JPS60247942A - 半導体メモリ試験装置 - Google Patents

半導体メモリ試験装置

Info

Publication number
JPS60247942A
JPS60247942A JP59103882A JP10388284A JPS60247942A JP S60247942 A JPS60247942 A JP S60247942A JP 59103882 A JP59103882 A JP 59103882A JP 10388284 A JP10388284 A JP 10388284A JP S60247942 A JPS60247942 A JP S60247942A
Authority
JP
Japan
Prior art keywords
test
current
test pattern
measurement
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59103882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574789B2 (enExample
Inventor
Masao Shimizu
雅男 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP59103882A priority Critical patent/JPS60247942A/ja
Priority to EP85106019A priority patent/EP0162418A3/en
Priority to US06/734,109 priority patent/US4631724A/en
Publication of JPS60247942A publication Critical patent/JPS60247942A/ja
Publication of JPH0574789B2 publication Critical patent/JPH0574789B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/02—Detection or location of defective auxiliary circuits, e.g. defective refresh counters
    • G11C29/021—Detection or location of defective auxiliary circuits, e.g. defective refresh counters in voltage or current generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31919—Storing and outputting test patterns
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/02—Detection or location of defective auxiliary circuits, e.g. defective refresh counters
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/50—Marginal testing, e.g. race, voltage or current testing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/50—Marginal testing, e.g. race, voltage or current testing
    • G11C2029/5006—Current

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • For Increasing The Reliability Of Semiconductor Memories (AREA)
JP59103882A 1984-05-23 1984-05-23 半導体メモリ試験装置 Granted JPS60247942A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59103882A JPS60247942A (ja) 1984-05-23 1984-05-23 半導体メモリ試験装置
EP85106019A EP0162418A3 (en) 1984-05-23 1985-05-15 Semiconductor memory test equipment
US06/734,109 US4631724A (en) 1984-05-23 1985-05-15 Semiconductor memory test equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59103882A JPS60247942A (ja) 1984-05-23 1984-05-23 半導体メモリ試験装置

Publications (2)

Publication Number Publication Date
JPS60247942A true JPS60247942A (ja) 1985-12-07
JPH0574789B2 JPH0574789B2 (enExample) 1993-10-19

Family

ID=14365801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59103882A Granted JPS60247942A (ja) 1984-05-23 1984-05-23 半導体メモリ試験装置

Country Status (3)

Country Link
US (1) US4631724A (enExample)
EP (1) EP0162418A3 (enExample)
JP (1) JPS60247942A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6629261B1 (en) 2000-11-21 2003-09-30 At&T Wireless Services, Inc. Enhanced data link layer selective reject mechanism in noisy wireless environment
US6697983B1 (en) 2000-10-24 2004-02-24 At&T Wireless Services, Inc. Data link layer tunneling technique for high-speed data in a noisy wireless environment
CN103576079A (zh) * 2013-11-15 2014-02-12 上海华岭集成电路技术股份有限公司 芯片测试系统及芯片测试方法

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61133873A (ja) * 1984-12-03 1986-06-21 Mitsubishi Electric Corp 半導体試験装置
US5155701A (en) * 1985-02-08 1992-10-13 Hitachi, Ltd. Semiconductor integrated circuit device and method of testing the same
US4855670A (en) * 1985-03-15 1989-08-08 Tektronix, Inc. Method of providing information useful in identifying defects in electronic circuits
EP0198935A1 (de) * 1985-04-23 1986-10-29 Deutsche ITT Industries GmbH Elektrisch umprogrammierbarer Halbleiterspeicher mit Redundanz
JPS62140299A (ja) * 1985-12-13 1987-06-23 Advantest Corp パタ−ン発生装置
US4943948A (en) * 1986-06-05 1990-07-24 Motorola, Inc. Program check for a non-volatile memory
JPH0812226B2 (ja) * 1987-01-14 1996-02-07 三菱電機株式会社 半導体装置
US4864219A (en) * 1987-03-19 1989-09-05 Genrad, Inc. Method and apparatus for verifying proper placement of integrated circuits on circuit boards
JPH01101646A (ja) * 1987-10-15 1989-04-19 Matsushita Electric Ind Co Ltd アクティブマトリクス液晶表示装置の製造方法
US4873705A (en) * 1988-01-27 1989-10-10 John Fluke Mfg. Co., Inc. Method of and system for high-speed, high-accuracy functional testing of memories in microprocessor-based units
US4929889A (en) * 1988-06-13 1990-05-29 Digital Equipment Corporation Data path chip test architecture
US5128658A (en) * 1988-06-27 1992-07-07 Digital Equipment Corporation Pixel data formatting
US5001469A (en) * 1988-06-29 1991-03-19 Digital Equipment Corporation Window-dependent buffer selection
JPH0255331U (enExample) * 1988-10-11 1990-04-20
US4973904A (en) * 1988-12-12 1990-11-27 Ncr Corporation Test circuit and method
NL8900050A (nl) * 1989-01-10 1990-08-01 Philips Nv Inrichting voor het meten van een ruststroom van een geintegreerde monolitische digitale schakeling, geintegreerde monolitische digitale schakeling voorzien van een dergelijke inrichting en testapparaat voorzien van een dergelijke inrichting.
US5321354A (en) * 1990-07-23 1994-06-14 Seiko Epson Corporation Method for inspecting semiconductor devices
US5097206A (en) * 1990-10-05 1992-03-17 Hewlett-Packard Company Built-in test circuit for static CMOS circuits
US5132615A (en) * 1990-12-19 1992-07-21 Honeywell Bull Inc. Detecting presence of N+ diffusion faults in a micropackage containing a plurality of integrated circuits by analyzing Vref current
JP2882426B2 (ja) * 1991-03-29 1999-04-12 株式会社アドバンテスト アドレス発生装置
US5325054A (en) * 1992-07-07 1994-06-28 Texas Instruments Incorporated Method and system for screening reliability of semiconductor circuits
US5392293A (en) * 1993-02-26 1995-02-21 At&T Corp. Built-in current sensor for IDDQ testing
DE4317175A1 (de) * 1993-05-22 1994-11-24 Bosch Gmbh Robert Selbsttesteinrichtung für Speicheranordnungen, Decoder od. dgl.
US5483170A (en) * 1993-08-24 1996-01-09 New Mexico State University Technology Transfer Corp. Integrated circuit fault testing implementing voltage supply rail pulsing and corresponding instantaneous current response analysis
US5731700A (en) * 1994-03-14 1998-03-24 Lsi Logic Corporation Quiescent power supply current test method and apparatus for integrated circuits
JP3636506B2 (ja) * 1995-06-19 2005-04-06 株式会社アドバンテスト 半導体試験装置
GB2291716A (en) * 1995-04-26 1996-01-31 Memory Corp Plc Early detection of cell failures
US5670892A (en) * 1995-10-20 1997-09-23 Lsi Logic Corporation Apparatus and method for measuring quiescent current utilizing timeset switching
US5721495A (en) * 1995-10-24 1998-02-24 Unisys Corporation Circuit for measuring quiescent current
US5652524A (en) * 1995-10-24 1997-07-29 Unisys Corporation Built-in load board design for performing high resolution quiescent current measurements of a device under test
US5808476A (en) * 1996-07-29 1998-09-15 National Science Council Built-in current sensor for IDDQ monitoring
US5828985A (en) * 1996-11-20 1998-10-27 Advantest Corp. Semiconductor test system
JPH10170603A (ja) * 1996-12-13 1998-06-26 Ando Electric Co Ltd Ｉｃテスタのキャリブレーション方法
DE19705355A1 (de) 1997-02-12 1998-11-19 Siemens Ag Verfahren zur Minimierung der Zugriffszeit bei Halbleiterspeichern
US5894424A (en) * 1997-05-15 1999-04-13 Matsushita Electrical Industrial Co., Ltd. Semiconductor testing apparatus
JP3613036B2 (ja) * 1998-11-10 2005-01-26 松下電器産業株式会社 半導体検査装置および半導体検査方法
JP2000215112A (ja) * 1998-11-20 2000-08-04 Sony Computer Entertainment Inc 電子機器及び低電圧検出方法
JP4173297B2 (ja) * 2001-09-13 2008-10-29 株式会社ルネサステクノロジ メモリカード
US7382117B2 (en) * 2005-06-17 2008-06-03 Advantest Corporation Delay circuit and test apparatus using delay element and buffer
JP4925630B2 (ja) * 2005-09-06 2012-05-09 株式会社アドバンテスト 試験装置および試験方法
US7669090B2 (en) * 2006-05-18 2010-02-23 Kabushiki Kaisha Toshiba Apparatus and method for verifying custom IC
JP4464454B1 (ja) * 2008-11-27 2010-05-19 Ｎｅｃエレクトロニクス株式会社 半導体装置及び半導体装置におけるベリファイ方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617873A (en) * 1969-12-22 1971-11-02 North American Rockwell System for generating switching window for plated wire
JPS585479B2 (ja) * 1977-09-30 1983-01-31 株式会社日立製作所 磁気バブルメモリ試験方法
US4293950A (en) * 1978-04-03 1981-10-06 Nippon Telegraph And Telephone Public Corporation Test pattern generating apparatus
US4414665A (en) * 1979-11-21 1983-11-08 Nippon Telegraph & Telephone Public Corp. Semiconductor memory device test apparatus
JPS5769597A (en) * 1980-10-16 1982-04-28 Toshiba Corp Testing device of memory element
JPS5832178A (ja) * 1981-08-19 1983-02-25 Advantest Corp Ｉｃテスタ
US4519076A (en) * 1981-12-28 1985-05-21 National Semiconductor Corporation Memory core testing system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6697983B1 (en) 2000-10-24 2004-02-24 At&T Wireless Services, Inc. Data link layer tunneling technique for high-speed data in a noisy wireless environment
US7395481B2 (en) 2000-10-24 2008-07-01 At&T Mobility Ii Llc Data link layer tunneling technique for high-speed data in a noisy wireless environment
US8407548B2 (en) 2000-10-24 2013-03-26 At&T Mobility Ii Llc Data link layer tunneling technique for high-speed data in a noisy wireless environment
US8578234B2 (en) 2000-10-24 2013-11-05 At&T Mobility Ii Llc Data link layer tunneling technique for high-speed data in a noisy wireless environment
US6629261B1 (en) 2000-11-21 2003-09-30 At&T Wireless Services, Inc. Enhanced data link layer selective reject mechanism in noisy wireless environment
CN103576079A (zh) * 2013-11-15 2014-02-12 上海华岭集成电路技术股份有限公司 芯片测试系统及芯片测试方法
CN103576079B (zh) * 2013-11-15 2016-08-10 上海华岭集成电路技术股份有限公司 芯片测试系统及芯片测试方法

Also Published As

Publication number Publication date
US4631724A (en) 1986-12-23
EP0162418A2 (en) 1985-11-27
JPH0574789B2 (enExample) 1993-10-19
EP0162418A3 (en) 1988-07-20

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Legal Events

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LAPS Cancellation because of no payment of annual fees