KR100330459B1 - 금속분말과 그의 제조방법 및 도전성 페이스트 - Google Patents
금속분말과 그의 제조방법 및 도전성 페이스트 Download PDFInfo
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- KR100330459B1 KR100330459B1 KR1019990038635A KR19990038635A KR100330459B1 KR 100330459 B1 KR100330459 B1 KR 100330459B1 KR 1019990038635 A KR1019990038635 A KR 1019990038635A KR 19990038635 A KR19990038635 A KR 19990038635A KR 100330459 B1 KR100330459 B1 KR 100330459B1
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- Prior art keywords
- metal salt
- metal
- metal powder
- alcohol
- hydrazine
- Prior art date
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- 239000000843 powder Substances 0.000 title claims abstract description 75
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 162
- 239000002184 metal Substances 0.000 claims abstract description 160
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims abstract description 78
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 57
- 150000003839 salts Chemical class 0.000 claims abstract description 51
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 46
- 239000000243 solution Substances 0.000 claims abstract description 44
- 239000002904 solvent Substances 0.000 claims abstract description 43
- IKDUDTNKRLTJSI-UHFFFAOYSA-N hydrazine monohydrate Substances O.NN IKDUDTNKRLTJSI-UHFFFAOYSA-N 0.000 claims abstract description 32
- NWZSZGALRFJKBT-KNIFDHDWSA-N (2s)-2,6-diaminohexanoic acid;(2s)-2-hydroxybutanedioic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O.NCCCC[C@H](N)C(O)=O NWZSZGALRFJKBT-KNIFDHDWSA-N 0.000 claims abstract description 29
- 239000002245 particle Substances 0.000 claims abstract description 28
- 239000012266 salt solution Substances 0.000 claims abstract description 28
- 229910001854 alkali hydroxide Inorganic materials 0.000 claims abstract description 26
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 18
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 239000000919 ceramic Substances 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 11
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 6
- 239000003513 alkali Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 2
- 239000000908 ammonium hydroxide Substances 0.000 claims description 2
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 claims description 2
- 229910001863 barium hydroxide Inorganic materials 0.000 claims description 2
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 claims description 2
- 239000000920 calcium hydroxide Substances 0.000 claims description 2
- 229910001861 calcium hydroxide Inorganic materials 0.000 claims description 2
- 125000004432 carbon atom Chemical group C* 0.000 claims description 2
- 238000013329 compounding Methods 0.000 claims description 2
- 150000003841 chloride salts Chemical class 0.000 claims 1
- 150000002823 nitrates Chemical class 0.000 claims 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 10
- 239000007791 liquid phase Substances 0.000 abstract description 5
- 238000000151 deposition Methods 0.000 abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 21
- 238000006722 reduction reaction Methods 0.000 description 13
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 238000001556 precipitation Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000012153 distilled water Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 3
- 238000010348 incorporation Methods 0.000 description 3
- QDRKDTQENPPHOJ-UHFFFAOYSA-N sodium ethoxide Chemical compound [Na+].CC[O-] QDRKDTQENPPHOJ-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- -1 hydrazine compound Chemical class 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000010944 silver (metal) Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- CZCSLHYZEQSUNV-UHFFFAOYSA-N [Na].OB(O)O Chemical compound [Na].OB(O)O CZCSLHYZEQSUNV-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 229910001453 nickel ion Inorganic materials 0.000 description 1
- 229910000008 nickel(II) carbonate Inorganic materials 0.000 description 1
- ZULUUIKRFGGGTL-UHFFFAOYSA-L nickel(ii) carbonate Chemical compound [Ni+2].[O-]C([O-])=O ZULUUIKRFGGGTL-UHFFFAOYSA-L 0.000 description 1
- ZLMJMSJWJFRBEC-OUBTZVSYSA-N potassium-40 Chemical compound [40K] ZLMJMSJWJFRBEC-OUBTZVSYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/16—Making metallic powder or suspensions thereof using chemical processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
- H01G4/0085—Fried electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/054—Nanosized particles
- B22F1/0545—Dispersions or suspensions of nanosized particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/16—Making metallic powder or suspensions thereof using chemical processes
- B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
- B22F9/24—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from liquid metal compounds, e.g. solutions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B5/00—General methods of reducing to metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Composite Materials (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Conductive Materials (AREA)
Abstract
Description
Claims (15)
- 최소한 약 10체적%의 1-3의 탄소 원자를 갖는 알코올을 함유하는 용매 중에, 수산화 알칼리; 히드라진(hydrizine) 또는 히드라진 수화물; 및 금속염;을 배합함으로써, 상기 수산화 알칼리, 히드라진, 히드라진 수화물, 금속염 각각의 적어도 일부가 상기 용매에 용해되도록 하는 배합 단계를 포함하며,상기 금속염의 농도는 약 10 몰/리터 이하이고, 상기 히드라진과 히드라진 수화물의 농도는 상기 금속염을 화학양론적으로 환원시키는 데에 필요한 양에서부터 약 20 몰/리터 이하의 범위이고,상기 금속염에 함유된 금속을 포함하는 금속 분말은 상기 용매로부터 석출되는 것을 특징으로 하는 금속 분말 제조 방법.
- 제 1 항에 있어서, 상기 배합 단계는,적어도 알코올을 함유하는 용매중에 수산화알칼리와 히드라진 또는 히드라진수화물을 용해시킴으로써 얻어지는 환원제 용액을 준비하는 공정;적어도 알코올을 함유하는 용매 중에 금속염을 용해시킴으로써 얻어지는 금속염 용액을 준비하는 공정; 및상기 환원제 용액과 상기 금속염 용액을 혼합하는 공정; 을 구비하는 것을 특징으로 하는 금속분말의 제조방법.
- 제 2 항에 있어서, 상기 환원제 용액과 금속염 용액을 혼합하는 공정은, 상기 환원제 용액에 상기 금속염 용액을 적하하는 공정을 구비하는 것을 특징으로 하는 금속분말의 제조방법.
- 제 2 항에 있어서, 상기 환원제 용액중의 수산화알칼리의 농도 및/또는 종류를 변화시킴으로써, 석출하는 금속분말의 입자 크기를 제어하는 공정을 더 구비하는 것을 특징으로 하는 금속분말의 제조방법.
- 제 3 항에 있어서, 상기 환원제 용액중의 수산화알칼리의 농도 및/또는 종류를 변화시킴으로써, 석출하는 금속분말의 입자 크기를 제어하는 공정을 더 구비하는 것을 특징으로 하는 금속분말의 제조방법.
- 제 1 항에 있어서, 상기 용매는 알코올과 물의 혼합액임을 특징으로 하는 금속분말의 제조방법.
- 제 6 항에 있어서, 상기 알코올과 물의 혼합액중의 알코올 농도를 변화시킴으로써, 석출하는 금속분말의 입자 크기를 제어하는 공정을 더 구비하는 것을 특징으로 하는 금속분말의 제조방법.
- 제 1 항에 있어서, 상기 금속염에 함유되는 금속원소는 Au, Ag, Pd, Cu, Ni, Co, Fe 및 Mn으로 이루어진 군에서 선택된 적어도 한 종임을 특징으로 하는 금속분말의 제조방법.
- 제 1 항에 있어서, 상기 금속염은 염화물, 황산염 및 질산염으로 이루어진 군에서 선택된 적어도 한 종임을 특징으로 하는 금속분말의 제조방법.
- 제 1 항에 있어서, 상기 알코올은 1가 알코올임을 특징으로 하는 금속분말의 제조방법.
- 제 1 항에 있어서, 상기 수산화알칼리는 수산화칼륨, 수산화나트륨, 수산화칼슘, 수산화바륨 및 수산화암모늄으로 이루어진 군에서 선택된 적어도 한 종임을 특징으로 하는 금속분말의 제조방법.
- 제 1 항에 기재된 제조방법에 의해 얻을 수 있는 금속분말.
- 제 12 항에 있어서, 입자 크기가 100nm 이하임을 특징으로 하는 금속분말.
- 제 12 항에 기재된 금속분말을 함유하는 것을 특징으로 하는 도전성 페이스트.
- 제 14 항에 있어서, 모놀리식 세라믹 전자 부품의 내부도체를 형성하는데 사용되는 것을 특징으로 하는 도전성 페이스트.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25839098A JP3635451B2 (ja) | 1998-09-11 | 1998-09-11 | 金属粉末およびその製造方法ならびに導電性ペースト |
JP10-258390 | 1998-09-11 |
Publications (2)
Publication Number | Publication Date |
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KR20000023067A KR20000023067A (ko) | 2000-04-25 |
KR100330459B1 true KR100330459B1 (ko) | 2002-04-01 |
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Application Number | Title | Priority Date | Filing Date |
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KR1019990038635A KR100330459B1 (ko) | 1998-09-11 | 1999-09-10 | 금속분말과 그의 제조방법 및 도전성 페이스트 |
Country Status (7)
Country | Link |
---|---|
US (2) | US6156094A (ko) |
EP (1) | EP0985474B1 (ko) |
JP (1) | JP3635451B2 (ko) |
KR (1) | KR100330459B1 (ko) |
CN (1) | CN1170648C (ko) |
DE (1) | DE69923265T2 (ko) |
TW (1) | TW460342B (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020026019A (ko) * | 2000-09-30 | 2002-04-06 | 김충섭 | 초미세 금속 분말의 제조방법 |
KR100486604B1 (ko) * | 2002-10-30 | 2005-05-03 | (주)창성 | 습식환원법에 의한 극미세 구리분말의 제조방법 |
KR100490678B1 (ko) * | 2002-11-29 | 2005-05-24 | (주)창성 | 습식환원법에 의한 극미세 니켈분말의 제조방법 |
KR100828933B1 (ko) | 2006-12-05 | 2008-05-13 | 한국원자력연구원 | 코발트금속 나노분말 및 이의 제조방법 |
KR101317297B1 (ko) * | 2013-03-08 | 2013-10-10 | 인천화학 주식회사 | 이온교환수지 및 환원제를 이용하여 니켈 폐기물로부터 고순도 니켈 분말을 회수하는 방법 |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3957444B2 (ja) * | 1999-11-22 | 2007-08-15 | 三井金属鉱業株式会社 | ニッケル粉、その製造方法及び電子部品電極形成用ペースト |
JP3473548B2 (ja) | 2000-04-27 | 2003-12-08 | 株式会社村田製作所 | 金属粉末の製造方法,金属粉末,これを用いた導電性ペーストならびにこれを用いた積層セラミック電子部品 |
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- 1999-09-09 DE DE69923265T patent/DE69923265T2/de not_active Expired - Lifetime
- 1999-09-09 EP EP99117833A patent/EP0985474B1/en not_active Expired - Lifetime
- 1999-09-10 KR KR1019990038635A patent/KR100330459B1/ko not_active IP Right Cessation
- 1999-09-10 CN CNB991185897A patent/CN1170648C/zh not_active Expired - Lifetime
- 1999-09-13 US US09/394,491 patent/US6156094A/en not_active Expired - Lifetime
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Cited By (5)
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KR20020026019A (ko) * | 2000-09-30 | 2002-04-06 | 김충섭 | 초미세 금속 분말의 제조방법 |
KR100486604B1 (ko) * | 2002-10-30 | 2005-05-03 | (주)창성 | 습식환원법에 의한 극미세 구리분말의 제조방법 |
KR100490678B1 (ko) * | 2002-11-29 | 2005-05-24 | (주)창성 | 습식환원법에 의한 극미세 니켈분말의 제조방법 |
KR100828933B1 (ko) | 2006-12-05 | 2008-05-13 | 한국원자력연구원 | 코발트금속 나노분말 및 이의 제조방법 |
KR101317297B1 (ko) * | 2013-03-08 | 2013-10-10 | 인천화학 주식회사 | 이온교환수지 및 환원제를 이용하여 니켈 폐기물로부터 고순도 니켈 분말을 회수하는 방법 |
Also Published As
Publication number | Publication date |
---|---|
US6620219B1 (en) | 2003-09-16 |
EP0985474B1 (en) | 2005-01-19 |
DE69923265D1 (de) | 2005-02-24 |
JP2000087121A (ja) | 2000-03-28 |
JP3635451B2 (ja) | 2005-04-06 |
US6156094A (en) | 2000-12-05 |
KR20000023067A (ko) | 2000-04-25 |
CN1248503A (zh) | 2000-03-29 |
CN1170648C (zh) | 2004-10-13 |
DE69923265T2 (de) | 2005-06-23 |
TW460342B (en) | 2001-10-21 |
EP0985474A3 (en) | 2000-03-29 |
EP0985474A2 (en) | 2000-03-15 |
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