and the first surface forms a step with the second surface. The substrate carrier of claim 7, wherein the upper end of the adjusting rod is provided with a nut. 9. The substrate carrier of claim 8, wherein the upper end of the adjustment rod is provided with a spring. 10. The substrate carrier of claim 3, wherein the furcation groove of the adjustment device on the upper frame has a marking scale. 11. The substrate carrier of claim i, wherein the upper frame and the lower frame have a plurality of posts supporting the upper frame and the lower frame. The substrate carrier of claim 1, wherein a plurality of plate-shaped support ribs are arranged in a vertical direction of each support body. 13. The substrate carrier of claim 12, wherein a slot is formed between adjacent upper and lower support ribs. The substrate carrier of claim 1, wherein the material of the frame is made of a metal material. 12 1315002 15. The substrate carrier according to claim 1 is a conductive resin material. 16. The substrate carrier as described in item 1 of the patent application is made of metal. Wherein the material of the frame is the material of the adjusting device 13
TW094112026A 2005-04-15 2005-04-15 Substrate cassette TWI315002B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW094112026A TWI315002B (en) 2005-04-15 2005-04-15 Substrate cassette
US11/403,703 US20060231515A1 (en) 2005-04-15 2006-04-13 Adjustable cassette for substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094112026A TWI315002B (en) 2005-04-15 2005-04-15 Substrate cassette

Publications (2)

Publication Number Publication Date
TW200636328A TW200636328A (en) 2006-10-16
TWI315002B true TWI315002B (en) 2009-09-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW094112026A TWI315002B (en) 2005-04-15 2005-04-15 Substrate cassette

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US (1) US20060231515A1 (en)
TW (1) TWI315002B (en)

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US20060231515A1 (en) 2006-10-19
TW200636328A (en) 2006-10-16

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