JP7366551B2 - 複合グリーンシート、セラミック部材、複合グリーンシートの製造方法及びセラミック部材の製造方法 - Google Patents
複合グリーンシート、セラミック部材、複合グリーンシートの製造方法及びセラミック部材の製造方法 Download PDFInfo
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- JP7366551B2 JP7366551B2 JP2019019124A JP2019019124A JP7366551B2 JP 7366551 B2 JP7366551 B2 JP 7366551B2 JP 2019019124 A JP2019019124 A JP 2019019124A JP 2019019124 A JP2019019124 A JP 2019019124A JP 7366551 B2 JP7366551 B2 JP 7366551B2
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- 239000000919 ceramic Substances 0.000 title claims description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 40
- 239000002131 composite material Substances 0.000 title claims description 37
- 238000000034 method Methods 0.000 title claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 78
- 239000002184 metal Substances 0.000 claims description 78
- 229910052782 aluminium Inorganic materials 0.000 claims description 35
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 35
- 239000011888 foil Substances 0.000 claims description 35
- 229910000838 Al alloy Inorganic materials 0.000 claims description 27
- 238000010304 firing Methods 0.000 claims description 27
- 229910045601 alloy Inorganic materials 0.000 claims description 20
- 239000000956 alloy Substances 0.000 claims description 20
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 17
- 230000008018 melting Effects 0.000 claims description 15
- 238000002844 melting Methods 0.000 claims description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 13
- 239000010949 copper Substances 0.000 claims description 13
- 239000002002 slurry Substances 0.000 claims description 13
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical group O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 229910021365 Al-Mg-Si alloy Inorganic materials 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 229910018134 Al-Mg Inorganic materials 0.000 claims description 2
- 229910021364 Al-Si alloy Inorganic materials 0.000 claims description 2
- 229910018182 Al—Cu Inorganic materials 0.000 claims description 2
- 229910018467 Al—Mg Inorganic materials 0.000 claims description 2
- 229910018571 Al—Zn—Mg Inorganic materials 0.000 claims description 2
- 229910018569 Al—Zn—Mg—Cu Inorganic materials 0.000 claims description 2
- 229910017518 Cu Zn Inorganic materials 0.000 claims description 2
- 229910017755 Cu-Sn Inorganic materials 0.000 claims description 2
- 229910017752 Cu-Zn Inorganic materials 0.000 claims description 2
- 229910002482 Cu–Ni Inorganic materials 0.000 claims description 2
- 229910017927 Cu—Sn Inorganic materials 0.000 claims description 2
- 229910017943 Cu—Zn Inorganic materials 0.000 claims description 2
- 229910018651 Mn—Ni Inorganic materials 0.000 claims description 2
- 229910007567 Zn-Ni Inorganic materials 0.000 claims description 2
- 229910007614 Zn—Ni Inorganic materials 0.000 claims description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 2
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 9
- 239000004020 conductor Substances 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- HHIQWSQEUZDONT-UHFFFAOYSA-N tungsten Chemical compound [W].[W].[W] HHIQWSQEUZDONT-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000395 magnesium oxide Substances 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 5
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 5
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 238000005238 degreasing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 3
- 239000000292 calcium oxide Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910018131 Al-Mn Inorganic materials 0.000 description 1
- 229910018461 Al—Mn Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- C23C24/00—Coating starting from inorganic powder
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Description
先ず、第1の実施形態について説明する。第1の実施形態は複合グリーンシートに関する。図1は、第1の実施形態に係る複合グリーンシートを示す図である。図1(a)は平面図であり、図1(b)は図1(a)中のI-I線に沿った断面図である。
次に、第2の実施形態について説明する。第2の実施形態はセラミック部材に関する。図3は、第2の実施形態に係るセラミック部材を示す図である。図3(a)は平面図であり、図3(b)は図3(a)中のI-I線に沿った断面図であり、図3(c)は図3(a)中のII-II線に沿った断面図である。
次に、第3の実施形態について説明する。第3の実施形態はセラミック部材を含む静電チャックに関する。図13は、第3の実施形態に係る静電チャックを示す断面図である。
次に、第4の実施形態について説明する。第4の実施形態はセラミック部材を含むインダクタに関する。図14は、第4の実施形態に係るインダクタを示す平面図である。
2、102 第2のグリーンシート
2A、102A 孔
3、103 第3のグリーンシート
10、110 焼結体
11、111 導電部材
11A アルミニウム箔
111A 金属膜
30 複合グリーンシート
31 グリーンシート
32 金属膜
50 スラリー
52 ブレード
55 乾燥機
200 静電チャック
300 インダクタ
Claims (16)
- グリーンシートと、
前記グリーンシート上に設けられた金属箔と、
を有し、
前記金属箔は、
前記グリーンシートに接する第1面と、
前記第1面とは反対側の第2面と、
を有し、
前記第2面は外部に露出しており、
前記金属箔の融点は、焼成によって前記グリーンシートの相対密度が90%以上となる温度より低いことを特徴とする複合グリーンシート。 - 前記金属箔は、アルミニウム又はアルミニウム合金の箔であることを特徴とする請求項1に記載の複合グリーンシート。
- 前記アルミニウム合金は、Al-Cu系合金、Al-Zn-Mg系合金、Al-Zn-Mg-Cu系合金、Al-Si系合金、Al-Mg系合金、Al-Mg-Si系合金又はAl-Mn系合金であることを特徴とする請求項2に記載の複合グリーンシート。
- 前記金属箔は、銅又は銅合金の箔であることを特徴とする請求項1に記載の複合グリーンシート。
- 前記銅合金は、Cu-Ni系合金、Cu-Zn系合金、Cu-Zn-Ni系合金、Cu-Mn-Ni系合金又はCu-Sn系合金であることを特徴とする請求項4に記載の複合グリーンシート。
- 前記グリーンシートを構成するセラミックのうち96質量%以上が酸化アルミニウムであることを特徴とする請求項1乃至5のいずれか1項に記載の複合グリーンシート。
- セラミックの焼結体と、
前記焼結体内に設けられた金属の箔の溶融及び凝固により形成された導電部材と、
を有し、
前記金属は、アルミニウム又はアルミニウム合金であり、
前記焼結体に前記導電部材まで達する孔が形成されており、
前記焼結体の相対密度は90%以上であることを特徴とするセラミック部材。 - セラミックの焼結体と、
前記焼結体内に設けられた金属の箔の溶融及び凝固により形成された導電部材と、
を有し、
前記金属は、銅又は銅合金であり、
前記焼結体に前記導電部材まで達する孔が形成されており、
前記焼結体の相対密度は90%以上であることを特徴とするセラミック部材。 - 前記孔が形成された部分を除き、前記導電部材の全体が前記焼結体により覆われていることを特徴とする請求項7又は8に記載のセラミック部材。
- 前記セラミックのうち96質量%以上が酸化アルミニウムであることを特徴とする請求項7乃至9のいずれか1項に記載のセラミック部材。
- セラミックの焼結体と、
前記焼結体内に設けられた金属の箔の溶融及び凝固により形成された導電部材と、
を有し、
前記金属は、アルミニウム又はアルミニウム合金であり、
前記セラミックのうち96質量%以上が酸化アルミニウムであり、
前記焼結体の相対密度は90%以上であることを特徴とするセラミック部材。 - セラミックの焼結体と、
前記焼結体内に設けられた金属の箔の溶融及び凝固により形成された導電部材と、
を有し、
前記金属は、銅又は銅合金であり、
前記セラミックのうち96質量%以上が酸化アルミニウムであり、
前記焼結体の相対密度は90%以上であることを特徴とするセラミック部材。 - 金属箔上にセラミックのスラリーを塗布する工程と、
前記スラリーを乾燥させてグリーンシートを形成する工程と、
を有し、
前記金属箔の融点は、焼成によって前記グリーンシートの相対密度が90%以上となる温度より低いことを特徴とする複合グリーンシートの製造方法。 - 請求項1乃至6のいずれか1項に記載の複合グリーンシートにおいて、前記金属箔のパターニングを行う工程と、
前記複合グリーンシートの前記グリーンシートと第2のグリーンシートとで前記金属箔を挟み込む工程と、
前記金属箔の融点以上の温度で前記グリーンシート及び前記第2のグリーンシートの焼成を行ってセラミックの焼結体を得る工程と、
を有し、
前記第2のグリーンシートの前記金属箔と接する面の一部に空隙が設けられていることを特徴とするセラミック部材の製造方法。 - 前記焼成を酸化性雰囲気中で行うことを特徴とする請求項14に記載のセラミック部材の製造方法。
- 前記焼成を大気雰囲気中で行うことを特徴とする請求項15に記載のセラミック部材の製造方法。
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