JPH08512256A - コンデンサーの誘電体及び酸素バリヤーを形成するのに有用な架橋アクリレートコーティング材料 - Google Patents
コンデンサーの誘電体及び酸素バリヤーを形成するのに有用な架橋アクリレートコーティング材料Info
- Publication number
- JPH08512256A JPH08512256A JP51099295A JP51099295A JPH08512256A JP H08512256 A JPH08512256 A JP H08512256A JP 51099295 A JP51099295 A JP 51099295A JP 51099295 A JP51099295 A JP 51099295A JP H08512256 A JPH08512256 A JP H08512256A
- Authority
- JP
- Japan
- Prior art keywords
- acrylate
- layer
- support
- monomer
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 title claims abstract description 405
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 88
- 239000001301 oxygen Substances 0.000 title claims abstract description 88
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 88
- 230000004888 barrier function Effects 0.000 title claims abstract description 82
- 239000000463 material Substances 0.000 title claims abstract description 73
- 239000003990 capacitor Substances 0.000 title claims abstract description 63
- 238000000576 coating method Methods 0.000 title description 43
- 239000011248 coating agent Substances 0.000 title description 38
- 239000003989 dielectric material Substances 0.000 title description 7
- 239000000178 monomer Substances 0.000 claims abstract description 177
- 229910052751 metal Inorganic materials 0.000 claims abstract description 49
- 239000002184 metal Substances 0.000 claims abstract description 49
- 238000001704 evaporation Methods 0.000 claims abstract description 43
- 238000001816 cooling Methods 0.000 claims abstract description 36
- 229920001169 thermoplastic Polymers 0.000 claims abstract description 32
- 239000004416 thermosoftening plastic Substances 0.000 claims abstract description 32
- 238000001465 metallisation Methods 0.000 claims abstract description 25
- 238000009833 condensation Methods 0.000 claims abstract description 15
- 238000007740 vapor deposition Methods 0.000 claims abstract description 15
- 230000005494 condensation Effects 0.000 claims abstract description 14
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims abstract description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 5
- 150000002739 metals Chemical class 0.000 claims abstract description 3
- 239000010410 layer Substances 0.000 claims description 341
- 238000000034 method Methods 0.000 claims description 86
- 238000000151 deposition Methods 0.000 claims description 42
- -1 polypropylene Polymers 0.000 claims description 41
- 230000008569 process Effects 0.000 claims description 37
- 239000004743 Polypropylene Substances 0.000 claims description 34
- 229920001155 polypropylene Polymers 0.000 claims description 34
- 239000000203 mixture Substances 0.000 claims description 32
- 230000035699 permeability Effects 0.000 claims description 31
- 150000001252 acrylic acid derivatives Chemical class 0.000 claims description 24
- 230000008021 deposition Effects 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 23
- 230000000379 polymerizing effect Effects 0.000 claims description 20
- 230000008020 evaporation Effects 0.000 claims description 19
- 229920000728 polyester Polymers 0.000 claims description 19
- 238000006116 polymerization reaction Methods 0.000 claims description 19
- 239000004677 Nylon Substances 0.000 claims description 15
- 229920001778 nylon Polymers 0.000 claims description 15
- 239000002985 plastic film Substances 0.000 claims description 13
- 125000004386 diacrylate group Chemical group 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 11
- 230000001070 adhesive effect Effects 0.000 claims description 11
- 238000004804 winding Methods 0.000 claims description 10
- 238000005507 spraying Methods 0.000 claims description 9
- 230000008018 melting Effects 0.000 claims description 8
- 238000002844 melting Methods 0.000 claims description 8
- 229920006255 plastic film Polymers 0.000 claims description 8
- ZDQNWDNMNKSMHI-UHFFFAOYSA-N 1-[2-(2-prop-2-enoyloxypropoxy)propoxy]propan-2-yl prop-2-enoate Chemical compound C=CC(=O)OC(C)COC(C)COCC(C)OC(=O)C=C ZDQNWDNMNKSMHI-UHFFFAOYSA-N 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 150000002734 metacrylic acid derivatives Chemical class 0.000 claims description 7
- VOBUAPTXJKMNCT-UHFFFAOYSA-N 1-prop-2-enoyloxyhexyl prop-2-enoate Chemical group CCCCCC(OC(=O)C=C)OC(=O)C=C VOBUAPTXJKMNCT-UHFFFAOYSA-N 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 claims description 4
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 claims description 4
- RZVINYQDSSQUKO-UHFFFAOYSA-N 2-phenoxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC1=CC=CC=C1 RZVINYQDSSQUKO-UHFFFAOYSA-N 0.000 claims description 4
- 239000004698 Polyethylene Substances 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 4
- 238000009832 plasma treatment Methods 0.000 claims description 4
- 229920000573 polyethylene Polymers 0.000 claims description 4
- 229920005992 thermoplastic resin Polymers 0.000 claims description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- HWSSEYVMGDIFMH-UHFFFAOYSA-N 2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOC(=O)C(C)=C HWSSEYVMGDIFMH-UHFFFAOYSA-N 0.000 claims description 3
- IAXXETNIOYFMLW-COPLHBTASA-N [(1s,3s,4s)-4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate Chemical compound C1C[C@]2(C)[C@@H](OC(=O)C(=C)C)C[C@H]1C2(C)C IAXXETNIOYFMLW-COPLHBTASA-N 0.000 claims description 3
- 239000012190 activator Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 3
- 229940119545 isobornyl methacrylate Drugs 0.000 claims description 3
- 229920000058 polyacrylate Polymers 0.000 claims description 3
- 239000013638 trimer Substances 0.000 claims description 3
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 claims description 2
- SAPGBCWOQLHKKZ-UHFFFAOYSA-N 6-(2-methylprop-2-enoyloxy)hexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCCOC(=O)C(C)=C SAPGBCWOQLHKKZ-UHFFFAOYSA-N 0.000 claims description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 239000002356 single layer Substances 0.000 claims description 2
- FDUFQLNPPGRIKX-UHFFFAOYSA-N 2,2-dimethylpropane-1,3-diol prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.CC(C)(CO)CO FDUFQLNPPGRIKX-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 54
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 10
- 238000001723 curing Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000004132 cross linking Methods 0.000 description 5
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 5
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 4
- 238000007598 dipping method Methods 0.000 description 4
- YDKNBNOOCSNPNS-UHFFFAOYSA-N methyl 1,3-benzoxazole-2-carboxylate Chemical compound C1=CC=C2OC(C(=O)OC)=NC2=C1 YDKNBNOOCSNPNS-UHFFFAOYSA-N 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000008961 swelling Effects 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- WPKYZIPODULRBM-UHFFFAOYSA-N azane;prop-2-enoic acid Chemical compound N.OC(=O)C=C WPKYZIPODULRBM-UHFFFAOYSA-N 0.000 description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 235000013305 food Nutrition 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 239000011140 metalized polyester Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical group [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 239000012815 thermoplastic material Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- QTKIQLNGOKOPOE-UHFFFAOYSA-N 1,1'-biphenyl;propane Chemical group CCC.C1=CC=CC=C1C1=CC=CC=C1 QTKIQLNGOKOPOE-UHFFFAOYSA-N 0.000 description 1
- PNJRDSUNBBSSSH-UHFFFAOYSA-N 1,2-dimethyl-3-(1-phenoxyethyl)benzene Chemical compound C=1C=CC(C)=C(C)C=1C(C)OC1=CC=CC=C1 PNJRDSUNBBSSSH-UHFFFAOYSA-N 0.000 description 1
- CEXQWAAGPPNOQF-UHFFFAOYSA-N 2-phenoxyethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOC1=CC=CC=C1 CEXQWAAGPPNOQF-UHFFFAOYSA-N 0.000 description 1
- DMQYPVOQAARSNF-UHFFFAOYSA-N 3-[2,3-bis(3-prop-2-enoyloxypropoxy)propoxy]propyl prop-2-enoate Chemical compound C=CC(=O)OCCCOCC(OCCCOC(=O)C=C)COCCCOC(=O)C=C DMQYPVOQAARSNF-UHFFFAOYSA-N 0.000 description 1
- CYUZOYPRAQASLN-UHFFFAOYSA-N 3-prop-2-enoyloxypropanoic acid Chemical compound OC(=O)CCOC(=O)C=C CYUZOYPRAQASLN-UHFFFAOYSA-N 0.000 description 1
- JHWGFJBTMHEZME-UHFFFAOYSA-N 4-prop-2-enoyloxybutyl prop-2-enoate Chemical compound C=CC(=O)OCCCCOC(=O)C=C JHWGFJBTMHEZME-UHFFFAOYSA-N 0.000 description 1
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 1
- XCHLRFRZJLYDOF-UHFFFAOYSA-N CCC.OC(=O)C=C.OC(=O)C=C Chemical compound CCC.OC(=O)C=C.OC(=O)C=C XCHLRFRZJLYDOF-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- FHLPGTXWCFQMIU-UHFFFAOYSA-N [4-[2-(4-prop-2-enoyloxyphenyl)propan-2-yl]phenyl] prop-2-enoate Chemical compound C=1C=C(OC(=O)C=C)C=CC=1C(C)(C)C1=CC=C(OC(=O)C=C)C=C1 FHLPGTXWCFQMIU-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000004359 castor oil Substances 0.000 description 1
- 235000019438 castor oil Nutrition 0.000 description 1
- 235000019504 cigarettes Nutrition 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- ZEMPKEQAKRGZGQ-XOQCFJPHSA-N glycerol triricinoleate Natural products CCCCCC[C@@H](O)CC=CCCCCCCCC(=O)OC[C@@H](COC(=O)CCCCCCCC=CC[C@@H](O)CCCCCC)OC(=O)CCCCCCCC=CC[C@H](O)CCCCCC ZEMPKEQAKRGZGQ-XOQCFJPHSA-N 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- PBOSTUDLECTMNL-UHFFFAOYSA-N lauryl acrylate Chemical compound CCCCCCCCCCCCOC(=O)C=C PBOSTUDLECTMNL-UHFFFAOYSA-N 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 235000010446 mineral oil Nutrition 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005292 vacuum distillation Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/14—Organic dielectrics
- H01G4/18—Organic dielectrics of synthetic material, e.g. derivatives of cellulose
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
- B05D3/142—Pretreatment
- B05D3/144—Pretreatment of polymeric substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D1/00—Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
- B65D1/02—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents
- B65D1/0207—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents characterised by material, e.g. composition, physical features
- B65D1/0215—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents characterised by material, e.g. composition, physical features multilayered
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
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- H—ELECTRICITY
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- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Paints Or Removers (AREA)
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Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.熱可塑性支持体; 前記支持体の1つの面上にある架橋アクリレート層;及び 前記支持体のアクリレート層と同じ側の面上にある酸素バリヤー材層; を含んで成る低酸素透過性を有するバリヤー。 2.第1アクリレート層が酸素バリヤー材の下側に位置し、且つ、第2アクリ レート層が酸素バリヤー材の上側に位置する少なくとも2層のアクリレート層を 含んでなる請求項1記載のバリヤー。 3.ポリプロピレン、ポリエチレン、ポリエステル及びナイロンから成る群よ り選ばれた熱可塑性樹脂から成形された密閉可能な中空容器; アクリレート層が連続であるように十分に滑らかな前記容器の外面上に位置す る架橋アクリレート層;及び 前記アクリレート層上に蒸着された酸素バリヤー材層; を含んで成る低酸素透過性を有する容器。 4.以下の工程を含んで成る熱可塑性支持体上に接着性バリヤー層を形成する 方法: 前記支持体の表面をその融点よりも高い温度で加熱する工程; 支持体上に少なくとも1種の液状多官能価アクリレートを蒸着する工程; 架橋アクリレート層を形成するためにアクリレートを重合させる工程;次いで 架橋アクリレート層上に酸素バリヤー材を蒸着する工程。 5.加熱工程が、支持体を変形させずに熱可塑性物質の表面を溶融させるのに 十分な時間を要して支持体を火炎に暴露することを含 んで成る請求項4に記載の方法。 6.以下の工程を含んで成る請求項4又は5のいずれか1項に記載の方法: 周囲温度よりも低い温度に支持体を冷却する工程; 冷却した支持体を真空チャンバー内に配置する工程;次いで 支持体を周囲温度よりも低い温度に保ちなから支持体上のアクリレートを凝縮 させる工程。 7.以下の工程を含んで成るアクリレートポリマー層を形成する方法: 多官能価アクリレートプレポリマーを、周囲温度よりも高く且つ前記プレポリ マーが重合する温度よりも低い温度に予熱する工程; プレポリマーを真空システム内の蒸発チャンバー内に噴霧する工程; 蒸発チャンバー内でプレポリマーを蒸発させ、蒸発したプレポリマーを真空シ ステム内に排出する工程; 支持体上にプレポリマーを蒸着する工程;次いで 架橋アクリレート層を形成するためにアクリレートプレポリマーを重合させる 工程。 8.以下の工程を含んで成る、接着性アクリレート層を形成する工程: 真空チャンバー内での支持体表面のプラズマ処理の直後に、架橋アクリレート 層を形成するための少なくとも少量の多官能価アクリレートモノマーを含み、1 50〜600の範囲の分子量を有するアクリレートモノマーを蒸発させ、次いで 支持体上にモノマーフィルムとしてアクリレートモノマーを凝縮させる工程;次 いで、 架橋アクリレート層を形成するためにアクリレートを重合させる工程。 9.以下の工程を含んで成る請求項8に記載の方法: 支持体を周囲温度よりも低い温度に冷却する工程; 冷却した支持体を真空チャンバー内に配置する工程;次いで 支持体を周囲温度よりも低い温度に冷却しながら支持体上にアクリレートモノ マーを凝縮させる工程。 10.以下の工程を含んで成る低酸素透過性を有するバリヤーシートを製造す る方法: ポリプロピレン、ポリエステル又はナイロンのシート支持体の表面をプラズマ 処理する工程; 150〜600の範囲の分子量を有するアクリレートモノマーを蒸発させる工 程; シート支持体の処理された面上に前記アクリレートモノマーをモノマーフィル ムとして凝縮させる工程; 架橋アクリレート層を形成するためにアクリレートを重合させる工程;次いで 酸化ケイ素、酸化アルミニウム及び金属から成る群より選ばれた酸素バリヤー 材層を支持体のアクリレート層と同じ側の面上に蒸着させる工程。 11.酸素バリヤー材がアクリレート層上に蒸着した金属を含んで成る、以下 の追加の工程を含んで成る請求項10記載の方法: 150〜600の範囲の分子量を有するアクリレートモノマーを蒸発させる工 程; 前記アクリレートモノマーをモノマーフィルムとして金属層上に凝縮させる工 程;次いで 第2の架橋アクリレート層を形成するために前記アクリレートを重合させる工 程。 12.以下の工程を含んで成るアクリレート層で被覆された支持 体を形成する方法: 支持体を蒸着ステーションの外部の周囲温度よりも低い温度に冷却する工程; 支持体を周囲温度よりも低い温度に保ちながら、冷却した支持体を蒸着ステー ションに通過させる工程; 蒸着ステーションにおいて: 150〜600の範囲の分子量を有するアクリレートモノマーを蒸発させ、次 いでアクリレートモノマーをモノマーフィルムとして支持体上に凝縮させる工程 ;次いで 重合アクリレート層を形成するためにアクリレートモノマーフィルムを重合さ せる工程。 13.支持体が可撓性シートを含んで成り、以下の工程を含んで成る請求項1 2記載の方法: 可撓性シートの面を冷却ロールとかみ合わせる工程;次いで 冷却ロールとかみ合った面と同じ面上にモノマーを蒸着させる工程。 14.支持体がプラスチックフィルムを含んで成り、以下の工程を含んで成る 請求項12又は13のいずれか1項に記載の方法: プラスチックフィルムのロールを冷却する工程; プラスチックフィルムを巻出す工程; プラスチックフィルムを冷却ドラムとかみ合わせる工程;次いで 蒸着ステーションを通過するドラムを回転させる工程。 15.支持体が可撓性シートフィルムを含んで成る、以下の工程を含んで成る 請求項12又は13のいずれか1項に記載の方法: シートの第1面を冷却ロールとかみ合わせる工程; シートの他の面を冷却ドラムとかみ合わせる工程;次いで 前記第1面上にアクリレートモノマーを蒸着させるために蒸着ス テーションを通過するドラムを回転させる工程。 16.以下の工程を含んで成るアクリレート層で被覆された可撓性シート支持 体を形成する方法: 可撓性シートの1面を冷却ロールとかみ合わせる工程; 真空システム内でアクリレートモノマーを蒸発させる工程; 支持体の冷却ロールによりかみ合わされた面と同じ面上にモノマーフィルムと してアクリレートを凝縮させる工程;及び 重合アクリレート層を形成するためにアクリレートモノマーを重合させる工程 。 17.以下の工程を含んで成る、支持体上に接着性アクリレート層を形成する 方法: 150〜400の範囲の分子量を有する少なくとも1種のモノマーを含んで成 るアクリレートモノマーと600を超える分子量を有するアクリレートとの混合 物を蒸発させる工程; 支持体上にモノマーフィルムとしてアクリレートモノマーを凝縮させる工程; 次いで 重合アクリレート層を形成するためにアクリレートを重合させる工程。 18.酸素バリヤー材が酸化ケイ素、窒化ケイ素、窒化アルミニウム、窒化チ タン及び酸化アルミニウムから成る群より選ばれた上記請求項のいずれか1項に 記載の発明。 19.第1アクリレート層が酸素バリヤー材の下側に位置し、且つ、第2アク リレート層が酸素バリヤー層の上側に位置する少なくとも2層のアクリレート層 を含んで成る上記請求項のいずれか1項に記載の発明。 20.シリンダーに巻かれた少なくとも1枚の熱可塑性誘電体シート; 前記誘電体シートの少なくとも1つの面上に蒸着された金属化導電性層; 前記金属化導電性層の全体と直接接触している架橋アクリレート層;及び スコーピング(Schooping)によりシリンダーの端において前記導電性層に設 けられた電気接点; を含んで成る巻込コンデンサー(wound capacitor)。 21.アクリレート層が金属化層の全体を被覆している請求項20記載のコン デンサー。 22.第1の架橋アクリレート層が導電性層の下側に位置し、更に、導電性層 上に蒸着された第2の架橋アクリレート層を含んで成る請求項20記載のコンデ ンサー。 23.導電性層を有する面とは反対側の誘電体シート面上に蒸着された第2の 架橋アクリレート層を更に含んでなる請求項20、21又は22のいずれか1項 に記載のコンデンサー。 24.シリンダーを充填する誘電性液体を含んで成る請求項20、21、22 又は23のいずれか1項に記載のコンデンサー。 25.シリンダーに巻かれたポリプロピレン又はポリエステル誘電体シート; 誘電体シートの1つの面上に蒸着された架橋アクリレート層であって、約15 0〜600の範囲の分子量を有し、架橋形成のための少なくとも少量の多官能価 アクリレートを含むアクリレートモノマーから形成されたアクリレート層; アクリレート層上に蒸着された金属化導電性層; 導電性層上に蒸着された第2の架橋アクリレート層;及び コンデンサーを充填している誘電性液体; を含んで成る巻込コンデンサー。 26.熱可塑性ポリプロピレン又はポリエステル誘電体シート; 前記誘電体シートの少なくとも1つの面上に蒸着された金属化導電性層; 前記誘電体シートの前記導電性層と同じ側の面上に蒸着された第1の重合アク リレート層;及び 誘電体シートを絶縁するための導電性層を有する面と反対側の誘電体シートの 面上に蒸着された第2の重合アクリレート層であって、約150〜600の分子 量を有し、架橋形成のための少なくとも少量の多官能価アクリレート分子を含む アクリレートモノマーから形成されたアクリレート層; を含んで成る巻込コンデンサーを形成するための金属化コンデンサーシート。 27.アクリレートが150〜600の範囲の分子量を有するアクリレートモ ノマーを含んで成る上記請求項のいずれか1項に記載の発明。 28.アクリレートが200〜400の範囲の分子量を有するアクリレートモ ノマーを含んで成る上記請求項のいずれか1項に記載の発明。 29.アクリレートが150〜400の範囲の分子量を有する少なくとも1種 のモノマーと600を超える分子量を有するアクリレートとの混合物を含んで成 るアクリレートモノマーの混合物である上記請求項のいずれか1項に記載の発明 。 30.アクリレートが、ヘキサンジオールジアクリレート、トリプロピレング リコールジアクリレート、2−フェノキシエチルアクリレート、イソボルニルア クリレート、ジセチレングリコールジアクリレート、ネオペンチルグリコールジ アクリレート、テトラエチレングリコールジアクリレート、トリメチロールプロ パントリアク リレート、ペンタエリスリトールトリアクリレート、イソボルニルメタクリレー ト、2−フェノキシエチルアクリレート、トリエチレングリコールジメタクリレ ート及び1,6−ヘキサンジオールジメタクリレートから成る群より選ばれた少 なくとも1種のモノマーを含む混合物を含んで成る上記請求項のいずれか1項に 記載の発明。 31.モノマーが、トリプロピレングリコールジアクリレート、BCEA、リ ン酸のアクリレート及びメタクリレート、アクリル酸、並びに酸性アクリレート 若しくはメタクリレートのダイマー、トリマー及びテトラマーから成る群より選 ばれた上記請求項のいずれか1項に記載の発明。 32.重合工程が、架橋アクリレート層を形成するための電子線及び紫外線か ら成る群より選ばれた放射線を用いてアクリレートを照射することを含んで成る 上記請求項のいずれか1項に記載の方法。
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US08/131,328 US5440446A (en) | 1993-10-04 | 1993-10-04 | Acrylate coating material |
US08/131,328 | 1993-10-04 | ||
US22857994A | 1994-04-15 | 1994-04-15 | |
US08/228,579 | 1994-04-15 | ||
US228,579 | 1994-04-15 | ||
US131,328 | 1994-04-15 | ||
PCT/US1994/011257 WO1995010117A1 (en) | 1993-10-04 | 1994-10-04 | Cross-linked acrylate coating material useful for forming capacitor dielectrics and oxygen barriers |
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JP2000034370A Pending JP2000235930A (ja) | 1993-10-04 | 2000-02-07 | バリヤーフィルムにより被覆された熱可塑性支持体の形成方法 |
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JPWO2016143461A1 (ja) * | 2015-03-10 | 2017-12-21 | 東洋紡株式会社 | 透明バリアフィルムの製造法 |
US10679793B2 (en) | 2016-02-04 | 2020-06-09 | Murata Manufacturing Co., Ltd. | Roll-up type capacitor and process for producing the same |
JP2019502260A (ja) * | 2016-02-04 | 2019-01-24 | 株式会社村田製作所 | 巻回型コンデンサおよびその製造方法 |
Also Published As
Publication number | Publication date |
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EP0722787B1 (en) | 2002-06-05 |
ATE233939T1 (de) | 2003-03-15 |
DE69432229T2 (de) | 2003-09-25 |
DE69430754T2 (de) | 2003-01-02 |
SK283289B6 (sk) | 2003-05-02 |
US6231939B1 (en) | 2001-05-15 |
EP0758482B1 (en) | 2003-03-05 |
US20010001284A1 (en) | 2001-05-17 |
JP2000235930A (ja) | 2000-08-29 |
EP0722787A2 (en) | 1996-07-24 |
EP0758482A1 (en) | 1997-02-19 |
FI961478A0 (fi) | 1996-04-02 |
AU694143B2 (en) | 1998-07-16 |
EP0758482A4 (en) | 1997-06-04 |
KR100241470B1 (ko) | 2000-02-01 |
EP0722787A3 (en) | 1997-06-04 |
US5725909A (en) | 1998-03-10 |
BR9407741A (pt) | 1997-02-12 |
JP3101682B2 (ja) | 2000-10-23 |
ATE218398T1 (de) | 2002-06-15 |
DE69430754D1 (de) | 2002-07-11 |
SK43496A3 (en) | 2003-03-04 |
FI961478A (fi) | 1996-04-02 |
DE69432229D1 (de) | 2003-04-10 |
KR960705330A (ko) | 1996-10-09 |
AU7965594A (en) | 1995-05-01 |
US6420003B2 (en) | 2002-07-16 |
WO1995010117A1 (en) | 1995-04-13 |
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