JPH0558583B2 - - Google Patents
Info
- Publication number
- JPH0558583B2 JPH0558583B2 JP60122365A JP12236585A JPH0558583B2 JP H0558583 B2 JPH0558583 B2 JP H0558583B2 JP 60122365 A JP60122365 A JP 60122365A JP 12236585 A JP12236585 A JP 12236585A JP H0558583 B2 JPH0558583 B2 JP H0558583B2
- Authority
- JP
- Japan
- Prior art keywords
- channel region
- pad
- transistor
- conductivity type
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/311—Gate electrodes for field-effect devices
- H10D64/411—Gate electrodes for field-effect devices for FETs
- H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
- H10D64/517—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
- H10D64/519—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their top-view geometrical layouts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/213—Channel regions of field-effect devices
- H10D62/221—Channel regions of field-effect devices of FETs
- H10D62/235—Channel regions of field-effect devices of FETs of IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/311—Gate electrodes for field-effect devices
- H10D64/411—Gate electrodes for field-effect devices for FETs
- H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
- H10D64/514—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
- H10D64/516—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
- H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Control Of Electrical Variables (AREA)
- Protection Of Static Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US617876 | 1984-06-06 | ||
US06617876 US4692781B2 (en) | 1984-06-06 | 1984-06-06 | Semiconductor device with electrostatic discharge protection |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6241175A Division JP2706626B2 (ja) | 1984-06-06 | 1994-10-05 | 半導体デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6144471A JPS6144471A (ja) | 1986-03-04 |
JPH0558583B2 true JPH0558583B2 (en, 2012) | 1993-08-26 |
Family
ID=24475407
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60122365A Granted JPS6144471A (ja) | 1984-06-06 | 1985-06-05 | 半導体ディバイス用保護装置 |
JP6241175A Expired - Lifetime JP2706626B2 (ja) | 1984-06-06 | 1994-10-05 | 半導体デバイス |
JP8248203A Expired - Lifetime JP2810874B2 (ja) | 1984-06-06 | 1996-09-19 | 半導体デバイス |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6241175A Expired - Lifetime JP2706626B2 (ja) | 1984-06-06 | 1994-10-05 | 半導体デバイス |
JP8248203A Expired - Lifetime JP2810874B2 (ja) | 1984-06-06 | 1996-09-19 | 半導体デバイス |
Country Status (2)
Country | Link |
---|---|
US (1) | US4692781B2 (en, 2012) |
JP (3) | JPS6144471A (en, 2012) |
Families Citing this family (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4692781B2 (en) * | 1984-06-06 | 1998-01-20 | Texas Instruments Inc | Semiconductor device with electrostatic discharge protection |
JPS6271275A (ja) * | 1985-09-25 | 1987-04-01 | Toshiba Corp | 半導体集積回路 |
US4908688A (en) * | 1986-03-14 | 1990-03-13 | Motorola, Inc. | Means and method for providing contact separation in silicided devices |
JPH065749B2 (ja) * | 1986-05-22 | 1994-01-19 | 日本電気株式会社 | 半導体装置 |
JP2541518B2 (ja) * | 1986-06-25 | 1996-10-09 | 株式会社日立製作所 | 半導体集積回路装置 |
JPH0693498B2 (ja) * | 1986-08-25 | 1994-11-16 | 日立超エル・エス・アイエンジニアリング株式会社 | 半導体集積回路装置 |
JP2545527B2 (ja) * | 1987-01-23 | 1996-10-23 | 沖電気工業株式会社 | 半導体装置 |
US4750081A (en) * | 1987-10-19 | 1988-06-07 | Unisys Corporation | Phantom ESD protection circuit employing E-field crowding |
US4855620A (en) * | 1987-11-18 | 1989-08-08 | Texas Instruments Incorporated | Output buffer with improved ESD protection |
JPH01199467A (ja) * | 1988-02-04 | 1989-08-10 | Seiko Epson Corp | 半導体装置 |
JP2538312B2 (ja) * | 1988-06-02 | 1996-09-25 | 三菱電機株式会社 | 半導体集積回路 |
US5196913A (en) * | 1988-07-11 | 1993-03-23 | Samsung Electronics Co., Ltd. | Input protection device for improving of delay time on input stage in semi-conductor devices |
JPH02114533A (ja) * | 1988-10-24 | 1990-04-26 | Nec Corp | 半導体装置 |
US4990802A (en) * | 1988-11-22 | 1991-02-05 | At&T Bell Laboratories | ESD protection for output buffers |
US5210846B1 (en) * | 1989-05-15 | 1999-06-29 | Dallas Semiconductor | One-wire bus architecture |
US5043782A (en) * | 1990-05-08 | 1991-08-27 | David Sarnoff Research Center, Inc. | Low voltage triggered snap-back device |
JP2557980B2 (ja) * | 1989-05-26 | 1996-11-27 | 富士通株式会社 | 半導体入力保護装置 |
JP2776569B2 (ja) * | 1989-07-10 | 1998-07-16 | 日本電気株式会社 | 半導体装置 |
US5124877A (en) * | 1989-07-18 | 1992-06-23 | Gazelle Microcircuits, Inc. | Structure for providing electrostatic discharge protection |
JPH0415955A (ja) * | 1990-05-09 | 1992-01-21 | Mitsubishi Electric Corp | 半導体装置の入力回路の製造方法 |
FR2662303A1 (fr) * | 1990-05-17 | 1991-11-22 | Hello Sa | Transistor mos a tension de seuil elevee. |
WO1992016998A1 (en) | 1991-03-18 | 1992-10-01 | Quality Semiconductor, Inc. | Fast transmission gate switch |
US6208195B1 (en) | 1991-03-18 | 2001-03-27 | Integrated Device Technology, Inc. | Fast transmission gate switch |
JP3375659B2 (ja) * | 1991-03-28 | 2003-02-10 | テキサス インスツルメンツ インコーポレイテツド | 静電放電保護回路の形成方法 |
JPH05121670A (ja) * | 1991-10-25 | 1993-05-18 | Nec Corp | 半導体入力保護装置 |
US5272371A (en) * | 1991-11-19 | 1993-12-21 | Sgs-Thomson Microelectronics, Inc. | Electrostatic discharge protection structure |
US5293057A (en) * | 1992-08-14 | 1994-03-08 | Micron Technology, Inc. | Electrostatic discharge protection circuit for semiconductor device |
JP2958202B2 (ja) * | 1992-12-01 | 1999-10-06 | シャープ株式会社 | 半導体装置 |
US5504362A (en) * | 1992-12-22 | 1996-04-02 | International Business Machines Corporation | Electrostatic discharge protection device |
JPH06232354A (ja) * | 1992-12-22 | 1994-08-19 | Internatl Business Mach Corp <Ibm> | 静電気保護デバイス |
US5404041A (en) * | 1993-03-31 | 1995-04-04 | Texas Instruments Incorporated | Source contact placement for efficient ESD/EOS protection in grounded substrate MOS integrated circuit |
US5440151A (en) * | 1993-04-09 | 1995-08-08 | Matra Mhs | Electrostatic discharge protection device for MOS integrated circuits |
US5343053A (en) * | 1993-05-21 | 1994-08-30 | David Sarnoff Research Center Inc. | SCR electrostatic discharge protection for integrated circuits |
CN1047027C (zh) * | 1994-01-12 | 1999-12-01 | 爱特梅尔股份有限公司 | 有最佳静电放电保护的输入/输出晶体管 |
FR2723800B1 (fr) * | 1994-08-19 | 1997-01-03 | Thomson Csf Semiconducteurs | Circuit de protection contre les decharges electrostatiques |
US5572394A (en) * | 1995-04-06 | 1996-11-05 | Industrial Technology Research Institute | CMOS on-chip four-LVTSCR ESD protection scheme |
US5754380A (en) * | 1995-04-06 | 1998-05-19 | Industrial Technology Research Institute | CMOS output buffer with enhanced high ESD protection capability |
CN1099713C (zh) * | 1995-04-06 | 2003-01-22 | 工业技术研究院 | 用n边多边形单元布线的mos单元、多单元晶体管及ic芯片 |
US5637900A (en) * | 1995-04-06 | 1997-06-10 | Industrial Technology Research Institute | Latchup-free fully-protected CMOS on-chip ESD protection circuit |
JPH08316426A (ja) * | 1995-05-16 | 1996-11-29 | Nittetsu Semiconductor Kk | Mos型半導体装置およびその製造方法 |
US5656967A (en) * | 1995-08-07 | 1997-08-12 | Micron Technology, Inc. | Two-stage fusible electrostatic discharge protection circuit |
KR100203054B1 (ko) * | 1995-12-02 | 1999-06-15 | 윤종용 | 개선된 정전기 방전 능력을 갖는 집적 회로 |
JP3036423B2 (ja) * | 1996-02-06 | 2000-04-24 | 日本電気株式会社 | 半導体装置 |
TW359023B (en) * | 1996-04-20 | 1999-05-21 | Winbond Electronics Corp | Device for improvement of static discharge protection in ICs |
US5796638A (en) * | 1996-06-24 | 1998-08-18 | The Board Of Trustees Of The University Of Illinois | Methods, apparatus and computer program products for synthesizing integrated circuits with electrostatic discharge capability and connecting ground rules faults therein |
US6246122B1 (en) | 1996-07-09 | 2001-06-12 | Winbond Electronics Corp. | Electrostatic discharge protective schemes for integrated circuit packages |
KR100240872B1 (ko) * | 1997-02-17 | 2000-01-15 | 윤종용 | 정전기 방전 보호 회로 및 그것을 구비하는 집적 회로 |
US6534833B1 (en) | 1998-03-18 | 2003-03-18 | Texas Instruments Incorporated | Semiconductor device with protection circuitry and method |
JP4295370B2 (ja) * | 1998-07-02 | 2009-07-15 | Okiセミコンダクタ株式会社 | 半導体素子 |
DE19840239A1 (de) * | 1998-09-03 | 2000-03-09 | Siemens Ag | Leistungshalbleiter-Bauelement mit einer Anordnung zum Schutz vor Schäden durch elektrostatische Entladungen |
US6633468B1 (en) | 1999-08-20 | 2003-10-14 | Texas Instruments Incorporated | High voltage protection circuit for improved oxide reliability |
JP2001077305A (ja) | 1999-08-31 | 2001-03-23 | Toshiba Corp | 半導体装置 |
US6624487B1 (en) | 2002-05-07 | 2003-09-23 | Texas Instruments Incorporated | Drain-extended MOS ESD protection structure |
US6804095B2 (en) * | 2002-06-05 | 2004-10-12 | Texas Instruments Incorporated | Drain-extended MOS ESD protection structure |
US7092227B2 (en) * | 2002-08-29 | 2006-08-15 | Industrial Technology Research Institute | Electrostatic discharge protection circuit with active device |
JP2004247578A (ja) * | 2003-02-14 | 2004-09-02 | Kawasaki Microelectronics Kk | 半導体装置および半導体装置の製造方法 |
US6919603B2 (en) * | 2003-04-30 | 2005-07-19 | Texas Instruments Incorporated | Efficient protection structure for reverse pin-to-pin electrostatic discharge |
US7244992B2 (en) * | 2003-07-17 | 2007-07-17 | Ming-Dou Ker | Turn-on-efficient bipolar structures with deep N-well for on-chip ESD protection |
DE102004012819B4 (de) * | 2004-03-16 | 2006-02-23 | Infineon Technologies Ag | Leistungshalbleiterbauelement mit erhöhter Robustheit |
JP4935708B2 (ja) * | 2008-02-19 | 2012-05-23 | 三菱電機ビルテクノサービス株式会社 | 乗客コンベアの注意喚起装置 |
US20100001394A1 (en) * | 2008-07-03 | 2010-01-07 | Promos Technologies Inc. | Chip package with esd protection structure |
US7888704B2 (en) * | 2008-08-15 | 2011-02-15 | System General Corp. | Semiconductor device for electrostatic discharge protection |
US9331066B2 (en) * | 2014-01-24 | 2016-05-03 | Taiwan Semiconductor Manufacturing Company Ltd. | Method and computer-readable medium for detecting parasitic transistors by utilizing equivalent circuit and threshold distance |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3673427A (en) * | 1970-02-02 | 1972-06-27 | Electronic Arrays | Input circuit structure for mos integrated circuits |
US3999213A (en) * | 1972-04-14 | 1976-12-21 | U.S. Philips Corporation | Semiconductor device and method of manufacturing the device |
US4055444A (en) * | 1976-01-12 | 1977-10-25 | Texas Instruments Incorporated | Method of making N-channel MOS integrated circuits |
JPS5299786A (en) * | 1976-02-18 | 1977-08-22 | Agency Of Ind Science & Technol | Mos integrated circuit |
JPS5413780A (en) * | 1977-07-01 | 1979-02-01 | Nec Corp | Semiconductor device |
JPS53136278A (en) * | 1977-08-18 | 1978-11-28 | Shinjirou Izumi | Apparatus for carrying tetrahedronn shaped packed bodies |
JPS5437584A (en) * | 1977-08-29 | 1979-03-20 | Nec Corp | Field effect semiconductor device of insulation gate type |
JPS5565469A (en) * | 1978-11-13 | 1980-05-16 | Toshiba Corp | Mos integrated circuit |
JPS56100441A (en) * | 1980-01-16 | 1981-08-12 | Hitachi Ltd | Semiconductor ic device with protection element and manufacture thereof |
US4342045A (en) * | 1980-04-28 | 1982-07-27 | Advanced Micro Devices, Inc. | Input protection device for integrated circuits |
JPS5737876A (en) * | 1980-08-20 | 1982-03-02 | Hitachi Ltd | Semiconductor integrated circuit apparatus |
JPS57211273A (en) * | 1981-06-23 | 1982-12-25 | Toshiba Corp | Semiconductor integrated circuit device |
JPS57211272A (en) * | 1981-06-23 | 1982-12-25 | Toshiba Corp | Semiconductor device |
JPS5861657A (ja) * | 1981-10-09 | 1983-04-12 | Toshiba Corp | 半導体集積回路 |
US4692781B2 (en) * | 1984-06-06 | 1998-01-20 | Texas Instruments Inc | Semiconductor device with electrostatic discharge protection |
-
1984
- 1984-06-06 US US06617876 patent/US4692781B2/en not_active Expired - Lifetime
-
1985
- 1985-06-05 JP JP60122365A patent/JPS6144471A/ja active Granted
-
1994
- 1994-10-05 JP JP6241175A patent/JP2706626B2/ja not_active Expired - Lifetime
-
1996
- 1996-09-19 JP JP8248203A patent/JP2810874B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4692781B1 (en) | 1995-05-30 |
US4692781A (en) | 1987-09-08 |
US4692781B2 (en) | 1998-01-20 |
JPH07321318A (ja) | 1995-12-08 |
JPH09172174A (ja) | 1997-06-30 |
JPS6144471A (ja) | 1986-03-04 |
JP2810874B2 (ja) | 1998-10-15 |
JP2706626B2 (ja) | 1998-01-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |