TWI315002B - Substrate cassette - Google Patents
Substrate cassette Download PDFInfo
- Publication number
- TWI315002B TWI315002B TW094112026A TW94112026A TWI315002B TW I315002 B TWI315002 B TW I315002B TW 094112026 A TW094112026 A TW 094112026A TW 94112026 A TW94112026 A TW 94112026A TW I315002 B TWI315002 B TW I315002B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate carrier
- groove
- frame
- rod
- adjusting rod
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims description 34
- 239000000463 material Substances 0.000 claims 4
- 101710095439 Erlin Proteins 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000009736 wetting Methods 0.000 claims 1
- 241000282320 Panthera leo Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
Description
1315002 九、發明說明: 【發明所屬之技術領域】 於液晶顯示震 本發明係關於-種基板載具,尤其係關於一種 置製私中用於裝載及搬運基板之基板载具。 【先前技術】 *液晶顯錢置之縣涉及麵基板之職及搬運,經常 藉機械設備或以人工徒手的方式搬 顶運或移動,而破螭基板係極脆 弱之物…所以容綠製程中因受碰撞、摔落簡壞,相對增加 了生產成本。業界常使賴具來搬運_基板,提高工作效率的 同時亦可避免上述情形的發生。 -種先前技術之基板載具如第—圖所示,該基板載且丨包括架 體11、組裝姉體11上之二挾持裝置12及挾持裝置12定位於 架體11上之_裝置13。其中,二挾持裝置12她—定距離以收 容基板。親11上每隔特定麟設有與_裝413配合之通孔 鲁14,鎖固裝置13與通孔14配合將二挾持裝置12固定於架體11内之 不同位置以便承载不同尺寸規格之基板。 對應不同尺寸規格之基板,調整基板載具丨之二相對挾持裝置 12之間距時,需要借助一定的外界工具,如板手、螺絲起子等等, 才能將鎖固裝置13完全卸下,然後調整挾持裝置12於架體u内之 位置,再藉由該工具將鎖固裝置13安裝好,才能完成二相對挾持 裝置12間收容空間之變化以適應不同尺寸規格之基板。惟,完全 1315002 222之間之複數個支掉體223及複數個調節桿224。該上邊桿⑵及 •下邊桿222上具有相對設置之導引槽225,每一支撐體您之垂直方 向上排佈有複數個板狀支撐肋咖,每一支撐肋細均與水平方 向平打’於每上、下_鄰之支獅2231間形成—插槽迎,每 一插槽2232可供放置一塊玻璃基板。 ^ 賴節杆224之上端部穿過上邊桿221之導引槽2Μ後伸入上框 架211上之分叉溝槽215,該上端部還具有彈簧224卜該上端部還 籲具有外職,通過具有㈣紋之螺帽2242仙、外螺紋配合,使 螺帽2242緊固文裝於上端部;該調節桿224之下端部2如穿過下邊 桿222上之導引槽225後落入下框架212上之分叉溝槽215内。 研參閱第二圖、第四圖及第五圖,第四_挾持裝置移動時 基板載具之立體示細,第五圖係第四,部份之放大示意圖。 因該調節桿224之上端部具有彈簧2241,當該調節桿似之上端部 穿過上邊桿221上之導引槽225後,該彈簧:加則位於調節桿a4之 ^上端部與上邊桿221之下表面之間,從而給該調節桿224提供一向 下之彈I*生力。§亥基板載具2需載置不同尺寸規格之基板時,用雙手 握持门下邊和"222上之二根調節桿224,輕微用力向上提起該調 節桿224 ’即可克服調節桿224上之彈箐2241之彈性力,使調節桿 224上端之螺帽2242位於調整裝置214之分叉溝槽215上方。將調節 桿224移動到調整裝置214上所標示之對應之分叉溝槽215内,移動 调節桿224時挾持裝置22也隨之滑動至預定的位置,此時鬆開握住 8 1315002 範圍 爲限,舉凡熟爾技藝之人均依本 Η ……·變化,皆應涵蓋於以下申請 發明之精神所作之等效修舞或 園内 【圖式簡單說明】 第-圖係先前技術基域具之立體示意圖。 第-圖係本發明基域具之立體示意圖。 第三圖係本發日絲板载具之挾持裝置之立體示意圖。 #第四圖係本發明基板载具之挾持裝置移動時之立:立 第五圖係第四圖ν部份之放大示意圖。 ;'、〜、圖 【主要元件符號說明】 基板載具 2 架體 上框架 211 下框架 21 架桿 213 調整裝置 212 分叉溝槽 215 第一表面 214 第二表面 2152 挾持裝置 2151 上邊桿 221 下邊桿 22 ' 支撐體 223 支撐肋 222 插槽 2232 調節桿 2231 彈簧 2241 螺帽 224 下端部 2243 導引槽 2242 2251315002 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a substrate carrier, and more particularly to a substrate carrier for mounting a substrate for loading and transporting. [Prior Art] *The liquid crystal display of the county is related to the position and handling of the surface substrate, often by mechanical equipment or by hand or by hand to move the top or move, and the broken substrate is extremely fragile... so the green process Due to the collision and the fall, the production cost is relatively increased. The industry often uses the rig to carry the _ substrate to improve work efficiency while avoiding the above situation. A prior art substrate carrier, as shown in the first figure, includes a frame 11, a two holding device 12 on the assembled body 11, and a device 13 on which the holding device 12 is positioned on the frame 11. Among them, the second holding device 12 is arranged at a distance to accommodate the substrate. Each of the specific linings is provided with a through hole 14 matched with the _ 413, and the locking device 13 cooperates with the through hole 14 to fix the two holding devices 12 at different positions in the frame 11 to carry substrates of different sizes. . Corresponding to the substrate of different size specifications, when adjusting the distance between the substrate carrier and the holding device 12, a certain external tool such as a wrench, a screwdriver or the like is required to completely remove the locking device 13 and then adjust. The holding device 12 is placed in the frame u, and the locking device 13 is installed by the tool, so that the change of the receiving space between the two holding devices 12 can be completed to adapt to different sizes of substrates. However, a plurality of branches 223 and a plurality of adjustment rods 224 are completely between 1315002 and 222. The upper side rod (2) and the lower side rod 222 have oppositely disposed guiding grooves 225, and each supporting body is arranged with a plurality of plate-shaped supporting ribs in the vertical direction, and each supporting rib is evenly flattened with the horizontal direction. Each of the upper and lower _ neighboring lions 2231 forms a slot-welcoming, and each slot 2232 can be used to place a glass substrate. ^ The upper end of the struts 224 passes through the guiding groove 2 of the upper rod 221 and then extends into the bifurcated groove 215 on the upper frame 211. The upper end also has a spring 224, and the upper end also has a foreign position. The nut of the (four) pattern is 2242, and the external thread is matched, so that the nut 2242 is fastened to the upper end; the lower end 2 of the adjusting rod 224 passes through the guiding groove 225 on the lower rod 222 and falls into the lower frame. 212 in the bifurcated groove 215. Referring to the second, fourth and fifth figures, the fourth _ holding device moves when the substrate carrier is three-dimensionally thin, and the fifth figure is the fourth and partial enlarged view. Since the upper end portion of the adjusting rod 224 has a spring 2241, when the adjusting rod is like the upper end portion passing through the guiding groove 225 on the upper side rod 221, the spring is added to the upper end portion and the upper side rod 221 of the adjusting rod a4. Between the lower surfaces, thereby providing the adjustment rod 224 with a downward force I*. §When the substrate carrier 2 is to be placed on a substrate of different sizes, hold the bottom of the door and the two adjustment levers 224 on the "222 with both hands, and lift the adjustment lever 224 ' with a slight force to overcome the adjustment rod 224. The elastic force of the upper magazine 2241 is such that the nut 2242 at the upper end of the adjusting rod 224 is located above the branching groove 215 of the adjusting device 214. The adjusting rod 224 is moved into the corresponding bifurcated groove 215 indicated on the adjusting device 214. When the adjusting rod 224 is moved, the holding device 22 is also slid to a predetermined position, and then the grip 8 1315002 is released. Limits, all those who are skilled in the craftsmanship according to this Η··changes, should cover the equivalent of the spirit of the invention in the following application of the equivalent of the dance or the garden [simplified description of the map] The first picture is the three-dimensional structure of the prior art schematic diagram. The first figure is a perspective view of the basic domain of the present invention. The third figure is a perspective view of the holding device of the hairpin carrier of the present invention. The fourth figure is the vertical movement of the holding device of the substrate carrier of the present invention: the fifth drawing is an enlarged view of the portion of the fourth figure ν. ; ', ~, Fig. [Description of main component symbols] Substrate carrier 2 Shelf upper frame 211 Lower frame 21 Rack 213 Adjustment device 212 Bifurcation groove 215 First surface 214 Second surface 2152 Holding device 2151 Upper side rod 221 Bottom side Rod 22 ' Support 223 Support rib 222 Slot 2232 Adjustment rod 2231 Spring 2241 Nut 224 Lower end 2243 Guide groove 2242 225
Claims (1)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094112026A TWI315002B (en) | 2005-04-15 | 2005-04-15 | Substrate cassette |
US11/403,703 US20060231515A1 (en) | 2005-04-15 | 2006-04-13 | Adjustable cassette for substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094112026A TWI315002B (en) | 2005-04-15 | 2005-04-15 | Substrate cassette |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200636328A TW200636328A (en) | 2006-10-16 |
TWI315002B true TWI315002B (en) | 2009-09-21 |
Family
ID=37107494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094112026A TWI315002B (en) | 2005-04-15 | 2005-04-15 | Substrate cassette |
Country Status (2)
Country | Link |
---|---|
US (1) | US20060231515A1 (en) |
TW (1) | TWI315002B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2352928B1 (en) * | 2009-07-28 | 2012-01-25 | Abengoa Solar New Technologies | SHELVES FOR THE SAFE TRANSPORTATION OF SOLAR CONCENTRATION FACETS. |
KR101212889B1 (en) * | 2010-10-01 | 2012-12-14 | 하이디스 테크놀로지 주식회사 | Cassette for loading Glasses |
CN102826303A (en) * | 2012-08-28 | 2012-12-19 | 深圳市华星光电技术有限公司 | Glass substrate cassette |
CN103448048B (en) * | 2013-09-09 | 2015-11-25 | 深圳市华星光电技术有限公司 | Substrate storage rack |
CN104309946B (en) * | 2014-11-17 | 2017-01-18 | 合肥鑫晟光电科技有限公司 | Storing device of display panel |
US10020213B1 (en) * | 2016-12-30 | 2018-07-10 | Sunpower Corporation | Semiconductor wafer carriers |
CN106829215B (en) * | 2017-03-01 | 2018-10-23 | 合肥鑫晟光电科技有限公司 | Panel storage device and its control method |
KR20210151527A (en) * | 2020-06-05 | 2021-12-14 | 삼성전자주식회사 | Open-ended type substrate receiving cassette and system thereof |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153164A (en) * | 1978-06-13 | 1979-05-08 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
JPS63201212U (en) * | 1987-06-16 | 1988-12-26 | ||
US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
US5184854A (en) * | 1992-02-03 | 1993-02-09 | Mavis Chen | Electromagnetic lock |
KR100188137B1 (en) * | 1995-09-07 | 1999-06-01 | 김광호 | Cassette for lcd glass |
US5638958A (en) * | 1995-09-08 | 1997-06-17 | Micron Technology, Inc. | Semiconductor film wafer cassette |
US5853214A (en) * | 1995-11-27 | 1998-12-29 | Progressive System Technologies, Inc. | Aligner for a substrate carrier |
US5823361A (en) * | 1996-02-06 | 1998-10-20 | Progressive System Technologies, Inc. | Substrate support apparatus for a substrate housing |
US5858459A (en) * | 1996-02-22 | 1999-01-12 | Micron Technology, Inc. | Cassette invertor apparatus and method |
JP2788901B2 (en) * | 1996-07-03 | 1998-08-20 | 日本電気エンジニアリング株式会社 | Substrate cassette |
JPH10203584A (en) * | 1997-01-22 | 1998-08-04 | Nec Corp | Cassette for substrate |
KR100247138B1 (en) * | 1997-11-20 | 2000-03-15 | 구본준, 론 위라하디락사 | Cassette for loading glass substrate |
KR100737846B1 (en) * | 1999-09-06 | 2007-07-12 | 요도가와 휴텍 가부시키가이샤 | Elongated rib for cassette and substrate cassette |
TW547460U (en) * | 2001-10-09 | 2003-08-11 | Advanced Semiconductor Eng | Storage box for chip |
JP3989736B2 (en) * | 2002-01-11 | 2007-10-10 | 株式会社ニックス | Board storage frame |
KR20030077070A (en) * | 2002-03-25 | 2003-10-01 | 엘지.필립스 엘시디 주식회사 | A Cassette for Measuring Gravitation Badness |
TW568095U (en) * | 2002-10-09 | 2003-12-21 | Foxsemicon Integrated Tech Inc | Substrate cassette and it's stopper |
TW542218U (en) * | 2002-10-09 | 2003-07-11 | Foxsemicon Intergated Technolo | Substrate supporting rod and substrate cassette using the same |
TW553195U (en) * | 2002-10-09 | 2003-09-11 | Foxsemicon Integrated Tech Inc | Substrate supporting slot plate and substrate cassette using the same |
TW549569U (en) * | 2002-11-13 | 2003-08-21 | Foxsemicon Integrated Tech Inc | Substrate cassette |
TW565008U (en) * | 2002-11-13 | 2003-12-01 | Foxsemicon Integrated Tech Inc | Substrate cassette |
TWM243458U (en) * | 2003-02-27 | 2004-09-11 | Innolux Display Corp | Substrate cassette |
US7891937B2 (en) * | 2003-06-02 | 2011-02-22 | Texas Instruments Incorporated | Adjustable width cassette for wafer film frames |
KR20050003759A (en) * | 2003-07-04 | 2005-01-12 | 비오이 하이디스 테크놀로지 주식회사 | Cassette for glass substrate loading |
TWI268570B (en) * | 2003-08-20 | 2006-12-11 | Innolux Display Corp | Substrate cassette |
TWI248909B (en) * | 2004-10-12 | 2006-02-11 | Au Optronics Corp | A cassette for placing multiple-sized substrate |
JP2006293257A (en) * | 2005-04-08 | 2006-10-26 | Samsung Electronics Co Ltd | Glass cassette for loading glass substrate of display panel |
-
2005
- 2005-04-15 TW TW094112026A patent/TWI315002B/en not_active IP Right Cessation
-
2006
- 2006-04-13 US US11/403,703 patent/US20060231515A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20060231515A1 (en) | 2006-10-19 |
TW200636328A (en) | 2006-10-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |