EP0129709A3 - Combinational molecular pump capable of readily being cleaned - Google Patents

Combinational molecular pump capable of readily being cleaned Download PDF

Info

Publication number
EP0129709A3
EP0129709A3 EP84105770A EP84105770A EP0129709A3 EP 0129709 A3 EP0129709 A3 EP 0129709A3 EP 84105770 A EP84105770 A EP 84105770A EP 84105770 A EP84105770 A EP 84105770A EP 0129709 A3 EP0129709 A3 EP 0129709A3
Authority
EP
European Patent Office
Prior art keywords
cylindrical member
additional
pump
molecular pump
combinational
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84105770A
Other languages
German (de)
French (fr)
Other versions
EP0129709A2 (en
Inventor
Junji C/O Anelva Corporation Takada
Shigeru Kaneto
Masashi Iguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Osaka Vacuum Ltd
Original Assignee
Osaka Vacuum Ltd
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP58073706A external-priority patent/JPS591818A/en
Application filed by Osaka Vacuum Ltd, Anelva Corp filed Critical Osaka Vacuum Ltd
Publication of EP0129709A2 publication Critical patent/EP0129709A2/en
Publication of EP0129709A3 publication Critical patent/EP0129709A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Reciprocating Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

In a molecular pump comprising a pump vessel (11) hav­ ing inlet and outlet ports (13 and 14), an axial-flow type molecular pump member (20) disposed near the inlet port, and an additional pump member (30) of a helical groove type disposed near the outlet port, the additional pump member comprises an inside cylindrical member (31) rotatable around a center axis of the pump vessel and an outside cylindrical member (32) held on an inner surface of the pump vessel. An additional cylindrical member (32a) is situated near the outlet port and brought into contact with the outside cylindrical member. The additional cylindrical member is separable into a plurality of separate pieces each of which is radially detach­ able from another. The additional cylindrical member is inde­ pendent of the outside cylindrical member. Alternatively, the additional cylindrical member may be integral with the out­ side cylindrical member cut into separate pieces.
EP84105770A 1983-04-26 1984-05-21 Combinational molecular pump capable of readily being cleaned Withdrawn EP0129709A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP58073706A JPS591818A (en) 1982-04-29 1983-04-26 Starter wheel gear-ignition target type clutch particularly for automobile
JP73706/83 1983-05-19

Publications (2)

Publication Number Publication Date
EP0129709A2 EP0129709A2 (en) 1985-01-02
EP0129709A3 true EP0129709A3 (en) 1985-03-06

Family

ID=13525925

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84105770A Withdrawn EP0129709A3 (en) 1983-04-26 1984-05-21 Combinational molecular pump capable of readily being cleaned

Country Status (1)

Country Link
EP (1) EP0129709A3 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE
JPH0784871B2 (en) * 1986-06-12 1995-09-13 株式会社日立製作所 Vacuum exhaust device
DE3705912A1 (en) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh HIGH VACUUM PUMP WITH A BELL-SHAPED ROTOR
JPH0617036Y2 (en) * 1988-02-17 1994-05-02 株式会社島津製作所 Turbo molecular pump
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
DE4427154A1 (en) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Friction pump with magnetic bearings
FR2736103B1 (en) * 1995-06-30 1997-08-08 Cit Alcatel TURBOMOLECULAR PUMP
JP3788558B2 (en) * 1999-03-23 2006-06-21 株式会社荏原製作所 Turbo molecular pump
GB0013491D0 (en) 2000-06-02 2000-07-26 Boc Group Plc Improved vacuum pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (en) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP WITH ROTOR AND STATOR
DD129822A1 (en) * 1976-12-20 1978-02-08 Harry Werner STATOR FOR A TURBOMOLECULAR PUMP

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (en) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP WITH ROTOR AND STATOR
DD129822A1 (en) * 1976-12-20 1978-02-08 Harry Werner STATOR FOR A TURBOMOLECULAR PUMP

Also Published As

Publication number Publication date
EP0129709A2 (en) 1985-01-02

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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17P Request for examination filed

Effective date: 19840704

AK Designated contracting states

Designated state(s): CH DE FR GB IT LI

PUAL Search report despatched

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AK Designated contracting states

Designated state(s): CH DE FR GB IT LI

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Withdrawal date: 19851230

RIN1 Information on inventor provided before grant (corrected)

Inventor name: IGUCHI, MASASHI

Inventor name: KANETO, SHIGERU

Inventor name: TAKADA, JUNJIC/O ANELVA CORPORATION