JPH0574789B2 - - Google Patents
Info
- Publication number
- JPH0574789B2 JPH0574789B2 JP59103882A JP10388284A JPH0574789B2 JP H0574789 B2 JPH0574789 B2 JP H0574789B2 JP 59103882 A JP59103882 A JP 59103882A JP 10388284 A JP10388284 A JP 10388284A JP H0574789 B2 JPH0574789 B2 JP H0574789B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- under test
- memory under
- circuit
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012360 testing method Methods 0.000 claims abstract description 172
- 230000015654 memory Effects 0.000 claims abstract description 65
- 239000004065 semiconductor Substances 0.000 claims abstract description 25
- 238000005259 measurement Methods 0.000 claims description 57
- 238000007493 shaping process Methods 0.000 description 6
- 230000002950 deficient Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/02—Detection or location of defective auxiliary circuits, e.g. defective refresh counters
- G11C29/021—Detection or location of defective auxiliary circuits, e.g. defective refresh counters in voltage or current generators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
- G01R31/31919—Storing and outputting test patterns
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/02—Detection or location of defective auxiliary circuits, e.g. defective refresh counters
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/50—Marginal testing, e.g. race, voltage or current testing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/30—Marginal testing, e.g. by varying supply voltage
- G01R31/3004—Current or voltage test
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/50—Marginal testing, e.g. race, voltage or current testing
- G11C2029/5006—Current
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- For Increasing The Reliability Of Semiconductor Memories (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59103882A JPS60247942A (ja) | 1984-05-23 | 1984-05-23 | 半導体メモリ試験装置 |
| EP85106019A EP0162418A3 (en) | 1984-05-23 | 1985-05-15 | Semiconductor memory test equipment |
| US06/734,109 US4631724A (en) | 1984-05-23 | 1985-05-15 | Semiconductor memory test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59103882A JPS60247942A (ja) | 1984-05-23 | 1984-05-23 | 半導体メモリ試験装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60247942A JPS60247942A (ja) | 1985-12-07 |
| JPH0574789B2 true JPH0574789B2 (enExample) | 1993-10-19 |
Family
ID=14365801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59103882A Granted JPS60247942A (ja) | 1984-05-23 | 1984-05-23 | 半導体メモリ試験装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4631724A (enExample) |
| EP (1) | EP0162418A3 (enExample) |
| JP (1) | JPS60247942A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007071622A (ja) * | 2005-09-06 | 2007-03-22 | Advantest Corp | 試験装置および試験方法 |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61133873A (ja) * | 1984-12-03 | 1986-06-21 | Mitsubishi Electric Corp | 半導体試験装置 |
| US5155701A (en) * | 1985-02-08 | 1992-10-13 | Hitachi, Ltd. | Semiconductor integrated circuit device and method of testing the same |
| US4855670A (en) * | 1985-03-15 | 1989-08-08 | Tektronix, Inc. | Method of providing information useful in identifying defects in electronic circuits |
| EP0198935A1 (de) * | 1985-04-23 | 1986-10-29 | Deutsche ITT Industries GmbH | Elektrisch umprogrammierbarer Halbleiterspeicher mit Redundanz |
| JPS62140299A (ja) * | 1985-12-13 | 1987-06-23 | Advantest Corp | パタ−ン発生装置 |
| US4943948A (en) * | 1986-06-05 | 1990-07-24 | Motorola, Inc. | Program check for a non-volatile memory |
| JPH0812226B2 (ja) * | 1987-01-14 | 1996-02-07 | 三菱電機株式会社 | 半導体装置 |
| US4864219A (en) * | 1987-03-19 | 1989-09-05 | Genrad, Inc. | Method and apparatus for verifying proper placement of integrated circuits on circuit boards |
| JPH01101646A (ja) * | 1987-10-15 | 1989-04-19 | Matsushita Electric Ind Co Ltd | アクティブマトリクス液晶表示装置の製造方法 |
| US4873705A (en) * | 1988-01-27 | 1989-10-10 | John Fluke Mfg. Co., Inc. | Method of and system for high-speed, high-accuracy functional testing of memories in microprocessor-based units |
| US4929889A (en) * | 1988-06-13 | 1990-05-29 | Digital Equipment Corporation | Data path chip test architecture |
| US5128658A (en) * | 1988-06-27 | 1992-07-07 | Digital Equipment Corporation | Pixel data formatting |
| US5001469A (en) * | 1988-06-29 | 1991-03-19 | Digital Equipment Corporation | Window-dependent buffer selection |
| JPH0255331U (enExample) * | 1988-10-11 | 1990-04-20 | ||
| US4973904A (en) * | 1988-12-12 | 1990-11-27 | Ncr Corporation | Test circuit and method |
| NL8900050A (nl) * | 1989-01-10 | 1990-08-01 | Philips Nv | Inrichting voor het meten van een ruststroom van een geintegreerde monolitische digitale schakeling, geintegreerde monolitische digitale schakeling voorzien van een dergelijke inrichting en testapparaat voorzien van een dergelijke inrichting. |
| US5321354A (en) * | 1990-07-23 | 1994-06-14 | Seiko Epson Corporation | Method for inspecting semiconductor devices |
| US5097206A (en) * | 1990-10-05 | 1992-03-17 | Hewlett-Packard Company | Built-in test circuit for static CMOS circuits |
| US5132615A (en) * | 1990-12-19 | 1992-07-21 | Honeywell Bull Inc. | Detecting presence of N+ diffusion faults in a micropackage containing a plurality of integrated circuits by analyzing Vref current |
| JP2882426B2 (ja) * | 1991-03-29 | 1999-04-12 | 株式会社アドバンテスト | アドレス発生装置 |
| US5325054A (en) * | 1992-07-07 | 1994-06-28 | Texas Instruments Incorporated | Method and system for screening reliability of semiconductor circuits |
| US5392293A (en) * | 1993-02-26 | 1995-02-21 | At&T Corp. | Built-in current sensor for IDDQ testing |
| DE4317175A1 (de) * | 1993-05-22 | 1994-11-24 | Bosch Gmbh Robert | Selbsttesteinrichtung für Speicheranordnungen, Decoder od. dgl. |
| US5483170A (en) * | 1993-08-24 | 1996-01-09 | New Mexico State University Technology Transfer Corp. | Integrated circuit fault testing implementing voltage supply rail pulsing and corresponding instantaneous current response analysis |
| US5731700A (en) * | 1994-03-14 | 1998-03-24 | Lsi Logic Corporation | Quiescent power supply current test method and apparatus for integrated circuits |
| JP3636506B2 (ja) * | 1995-06-19 | 2005-04-06 | 株式会社アドバンテスト | 半導体試験装置 |
| GB2291716A (en) * | 1995-04-26 | 1996-01-31 | Memory Corp Plc | Early detection of cell failures |
| US5670892A (en) * | 1995-10-20 | 1997-09-23 | Lsi Logic Corporation | Apparatus and method for measuring quiescent current utilizing timeset switching |
| US5721495A (en) * | 1995-10-24 | 1998-02-24 | Unisys Corporation | Circuit for measuring quiescent current |
| US5652524A (en) * | 1995-10-24 | 1997-07-29 | Unisys Corporation | Built-in load board design for performing high resolution quiescent current measurements of a device under test |
| US5808476A (en) * | 1996-07-29 | 1998-09-15 | National Science Council | Built-in current sensor for IDDQ monitoring |
| US5828985A (en) * | 1996-11-20 | 1998-10-27 | Advantest Corp. | Semiconductor test system |
| JPH10170603A (ja) * | 1996-12-13 | 1998-06-26 | Ando Electric Co Ltd | Icテスタのキャリブレーション方法 |
| DE19705355A1 (de) | 1997-02-12 | 1998-11-19 | Siemens Ag | Verfahren zur Minimierung der Zugriffszeit bei Halbleiterspeichern |
| US5894424A (en) * | 1997-05-15 | 1999-04-13 | Matsushita Electrical Industrial Co., Ltd. | Semiconductor testing apparatus |
| JP3613036B2 (ja) * | 1998-11-10 | 2005-01-26 | 松下電器産業株式会社 | 半導体検査装置および半導体検査方法 |
| JP2000215112A (ja) * | 1998-11-20 | 2000-08-04 | Sony Computer Entertainment Inc | 電子機器及び低電圧検出方法 |
| US6697983B1 (en) | 2000-10-24 | 2004-02-24 | At&T Wireless Services, Inc. | Data link layer tunneling technique for high-speed data in a noisy wireless environment |
| US6629261B1 (en) | 2000-11-21 | 2003-09-30 | At&T Wireless Services, Inc. | Enhanced data link layer selective reject mechanism in noisy wireless environment |
| JP4173297B2 (ja) * | 2001-09-13 | 2008-10-29 | 株式会社ルネサステクノロジ | メモリカード |
| US7382117B2 (en) * | 2005-06-17 | 2008-06-03 | Advantest Corporation | Delay circuit and test apparatus using delay element and buffer |
| US7669090B2 (en) * | 2006-05-18 | 2010-02-23 | Kabushiki Kaisha Toshiba | Apparatus and method for verifying custom IC |
| JP4464454B1 (ja) * | 2008-11-27 | 2010-05-19 | Necエレクトロニクス株式会社 | 半導体装置及び半導体装置におけるベリファイ方法 |
| CN103576079B (zh) * | 2013-11-15 | 2016-08-10 | 上海华岭集成电路技术股份有限公司 | 芯片测试系统及芯片测试方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3617873A (en) * | 1969-12-22 | 1971-11-02 | North American Rockwell | System for generating switching window for plated wire |
| JPS585479B2 (ja) * | 1977-09-30 | 1983-01-31 | 株式会社日立製作所 | 磁気バブルメモリ試験方法 |
| US4293950A (en) * | 1978-04-03 | 1981-10-06 | Nippon Telegraph And Telephone Public Corporation | Test pattern generating apparatus |
| US4414665A (en) * | 1979-11-21 | 1983-11-08 | Nippon Telegraph & Telephone Public Corp. | Semiconductor memory device test apparatus |
| JPS5769597A (en) * | 1980-10-16 | 1982-04-28 | Toshiba Corp | Testing device of memory element |
| JPS5832178A (ja) * | 1981-08-19 | 1983-02-25 | Advantest Corp | Icテスタ |
| US4519076A (en) * | 1981-12-28 | 1985-05-21 | National Semiconductor Corporation | Memory core testing system |
-
1984
- 1984-05-23 JP JP59103882A patent/JPS60247942A/ja active Granted
-
1985
- 1985-05-15 EP EP85106019A patent/EP0162418A3/en not_active Withdrawn
- 1985-05-15 US US06/734,109 patent/US4631724A/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007071622A (ja) * | 2005-09-06 | 2007-03-22 | Advantest Corp | 試験装置および試験方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US4631724A (en) | 1986-12-23 |
| JPS60247942A (ja) | 1985-12-07 |
| EP0162418A2 (en) | 1985-11-27 |
| EP0162418A3 (en) | 1988-07-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |