JPS63208695A - 高真空ポンプ - Google Patents

高真空ポンプ

Info

Publication number
JPS63208695A
JPS63208695A JP63016021A JP1602188A JPS63208695A JP S63208695 A JPS63208695 A JP S63208695A JP 63016021 A JP63016021 A JP 63016021A JP 1602188 A JP1602188 A JP 1602188A JP S63208695 A JPS63208695 A JP S63208695A
Authority
JP
Japan
Prior art keywords
bell
rotor
high vacuum
vacuum pump
shaped rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63016021A
Other languages
English (en)
Japanese (ja)
Inventor
ハインツ・ディーター・ビュルガー
クロード・ソールジョ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Hochvakuumtechnik GmbH
Original Assignee
Alcatel Hochvakuumtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Hochvakuumtechnik GmbH filed Critical Alcatel Hochvakuumtechnik GmbH
Publication of JPS63208695A publication Critical patent/JPS63208695A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP63016021A 1987-02-24 1988-01-28 高真空ポンプ Pending JPS63208695A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3705912.2 1987-02-24
DE19873705912 DE3705912A1 (de) 1987-02-24 1987-02-24 Hochvakuumpumpe mit einem glockenfoermigen rotor

Publications (1)

Publication Number Publication Date
JPS63208695A true JPS63208695A (ja) 1988-08-30

Family

ID=6321656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63016021A Pending JPS63208695A (ja) 1987-02-24 1988-01-28 高真空ポンプ

Country Status (4)

Country Link
US (1) US4806074A (enExample)
EP (1) EP0283736A3 (enExample)
JP (1) JPS63208695A (enExample)
DE (1) DE3705912A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0442296U (enExample) * 1990-08-07 1992-04-09

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408792B1 (de) * 1989-07-20 1993-09-29 Leybold Aktiengesellschaft Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
ES2069713T3 (es) * 1990-07-06 1995-05-16 Cit Alcatel Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo.
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
DE102008034948A1 (de) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1492846A (en) * 1922-05-11 1924-05-06 Mullard Radio Valve Co Ltd Vacuum pump
CH222288A (de) * 1942-11-24 1942-07-15 Bbc Brown Boveri & Cie Molekularpumpe.
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
NL184487C (nl) * 1977-02-25 1989-08-01 Ultra Centrifuge Nederland Nv Moleculaire pomp.
NL168311C (nl) * 1978-03-01 1982-03-16 Neratoom Afdichtende doorvoer.
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
EP0129709A3 (en) * 1983-04-26 1985-03-06 Anelva Corporation Combinational molecular pump capable of readily being cleaned
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0442296U (enExample) * 1990-08-07 1992-04-09

Also Published As

Publication number Publication date
DE3705912A1 (de) 1988-09-01
DE3705912C2 (enExample) 1989-03-02
EP0283736A2 (de) 1988-09-28
US4806074A (en) 1989-02-21
EP0283736A3 (de) 1989-03-08

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