JP7231065B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

Info

Publication number
JP7231065B2
JP7231065B2 JP2021570670A JP2021570670A JP7231065B2 JP 7231065 B2 JP7231065 B2 JP 7231065B2 JP 2021570670 A JP2021570670 A JP 2021570670A JP 2021570670 A JP2021570670 A JP 2021570670A JP 7231065 B2 JP7231065 B2 JP 7231065B2
Authority
JP
Japan
Prior art keywords
region
semiconductor device
injection
transistor
diode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021570670A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021145080A1 (https=
JPWO2021145080A5 (https=
Inventor
徹 白川
大輔 尾崎
泰典 阿形
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of JPWO2021145080A1 publication Critical patent/JPWO2021145080A1/ja
Publication of JPWO2021145080A5 publication Critical patent/JPWO2021145080A5/ja
Application granted granted Critical
Publication of JP7231065B2 publication Critical patent/JP7231065B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01—Manufacture or treatment
    • H10D12/031—Manufacture or treatment of IGBTs
    • H10D12/032—Manufacture or treatment of IGBTs of vertical IGBTs
    • H10D12/038—Manufacture or treatment of IGBTs of vertical IGBTs having a recessed gate, e.g. trench-gate IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411—Insulated-gate bipolar transistors [IGBT]
    • H10D12/441—Vertical IGBTs
    • H10D12/461—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
    • H10D12/481—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/129—Cathode regions of diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/141—Anode or cathode regions of thyristors; Collector or emitter regions of gated bipolar-mode devices, e.g. of IGBTs
    • H10D62/142—Anode regions of thyristors or collector regions of gated bipolar-mode devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/422—PN diodes having the PN junctions in mesas
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H10D64/117—Recessed field plates, e.g. trench field plates or buried field plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/517—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
    • H10D64/519—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their top-view geometrical layouts

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP2021570670A 2020-01-17 2020-11-30 半導体装置 Active JP7231065B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020006095 2020-01-17
JP2020006095 2020-01-17
JP2020085521 2020-05-14
JP2020085521 2020-05-14
PCT/JP2020/044532 WO2021145080A1 (ja) 2020-01-17 2020-11-30 半導体装置

Publications (3)

Publication Number Publication Date
JPWO2021145080A1 JPWO2021145080A1 (https=) 2021-07-22
JPWO2021145080A5 JPWO2021145080A5 (https=) 2022-03-24
JP7231065B2 true JP7231065B2 (ja) 2023-03-01

Family

ID=76864229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021570670A Active JP7231065B2 (ja) 2020-01-17 2020-11-30 半導体装置

Country Status (5)

Country Link
US (1) US12471303B2 (https=)
JP (1) JP7231065B2 (https=)
CN (1) CN114097079A (https=)
DE (1) DE112020002890T5 (https=)
WO (1) WO2021145080A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7446198B2 (ja) * 2020-10-01 2024-03-08 三菱電機株式会社 半導体装置
JP7609010B2 (ja) * 2021-08-16 2025-01-07 三菱電機株式会社 半導体装置
JP2024135983A (ja) * 2023-03-23 2024-10-04 株式会社東芝 半導体装置
CN117650165B (zh) * 2023-10-31 2024-05-31 海信家电集团股份有限公司 半导体装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012156564A (ja) 2008-12-24 2012-08-16 Denso Corp 半導体装置
JP2012182391A (ja) 2011-03-02 2012-09-20 Toyota Motor Corp 半導体装置
JP2014103376A (ja) 2012-09-24 2014-06-05 Toshiba Corp 半導体装置
WO2019078131A1 (ja) 2017-10-18 2019-04-25 富士電機株式会社 半導体装置
WO2019116748A1 (ja) 2017-12-14 2019-06-20 富士電機株式会社 半導体装置およびその製造方法
JP2019161168A (ja) 2018-03-16 2019-09-19 富士電機株式会社 半導体装置

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005057235A (ja) 2003-07-24 2005-03-03 Mitsubishi Electric Corp 絶縁ゲート型バイポーラトランジスタ及びその製造方法、並びに、インバータ回路
JP4799829B2 (ja) 2003-08-27 2011-10-26 三菱電機株式会社 絶縁ゲート型トランジスタ及びインバータ回路
JP2008192737A (ja) 2007-02-02 2008-08-21 Denso Corp 半導体装置
JP4910894B2 (ja) 2007-06-12 2012-04-04 富士電機株式会社 半導体装置の製造方法および半導体装置
EP2003694B1 (en) 2007-06-14 2011-11-23 Denso Corporation Semiconductor device
JP5045733B2 (ja) 2008-12-24 2012-10-10 株式会社デンソー 半導体装置
KR101276407B1 (ko) 2010-05-07 2013-06-19 도요타지도샤가부시키가이샤 반도체 장치
JP5582102B2 (ja) 2010-07-01 2014-09-03 株式会社デンソー 半導体装置
JP5605073B2 (ja) 2010-08-17 2014-10-15 株式会社デンソー 半導体装置
JP5321669B2 (ja) 2010-11-25 2013-10-23 株式会社デンソー 半導体装置
JP6022774B2 (ja) 2012-01-24 2016-11-09 トヨタ自動車株式会社 半導体装置
JP5787853B2 (ja) 2012-09-12 2015-09-30 株式会社東芝 電力用半導体装置
US9960165B2 (en) 2013-11-05 2018-05-01 Toyota Jidosha Kabushiki Kaisha Semiconductor device having adjacent IGBT and diode regions with a shifted boundary plane between a collector region and a cathode region
JP6119593B2 (ja) 2013-12-17 2017-04-26 トヨタ自動車株式会社 半導体装置
JP6421570B2 (ja) * 2013-12-20 2018-11-14 株式会社デンソー 半導体装置
KR101921844B1 (ko) 2014-08-26 2019-02-13 미쓰비시덴키 가부시키가이샤 반도체 소자
JP6197773B2 (ja) 2014-09-29 2017-09-20 トヨタ自動車株式会社 半導体装置
JP6260515B2 (ja) 2014-11-13 2018-01-17 三菱電機株式会社 半導体装置
JP6274154B2 (ja) 2015-05-27 2018-02-07 トヨタ自動車株式会社 逆導通ｉｇｂｔ
JP6334465B2 (ja) * 2015-06-17 2018-05-30 富士電機株式会社 半導体装置
JP6844147B2 (ja) * 2016-02-12 2021-03-17 富士電機株式会社 半導体装置
JP6878848B2 (ja) * 2016-02-16 2021-06-02 富士電機株式会社 半導体装置
US10559663B2 (en) * 2016-10-14 2020-02-11 Fuji Electric Co., Ltd. Semiconductor device with improved current flow distribution
CN109075202B (zh) 2016-11-17 2021-08-31 富士电机株式会社 半导体装置
EP3480855B1 (en) 2017-02-15 2023-09-20 Fuji Electric Co., Ltd. Semiconductor device
US10319808B2 (en) 2017-04-03 2019-06-11 Fuji Electric Co., Ltd. Semiconductor device
JP7095303B2 (ja) * 2018-02-14 2022-07-05 富士電機株式会社 半導体装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012156564A (ja) 2008-12-24 2012-08-16 Denso Corp 半導体装置
JP2012182391A (ja) 2011-03-02 2012-09-20 Toyota Motor Corp 半導体装置
JP2014103376A (ja) 2012-09-24 2014-06-05 Toshiba Corp 半導体装置
WO2019078131A1 (ja) 2017-10-18 2019-04-25 富士電機株式会社 半導体装置
WO2019116748A1 (ja) 2017-12-14 2019-06-20 富士電機株式会社 半導体装置およびその製造方法
JP2019161168A (ja) 2018-03-16 2019-09-19 富士電機株式会社 半導体装置

Also Published As

Publication number Publication date
US20220149191A1 (en) 2022-05-12
US12471303B2 (en) 2025-11-11
CN114097079A (zh) 2022-02-25
JPWO2021145080A1 (https=) 2021-07-22
WO2021145080A1 (ja) 2021-07-22
DE112020002890T5 (de) 2022-02-24

Similar Documents

Publication Publication Date Title
US11532738B2 (en) Semiconductor device
JP7456520B2 (ja) 半導体装置
JP7211516B2 (ja) 半導体装置
JP7231065B2 (ja) 半導体装置
JP7613570B2 (ja) 半導体装置
JP7459976B2 (ja) 半導体装置
JP7395844B2 (ja) 半導体装置および製造方法
WO2023063411A1 (ja) 半導体装置
JP7613569B2 (ja) 半導体装置
JP2022179212A (ja) 半導体装置
JP7231064B2 (ja) 半導体装置
JP6996621B2 (ja) 半導体装置
JP2023170200A (ja) 半導体装置
JP7683822B2 (ja) 半導体装置
JP2024035557A (ja) 半導体装置
US20240072110A1 (en) Semiconductor device and manufacturing method of semiconductor device
WO2025033086A1 (ja) 半導体装置
JP2025187739A (ja) 半導体装置
JP2024118696A (ja) 半導体装置および半導体装置の製造方法
JP2025184002A (ja) 半導体装置
CN118352354A (zh) 半导体装置

Legal Events

Date Code Title Description
A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A527

Effective date: 20211228

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20211228

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220927

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221117

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230117

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230130

R150 Certificate of patent or registration of utility model

Ref document number: 7231065

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250