JP7268330B2 - 半導体装置および製造方法 - Google Patents
半導体装置および製造方法 Download PDFInfo
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- JP7268330B2 JP7268330B2 JP2018208430A JP2018208430A JP7268330B2 JP 7268330 B2 JP7268330 B2 JP 7268330B2 JP 2018208430 A JP2018208430 A JP 2018208430A JP 2018208430 A JP2018208430 A JP 2018208430A JP 7268330 B2 JP7268330 B2 JP 7268330B2
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Description
特許文献1 特開2017-147435号公報
特許文献2 特開2008-235405号公報
特許文献3 特開2016-12647号公報
Claims (10)
- 第1導電型のドリフト領域が設けられた半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられたダイオード部と、
前記半導体基板の上面に露出する第2導電型のウェル領域と、
上面視において前記ダイオード部に隣接しており、前記ウェル領域の上方に設けられた温度センス部と、
前記ダイオード部において前記半導体基板の上面側に設けられ、且つ、上面視において前記温度センス部と重ならない領域に設けられた上面側ライフタイム制御領域と
を備え、
上面視において前記温度センス部は、隣接する前記ダイオード部に挟まれおり、
上面視における前記ダイオード部の全体に前記上面側ライフタイム制御領域が配置されている半導体装置。 - 第1導電型のドリフト領域が設けられた半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられたダイオード部と、
前記半導体基板の上面に露出する第2導電型のウェル領域と、
上面視において前記ダイオード部に隣接しており、前記ウェル領域の上方に設けられた温度センス部と、
前記ダイオード部において前記半導体基板の上面側に設けられ、且つ、上面視において前記温度センス部と重ならない領域に設けられた上面側ライフタイム制御領域と
を備え、
上面視において、前記温度センス部と、前記上面側ライフタイム制御領域との距離が90μm以下である
半導体装置。 - 上面視において前記温度センス部は、隣接する前記ダイオード部に挟まれている
請求項2に記載の半導体装置。 - 第1導電型のドリフト領域が設けられた半導体基板と、
半導体基板においてトランジスタ部およびダイオード部が設けられた活性部と、
前記半導体基板に設けられ、上面視において前記活性部を囲む耐圧構造部と、
前記半導体基板の上面に露出する第2導電型のウェル領域と、
上面視において前記活性部と前記耐圧構造部との間に設けられ、前記ウェル領域の上方に設けられた温度センス部と、
前記ダイオード部において前記半導体基板の上面側に設けられ、且つ、上面視において前記温度センス部と重ならない領域に設けられた上面側ライフタイム制御領域と
を備え、
上面視において、前記温度センス部と、前記上面側ライフタイム制御領域との距離が90μm以下である
半導体装置。 - 前記上面側ライフタイム制御領域は、上面視において前記ウェル領域と重ならない領域に設けられている
請求項1から4のいずれか一項に記載の半導体装置。 - 前記トランジスタ部および前記ダイオード部は、前記半導体基板の表面から内部まで設けられたトレンチ部を有し、
前記ウェル領域の内部に、前記トレンチ部の一部分が設けられている
請求項1から5のいずれか一項に記載の半導体装置。 - 第1導電型のドリフト領域が設けられた半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられたダイオード部と、
前記半導体基板の上面に露出する第2導電型のウェル領域と、
上面視において前記ダイオード部に隣接しており、前記ウェル領域の上方に設けられた温度センス部と、
前記ダイオード部において前記半導体基板の上面側に設けられ、且つ、上面視において前記温度センス部と重ならない領域に設けられた上面側ライフタイム制御領域と
を備え、
前記ダイオード部は、前記半導体基板の内部に設けられ、且つ、前記半導体基板の下面に露出する第2導電型のカソード領域を有し、
上面視において、前記上面側ライフタイム制御領域の端部は、前記カソード領域と前記温度センス部との間に配置されている
半導体装置。 - 第1導電型のドリフト領域が設けられた半導体基板と、
半導体基板においてトランジスタ部およびダイオード部が設けられた活性部と、
前記半導体基板に設けられ、上面視において前記活性部を囲む耐圧構造部と、
前記半導体基板の上面に露出する第2導電型のウェル領域と、
上面視において前記活性部と前記耐圧構造部との間に設けられ、前記ウェル領域の上方に設けられた温度センス部と、
前記ダイオード部において前記半導体基板の上面側に設けられ、且つ、上面視において前記温度センス部と重ならない領域に設けられた上面側ライフタイム制御領域と
を備え、
前記ダイオード部は、前記半導体基板の内部に設けられ、且つ、前記半導体基板の下面に露出する第2導電型のカソード領域を有し、
上面視において、前記上面側ライフタイム制御領域の端部は、前記カソード領域と前記温度センス部との間に配置されている
半導体装置。 - 第1導電型のドリフト領域が設けられた半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられたダイオード部と、
前記半導体基板の上面に露出する第2導電型のウェル領域と、
前記ウェル領域の上方に設けられた温度センス部と、
前記ダイオード部において前記半導体基板の上面側に設けられ、且つ、上面視において前記温度センス部との距離が90μm以下である上面側ライフタイム制御領域と
を備える半導体装置。 - 前記上面側ライフタイム制御領域は、ライフタイムキラーを含み、
前記温度センス部は、前記ライフタイムキラーを含まない
請求項1から9のいずれか一項に記載の半導体装置。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004363328A (ja) | 2003-06-04 | 2004-12-24 | Fuji Electric Device Technology Co Ltd | 半導体装置およびその製造方法 |
JP2008211148A (ja) | 2007-02-28 | 2008-09-11 | Fuji Electric Device Technology Co Ltd | 半導体装置およびその製造方法 |
WO2011125156A1 (ja) | 2010-04-02 | 2011-10-13 | トヨタ自動車株式会社 | ダイオード領域とigbt領域を有する半導体基板を備える半導体装置 |
WO2014199558A1 (ja) | 2013-06-12 | 2014-12-18 | 富士電機株式会社 | 半導体装置の製造方法 |
WO2015004774A1 (ja) | 2013-07-11 | 2015-01-15 | 三菱電機株式会社 | 半導体装置の製造方法及びpinダイオード |
JP2017147435A (ja) | 2016-02-16 | 2017-08-24 | 富士電機株式会社 | 半導体装置 |
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JP2008235405A (ja) | 2007-03-19 | 2008-10-02 | Denso Corp | 半導体装置 |
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JP5487956B2 (ja) | 2009-12-25 | 2014-05-14 | トヨタ自動車株式会社 | 半導体装置 |
US9412809B2 (en) * | 2013-02-15 | 2016-08-09 | Toyota Jidosha Kabushiki Kaisha | Semiconductor device and manufacturing method thereof |
JP6117602B2 (ja) * | 2013-04-25 | 2017-04-19 | トヨタ自動車株式会社 | 半導体装置 |
JP6194812B2 (ja) * | 2014-02-18 | 2017-09-13 | トヨタ自動車株式会社 | 半導体モジュール |
JP6277814B2 (ja) | 2014-03-25 | 2018-02-14 | 株式会社デンソー | 半導体装置 |
JP2016012647A (ja) | 2014-06-27 | 2016-01-21 | トヨタ自動車株式会社 | 半導体装置 |
JP6512025B2 (ja) * | 2015-08-11 | 2019-05-15 | 富士電機株式会社 | 半導体素子及び半導体素子の製造方法 |
JP6753066B2 (ja) * | 2016-02-09 | 2020-09-09 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
CN107086217B (zh) * | 2016-02-16 | 2023-05-16 | 富士电机株式会社 | 半导体装置 |
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CN110323273A (zh) * | 2018-03-30 | 2019-10-11 | 富士电机株式会社 | 半导体装置、半导体封装、半导体模块及半导体电路装置 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004363328A (ja) | 2003-06-04 | 2004-12-24 | Fuji Electric Device Technology Co Ltd | 半導体装置およびその製造方法 |
JP2008211148A (ja) | 2007-02-28 | 2008-09-11 | Fuji Electric Device Technology Co Ltd | 半導体装置およびその製造方法 |
WO2011125156A1 (ja) | 2010-04-02 | 2011-10-13 | トヨタ自動車株式会社 | ダイオード領域とigbt領域を有する半導体基板を備える半導体装置 |
WO2014199558A1 (ja) | 2013-06-12 | 2014-12-18 | 富士電機株式会社 | 半導体装置の製造方法 |
WO2015004774A1 (ja) | 2013-07-11 | 2015-01-15 | 三菱電機株式会社 | 半導体装置の製造方法及びpinダイオード |
JP2017147435A (ja) | 2016-02-16 | 2017-08-24 | 富士電機株式会社 | 半導体装置 |
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