EP0283736A3 - Hochvakuumpumpe mit einem glockenförmigen Rotor - Google Patents

Hochvakuumpumpe mit einem glockenförmigen Rotor Download PDF

Info

Publication number
EP0283736A3
EP0283736A3 EP88102562A EP88102562A EP0283736A3 EP 0283736 A3 EP0283736 A3 EP 0283736A3 EP 88102562 A EP88102562 A EP 88102562A EP 88102562 A EP88102562 A EP 88102562A EP 0283736 A3 EP0283736 A3 EP 0283736A3
Authority
EP
European Patent Office
Prior art keywords
rotor
bell
pump
high vacuum
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88102562A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0283736A2 (de
Inventor
Heinz-Dieter Bürger
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Hochvakuumtechnik GmbH
Original Assignee
Alcatel Hochvakuumtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Hochvakuumtechnik GmbH filed Critical Alcatel Hochvakuumtechnik GmbH
Publication of EP0283736A2 publication Critical patent/EP0283736A2/de
Publication of EP0283736A3 publication Critical patent/EP0283736A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP88102562A 1987-02-24 1988-02-22 Hochvakuumpumpe mit einem glockenförmigen Rotor Withdrawn EP0283736A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3705912 1987-02-24
DE19873705912 DE3705912A1 (de) 1987-02-24 1987-02-24 Hochvakuumpumpe mit einem glockenfoermigen rotor

Publications (2)

Publication Number Publication Date
EP0283736A2 EP0283736A2 (de) 1988-09-28
EP0283736A3 true EP0283736A3 (de) 1989-03-08

Family

ID=6321656

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88102562A Withdrawn EP0283736A3 (de) 1987-02-24 1988-02-22 Hochvakuumpumpe mit einem glockenförmigen Rotor

Country Status (4)

Country Link
US (1) US4806074A (enExample)
EP (1) EP0283736A3 (enExample)
JP (1) JPS63208695A (enExample)
DE (1) DE3705912A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408792B1 (de) * 1989-07-20 1993-09-29 Leybold Aktiengesellschaft Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
ES2069713T3 (es) * 1990-07-06 1995-05-16 Cit Alcatel Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo.
JPH0442296U (enExample) * 1990-08-07 1992-04-09
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
DE102008034948A1 (de) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH222288A (de) * 1942-11-24 1942-07-15 Bbc Brown Boveri & Cie Molekularpumpe.
EP0129709A2 (en) * 1983-04-26 1985-01-02 Anelva Corporation Combinational molecular pump capable of readily being cleaned
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1492846A (en) * 1922-05-11 1924-05-06 Mullard Radio Valve Co Ltd Vacuum pump
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
NL184487C (nl) * 1977-02-25 1989-08-01 Ultra Centrifuge Nederland Nv Moleculaire pomp.
NL168311C (nl) * 1978-03-01 1982-03-16 Neratoom Afdichtende doorvoer.
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH222288A (de) * 1942-11-24 1942-07-15 Bbc Brown Boveri & Cie Molekularpumpe.
EP0129709A2 (en) * 1983-04-26 1985-01-02 Anelva Corporation Combinational molecular pump capable of readily being cleaned
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ

Also Published As

Publication number Publication date
DE3705912A1 (de) 1988-09-01
JPS63208695A (ja) 1988-08-30
DE3705912C2 (enExample) 1989-03-02
EP0283736A2 (de) 1988-09-28
US4806074A (en) 1989-02-21

Similar Documents

Publication Publication Date Title
EP0283736A3 (de) Hochvakuumpumpe mit einem glockenförmigen Rotor
FI872967A0 (fi) Pump och foerfarande foer separering av gas med pumpen ur mediet som skall pumpas.
ATE105378T1 (de) Kombinierte turbomolekularpumpe mit zwei wellen und atmosphaerischem auslass.
EP0401670A3 (en) Self-priming centrifugal pump
IT1234126B (it) Cassa statorica, particolarmente per pompa radiale centrifuga, nonche' metodo per la sua realizzazione
GB1288855A (enExample)
FR2381925A1 (fr) Rotor de pompe centrifuge
FR2611819B1 (fr) Pompe a vide, rotative
US4479756A (en) Multi-stage pump
KR880009213A (ko) 2단계 액체링 펌프
WO1998016722A3 (en) Orbiting engine
SE7406708L (enExample)
ATE249583T1 (de) Eingangsstufe für eine zweiflutige gasreibungspumpe
GB1355727A (en) Pump units for the multistage compression of gases
DE69419863D1 (de) Motorpumpenaggregat und Verfahren zu dessen Herstellung
SU694534A1 (ru) Способ получени коллагеназы
EP0267405A3 (en) Radial-flow turbo machine
FR2241211A5 (en) Centrifugal blower enclosed rotor - has holes in lines parallel to discharge tip edges of blades
SU694661A1 (ru) Пожарный насос
SE9401345L (sv) Anordning för förtjockning och/eller tvättning av en suspension
SU898120A1 (ru) Рабочее колесо центробежного нагнетател
GB1478653A (en) Liquid impellers
JPS6429695A (en) Turbo molecular pump
EP0196458A3 (de) Polyätherpolyester
JPS54157309A (en) Outdoor unit for separate type air conditioner

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): CH FR GB LI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

RHK1 Main classification (correction)

Ipc: F04D 19/04

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): CH FR GB LI

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19890909