EP0129709A3 - Pompe moléculaire combinée pour faciliter le nettoyage - Google Patents
Pompe moléculaire combinée pour faciliter le nettoyage Download PDFInfo
- Publication number
- EP0129709A3 EP0129709A3 EP84105770A EP84105770A EP0129709A3 EP 0129709 A3 EP0129709 A3 EP 0129709A3 EP 84105770 A EP84105770 A EP 84105770A EP 84105770 A EP84105770 A EP 84105770A EP 0129709 A3 EP0129709 A3 EP 0129709A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- cylindrical member
- additional
- pump
- molecular pump
- combinational
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Details Of Reciprocating Pumps (AREA)
- Reciprocating Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58073706A JPS591818A (ja) | 1982-04-29 | 1983-04-26 | 自動車用スタータリングギャー−点火タイミングマーク手段式クラッチ |
JP73706/83 | 1983-05-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0129709A2 EP0129709A2 (fr) | 1985-01-02 |
EP0129709A3 true EP0129709A3 (fr) | 1985-03-06 |
Family
ID=13525925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP84105770A Withdrawn EP0129709A3 (fr) | 1983-04-26 | 1984-05-21 | Pompe moléculaire combinée pour faciliter le nettoyage |
Country Status (1)
Country | Link |
---|---|
EP (1) | EP0129709A3 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3613344A1 (de) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | Turbomolekular-vakuumpumpe fuer hoeheren druck |
JPH0784871B2 (ja) * | 1986-06-12 | 1995-09-13 | 株式会社日立製作所 | 真空排気装置 |
DE3705912A1 (de) * | 1987-02-24 | 1988-09-01 | Alcatel Hochvakuumtechnik Gmbh | Hochvakuumpumpe mit einem glockenfoermigen rotor |
JPH0617036Y2 (ja) * | 1988-02-17 | 1994-05-02 | 株式会社島津製作所 | ターボ分子ポンプ |
US5049168A (en) * | 1988-09-12 | 1991-09-17 | Philip Danielson | Helium leak detection method and system |
DE4427154A1 (de) * | 1994-08-01 | 1996-02-08 | Balzers Pfeiffer Gmbh | Reibungspumpe mit Magnetlagerung |
FR2736103B1 (fr) * | 1995-06-30 | 1997-08-08 | Cit Alcatel | Pompe turbomoleculaire |
JP3788558B2 (ja) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
GB0013491D0 (en) | 2000-06-02 | 2000-07-26 | Boc Group Plc | Improved vacuum pump |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2218615A1 (de) * | 1972-04-18 | 1973-10-31 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularpumpe mit rotor und stator |
DD129822A1 (de) * | 1976-12-20 | 1978-02-08 | Harry Werner | Stator fuer eine turbomolekularpumpe |
-
1984
- 1984-05-21 EP EP84105770A patent/EP0129709A3/fr not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2218615A1 (de) * | 1972-04-18 | 1973-10-31 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularpumpe mit rotor und stator |
DD129822A1 (de) * | 1976-12-20 | 1978-02-08 | Harry Werner | Stator fuer eine turbomolekularpumpe |
Also Published As
Publication number | Publication date |
---|---|
EP0129709A2 (fr) | 1985-01-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19840704 |
|
AK | Designated contracting states |
Designated state(s): CH DE FR GB IT LI |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Designated state(s): CH DE FR GB IT LI |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Withdrawal date: 19851230 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: IGUCHI, MASASHI Inventor name: KANETO, SHIGERU Inventor name: TAKADA, JUNJIC/O ANELVA CORPORATION |