JPS56100441A - Semiconductor ic device with protection element and manufacture thereof - Google Patents
Semiconductor ic device with protection element and manufacture thereofInfo
- Publication number
- JPS56100441A JPS56100441A JP262680A JP262680A JPS56100441A JP S56100441 A JPS56100441 A JP S56100441A JP 262680 A JP262680 A JP 262680A JP 262680 A JP262680 A JP 262680A JP S56100441 A JPS56100441 A JP S56100441A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- protection element
- prepared
- film
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0255—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using diodes as protective elements
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE:To obtain a highly-integrated IC with a protection element by providing the protection element in a P type Si substrate, by constituting the P-N junction thereof from the 1st region and the 2nd region deeper than the former, and by connecting an input terminal with the 2nd region through the intermediary of an N type poly-Si layer. CONSTITUTION:A field oxidized film 2 and a gate oxidized film 6 are provided on the P type Si substrate, an opening is made in the film 6, poly-Si 78 is piled, and in a part thereof SiO220 is formed. Next, the resistance of the layer 78 is lowered through P diffusion and N<+> layers 5 and 21 are prepared. The layer 78 and the film 20 are subjected to patterning and gate electrodes 7 and 22, a connection layer 8 of the input terminal with the layer 5, a drain drawing-out layer 23, a resistance layer 24 and a wiring 25 are prepared. Then, the surface of the poly-Si is oxidized thermally and covered with SiO226, while P ions are struck therein, and thereby N<+> layers 4, 3, 27 and 28 are prepared through self-alignment. Being covered with PSG29, Al layers 11 (input terminal), 14, 15 and 31 are prepared selectively. By this constitution, the highly-integrated IC with the protection element A, FETQM as a memory cell and a resistor 24 is formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP262680A JPS56100441A (en) | 1980-01-16 | 1980-01-16 | Semiconductor ic device with protection element and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP262680A JPS56100441A (en) | 1980-01-16 | 1980-01-16 | Semiconductor ic device with protection element and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56100441A true JPS56100441A (en) | 1981-08-12 |
Family
ID=11534598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP262680A Pending JPS56100441A (en) | 1980-01-16 | 1980-01-16 | Semiconductor ic device with protection element and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56100441A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6057659A (en) * | 1983-09-09 | 1985-04-03 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS6144471A (en) * | 1984-06-06 | 1986-03-04 | テキサス インスツルメンツ インコーポレイテッド | Electrostatic discharge protecting circuit of semiconductor device |
JPS6173427A (en) * | 1984-09-18 | 1986-04-15 | Matsushita Electric Ind Co Ltd | Amplifier circuit for fm intermediate frequency |
JPS61283155A (en) * | 1985-06-07 | 1986-12-13 | Mitsubishi Electric Corp | Input protecting circuit of semiconductor device |
KR100325185B1 (en) * | 1998-06-26 | 2002-02-21 | 가네꼬 히사시 | Semiconductor integrated circuit |
-
1980
- 1980-01-16 JP JP262680A patent/JPS56100441A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6057659A (en) * | 1983-09-09 | 1985-04-03 | Hitachi Ltd | Semiconductor integrated circuit device |
JPH0478017B2 (en) * | 1983-09-09 | 1992-12-10 | Hitachi Ltd | |
JPS6144471A (en) * | 1984-06-06 | 1986-03-04 | テキサス インスツルメンツ インコーポレイテッド | Electrostatic discharge protecting circuit of semiconductor device |
JPH0558583B2 (en) * | 1984-06-06 | 1993-08-26 | Texas Instruments Inc | |
JPH07321318A (en) * | 1984-06-06 | 1995-12-08 | Texas Instr Inc <Ti> | Protective device for semiconductor device |
JPS6173427A (en) * | 1984-09-18 | 1986-04-15 | Matsushita Electric Ind Co Ltd | Amplifier circuit for fm intermediate frequency |
JPS61283155A (en) * | 1985-06-07 | 1986-12-13 | Mitsubishi Electric Corp | Input protecting circuit of semiconductor device |
KR100325185B1 (en) * | 1998-06-26 | 2002-02-21 | 가네꼬 히사시 | Semiconductor integrated circuit |
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